JPH0663501A - Al alloy plate excellent in workability - Google Patents

Al alloy plate excellent in workability

Info

Publication number
JPH0663501A
JPH0663501A JP22133492A JP22133492A JPH0663501A JP H0663501 A JPH0663501 A JP H0663501A JP 22133492 A JP22133492 A JP 22133492A JP 22133492 A JP22133492 A JP 22133492A JP H0663501 A JPH0663501 A JP H0663501A
Authority
JP
Japan
Prior art keywords
alloy plate
aluminum alloy
water glass
workability
press
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP22133492A
Other languages
Japanese (ja)
Inventor
Koji Uesugi
杉 康 治 上
Nobuo Totsuka
塚 信 夫 戸
Naoki Nishiyama
山 直 樹 西
Masaki Mabuchi
渕 昌 樹 馬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Furukawa Aluminum Co Ltd
Original Assignee
Furukawa Aluminum Co Ltd
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Aluminum Co Ltd, Kawasaki Steel Corp filed Critical Furukawa Aluminum Co Ltd
Priority to JP22133492A priority Critical patent/JPH0663501A/en
Publication of JPH0663501A publication Critical patent/JPH0663501A/en
Withdrawn legal-status Critical Current

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  • Application Of Or Painting With Fluid Materials (AREA)
  • Laminated Bodies (AREA)

Abstract

PURPOSE:To provide an A1 alloy plate improving a sliding property of the A1 alloy plate and being remarkably improved in press workability without impairing a zinc phosphating treatment. CONSTITUTION:The A1 alloy plate excellent in press workability is constituted of a water glass layer of 0.1-10mum thickness of the dry film on the surface, which improves greatly press workability, and a film applied with rust preventive oil at 0.1-7g/m<2> on the water glass layer.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、主として自動車用軽量
化素材として使用されるアルミニウム合金板、特にプレ
ス成形性に優れたアルミニウム合金板(アルミニウム板
も広く含む)に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an aluminum alloy sheet mainly used as a lightweight material for automobiles, and more particularly to an aluminum alloy sheet excellent in press formability (a wide range of aluminum sheets are included).

【0002】[0002]

【従来の技術】近年、炭酸ガスによる地球環境温暖化問
題の対応としての燃費の向上や運動性能の向上のために
自動車車体の軽量化が積極的に推進されている。すなわ
ち、10%の車体軽量化は5〜10%の燃費を向上し、
かつエンジンパワーの25PSに相当する運動性能の向
上をもたらす効果がある。アルミニウム合金板は軽量化
効果、リサイクル利用等の面で有利な素材であることか
ら、近年注目され、ホイール、バンパー、ラジエター、
エンジンから車体パネルへと使用範囲が拡大している。
2. Description of the Related Art In recent years, weight reduction of automobile bodies has been actively promoted in order to improve fuel efficiency and exercise performance in response to the global warming problem caused by carbon dioxide. In other words, 10% weight reduction of the vehicle body improves fuel efficiency of 5-10%,
In addition, it has an effect of improving the exercise performance corresponding to the engine power of 25 PS. Aluminum alloy plates have been attracting attention in recent years because they are advantageous materials in terms of weight reduction effects, recycling, etc., and are used for wheels, bumpers, radiators,
The range of use is expanding from engines to body panels.

【0003】しかしながら、車体パネルへのアルミニウ
ム合金板の適用には、従来多用されている鋼板に比べ特
性が異なるために多くの問題を抱えている。特にアルミ
ニウム用専用ラインの建設は多大の設備投資を伴うこと
から、現有の鋼板用製造ラインを用いた兼用同時処理と
することが必要となるが、そのために解決すべき問題は
多い。
However, the application of the aluminum alloy sheet to the vehicle body panel has many problems because the characteristics are different from those of the steel sheet which has been widely used conventionally. In particular, since the construction of a dedicated line for aluminum involves a large amount of capital investment, it is necessary to carry out the simultaneous simultaneous processing using the existing steel plate production line, but there are many problems to be solved for that purpose.

【0004】その代表的な問題はプレス加工性であると
言える。すなわち、アルミニウム合金板のプレス加工性
は鋼板の加工性より極めて悪い。例えば代表的自動車鋼
板材であるJIS SPCCと比較すると、SPCCの
伸び(El)は45%、ランクフォード値(r値)は
1.4で、限界絞り比(LDR)は2.15に達する
が、一方アルミニウム合金板は、JIS A5182を
例にとるとElは30%、r値は0.7、LDRは1.
8にしか達しない。このようにアルミニウム合金板の加
工性が著しく劣るため、自動車車体への適用には大きな
制約があった。すなわち、アルミニウム合金板の車体パ
ネルへの適用例としてはフードのような軽加工の部材に
限定され、より複雑でかつ強加工を伴う部材への適用は
困難であった。
It can be said that the typical problem is press workability. That is, the press workability of the aluminum alloy plate is much worse than the workability of the steel plate. For example, comparing with JIS SPCC, which is a typical automobile steel sheet material, the SPCC has an elongation (El) of 45%, a Rankford value (r value) of 1.4, and a limiting drawing ratio (LDR) of 2.15. On the other hand, in the case of an aluminum alloy plate, taking JIS A5182 as an example, El is 30%, r value is 0.7, and LDR is 1.
Only reaches 8. As described above, since the workability of the aluminum alloy plate is extremely poor, there are great restrictions on the application to an automobile body. That is, as an example of application of the aluminum alloy plate to a vehicle body panel, it is limited to a lightly processed member such as a hood, and it is difficult to apply it to a more complicated member accompanied by heavy working.

【0005】アルミニウム合金板のプレス加工性が悪い
のは、素材としてのアルミニウム自体の成形性が悪いこ
とに加えて、アルミニウムが低融点で軟質であることか
ら、プレス金型に多用されている鋳鉄などとの親和力が
強く、金型に凝着しやすい性質を有すること、すなわち
摺動性が悪いことに起因すると考えられる。
The poor press workability of the aluminum alloy plate is due to the poor formability of aluminum itself as a raw material and the low melting point and softness of aluminum, which makes cast iron widely used in press dies. It is considered that this is due to the fact that it has a strong affinity with, and has the property of easily adhering to the mold, that is, its slidability is poor.

【0006】プレス成形時の摺動性は、金型と直接接触
するアルミニウム合金板表面の物性により大きく影響を
受けるので、アルミニウム合金板表層を、例えば有機高
分子皮膜、例えばビニールなどで被覆し、アルミニウム
合金板表表層と金型との直接接触を避け、潤滑性を与え
ることにより摺動性を改善する試みがなされている。
Since the slidability during press molding is greatly affected by the physical properties of the surface of the aluminum alloy plate that is in direct contact with the mold, the surface layer of the aluminum alloy plate is coated with, for example, an organic polymer film, such as vinyl, Attempts have been made to improve the sliding property by avoiding direct contact between the surface layer of the aluminum alloy plate and the mold and providing lubricity.

【0007】同様にアルミニウム合金板表面の摺動性を
良好にすることでその加工性を向上せしめるものとして
は、潤滑処理、例えば金属石鹸、高級脂肪酸ワックスな
どを主成分とした皮膜を被覆したものなどが提案されて
いる。
Similarly, as a material for improving the workability by improving the slidability of the surface of an aluminum alloy plate, a material having a lubrication treatment, for example, a film mainly composed of metal soap, higher fatty acid wax, etc. is coated. Have been proposed.

【0008】しかし、これらの潤滑処理を施したアルミ
ニウム合金板は、プレス加工の後に行うリン酸塩処理性
が悪くなるので、リン酸塩処理前にこれらの潤滑処理皮
膜を完全に除去する工程が必要となる問題点がある。
However, since the aluminum alloy plate subjected to these lubrication treatments has a poor phosphating property after press working, a step of completely removing these lubrication treatment films before the phosphating treatment is required. There are problems that need to be addressed.

【0009】[0009]

【発明が解決しようとする課題】本発明は、プレス成形
性が従来のアルミニウムあるいはアルミニウム合金板に
比べ格段に向上し、かつ工業的に容易に安定的に、しか
も経済的に製造できるアルミニウム合金板(広くアルミ
ニウム板も包含する)を提供することを目的とするもの
である。
DISCLOSURE OF THE INVENTION The present invention provides an aluminum alloy sheet which has a significantly improved press formability as compared with the conventional aluminum or aluminum alloy sheet and which can be produced easily and stably industrially and economically. It is intended to provide (a wide range of aluminum plates are included).

【0010】[0010]

【課題を解決するための手段】すなわち本発明は、アル
ミニウム合金板表面にプレス加工性を格段に向上させ、
かつリン酸亜鉛処理の前処理でのアルカリ脱脂液に容易
に溶解する水ガラス(ケイ酸ソーダ:nNa2 O・mS
iO2 )の被覆層を有し、あるいはさらにその上層に防
錆油を塗布した、プレス加工性に優れたアルミニウム合
金板を提供するものである。水ガラスの被覆層の乾燥膜
厚は0.1〜10μmが好ましく、水ガラス層上の防錆
油の塗布量が0.1〜7g/m2が好ましい。
That is, according to the present invention, the press workability is remarkably improved on the surface of an aluminum alloy plate,
And water glass (sodium silicate: nNa 2 O.mS) that easily dissolves in the alkaline degreasing liquid in the pretreatment of zinc phosphate treatment
The present invention provides an aluminum alloy plate having a coating layer of iO 2 ) or having an anticorrosion oil applied to the upper layer thereof and having excellent press workability. The dry film thickness of the coating layer of water glass is preferably 0.1 to 10 μm, and the coating amount of rust preventive oil on the water glass layer is preferably 0.1 to 7 g / m 2 .

【0011】[0011]

【作用】以下本発明をさらに詳細に説明する。アルミニ
ウム合金板が高い摺動抵抗性を有するのは、先述のよう
にアルミニウム合金が低融点でしかも他金属、特にプレ
ス金型に多用されている鋳鉄などとの親和力が強く、金
型に凝着しやすい性質を有することに起因すると考えら
れる。プレス成形時の摺動性に影響を与えるのは、金型
と直接接触するアルミニウム合金板の表面の物性である
ため、アルミニウム合金板表層を鋳鉄などとの親和力が
弱い物質で被覆しアルミニウム合金板と金型との直接接
触を避け、潤滑性を与えることで摺動性は改善される。
しかしながら、潤滑性を付与する処理によって、プレス
加工後に施されるリン酸亜鉛化成処理性を阻害してはな
らないことが必須条件である。
The present invention will be described in more detail below. Aluminum alloy plates have high sliding resistance as described above because aluminum alloys have a low melting point and have a strong affinity with other metals, especially cast iron, which is often used in press dies, and adheres to dies. It is considered that this is due to the fact that it has the property of being easy to do. Since it is the physical properties of the surface of the aluminum alloy plate that is in direct contact with the die that affect the slidability during press forming, the aluminum alloy plate surface layer is coated with a substance with a weak affinity for cast iron etc. The sliding property is improved by avoiding direct contact between the mold and the mold and providing lubricity.
However, it is an essential condition that the treatment for imparting lubricity should not interfere with the zinc phosphate chemical conversion treatment performed after pressing.

【0012】発明者らは、前述の観点からアルミニウム
合金板が有する問題点を解決すべく鋭意研究した結果、
水ガラス(ケイ酸ソーダ:nNa2 O・mSiO2 )が
アルミニウム合金板の表面に存在した場合に、その摺動
性を著しく改善し、かつリン酸塩処理の前に施されるア
ルカリ脱脂工程で完全に溶解除去される物質であること
を見いだし本発明を完成した。
The inventors of the present invention have earnestly studied to solve the problems of the aluminum alloy plate from the above viewpoint,
When water glass (sodium silicate: nNa 2 O.mSiO 2 ) is present on the surface of the aluminum alloy plate, it improves the slidability of the glass and also in the alkaline degreasing step performed before the phosphate treatment. The present invention has been completed by finding out that the substance can be completely dissolved and removed.

【0013】アルミニウム合金板表面に施した柔軟性の
少ない水ガラス乾燥皮膜が、一見不可解とも思える優れ
たプレス加工性を付与できるのは以下の理由によるもの
と考えられる。すなわち、水ガラス皮膜はアルミニウム
合金板表面に存在する微少な凹凸あるいはプレス成形中
に新たに生じる凹凸によってもたらされる局部的な極め
て高い接触面圧に対して十分耐えることができるため、
プレス金型とアルミニウム合金板の直接接触をほぼ完全
に防止できるためと考えられる。その効果は乾燥膜厚で
0.1μm以上で発現し、10μmを越えるとその効果
が飽和し不経済であるばかりでなく、脱脂工程での溶解
除去が不完全となりやすくなり、残留する水ガラスがリ
ン酸亜鉛化成処理性に悪影響を与えるため上限とした。
なお、水ガラスの水溶液は金属の脱脂剤としても使用で
きることが知られているが、このことからも理解できる
ように、水ガラスが脱脂液中に溶解しても、なんら脱脂
液の脱脂能力を阻害するものではない。
It is considered that the reason why the water glass dry film having a low flexibility applied to the surface of the aluminum alloy plate can give the excellent press workability which is seemingly incomprehensible is as follows. That is, since the water glass film can sufficiently withstand the extremely high local contact surface pressure caused by the minute irregularities present on the surface of the aluminum alloy plate or the irregularities newly generated during press molding,
It is considered that the direct contact between the press die and the aluminum alloy plate can be almost completely prevented. The effect is exhibited at a dry film thickness of 0.1 μm or more, and when it exceeds 10 μm, the effect is saturated and uneconomical, and the dissolution and removal in the degreasing process are likely to be incomplete, and residual water glass The upper limit was set because it adversely affects the zinc phosphate chemical conversion treatability.
It is known that an aqueous solution of water glass can also be used as a degreasing agent for metals, but as can be understood from this, even if water glass is dissolved in the degreasing solution, the degreasing ability of the degreasing solution is not affected. It does not hinder.

【0014】しかしながら、水ガラス皮膜のみの被覆に
は問題がある。すなわち、水ガラス皮膜は吸湿し易く、
そのため次第に粘着性を帯びることに起因して板のハン
ドリング性が困難となること。また、吸湿が進行すると
水ガラスの分解劣化が起こり、その効果が減少すること
である。これらの問題を回避するには防錆油の塗布が不
可欠である。使用する防錆油は特に制限されないが、そ
の塗布量は0.1〜7g/m2が必要である。その塗布量が
0.1g/m2未満ではその効果は充分でなく、7g/m2を越
えるとその効果は飽和するだけでなく、脱脂不良を起こ
したり脱脂液の劣化を速めるため上限とした。
However, the coating of only the water glass coating has a problem. That is, the water glass film easily absorbs moisture,
Therefore, it becomes difficult to handle the plate due to gradually becoming tacky. Further, as the moisture absorption progresses, the water glass is decomposed and deteriorated, and its effect is reduced. In order to avoid these problems, application of rust preventive oil is indispensable. The rust preventive oil to be used is not particularly limited, but its coating amount is required to be 0.1 to 7 g / m 2 . If the coating amount is less than 0.1 g / m 2 , the effect is not sufficient, and if it exceeds 7 g / m 2 , the effect is not only saturated, but also the degreasing failure occurs or the deterioration of the degreasing liquid is accelerated, so the upper limit is set. .

【0015】本発明の処理工程は、水ガラス水溶液をア
ルミニウム合金板に塗布・乾燥して水ガラス皮膜を形成
する工程と前記水ガラス皮膜上に防錆油を塗布する工程
から成り立っている。水ガラス水溶液の塗布は、水ガラ
スを適当な粘度に水で希釈して、通常のロールコータ等
の塗布装置でアルミニウム合金板に塗布後、これを加熱
空気により乾燥する。この場合、アルミニウム合金板の
前処理としては特に水ガラス水溶液に適当な脱脂、エッ
チング作用があることから実施する必要はなく、圧延後
直接処理しても良いが、圧延工程で生成した圧延油を含
有する不均一酸化皮膜をより完全に除去する目的で、硝
酸、硫酸等によるエッチング処理またはアルカリエッチ
ング処理と酸溶液中でのスマット除去処理を行えばより
安定、均一な処理が可能となる。防錆油の塗布は静電塗
布、ロールコーター法等の通常用いられている方法で実
施でき、特に制限されない。
The treatment step of the present invention comprises a step of applying a water glass aqueous solution to an aluminum alloy plate and drying it to form a water glass film, and a step of applying rust preventive oil on the water glass film. The water glass aqueous solution is applied by diluting water glass with water to an appropriate viscosity, applying it on an aluminum alloy plate with an ordinary applicator such as a roll coater, and then drying it with heated air. In this case, as the pretreatment of the aluminum alloy plate, it is not necessary to perform it because the degreasing and etching action is appropriate for the water glass aqueous solution, and it may be directly treated after rolling, but the rolling oil generated in the rolling step is For more complete removal of the heterogeneous oxide film contained therein, etching treatment with nitric acid, sulfuric acid or the like or alkali etching treatment and smut removal treatment in an acid solution can be carried out to provide a more stable and uniform treatment. The rust preventive oil can be applied by a commonly used method such as electrostatic application or a roll coater method, and is not particularly limited.

【0016】[0016]

【実施例】以下に本発明を実施例に基づいて具体的に説
明する。 (実施例1)JIS A5182(Al−0.3wt%
Mn−4.5wt%Mg)アルミニウム合金を常法によ
り溶解、鋳造、熱間圧延、冷間圧延により1.0mm板
厚とし、仕上げ焼鈍を施した後、ロールコーターにて水
ガラス水溶液の塗布および乾燥と防錆油の塗布を行ない
種々の試験片を作製した。
EXAMPLES The present invention will be specifically described below based on examples. (Example 1) JIS A5182 (Al-0.3 wt%
A Mn-4.5 wt% Mg) aluminum alloy is melted, cast, hot-rolled, and cold-rolled to a plate thickness of 1.0 mm by a conventional method, and after finish annealing, application of a water glass aqueous solution by a roll coater and Various test pieces were prepared by drying and applying antirust oil.

【0017】その後以下に示す試験を行った。 (1)プレス成形性試験 70mmφに打ち抜いたサンプルを33mmφの高速円
筒絞り加工(加工速度:500mm/秒)を行なった。
この場合、各試料の成形性の評価は試験後円筒試片の側
面のかじりまたは/および割れが発生したものを×、こ
れらの欠陥が発生しなかったものを○とした。
After that, the following tests were conducted. (1) Press Formability Test A sample punched to 70 mmφ was subjected to high-speed cylindrical drawing of 33 mmφ (processing speed: 500 mm / sec).
In this case, the evaluation of the moldability of each sample was evaluated as × when the galling and / or cracking of the side surface of the cylindrical sample after the test was generated, and as ○ when the defects were not generated.

【0018】(2)リン酸亜鉛化成処理性試験 弱アルカリ系脱脂剤にて50℃、2分間の脱脂を行い、
水洗、表調処理を行った後、40℃、2分間のリン酸亜
鉛化成処理を行った。なお、いずれの処理試薬も日本パ
ーカライジング社製のパルボンドL−3020アルミニ
ウム仕様のものを用いた。各試料の化成性の評価は、走
査型電子顕微鏡にて1000倍の観察により、化成結晶
にスケ(化成結晶の欠落ないしは非付着箇所)があるも
のを×、スケがないものを○とした。
(2) Zinc phosphate chemical conversion treatment test Degreasing was performed at 50 ° C. for 2 minutes with a weak alkaline degreasing agent,
After washing with water and surface treatment, zinc phosphate conversion treatment was performed at 40 ° C. for 2 minutes. All treatment reagents used were Palbond L-3020 aluminum specifications manufactured by Nippon Parkerizing Co., Ltd. The chemical conversion of each sample was evaluated by observing with a scanning electron microscope at a magnification of 1000, and those having a skein (the lack or non-adhesion site of the sizing crystal) in the chemical conversion crystal were evaluated as x, and those having no skein were evaluated as o.

【0019】作製試料の条件および試験結果を表1に示
す。以上の試験結果より、本発明はアルミニウム合金板
の成形性の改善に極めて有効であると共に、リン酸亜鉛
化成性も優れていることが判る。
Table 1 shows the conditions of the prepared samples and the test results. From the above test results, it is understood that the present invention is extremely effective in improving the formability of the aluminum alloy sheet and also has excellent zinc phosphate chemical conversion properties.

【0020】[0020]

【表1】 [Table 1]

【0021】[0021]

【発明の効果】本発明で開示したように、アルミニウム
合金板の表面に水ガラス皮膜、さらにはその上層に防錆
油を施すことにより良好なリン酸塩処理性を有したまま
プレス加工時の摺動性を著しく改善することが可能にな
り、アルミニウム合金板のプレス成形時における生産性
を飛躍的に向上させることができる。
As disclosed in the present invention, a water glass film is formed on the surface of an aluminum alloy plate, and further rust preventive oil is applied to the upper layer of the aluminum alloy plate, so that a good phosphating property can be maintained during pressing. It becomes possible to remarkably improve the slidability, and it is possible to dramatically improve the productivity at the time of press forming of the aluminum alloy plate.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 戸 塚 信 夫 千葉県千葉市中央区川崎町1番地 川崎製 鉄株式会社技術研究本部内 (72)発明者 西 山 直 樹 千葉県千葉市中央区川崎町1番地 川崎製 鉄株式会社技術研究本部内 (72)発明者 馬 渕 昌 樹 千葉県千葉市中央区川崎町1番地 川崎製 鉄株式会社技術研究本部内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Nobuo Totsuka 1 Kawasaki-cho, Chuo-ku, Chiba-shi, Chiba Kawasaki Steel Corporation Technical Research Division (72) Inventor Naoki Nishiyama Chuo-ku, Chiba-shi, Chiba Kawasaki-cho, No. 1 Kawasaki Steel Co., Ltd., Technical Research Division (72) Inventor Mabuchi Masaki, Kawasaki-machi, Chuo-ku, Chiba, Chiba Prefecture Kawasaki Steel Co., Ltd., Technical Research Division

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】表面に水ガラスの被覆層を有することを特
徴とする加工性に優れたアルミニウム合金板。
1. An aluminum alloy plate having excellent workability, which has a coating layer of water glass on the surface.
【請求項2】前記水ガラスの被覆層が乾燥膜厚で0.1
〜10μmである請求項1に記載の加工性に優れたアル
ミニウム合金板。
2. The water glass coating layer has a dry film thickness of 0.1.
The aluminum alloy plate having excellent workability according to claim 1, having a thickness of 10 μm.
【請求項3】前記水ガラス層上に0.1〜7g/m2の防錆
油を塗布してなる請求項1または2に記載の加工性に優
れたアルミニウム合金板。
3. An aluminum alloy plate excellent in workability according to claim 1 or 2, wherein 0.1 to 7 g / m 2 of rust preventive oil is applied on the water glass layer.
JP22133492A 1992-08-20 1992-08-20 Al alloy plate excellent in workability Withdrawn JPH0663501A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22133492A JPH0663501A (en) 1992-08-20 1992-08-20 Al alloy plate excellent in workability

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22133492A JPH0663501A (en) 1992-08-20 1992-08-20 Al alloy plate excellent in workability

Publications (1)

Publication Number Publication Date
JPH0663501A true JPH0663501A (en) 1994-03-08

Family

ID=16765183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22133492A Withdrawn JPH0663501A (en) 1992-08-20 1992-08-20 Al alloy plate excellent in workability

Country Status (1)

Country Link
JP (1) JPH0663501A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5849104A (en) * 1996-09-19 1998-12-15 Yieldup International Method and apparatus for cleaning wafers using multiple tanks

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5849104A (en) * 1996-09-19 1998-12-15 Yieldup International Method and apparatus for cleaning wafers using multiple tanks

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