JPH0660466A - Evaluating method for sliding surface of magnetic head of magnetooptical disk and evaluating device - Google Patents

Evaluating method for sliding surface of magnetic head of magnetooptical disk and evaluating device

Info

Publication number
JPH0660466A
JPH0660466A JP20863592A JP20863592A JPH0660466A JP H0660466 A JPH0660466 A JP H0660466A JP 20863592 A JP20863592 A JP 20863592A JP 20863592 A JP20863592 A JP 20863592A JP H0660466 A JPH0660466 A JP H0660466A
Authority
JP
Japan
Prior art keywords
magnetic head
magneto
optical disk
sliding
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20863592A
Other languages
Japanese (ja)
Inventor
Hiroyuki Wakasugi
弘幸 若杉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP20863592A priority Critical patent/JPH0660466A/en
Publication of JPH0660466A publication Critical patent/JPH0660466A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To exactly analyze the behavior of friction and wear of a sliding surface at the time of sliding by continuously focusing on the sliding surface on which the magnetic head slides on a magnetooptical disk and observing the surface. CONSTITUTION:A magnetic head 3 slides on a surface on the side of the protection film of a magnetooptical disk 1 and a microscope main body 4 is arranged on the opposite side of the magnetic head 3 through the disk 1. A substrate coated with ultraviolet curing resin for protecting the disk 1 is used and a recording film is formed so that the light ray of the microscope is made to be transmitted through the substrate in order to observe the sliding surface of the disk 1. Thus, by continuously focusing on the sliding surface when the magnetic head 3 slides on the disk 1, the change of the sliding surface caused by wraping at the time of sliding is observed since the measuring part of the microscope is provided. Consequently, the analysis of the behevior of friction and wear of the disk 1 and the head 3 at the time of sliding is exactly performed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、光磁気ディスクに磁気
ヘッドが摺動する摺動面を、連続的に合焦して観察する
ための、評価方法及び評価装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an evaluating method and an evaluating apparatus for continuously focusing and observing a sliding surface on which a magnetic head slides on a magneto-optical disk.

【0002】[0002]

【従来の技術】光磁気記録方式は、磁性薄膜を部分的に
キュリ−点または温度補償点を越えて昇温し、この部分
の保磁力を消滅させて外部から印加される記録磁界の方
向に磁化の向きを反転することを基本原理とするもの
で、光ファイルシステムやコンピュ−タ−の外部記憶装
置、あるいは音響、映像情報の記憶装置等において実用
化されつつある。
2. Description of the Related Art In a magneto-optical recording system, the temperature of a magnetic thin film is partially raised above a Curie point or a temperature compensation point, the coercive force of this portion is extinguished, and the direction of a recording magnetic field applied from the outside is increased. The basic principle is to reverse the direction of magnetization, and it is being put to practical use in an optical file system, an external storage device of a computer, a storage device of audio and video information, and the like.

【0003】この光磁気記録方式に用いられる光磁気デ
ィスクとしては、ポリカ−ボネイト等からなる透明基板
の一主面に、膜面と垂直方向に磁化容易軸を有し、且つ
磁気光学効果の大きな記録磁性層(例えば希土類−遷移
金属合金非晶質薄膜)や反射層、誘電体層を積層するこ
とにより記録部を形成し、さらにこの記録部上に紫外線
硬化樹脂等よりなる保護膜を覆う如く形成したものが知
られている。
A magneto-optical disk used in this magneto-optical recording system has an easy axis of magnetization in the direction perpendicular to the film surface on one main surface of a transparent substrate made of polycarbonate or the like and has a large magneto-optical effect. A recording portion is formed by laminating a recording magnetic layer (for example, a rare earth-transition metal alloy amorphous thin film), a reflection layer, and a dielectric layer, and a protective film made of an ultraviolet curable resin or the like is formed on the recording portion. What is formed is known.

【0004】ところで、光磁気記録方式には、大きく分
けて光変調方式と磁界変調方式があるが、このうち磁界
変調方式は、オ−バ−ライト可能であることから注目さ
れており、例えば汎用タイプである直径64mm程度の
小型光磁気ディスク(いわゆるミニディスク)の記録方
式として採用が検討されている。
By the way, the magneto-optical recording method is roughly classified into an optical modulation method and a magnetic field modulation method. Among them, the magnetic field modulation method has attracted attention because it can be overwritten. Adoption is being considered as a recording method for a compact magneto-optical disk (so-called mini disk) having a diameter of about 64 mm.

【0005】上記磁界変調方式は、印加磁界を高速で反
転することにより磁性薄膜に情報を書き込むものであっ
て、磁界の印加は通常磁界発生手段を有する磁気ヘッド
によって行われる。この場合、高速反転磁界を印加する
磁気ヘッドでは、諸々の制約から非常に小さな磁界しか
発生できず、磁気ヘッドをなるべく記録磁性層と近接さ
せなければならない。
The above-mentioned magnetic field modulation method writes information in a magnetic thin film by reversing the applied magnetic field at a high speed, and the magnetic field is usually applied by a magnetic head having magnetic field generating means. In this case, a magnetic head that applies a high-speed reversal magnetic field can generate only a very small magnetic field due to various restrictions, and the magnetic head must be as close to the recording magnetic layer as possible.

【0006】そこで、このような磁界変調方式において
は、磁気ヘッドを光磁気ディスクのディスク面に対して
直接接触させ、摺動させながら記録を行う摺動記録方式
の採用が検討されている。この摺動記録方式を採用すれ
ば、上記高速反転磁界を印加する磁気ヘッドであっても
記録磁性層に対して十分な磁力が印加できる。しかも、
ディスク面に対してヘッドが浮上する方式では、ディス
ク面とヘッド間の距離を常に一定に保つための複雑なサ
−ボ機構が必要であるが、摺動記録方式では、このよう
なサ−ボ機構が不要である。したがって、装置の簡易
化、小型化にも有利となる。
Therefore, in such a magnetic field modulation system, adoption of a sliding recording system in which a magnetic head is brought into direct contact with the disk surface of a magneto-optical disk and recording is carried out while sliding is being considered. If this sliding recording method is adopted, a sufficient magnetic force can be applied to the recording magnetic layer even with the magnetic head that applies the high-speed reversal magnetic field. Moreover,
The head flying above the disk surface requires a complicated servo mechanism for keeping the distance between the disk surface and the head constant, but the sliding recording method requires such a servo mechanism. No mechanism is required. Therefore, it is also advantageous in simplifying and downsizing the device.

【0007】[0007]

【発明が解決しようとする課題】ところで、上記のよう
な摺動記録方式においては、磁気ヘッドが光磁気ディス
クに摺動するため、光磁気ディスク、磁気ヘッドの設計
や開発を行う上で、光磁気ディスクと磁気ヘッド間の摺
動面を観察し、光磁気ディスク、磁気ヘッドの摩擦摩耗
挙動の解析をすることが必要とされている。そこで、光
磁気ディスクと磁気ヘッドを一定回転摺動させた後、光
磁気ディスク、磁気ヘッドを摺動装置より取り外し、光
学顕微鏡下で光磁気ディスク、磁気ヘッドの摺動面を観
察している。
In the sliding recording method as described above, since the magnetic head slides on the magneto-optical disk, the optical disk is designed and developed for the magneto-optical disk and the magnetic head. It is necessary to observe the sliding surface between the magnetic disk and the magnetic head and analyze the friction and wear behavior of the magneto-optical disk and the magnetic head. Therefore, after sliding the magneto-optical disk and the magnetic head for a fixed rotation, the magneto-optical disk and the magnetic head are removed from the sliding device, and the sliding surfaces of the magneto-optical disk and the magnetic head are observed under an optical microscope.

【0008】上述のような摺動を行う装置は、例えば保
護膜が形成された光磁気ディスク、該光磁気ディスクに
摺動する磁気ヘッド、磁気ヘッドを支持する支持体、該
光磁気ディスクを回転させる駆動部によって構成されて
いる。上記の摺動装置で所定の回転数を摺動した後、光
磁気ディスク、磁気ヘッドを摺動装置より取り外し、光
学顕微鏡下で摺動部の表面形状の変化を観察して、光磁
気ディスク、磁気ヘッドの摩擦摩耗挙動を解析してい
る。
The above-described sliding device is, for example, a magneto-optical disk having a protective film formed thereon, a magnetic head sliding on the magneto-optical disk, a support for supporting the magnetic head, and a rotating magneto-optical disk. It is composed of a driving unit for driving. After sliding a predetermined number of rotations with the above-mentioned sliding device, the magneto-optical disk and the magnetic head were removed from the sliding device, and the change in the surface shape of the sliding portion was observed under an optical microscope. The frictional wear behavior of the magnetic head is analyzed.

【0009】一方、摺動時の環境温度変化、光磁気ディ
スクの反りに起因する接触圧力の変化等により、光磁気
ディスク、磁気ヘッドの摺動面は変化しており、磁気ヘ
ッドの挙動に影響を及ぼしているものと思われる。よっ
て、摺動時の光磁気ディスク、磁気ヘッドの摺動面を接
触状態のまま連続的に合焦して観察することは、光磁気
ディスク、磁気ヘッドの摩擦摩耗挙動を解析するために
は必要と思われる。
On the other hand, the sliding surfaces of the magneto-optical disk and the magnetic head change due to changes in the environmental temperature during sliding, changes in the contact pressure caused by the warp of the magneto-optical disk, etc., which affects the behavior of the magnetic head. It seems that it is affecting. Therefore, it is necessary to continuously focus and observe the sliding surfaces of the magneto-optical disk and magnetic head during sliding in order to analyze the friction and wear behavior of the magneto-optical disk and magnetic head. I think that the.

【0010】そこで本発明は、従来の実情に鑑みて提案
されたものであって、光磁気ディスクに磁気ヘッドが摺
動する時の摺動面を、連続的に合焦して顕微鏡観察する
ことが可能な評価方法と評価装置を、提供することを目
的とする。
Therefore, the present invention has been proposed in view of the conventional circumstances, and it is possible to continuously focus the sliding surface when the magnetic head slides on the magneto-optical disk for microscopic observation. It is an object of the present invention to provide an evaluation method and an evaluation device capable of

【0011】[0011]

【課題を解決するための手段】上述の目的を達成するた
めに、本発明の評価方法は、光磁気ディスクに磁気ヘッ
ドが摺動する時の摺動面を、連続的に合焦して顕微鏡観
察することを特徴とするものである。
In order to achieve the above-mentioned object, the evaluation method of the present invention is a microscope in which a sliding surface when a magnetic head slides on a magneto-optical disk is continuously focused. It is characterized by observing.

【0012】また、本発明の評価装置は、光磁気ディス
クと該光磁気ディスクに摺動する磁気ヘッド、該光磁気
ディスクと該磁気ヘッド間の摺動面を顕微鏡観察する観
察部を備えてなることを特徴とするものである。
The evaluation device of the present invention comprises a magneto-optical disk, a magnetic head sliding on the magneto-optical disk, and an observation section for observing the sliding surface between the magneto-optical disk and the magnetic head with a microscope. It is characterized by that.

【0013】[0013]

【作用】光磁気記録方式等に用いられる摺動記録方式に
おいては、磁気ヘッドが光磁気ディスク面に摺動するた
め、光磁気ディスク、磁気ヘッドの設計や開発を行う上
で、摺動時の摩擦摩耗挙動の解析をすることが必要とさ
れており、光磁気ディスク、磁気ヘッドを所定の回転数
摺動した後、光磁気ディスク、磁気ヘッドを摺動装置よ
り取り外し、光学顕微鏡下で摺動面の表面形状の変化を
観察して、光磁気ディスク、磁気ヘッドの摩擦摩耗挙動
を解析している。
In the sliding recording method used for the magneto-optical recording method, the magnetic head slides on the surface of the magneto-optical disk. Therefore, when designing and developing the magneto-optical disk and the magnetic head, It is necessary to analyze the friction and wear behavior, and after sliding the magneto-optical disk and the magnetic head at a specified number of rotations, remove the magneto-optical disk and the magnetic head from the sliding device and slide them under an optical microscope. By observing the change in the surface shape of the surface, the frictional wear behavior of the magneto-optical disk and magnetic head is analyzed.

【0014】しかしながら、摺動時の環境温度変化、光
磁気ディスクの反りに起因する接触圧力の変化、摩擦回
数の増加による摩擦面粗さの変化等により、光磁気ディ
スク、磁気ヘッドの摺動面の状態は変化しており、摺動
時の光磁気ディスクと磁気ヘッド間の摺動面を接触状態
のまま連続的に観察することは、光磁気ディスク、磁気
ヘッドの摩擦摩耗挙動を解析するためには必要と思われ
る。さらに、光磁気ディスクの反りを考慮して、顕微鏡
の焦点が合った状態で連続的に観察を行う必要がある。
However, the sliding surfaces of the magneto-optical disk and the magnetic head are subject to changes in environmental temperature during sliding, changes in contact pressure due to warpage of the magneto-optical disk, changes in friction surface roughness due to an increase in the number of times of friction, and the like. The state of has changed, and continuous observation of the sliding surface between the magneto-optical disk and the magnetic head during sliding is in order to analyze the friction and wear behavior of the magneto-optical disk and magnetic head. It seems necessary to. Further, in consideration of the warp of the magneto-optical disk, it is necessary to continuously observe with the microscope in focus.

【0015】本発明の評価方法においては、光磁気ディ
スクと磁気ヘッド間の摺動面を接触状態のまま連続的に
合焦して顕微鏡観察するため、摺動時の光磁気ディス
ク、磁気ヘッドの摩擦摩耗挙動の解析を正確に行うこと
ができる。
In the evaluation method of the present invention, since the sliding surface between the magneto-optical disk and the magnetic head is continuously focused and observed under a microscope, the magneto-optical disk and the magnetic head during sliding are in contact with each other. It is possible to accurately analyze the friction and wear behavior.

【0016】また、本発明の評価装置においては、光磁
気ディスクと該光磁気ディスクに摺動する磁気ヘッド、
該光磁気ディスクと該磁気ヘッド間の摺動面を顕微鏡観
察する観察部を備えているため、光磁気ディスクと磁気
ヘッド間の摺動面を接触状態のまま連続的に合焦して観
察することができ、摺動時の光磁気ディスク、磁気ヘッ
ドの摩擦摩耗挙動の解析を正確に行うことができる。さ
らに、本発明の評価装置には、光磁気ディスク1回転に
1回ストロボ発光する光源を備えているため、光磁気デ
ィスクの任意位置の観察を連続的に合焦して、顕微鏡観
察することができる。
Further, in the evaluation apparatus of the present invention, a magneto-optical disk and a magnetic head sliding on the magneto-optical disk,
Since the observation unit for observing the sliding surface between the magneto-optical disk and the magnetic head with a microscope is provided, the sliding surface between the magneto-optical disk and the magnetic head is continuously focused and observed in a contact state. Therefore, the friction and wear behavior of the magneto-optical disk and the magnetic head during sliding can be accurately analyzed. Furthermore, since the evaluation device of the present invention is provided with a light source that emits strobe light once for one rotation of the magneto-optical disk, observation at an arbitrary position of the magneto-optical disk can be continuously focused and microscopically observed. it can.

【0017】[0017]

【実施例】以下、本発明を適用した具体的な実施例につ
いて、図面を参照しながら説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments to which the present invention is applied will be described below with reference to the drawings.

【0018】本実施例の評価装置は、図1に示すよう
に、図中矢印M1方向に回転する光磁気ディスク1、光
磁気ディスク1を回転させるモ−タ2、光磁気ディスク
1に摺動する磁気ヘッド3、顕微鏡本体4、顕微鏡本体
4を支持する支持体5、対物レンズ6、CCDカメラ
7、VTR8、モニタ−9、ストロボ駆動部10、スト
ロボ発光部11、同期信号遅延回路12、CCDカメラ
駆動部13により構成される。この時、光磁気ディスク
1の保護膜側の面と磁気ヘッド3が摺動し、顕微鏡本体
4は光磁気ディスク1を介して磁気ヘッド3と反対側に
配置される。光磁気ディスク1は保護膜として紫外線硬
化樹脂を施された、透明ポリカ−ボネイト基板を使用し
ている。また、光磁気ディスク1の摺動面を観察するた
め、基板中を顕微鏡の光線を透過させるよう、MO膜な
どの記録膜は成膜されていない。
As shown in FIG. 1, the evaluation apparatus of this embodiment slides on a magneto-optical disk 1 rotating in the direction of arrow M1, a motor 2 rotating the magneto-optical disk 1, and a magneto-optical disk 1. Magnetic head 3, microscope body 4, support body 5 for supporting the microscope body 4, objective lens 6, CCD camera 7, VTR 8, monitor 9, strobe drive section 10, strobe light emission section 11, sync signal delay circuit 12, CCD It is configured by the camera drive unit 13. At this time, the surface of the magneto-optical disk 1 on the protective film side slides against the magnetic head 3, and the microscope body 4 is arranged on the opposite side of the magnetic head 3 with the magneto-optical disk 1 interposed therebetween. The magneto-optical disk 1 uses a transparent polycarbonate substrate coated with an ultraviolet curable resin as a protective film. Further, in order to observe the sliding surface of the magneto-optical disk 1, a recording film such as an MO film is not formed so that the light beam of the microscope is transmitted through the substrate.

【0019】上述のように、光磁気ディスク1が図中矢
印M1 方向に線速度1.4m/秒で回転し、任意測定位
置に置かれた磁気ヘッド3と、光磁気ディスク1の保護
膜面が摺動する。光磁気ディスク1を回転させるモ−タ
2からは、回転に同期した1周に1発のパルスが発生す
る。このパルスを同期信号遅延回路12にて任意時間の
遅延を与えた後、上述遅延同期信号をストロボ駆動部1
0に送り、ストロボ発光部11を発光させる。以上によ
り、光磁気ディスク1の任意位置で1周に1回ずつの映
像が、CCDカメラ7によって撮影され、モニタ−9を
介してVTR8に記録される。顕微鏡本体4の焦点合わ
せは上述の回転同期を合わせた後、顕微鏡本体4を支持
する支持体5を動かして焦点合わせを行う。
As described above, the magneto-optical disk 1 rotates in the direction of the arrow M1 at a linear velocity of 1.4 m / sec, the magnetic head 3 placed at an arbitrary measurement position, and the protective film surface of the magneto-optical disk 1. Slides. From the motor 2 that rotates the magneto-optical disk 1, one pulse is generated in one rotation in synchronization with the rotation. This pulse is delayed by the synchronization signal delay circuit 12 for an arbitrary time, and then the above-mentioned delayed synchronization signal is applied to the flash drive unit 1.
0, and the strobe light emitting section 11 is caused to emit light. As described above, an image is taken by the CCD camera 7 once per rotation at an arbitrary position of the magneto-optical disk 1 and recorded on the VTR 8 via the monitor-9. Focusing of the microscope main body 4 is performed by moving the support 5 that supports the microscope main body 4 after the above-described rotation synchronization is adjusted.

【0020】本実施例において、顕微鏡本体4として
は、中央精機製TS−V、顕微鏡本体4を支持する支持
体5としては、中央精機製TS−Oを使用した。対物レ
ンズ6としては、中央精機製の3倍、10倍、20倍の
対物レンズを適宜使用した。、また、CCDカメラ7と
しては、ソニ−製XC−39、ストロボ駆動部10とし
ては、菅原研究所製のMS−210、ストロボ発光部1
1としては、菅原研究所製SL−210Mを使用した。
また、記録用VTR8としては、ソニ−製SLV−R5
を使用し、最長9時間の記録を行った。
In the present embodiment, the microscope body 4 was a TS-V manufactured by Chuo Seiki, and the support 5 supporting the microscope body 4 was a TS-O manufactured by Chuo Seiki. As the objective lens 6, 3 ×, 10 ×, and 20 × objective lenses manufactured by Chuo Seiki were used appropriately. The CCD camera 7 is a Sony XC-39, the strobe drive unit 10 is an MS-210 manufactured by Sugawara Laboratories, and the strobe light emission unit 1 is used.
As No. 1, SL-210M manufactured by Sugawara Laboratories was used.
Further, as the recording VTR 8, Sony-made SLV-R5 is used.
Was recorded for up to 9 hours.

【0021】光磁気ディスク1は、プラスチック基板を
使用しているため基板の反りが発生し、通常の連続光の
顕微鏡照明下で観察を行うと焦点が合わない箇所が大半
を占めてしまう。しかし、本実施例のように、ストロボ
発光によって、1周内で光磁気ディスク1の1箇所のみ
を連続的に観察する機構をとれば、焦点が合った状態で
摺動面の観察が正確に行える。
Since the magneto-optical disk 1 uses a plastic substrate, the substrate is warped, and when observed under normal continuous microscope illumination, most of the areas are out of focus. However, if a mechanism for continuously observing only one place of the magneto-optical disk 1 within one rotation by strobe emission as in this embodiment is adopted, the sliding surface can be accurately observed in a focused state. You can do it.

【0022】[0022]

【発明の効果】以上の説明からも明かなように、本発明
の評価方法においては、光磁気ディスクに磁気ヘッドが
摺動する際の摩擦面を、連続的に合焦して観察すること
ができる。また、本発明の評価装置においては、光磁気
ディスクに磁気ヘッドが摺動する際の摩擦面を、連続的
に合焦して顕微鏡観察する測定部を備えているため、摺
動時の環境温度変化、光磁気ディスクの反りに起因する
接触圧力の変化等による、光磁気ディスク、磁気ヘッド
の摺動面の変化を観察することが可能であり、光磁気デ
ィスク、磁気ヘッドの摺動時の摩擦摩耗挙動の解析を正
確に行うことができる。このような光磁気ディスク、磁
気ヘッドの摺動時の摩擦摩耗挙動の解析は、光磁気ディ
スク、磁気ヘッドの設計や開発を行う上で非常に重要で
あり、工業的価値は非常に高い。
As is clear from the above description, in the evaluation method of the present invention, it is possible to continuously focus and observe the friction surface when the magnetic head slides on the magneto-optical disk. it can. Further, in the evaluation device of the present invention, since the friction surface when the magnetic head slides on the magneto-optical disk is equipped with a measuring unit for continuously focusing and observing with a microscope, the environmental temperature at the time of sliding It is possible to observe changes in the sliding surface of the magneto-optical disk and magnetic head due to changes in the contact pressure due to warping of the magneto-optical disk, and friction during sliding of the magneto-optical disk and magnetic head. The wear behavior can be accurately analyzed. The analysis of such frictional wear behavior of the magneto-optical disk and the magnetic head when sliding is very important in designing and developing the magneto-optical disk and the magnetic head, and has an extremely high industrial value.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明を適用した評価装置の一実施例の構成を
示す要部概略斜視図である。
FIG. 1 is a schematic perspective view of essential parts showing a configuration of an embodiment of an evaluation device to which the present invention is applied.

【符号の説明】[Explanation of symbols]

1 光磁気ディスク 2 モ−タ 3 磁気ヘッド 4 顕微鏡本体 6 対物レンズ 7 CCDカメラ 8 VTR 10 ストロボ駆動部 11 ストロボ発光部 12 同期信号遅延回路 1 Magneto-optical disk 2 Motor 3 Magnetic head 4 Microscope main body 6 Objective lens 7 CCD camera 8 VTR 10 Strobe drive section 11 Strobe light emission section 12 Sync signal delay circuit

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 光磁気ディスクに磁気ヘッドが摺動する
摺動面を、連続的に合焦して観察することを特徴とする
光磁気ディスクの磁気ヘッド摺動面の評価方法。
1. A method of evaluating a magnetic head sliding surface of a magneto-optical disk, which comprises continuously observing a sliding surface on which a magnetic head slides on a magneto-optical disk.
【請求項2】 光磁気ディスクに磁気ヘッドが摺動する
摺動面を、連続的に合焦して観察する測定部を備えてな
る光磁気ディスクの磁気ヘッド摺動面の評価装置。
2. An apparatus for evaluating a magnetic head sliding surface of a magneto-optical disk, comprising a measuring unit for continuously focusing and observing a sliding surface on which a magnetic head slides on a magneto-optical disk.
JP20863592A 1992-08-05 1992-08-05 Evaluating method for sliding surface of magnetic head of magnetooptical disk and evaluating device Pending JPH0660466A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20863592A JPH0660466A (en) 1992-08-05 1992-08-05 Evaluating method for sliding surface of magnetic head of magnetooptical disk and evaluating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20863592A JPH0660466A (en) 1992-08-05 1992-08-05 Evaluating method for sliding surface of magnetic head of magnetooptical disk and evaluating device

Publications (1)

Publication Number Publication Date
JPH0660466A true JPH0660466A (en) 1994-03-04

Family

ID=16559504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20863592A Pending JPH0660466A (en) 1992-08-05 1992-08-05 Evaluating method for sliding surface of magnetic head of magnetooptical disk and evaluating device

Country Status (1)

Country Link
JP (1) JPH0660466A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5795490A (en) * 1996-03-31 1998-08-18 Nec Corporation Magnetic head damage evaluation method and apparatus therefor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5795490A (en) * 1996-03-31 1998-08-18 Nec Corporation Magnetic head damage evaluation method and apparatus therefor

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