JPH0658839A - Automatic inspecting apparatus for defect of color filter - Google Patents

Abstract

PURPOSE:To detect every kind of defects of a color filter automatically and accurately without requiring massive arithmetic processing. CONSTITUTION:Light transmitted through a color filter 5 of irradiation light from a light source 1 is limited with a photometric stop 8 to a multiple of integer of that of one pixel of the color filter 5 and the limited transmission light is detected with photo detectors 9 and 12 to perform a data processing with a personal computer. Thus, the number of data which must be processed is reduced sharply to allow a control and data processing with the personal computer alone thereby enabling accurate detection of all defects of the color filter 5 including blurring and unevenness.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic defect inspection apparatus for color filters, and more particularly to an automatic defect inspection for color filters having a spatially red, green and blue periodic repeating structure used in liquid crystal display devices and the like. The present invention relates to a color filter automatic defect inspection device suitable for use in detection inspection.

[0002]

2. Description of the Related Art Conventionally, inspecting a defect of a color filter used in a liquid crystal display device or the like has usually been performed by an inspector by visual inspection. This conventional defect inspection method
Since it depends on the human sense organs, the defect detection results vary depending on the physical condition of the inspector and individual differences, which makes it difficult to perform a stable defect inspection.

Various methods for automatically detecting defects by using a machine without relying on human sense organs have been proposed, but all of them are still in the examination stage and have not been put into practical use.

In the proposed automatic defect inspection apparatus, a CCD is used as a detecting means for detecting the light from the color filter.
There is an automatic defect inspection apparatus that uses a video camera equipped with such a line sensor. Since this automatic defect inspection apparatus uses an area, which is too small, corresponding to one pixel of the line sensor for the size of the defect on the color filter as one unit for measurement, it is necessary to process a large amount of measurement data. However, there is a drawback that a dedicated arithmetic unit capable of high-speed arithmetic is required and the price of the apparatus becomes extremely expensive.

[0005] Further, the automatic defect inspection apparatus of the color filters proposed in the prior art, both structural der驍scan Me for detecting the form of the defect, the detection capability of the defects of unclear unevenness, blurring or the like of the contour not It is enough.

The types of defects of the color filter include protrusions, white pins, blurring, color mixing, and unevenness. The protrusion means a part of the color filter protruding on the color filter. Is a defect in which holes appear in the color filter and appear white. Further, the white blur refers to a defect that appears to be white in the thinned portion of the color filter, and the mixed color refers to a portion where the red, green, and blue filters are partially mixed. Further, the unevenness refers to a portion that is seen as so-called “unevenness” when the color filter is viewed, and refers to a defect having a weaker contrast and a wider range than “blur”. In addition to these, as the defects of the color filter, there are defects such as "black pins", which are defects in which foreign substances are mixed in the filter, and black lines that separate the red, green, and blue parts. There are "black line anomalies" etc. that refer to the abnormal parts.

[0007]

SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances, and its object is to automate defect detection without relying on the conventional visual inspection by an inspector, and An automatic defect inspection device for a color filter that solves the above-mentioned drawbacks of the conventionally proposed automatic defect inspection device and is inexpensive and highly practical that can detect all defects of the color filter including blur and unevenness. That is.

[0008]

In order to solve the above-mentioned problems, an automatic defect inspection apparatus for color filters according to the present invention comprises:
A light source that irradiates a color filter having a spatially red, green, and blue periodic repeating structure with light, a detection unit that detects the light from the color filter, and a process that arithmetically processes an output signal from the detection unit. In the automatic defect inspection apparatus for a color filter including means, the detecting means is arranged so as to detect the transmitted light of the irradiation light from the light source through the color filter, and the range of the transmitted light incident on the detecting means. The spatial red of the color filter,
It is provided with a photometric range designating means for limiting the number to a multiple of the periodic repeating structure of green and blue.

Also, in the automatic defect inspection apparatus for color filters of the present invention, a plurality of detecting means and a plurality of photometric range specifying means are provided respectively, and the processing means calculates the difference between the detection signals of the detecting means. Is provided.

Further, the automatic defect inspection apparatus for a color filter of the present invention detects a light source for irradiating a color filter having a spatially red, green, and blue periodic repeating structure with light and a light from the color filter. In a color filter automatic defect inspection device comprising a detection means for performing an arithmetic processing of an output signal from the detection means, the above-mentioned so as to detect the transmitted light of the light emitted from the light source through the color filter. The detecting means is arranged, and the range of transmitted light incident on the detecting means is limited to an integral multiple of the spatially repeating red, green, and blue periodic structure of the color filter, and the direction of this periodic repeating is In the orthogonal direction, a photometric range designating means for limiting the range to less than one pixel is provided.

Further, in the automatic defect inspection apparatus for a color filter of the present invention, the photometric range designating means limits the range of the transmitted light incident on the detecting means to a range equal to the area of one pixel of the color filter. It was done like this.

[0012]

The automatic defect inspection apparatus for a color filter of the present invention utilizes the regular structure of the color filter and the change in light transmittance at the defect position. That is,
At a defect position of the color filter, a phenomenon such as a change in light transmittance or generation of scattered light occurs, and the present invention detects a defect by detecting the change in transmittance.

Further, by detecting a change in transmittance rather than detecting the form of the defect of the color filter,
Take the photometric unit large enough to reduce the number of data,
It is possible to avoid performing a huge amount of arithmetic processing, and it is also possible to detect a defect such as a blur having an unclear outline. The color filter has a structure in which pixels that are a set of filters corresponding to each color of red, green, and blue are regularly arranged, and the photometric range is set to correspond to this structure. By taking an integral multiple of the periodic repeating structure, a constant photometric intensity can be obtained regardless of the photometric position of the filter (when there is no defect in the filter), and the defect can be detected by using this value as a reference.

Further, by performing photometry at a plurality of positions and taking the difference between these photometric values, it is possible to extract the change only in the deformed portion corresponding to the defect, and to clarify the location and degree of the defect.

Further, the photometric range is set to the color filter red,
It is possible to detect defects smaller than 1 pixel by limiting to an integer multiple of the periodic repeating structure of green and blue and limiting to a range smaller than 1 pixel in a direction orthogonal to the direction of the periodic repeating. , The fluctuation of the photometric value can be moderated and the fluctuation amount can be reduced to reduce the error.

Further, by setting the photometric range to an area equal to one pixel of the color filter, the photometric amount can be kept constant and the error can be reduced.

[0017]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a diagram showing an optical configuration of an embodiment of the present invention.

The light source 1 is an illumination light source such as a halogen lamp or a tungsten lamp, and in front of the light source 1, an irradiation diaphragm 2 is provided for designating an observation range and suppressing a photometric error. An aperture stop 3 for adjusting the irradiation angle of the transmitted light is provided in front of the irradiation stop 2, and a condenser lens 4 for converging the irradiation light is further provided in front of it. The aperture stop 3 can be selected from a circular shape, a ring shape, and a rectangular shape by a slide method. The light source 1, the irradiation diaphragm 2, the aperture diaphragm 3, and the condenser lens 4 form an irradiation optical system.

The color filter 5, which is the object to be inspected, is irradiated from the irradiation optical system so as to face the irradiation optical system.
A detection unit that detects the transmitted light that has passed through the color filter 5 is arranged.

The optical system of the detection means is provided with an objective lens 6 immediately before the color filter, a semi-transparent mirror 7 and a semi-transparent mirror 7 which are provided in the optical path behind the objective lens 6 and which divide the transmitted light of the color filter. Of the transmitted light separated by the semi-transparent mirror 7 in the other optical path of the photometric diaphragm 8 provided in the one optical path behind From the mirror 10, the photometric aperture 11 provided in the optical path behind the total reflection mirror 10, the light receiving element 12 provided behind the photometric aperture 11, an observation finder (not shown), and a viewfinder for confirming the position of the photometric aperture 11. Become.

The objective lens 6 has a value of 1.5 depending on the application.
A lens having a magnification of 2.5 times, 2.5 times, 5 times or the like is used. The photometric diaphragms 8 and 11 have a position adjusting function, and the diaphragm portion is removable, and a rectangular variable type and a fixed type in which an arbitrary shape can be selected by a turret method are used according to the application. Select and use as appropriate.

FIG. 2 shows the electrical construction of the processing means for arithmetically processing the output signal from the detection means of the embodiment of FIG. 1 and the drive means for moving the color filter 5 as the test object and for detecting the moving position. It is a block diagram showing.

The photodetectors 9 and 12 are photomultipliers, photodiodes, etc., and the output signals from the photodetectors 9 and 12 are a controller 13 that performs amplification and difference calculation.
Are input respectively. The output signal of the controller 13 is input to an A / D converter (hereinafter referred to as "A / D") 14, and the output signal of the A / D 14 is a personal computer (hereinafter referred to as "personal computer") that performs arithmetic processing of the input data.
15) is input. The calculation processing result of the personal computer 15 is displayed on the monitor 16 and the external storage device 1
Stored in 7.

In addition to the above calculation, the personal computer 15 outputs a control signal of the electric stage 18 for moving the position of the color filter to an interface (hereinafter referred to as "I / F") 19. The output signal of the I / F 19 is input to the controller 20 that controls the operation of the electric stage 18, and the output signal of the controller 20 is input to the electric stage 18.

The electric stage 18 can be moved independently in the vertical and horizontal directions, and is equipped with a motor for moving in each direction. The motorized stage 18 has an encoder 2
1 is attached, and the encoder 21 outputs the number of up / down pulses proportional to the moving distance to the controller 22. The controller 22 is via the I / F 23
The output pulse of the encoder 21 is input to the personal computer 15.

Next, the operation of the automatic defect inspection apparatus of this embodiment will be described.

First, the structure of the color filter 5 as the test object will be described.

The color filter is, for example, as shown in FIG. 3 or 4, a red filter (hereinafter referred to as “R”), a green filter (hereinafter referred to as “G”) and a blue filter (hereinafter referred to as “B”). Has a spatially continuous (X direction in FIG. 3: line type) or intermittently (X direction in FIG. 4: mesh type) periodic repeating structure (Y direction in FIGS. 3 and 4), One set of these R, G, and B is one pixel.

Focusing on the regularity of such a color filter, in this embodiment, first, the photometric diaphragms 8 and 11 are manually operated so that the light from the color filter 5 incident on the photometric range, that is, the light receiving elements 9 and 12 is detected. The range of transmitted light is set to an integral multiple of 1 pixel (1 to N times). When the color filter 5 is a mesh type, as shown in FIG. 5, a photometric range enlarged to an integral multiple of one pixel is set in both X and Y directions. With this setting, regardless of the position of the color filter 5, the same photometric value should be obtained when there is no defect, and if there is a defect, the photometric value changes by that amount and the defect is detected. it can. An example of actual numerical values in the example of FIG. 5 shows that the size of one pixel is 330 μm.
For x330μm, the photometric range is 660μm × 660μ
Take to m.

Therefore, when the light source 1 is first turned on, the light source 1
The irradiation light emitted from the laser beam passes through the color filter 5 via the irradiation diaphragm 2, the aperture diaphragm 3, and the condenser lens 4. The transmitted light of the color filter 5 is condensed by the objective lens 6 and passes through the semitransparent mirror 7 and the total reflection mirror 10 to the photometric aperture 8,
To 11. As described above, since the photometric diaphragms 8 and 11 are set in the range of an integral multiple of one pixel, only the transmitted light in this range is incident on the light receiving elements 9 and 12.

The light receiving elements 9 and 12 output an electric signal of a voltage proportional to the intensity of incident light to the controller 13. The controller 13 blocks the input signal from one light receiving element and amplifies only the input signal from the other light receiving element, except for the case where the light measuring range is divided into two as shown in FIG. Output to A / D 14. The A / D 14 converts the input analog data into a digital value and outputs it to the personal computer 15. The personal computer 15 classifies the input photometric value according to its size, compares it with a predetermined reference value, determines whether it is normal or defective, and classifies the defect, and displays it on the monitor 16 and at the same time stores it in a storage device. Store in 17.

The measurement of the photometric value is sequentially performed by rectangular scanning while moving the color filter 5 as the object to be inspected by the electric stage 18. At this time, the position of the moving color filter 5 is determined by the encoder 2 attached to the electric stage 18.
1 is detected and input to the personal computer 15.

The judgment result of the photometric value and the position of the color filter 5 are displayed as a defect map on the monitor 16 in real time by the personal computer 15 as shown in FIG. 8, for example. In FIG. 8, the frame 24 is the color filter 5
, And the white circle represents the defect class 1 with the smallest degree of defect. Black circles represent defect class 2 with a medium degree of defect, and white diamonds represent defect class 3 with the largest degree of defect. Vertical and horizontal cross lines represent the current position of the color filter.

In this embodiment, since the presence / absence of a defect, its extent, and the defect occurrence position are stored in the storage device 17, the color filter 5 is moved to the defect existing position after measurement, and the defect is visually observed with a microscope. Further, it is possible to display the defect map, move the color filter to the defect position, and observe with a microscope by recalling the data measured in the past, if necessary.

In the above-described embodiment, the photometric range is set to an integral multiple of one pixel, so that defects larger than one pixel such as unevenness can be effectively detected. On the other hand, a defect of a small size in the X direction without a periodic repeating structure such as a line type color filter, for example, a line type color filter having a pitch of 330 μm in the Y direction of 30 μm
When it is desired to detect the above defects, as shown in FIG. 6, the photometric range is an integral multiple of one pixel only in the Y direction (for example, 990 μm).
In the X direction, the minimum defect size (for example, 20μ)
By taking m), the S / N ratio can be improved. FIG. 9 shows the relationship between the size x of the defect in the X direction and the change amount ΔP of the photometric value in such a case. In FIG. 9, the solid line shows the relationship when the width w of the photometric diaphragms 8 and 11 in the X direction is w0, and the broken line shows the relationship when w> w0.

In the above-described embodiment, only one of the output signals from the light receiving elements 9 and 12 is controlled by the controller 1.
However, if the positions of the photometric diaphragms 8 and 11 are shifted and two photometric ranges are arranged in the Y direction of the color filter 5 to provide a photometric range, it is possible to measure a double area with one scan. Therefore, the number of scans can be halved. Thereby, the measurement time can be shortened.

Further, also in the mesh type color filter, when it is desired to detect a defect smaller than one pixel (for example, when one pixel is to detect a defect of 330 μm × 330 μm and 30 μm or more), as shown in FIG. , The photometric range in the Y direction is an integral multiple of one pixel (for example, 660 μm), and two photometric ranges A and B are arranged in the Y direction so that the photometric range in the X direction is about the minimum defect range (for example, 20 μm). Take In this way, if there is a defect at a point on the color filter corresponding to the photometric range A, for example, the output signal waveform of the light receiving element corresponding to the photometric range A depends on the defect as shown in FIG. The output signal waveform of the light receiving element which is deformed (protrusions are generated in the example of the figure) and which corresponds to the photometric range B where no defect is present does not cause any deformation as shown in FIG. . When the controller 13 outputs the output signal waveforms of both the light receiving elements with a difference, only the deformation corresponding to the defect is output as shown in FIG. 7C, and the location of the defect and its degree are clearly detected. it can.

However, in this case, when the photometric range A and the photometric range B arranged in the Y direction are slightly displaced in the X direction,
The output signal waveforms of the light receiving elements corresponding to the photometric range A and the photometric range B are as shown in FIGS. 11A and 11B, respectively.
When the controller 13 outputs the output signal waveforms of both the light receiving elements with a difference, a noise component β is output in addition to the deformation α corresponding to the defect as shown in FIG. Cause of. This is a phenomenon that occurs due to rapid and large fluctuations in the photometric value in the photometric range and in the non-photometric range, and can be solved by making the fluctuation in the photometric value moderate and reducing the variation amount.

FIG. 12 is a diagram showing an embodiment of the photometric diaphragms 8 and 11 in which the fluctuation of the photometric value is moderated as described above, and is provided at an angle of 5 degrees from the Y direction of the color filter 5. There is. FIG. 13 shows the photometric apertures 8 and 1 of this embodiment.
3 is a diagram showing photometric ranges A and B of transmitted light of the color filter 5 according to No. 1; For example, one pixel is 330 μm × 330 μm
When it is desired to detect a defect of 30 μm or more with the color filter 5 of No. 3, the width in the X direction is 20 μmY as shown in FIG.
When the photometric ranges A and B having a length of 1320 μm in the direction are arranged side by side, the output signal waveforms from the light receiving elements corresponding to the photometric ranges A and B are as shown in FIGS.
Therefore, even if the photometric range A and the photometric range B are slightly shifted in the X direction, no noise component appears as shown in FIG.

FIG. 15 is a diagram showing another embodiment of the photometric diaphragms 8 and 11 in which the fluctuations in the photometric value are moderated. The photometric diaphragms 8 and 11 are arranged to have a narrow width in the X direction and the light receiving element 9 is provided. , 12 is limited to a range equal to the area of one pixel of the color filter 5 so that the amount of photometric light is always equal. As shown in FIG. 15, the length of one pixel in the X direction is gx, the length of one pixel in the Y direction is gy, and the number of pixels in the Y direction of the photometric apertures 8 and 11 is ny.
(Ny = 4 in this embodiment), the lengths of the photometric apertures 8 and 11 in the X direction are sx, and the lengths of the photometric apertures 8 and 11 in the Y direction are sy.
Then, if sx = gx ÷ ny sy = gy × ny, then sx × sy = gx × gy, and the transmitted light that passes through the photometric apertures 8 and 11 becomes the transmitted light for one pixel of the color filter 5. . FIG. 16 is a diagram showing an embodiment in which two such photometric diaphragms 8 and 11 are arranged in the Y direction. In this case, the color filter 5 is set to X as shown in FIG.
Even if the photometric aperture 8 is shifted from the position of x1 to the position of x2 by scanning in the direction, the pattern of the color filter 5 seen from the position of the photometric aperture 8 is as shown in FIG. As in c), both positions are equal to one pixel.

The photometric range is, for example, 330 pixels per pixel.
When it is desired to detect a defect of 30 μm or more in μm × 330 μm, ny = 10, sx = 33 μm, sy = 3300
It may be μm.

In the case of this embodiment, as shown in FIG. 18, the output signal waveform of the light receiving element corresponding to the photometric range A has a constant output level and a level change corresponding to the defective portion as shown in FIG. α appears, and the output signal waveform of the light receiving element corresponding to the photometric range B has a constant output level as shown in FIG. Therefore, by taking the difference between the two, only the level change α can be detected regardless of the deviation between the photometric range A and the photometric range B, as shown in FIG.

FIG. 19 shows a modification of the photometric apertures 8 and 11 of FIG. 15, and the photometric range is formed to be equal to one pixel of the color filter 5 as well.

FIG. 20 shows the embodiment of FIG. 7 (FIG. 20 (a)), the embodiment of FIG. 13 (FIG. 20 (b)) and FIG.
In the sixth embodiment ((c) of FIG. 20), when the defects smaller than one pixel are detected, the output signal waveforms when the photometric positions of the photometric range A and the photometric range B are slightly deviated are compared. The noise level β is the highest in the embodiment of FIG. 7, and the noise level β is the same as that of the embodiment of FIG.
You can see the improved state.

[0046]

According to the automatic defect inspection apparatus of the color filter of the present invention, the transmitted light of the color filter is detected, and the photometric range is limited to an integral multiple of the increase in the cyclic repetition of the color filter. The number of data that has to be processed is drastically reduced, control and data processing is possible only with a personal computer, and all defects of color filters including blur and unevenness can be detected. Cheap and highly practical automatic defect inspection of color filters. The device can be realized.

Further, according to the color filter automatic defect inspection apparatus of the present invention, a plurality of detecting means and photometric range specifying means are provided respectively, and the difference between the detection signals of each detecting means is calculated by the arithmetic circuit. The change in only the deformed portion corresponding to the defect can be extracted, and the location and degree of the defect can be clarified.

Further, according to the automatic defect inspection apparatus of the color filter of the present invention, the photometric range is set to the red of the color filter,
In addition to limiting to an integer multiple of the periodic repeating structure of green and blue, and limiting to a range smaller than 1 pixel in the direction orthogonal to this periodic repeating direction, it is possible to detect defects smaller than 1 pixel. Therefore, the fluctuation of the photometric value can be moderated and the fluctuation amount can be reduced to reduce the error.

Furthermore, according to the automatic defect inspection apparatus for a color filter of the present invention, the photometric range is set to 1 of the color filter.
Since the area is equal to that of the pixel, the amount of photometric light can be kept constant and the error can be reduced.

[Brief description of drawings]

FIG. 1 is a diagram showing an optical configuration of an embodiment of the present invention.

FIG. 2 is a block diagram showing an electrical configuration of the embodiment shown in FIG.

FIG. 3 is a diagram showing a configuration of a line type color filter.

FIG. 4 is a diagram showing a configuration of a mesh type color filter.

FIG. 5 is a diagram showing an example of a method of specifying a photometric range of a mesh type color filter.

FIG. 6 is a diagram showing an example of a method of designating a photometric range of a line type color filter.

FIG. 7 is a diagram showing another example of a method of designating a photometric range of a mesh type color filter.

8 is a diagram showing a defect display example of the embodiment of FIG.

FIG. 9 is a diagram showing an example of a relationship between a defect size of a color filter and a change in photometric value.

10 is a diagram showing an example of output waveforms of the light receiving element and the controller of the embodiment of FIG. 1 when the photometric range is designated as in FIG.

11 is an output waveform example of the light receiving element and the controller of the embodiment of FIG. 1 when there is a slight deviation between the photometric range A and the photometric range B when the photometric range is designated as in FIG. FIG.

FIG. 12 is a diagram showing an example of the form of a photometric diaphragm.

13 is a diagram showing an example of a method of designating a photometric range of a mesh type color filter using the photometric diaphragm of FIG.

14 is an output waveform example of the light receiving element and the controller of the embodiment of FIG. 1 when there is a slight deviation between the photometric range A and the photometric range B when the photometric range is designated as in FIG. FIG.

FIG. 15 is a diagram showing another example of the form of the photometric diaphragm.

16 is a diagram showing an example of a method of designating a photometric range of a mesh type color filter using the photometric aperture of FIG.

17 is a diagram showing that the amount of light passing through the photometric aperture is equal to one pixel of the mesh type color filter when the photometric range is designated as in FIG.

18 is an output waveform example of the light receiving element and the controller of the embodiment of FIG. 1 when there is a slight deviation between the photometric range A and the photometric range B when the photometric range is designated as in FIG. FIG.

FIG. 19 is a diagram showing another example of the form of the photometric diaphragm.

20 shows a case where a photometric range is designated as shown in FIG. 7, a case where a photometric range is designated as shown in FIG. 13, and FIG.
6 is a diagram comparing output waveform examples of the controller of the embodiment of FIG. 1 when there is a slight deviation between the photometric range A and the photometric range B when the photometric range is designated as in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 light source 2 color filter 8,11 photometric aperture 9,12 light receiving element 13, 20, 22 controller 15 personal computer 18 electric stage 21 encoder

Claims (5)

[Claims] 1. A light source for irradiating light to a color filter having a spatially red, green, and blue periodic repeating structure, a detecting means for detecting light from the color filter, and an output signal from the detecting means. In an automatic defect inspection device for a color filter including a processing means for performing an arithmetic processing, the detection means is arranged so as to detect the transmitted light of the irradiation light from the light source through the color filter, and is incident on the detection means. An automatic defect inspection device for a color filter, comprising: a photometric range designating means for limiting the range of transmitted light to an integral multiple of the spatially repeating red, green, and blue periodic structure of the color filter. 2. The automatic color filter according to claim 1, wherein a plurality of the detecting means and a plurality of photometric range specifying means are provided, and the processing means is provided with an arithmetic circuit for calculating a difference between detection signals of the detecting means. Defect inspection equipment. 3. A light source for irradiating light to a color filter having a spatially periodic structure of red, green, and blue, a detecting means for detecting light from the color filter, and an output signal from the detecting means. In an automatic defect inspection device for a color filter including a processing means for performing an arithmetic processing, the detection means is arranged so as to detect the transmitted light of the irradiation light from the light source through the color filter, and is incident on the detection means. The range of transmitted light is limited to an integral multiple of the spatially red, green, and blue periodic repeating structure of the color filter, and is limited to a range smaller than one pixel in the direction orthogonal to the periodic repeating direction. An automatic defect inspection device for color filters, characterized by comprising a photometric range designating means. 4. The automatic defect inspection device for a color filter according to claim 3, wherein the photometric range designation means limits the range of the transmitted light incident on the detection means to a range equal to the area of one pixel of the color filter. . 5. The color filter according to claim 4, wherein a plurality of the detecting means and the photometric range designating means are provided, and the processing means is provided with an arithmetic circuit for calculating a difference between detection signals of the detecting means. Automatic defect inspection system.