JPH0656763U - Solid surface evaluation device - Google Patents
Solid surface evaluation deviceInfo
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- JPH0656763U JPH0656763U JP20793U JP20793U JPH0656763U JP H0656763 U JPH0656763 U JP H0656763U JP 20793 U JP20793 U JP 20793U JP 20793 U JP20793 U JP 20793U JP H0656763 U JPH0656763 U JP H0656763U
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- light
- moving table
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- irradiation
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Abstract
(57)【要約】
【目的】測定試料全面の洗浄評価、表面処理評価等の分
布状況を知ることができる固体表面評価装置を提供する
ことにある。
【構成】測定試料５を載置して移動させる移動テーブル
２の搬入側に測定試料５の表面に蒸気を吹き付けて測定
試料の表面全体に結露させる蒸気発生装置６を設け、こ
の蒸気発生装置６によって結露された測定試料５の表面
に対して傾斜角度を持った光軸の照射光を照射させる光
源８および測定試料５の表面に対向して照射光の照射点
における透過光または反射光の光量を検知するラインセ
ンサ９を設ける。そして、移動テーブル２の移動に伴う
測定試料５の移動によって測定試料５の全面の結露状態
を取り込み、このラインセンサ９からの画像信号を画像
処理装置２０によって画像処理し、モニター２１に表示
することにある。
(57) [Abstract] [Purpose] To provide a solid surface evaluation device capable of knowing the distribution status of cleaning evaluation, surface treatment evaluation, etc. on the entire surface of a measurement sample. [Structure] A steam generator 6 for spraying steam onto the surface of the measurement sample 5 to cause dew condensation on the entire surface of the measurement sample 5 is provided on the carry-in side of a moving table 2 on which the measurement sample 5 is placed and moved. The amount of transmitted light or reflected light at the irradiation point of the irradiation light facing the surface of the light source 8 and the measurement sample 5 which irradiates the irradiation light of the optical axis having an inclination angle with respect to the surface of the measurement sample 5 condensed by A line sensor 9 for detecting Then, the dew condensation state on the entire surface of the measurement sample 5 is taken in by the movement of the measurement sample 5 accompanying the movement of the moving table 2, and the image signal from the line sensor 9 is subjected to image processing by the image processing device 20 and displayed on the monitor 21. It is in.
Description
【０００１】[0001]
この考案は、例えば液晶ガラス、ディスク、半導体ウェハ等の固体表面の洗 浄評価、表面処理評価を行う固体表面評価装置に関する。 The present invention relates to a solid surface evaluation apparatus for performing cleaning evaluation and surface treatment evaluation of solid surfaces such as liquid crystal glass, disks, and semiconductor wafers.
【０００２】[0002]
液晶ガラス、ディスク、半導体ウェハ等を洗浄した後あるいは表面処理した 後、その洗浄度または表面処理効果を評価するための固体表面評価装置が知られ ている。 There is known a solid surface evaluation apparatus for evaluating the degree of cleaning or the surface treatment effect after cleaning liquid crystal glass, disks, semiconductor wafers, or the like or after surface treatment.
【０００３】 固体表面評価装置として、固体表面に対する水滴の濡れる角度、つまり接触角 を測定して表面評価を行う接触角測定方式が知られている。この接触角測定方式 は、測定試料の表面に水滴を接触させ、その水滴の接触角を測定して測定試料の 洗浄度合（表面脱脂）や処理状態を評価するものである。As a solid surface evaluation apparatus, a contact angle measuring method is known in which a wettability angle of a water droplet with respect to a solid surface, that is, a contact angle is measured to evaluate the surface. In this contact angle measurement method, a water drop is brought into contact with the surface of the measurement sample, and the contact angle of the water drop is measured to evaluate the cleaning degree (surface degreasing) and the treatment state of the measurement sample.
【０００４】 例えば、測定試料の洗浄度合を評価する場合には、測定試料の表面に水滴を接 触させ、その水滴の接触角を測定し、接触角が大きい時には油量残が多く、表面 脱脂が不十分であると判断し、接触角が小さくなるつれて油量残が少なくなり、 表面脱脂が行われ、一定の接触角以下であると洗浄が良好に行われていると判断 している。For example, when evaluating the degree of cleaning of a measurement sample, the surface of the measurement sample is contacted with water droplets, the contact angle of the water droplets is measured, and when the contact angle is large, a large amount of oil remains and surface degreasing is performed. Is judged to be insufficient, and as the contact angle decreases, the amount of residual oil decreases, surface degreasing is performed, and if the contact angle is below a certain value, it is judged that the cleaning is being performed well. .
【０００５】[0005]
ところが、前述のように構成された固体表面評価装置は、測定する位置があ る１点での値であり、測定試料全面の洗浄評価、表面処理評価等の分布状況を知 ることができない。また、測定点を増やすには、１点での測定時間がかかるため 、測定試料が大面積化してきている液晶ガラス等の全面について測定を行うには 膨大な時間がかかり実用的でない。 However, the solid surface evaluation apparatus configured as described above is a value at one point where there is a measurement position, and it is not possible to know the distribution status such as cleaning evaluation and surface treatment evaluation of the entire surface of the measurement sample. Further, since it takes a single measuring time to increase the number of measuring points, it takes an enormous amount of time to perform measurement on the entire surface of the liquid crystal glass or the like where the measurement sample is increasing in area, which is not practical.
【０００６】 また、測定時に測定試料に対して多くの液体を付着させるため、測定時間中に 測定試料の表面に与える影響が大きく、また、測定後に付着した液体を回収する のが困難である。Further, since a large amount of liquid adheres to the measurement sample at the time of measurement, it greatly affects the surface of the measurement sample during the measurement time, and it is difficult to collect the adhered liquid after the measurement.
【０００７】 この考案は、前記事情に着目してなされたもので、その目的とするところは、 測定試料全面の洗浄評価、表面処理評価等の分布状況を知ることができ、また測 定試料が大面積であっても短時間に測定することができ、さらに液体が少量で短 時間測定であるので測定試料の表面に対する影響が少ない固体表面評価装置を提 供することにある。The present invention has been made in view of the above circumstances, and its purpose is to be able to know the distribution status of cleaning evaluation, surface treatment evaluation, etc. on the entire surface of the measurement sample, and Since a large area can be measured in a short time and a small amount of liquid can be measured in a short time, the object is to provide a solid surface evaluation device that has little influence on the surface of the measurement sample.
【０００８】[0008]
この考案は、前述した目的を達成するために、測定試料を載置して移動させ る移動テーブルおよび測定試料の表面に蒸気を吹き付けて測定試料の表面全体に 結露させる蒸気発生装置を設けるとともに、この蒸気発生装置によって結露され た前記測定試料の表面に対して傾斜角度を持った光軸の照射光を照射させる光源 を設ける。さらに、前記移動テーブルの試料載置面に対向して前記照射光の照射 点における透過光または反射光の光量を検知し前記移動テーブルの移動により測 定試料の全面の結露状態を取り込むラインセンサを設け、このラインセンサから の画像信号を画像処理装置によって画像処理することにある。 In order to achieve the above-mentioned object, the present invention provides a moving table on which a measurement sample is placed and moved, and a steam generator for spraying steam on the surface of the measurement sample to cause dew condensation on the entire surface of the measurement sample. A light source is provided for irradiating the surface of the measurement sample, which is condensed by the vapor generator, with irradiation light of an optical axis having an inclination angle. Further, a line sensor that faces the sample mounting surface of the moving table, detects the amount of transmitted light or reflected light at the irradiation point of the irradiation light, and captures the dew condensation state of the entire surface of the measured sample by moving the moving table. The image signal from the line sensor is provided for image processing by the image processing device.
【０００９】[0009]
移動する測定試料の表面に蒸気を吹き付けて測定試料の表面全体に結露させ 、その結露された測定試料の表面に対して傾斜角度を持った光軸の照射光を照射 させると、測定試料の表面の汚染されている部分と汚染されていない部分とで照 射光の照射点における透過光または反射光の光量が異なるため、その光量をライ ンセンサによって取り込み、さらに測定試料が移動しているため結露状態を全面 画像として取り込むことができ、この画像信号が画像処理装置によって画像処理 することにより、測定試料全面の表面状態を分布的に評価できる。 When steam is sprayed on the surface of a moving measurement sample to cause dew condensation on the entire surface of the measurement sample, and the condensation light is irradiated on the surface of the measurement sample with an optical axis having an inclination angle. Since the amount of transmitted light or reflected light at the irradiation point of the irradiating light differs between the contaminated part and the uncontaminated part, the light amount is captured by the line sensor, and the measurement sample is moving, so the condensation state Can be captured as an entire surface image, and this image signal is subjected to image processing by an image processing device, whereby the surface condition of the entire surface of the measurement sample can be evaluated in a distributed manner.
【００１０】[0010]
以下、この考案の一実施例を図面に基づいて説明する。 An embodiment of the present invention will be described below with reference to the drawings.
【００１１】 図１は固体表面評価装置を示すもので、１は本体であり、この本体１の上面に は移動テーブル２が設けられている。この移動テーブル２は駆動機構（図示しな い）によって左右方向に往復移動自在であり、中央部には開口部３を有する試料 載置面４が設けられている。FIG. 1 shows a solid surface evaluation apparatus. Reference numeral 1 denotes a main body, and a moving table 2 is provided on the upper surface of the main body 1. The moving table 2 is reciprocally movable in the left-right direction by a drive mechanism (not shown), and a sample mounting surface 4 having an opening 3 is provided at the center thereof.
【００１２】 そして、この試料載置面４には固体表面の洗浄評価、表面処理評価を行うため の例えば液晶ガラス、ディスク、半導体ウェハ等の測定試料５が載置され、移動 テーブル２の移動によって矢印ａ方向に走行するようになっている。Then, a measurement sample 5 such as liquid crystal glass, a disk, a semiconductor wafer for performing cleaning evaluation and surface treatment evaluation of the solid surface is mounted on the sample mounting surface 4, and when the movable table 2 is moved, It runs in the direction of arrow a.
【００１３】 移動テーブル２の一側には蒸気発生装置６が設けられ、搬出側には水滴を回収 する吸気回収装置７が設けられている。さらに、蒸気発生装置６と吸気回収装置 ７との間には測定試料５に向かって光源８およびビデオカメラ等のラインセンサ ９が設けられている。A steam generating device 6 is provided on one side of the moving table 2, and an intake air collecting device 7 for collecting water droplets is provided on the carry-out side. Further, a light source 8 and a line sensor 9 such as a video camera are provided toward the measurement sample 5 between the vapor generation device 6 and the intake air recovery device 7.
【００１４】 前記蒸気発生装置６について説明すると、図２に示すように構成されている。 すなわち、１０は貯水槽であり、この貯水槽１０の底部近傍には給水管１１が接 続され、貯水槽１０の内部に所定量の純度の高い水１２が収容されている。さら に、貯水槽１０の内部にはヒータ１３および給気管１４が設けられ、貯水槽１０ の内部で水蒸気を発生させるように構成されている。The steam generator 6 will be described as shown in FIG. That is, 10 is a water storage tank, a water supply pipe 11 is connected near the bottom of the water storage tank 10, and a predetermined amount of high-purity water 12 is stored in the water storage tank 10. Furthermore, a heater 13 and an air supply pipe 14 are provided inside the water storage tank 10 so that water vapor is generated inside the water storage tank 10.
【００１５】 貯水槽１０の上部は逆Ｕ字状のダクト１５に接続され、このダクト１５によっ て水蒸気を測定試料５の上部まで導き、測定試料５の表面に吹き付けるようにな っている。したがって、このダクト１５は測定試料５の幅方向に長い偏平状に形 成されているとともに、測定試料５の表面に水滴が落下しないようにダクト１５ はヒータ１５ａによって加温されており、ダクト１５の先端部には水蒸気噴出ノ ズル１６が設けられている。The upper part of the water storage tank 10 is connected to an inverted U-shaped duct 15, and the duct 15 guides water vapor to the upper part of the measurement sample 5 and blows it onto the surface of the measurement sample 5. Therefore, the duct 15 is formed in a flat shape that is long in the width direction of the measurement sample 5, and the duct 15 is heated by the heater 15a so that water droplets do not drop on the surface of the measurement sample 5. A water vapor jet nozzle 16 is provided at the tip of the.
【００１６】 また、前記吸気回収装置７は、図１に示すように、測定試料５の表面に対向す る吸気ノズル１７を有した吸気ダクト１８と、この吸気ダクト１８の途中に設け られた吸引ファン１９とから構成されており、この吸気ダクト１８も測定試料５ の幅方向に長い偏平状に形成されている。Further, as shown in FIG. 1, the intake recovery device 7 includes an intake duct 18 having an intake nozzle 17 facing the surface of the measurement sample 5, and a suction provided in the intake duct 18. The intake duct 18 is also formed in a flat shape long in the width direction of the measurement sample 5.
【００１７】 さらに、前記光源８は、測定試料５の表面に対して傾斜角度を持った光軸の照 射光Ｌを照射させるランプであり、また図３に示すように、ラインセンサ９は照 射光Ｌの照射点Ｏに対向して設置されている。このラインセンサ９は測定試料５ の結露状態によって異なる反射光量を検知し、移動する測定試料５により全面画 像信号としてコンピュータの画像処理装置２０に出力し、この画像処理装置２０ によって明るさの濃淡分布をモニター２１に表示するようになっている。 次に、前述のように構成された固体表面評価装置の作用を説明する。Further, the light source 8 is a lamp for irradiating the surface of the measurement sample 5 with the illuminating light L of the optical axis having an inclination angle. As shown in FIG. 3, the line sensor 9 illuminates the illuminating light. It is installed facing the irradiation point O of L. The line sensor 9 detects the amount of reflected light that varies depending on the dew condensation state of the measurement sample 5, and outputs it as a full-screen image signal to the image processing device 20 of the computer by the moving measurement sample 5, and the image processing device 20 changes the brightness level. The distribution is displayed on the monitor 21. Next, the operation of the solid surface evaluation device configured as described above will be described.
【００１８】 移動テーブル２の試料載置面４に洗浄評価、表面処理評価を行うための測定試 料５を載置し、移動テーブル２を駆動機構によって矢印ａ方向に移動させるとと もに、蒸気発生装置６から水蒸気を発生すると、この水蒸気はダクト１５を介し て先端側に導かれ、水蒸気噴出ノズル１６から測定試料５の表面に吹き付けられ る。この場合の水蒸気の吹き付け量は、給気管１４からの給気量によって決定さ れる。A measurement sample 5 for performing cleaning evaluation and surface treatment evaluation is placed on the sample mounting surface 4 of the moving table 2, and the moving table 2 is moved in the direction of arrow a by a drive mechanism. When steam is generated from the steam generator 6, the steam is guided to the tip side through the duct 15 and sprayed from the steam jet nozzle 16 onto the surface of the measurement sample 5. The amount of steam sprayed in this case is determined by the amount of air supplied from the air supply pipe 14.
【００１９】 水蒸気噴出ノズル１６から吹き付けられた水蒸気が測定試料５の表面に当たる と、冷却されて結露する。つまり、測定試料５の表面全面に微小粒子の水滴が均 一にできる。When the water vapor sprayed from the water vapor jet nozzle 16 hits the surface of the measurement sample 5, it is cooled and dewed. That is, water droplets of fine particles can be evenly distributed over the entire surface of the measurement sample 5.
【００２０】 移動テーブル２の移動に伴って測定試料５の結露された部分が光源８からの照 射光Ｌの照射点Ｏに位置すると、照射光Ｌが測定試料５の結露部分に照射され、 照射光Ｌは測定試料５の表面に当たって反射する。このとき、測定試料５の表面 に汚染された部分がなく結露状態が均一であれば、ラインセンサ９が検知する光 量に差がないが、測定試料５が部分的に汚染されていた場合、汚染されていない 部分とに光量の差ができる。つまり、微小粒子の水滴が測定試料５の表面に付着 したとき、その汚染度合いによって接触角が異なるため、反射光量が異なる。When the dewed portion of the measurement sample 5 is located at the irradiation point O of the irradiation light L from the light source 8 with the movement of the moving table 2, the irradiation light L is irradiated to the dewed portion of the measurement sample 5, and the irradiation is performed. The light L strikes the surface of the measurement sample 5 and is reflected. At this time, if there is no contaminated portion on the surface of the measurement sample 5 and the dew condensation state is uniform, there is no difference in the amount of light detected by the line sensor 9, but if the measurement sample 5 is partially contaminated, There is a difference in the amount of light from the uncontaminated area. That is, when water droplets of fine particles adhere to the surface of the measurement sample 5, the amount of reflected light differs because the contact angle varies depending on the degree of contamination.
【００２１】 したがって、ラインセンサ９は照射光Ｌの反射光量を検知することにより、測 定試料５の表面の結露状態を分布的に検知することができ、移動する測定試料５ により全面画像信号として検知し、その検知信号をコンピュータの画像処理装置 ２０に入力することにより、画像処理装置２０は明るさの濃淡分布をモニター２ １に表示する。Therefore, the line sensor 9 can detect the dew condensation state on the surface of the measurement sample 5 in a distributed manner by detecting the amount of reflected light of the irradiation light L, and the moving measurement sample 5 produces a full-face image signal. By detecting and inputting the detection signal to the image processing apparatus 20 of the computer, the image processing apparatus 20 displays the light and shade distribution on the monitor 21.
【００２２】 移動テーブル２の移動に伴って測定試料５が光源８からの照射光Ｌの照射点Ｏ を通過し、吸気回収装置７の吸気ノズル１７に対向する位置に到達すると、吸気 ノズル１７からの吸気力によって測定試料５の表面の結露水は吸気ダクト１８に 吸引されて回収される。したがって、測定試料５の表面に結露水が付着したまま に放置されることはなく、液体による測定試料５への影響を低減できる。When the measurement sample 5 passes through the irradiation point O 2 of the irradiation light L from the light source 8 with the movement of the moving table 2 and reaches the position facing the intake nozzle 17 of the intake recovery device 7, the measurement sample 5 is discharged from the intake nozzle 17. The condensed water on the surface of the measurement sample 5 is sucked into the suction duct 18 and collected by the suction force. Therefore, the dew condensation water is not left on the surface of the measurement sample 5 and the influence of the liquid on the measurement sample 5 can be reduced.
【００２３】 なお、前記一実施例においては、移動テーブル２の上方に光源８を設け、照射 光Ｌを測定試料５の表面に照射し、その照射点Ｏからの反射光量をラインセンサ ９によって検知しているが、測定試料５が透明または透光性を有する材料の場合 には移動テーブル２の下方に光源を設け、照射光Ｌを測定試料５の裏面に照射し 、その照射点Ｏからの透過光量をラインセンサ９によって検知するようにしても よい。In the above embodiment, the light source 8 is provided above the moving table 2, the surface of the measurement sample 5 is irradiated with the irradiation light L, and the amount of reflected light from the irradiation point O is detected by the line sensor 9. However, when the measurement sample 5 is a transparent or translucent material, a light source is provided below the moving table 2 to irradiate the back surface of the measurement sample 5 with the irradiation light L, and the irradiation point O The amount of transmitted light may be detected by the line sensor 9.
【００２４】 また、吸気回収装置７を設け、吸気ノズル１７からの吸気力によって測定試料 ５の表面の結露水を吸気ダクト１８に吸引して回収しているが、測定試料５が結 露水の付着に影響されない物質であれば吸気回収装置７を設ける必要がない。Further, an intake air collecting device 7 is provided, and the condensed water on the surface of the measurement sample 5 is sucked and collected by the intake duct 18 by the suction force from the intake nozzle 17. If the substance is not affected by the above, it is not necessary to provide the intake air recovery device 7.
【００２５】[0025]
以上説明したように、この考案によれば、搬送する測定試料の表面に蒸気を 吹き付けて測定試料の表面全体に結露させ、その結露された測定試料の表面に対 して照射光を照射させることにより、測定試料の表面の汚染されている部分と汚 染されていない部分との照射光の透過光または反射光の光量の差をラインセンサ によって取り込み、結露状態を全面画像として取り込むようにしたことを特徴と する。 As described above, according to the present invention, vapor is sprayed onto the surface of the conveyed measurement sample to cause dew condensation on the entire surface of the measurement sample, and irradiation light is applied to the dewed surface of the measurement sample. The line sensor captures the difference in the amount of transmitted or reflected light of the irradiation light between the contaminated part and the uncontaminated part of the surface of the measurement sample, and the dew condensation state is captured as an entire image. Is characterized by.
【００２６】 したがって、測定試料全面の洗浄評価、表面処理評価等の分布状況を知ること ができ、また測定試料が大面積であっても短時間に測定することができる。さら に液体が少量で短時間測定であるので測定試料の表面に対する影響が少なく、例 えば液晶ガラス、ディスク、半導体ウェハ等の表面評価装置に好適するものであ る。Therefore, it is possible to know the distribution state of cleaning evaluation, surface treatment evaluation, etc. on the entire surface of the measurement sample, and it is possible to measure in a short time even if the measurement sample has a large area. Furthermore, since the amount of liquid is small and the measurement is performed for a short time, the influence on the surface of the measurement sample is small, and it is suitable for a surface evaluation device such as liquid crystal glass, a disk, a semiconductor wafer, and the like.
【図１】この考案の一実施例に係わる固体表面評価装置
を示す正面図。FIG. 1 is a front view showing a solid surface evaluation apparatus according to an embodiment of the present invention.
【図２】同実施例の蒸気発生装置を示し、（ａ）は断面
図、（ｂ）は（ａ）のｂ−ｂ線に沿う断面図。2A and 2B show the steam generator of the embodiment, wherein FIG. 2A is a sectional view, and FIG. 2B is a sectional view taken along line bb of FIG.
【図３】同実施例のラインセンサの斜視図。FIG. 3 is a perspective view of the line sensor of the same embodiment.
２…移動テーブル、４…試料載置面、５…測定試料、６
…蒸気発生装置、８…光源、９…ラインセンサ、２０…
画像処理装置。2 ... movable table, 4 ... sample mounting surface, 5 ... measurement sample, 6
... Steam generator, 8 ... Light source, 9 ... Line sensor, 20 ...
Image processing device.
Claims (1)
ブルと、この移動テーブルに載置された前記測定試料の
表面に蒸気を吹き付けて測定試料の表面全体に結露させ
る蒸気発生装置と、この蒸気発生装置によって結露され
た前記測定試料の表面に対して傾斜角度を持った光軸の
照射光を照射させる光源と、前記移動テーブルの試料載
置面に対向して設けられ前記照射光の照射点における透
過光または反射光の光量を検知し前記移動テーブルの移
動により測定試料全面の結露状態を取り込むラインセン
サと、このラインセンサからの画像信号を画像処理する
画像処理装置とを具備したことを特徴とする固体表面評
価装置。1. A moving table on which a measurement sample is placed and moved, a steam generator for blowing steam onto the surface of the measurement sample placed on the moving table to cause dew condensation on the entire surface of the measurement sample, and A light source for irradiating the surface of the measurement sample condensed by a vapor generator with irradiation light of an optical axis having an inclination angle, and irradiation of the irradiation light provided so as to face the sample mounting surface of the moving table. A line sensor that detects the amount of transmitted light or reflected light at a point and captures the dew condensation state of the entire measurement sample by moving the moving table; and an image processing device that processes the image signal from the line sensor. Characteristic solid surface evaluation device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20793U JPH0656763U (en) | 1993-01-08 | 1993-01-08 | Solid surface evaluation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20793U JPH0656763U (en) | 1993-01-08 | 1993-01-08 | Solid surface evaluation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0656763U true JPH0656763U (en) | 1994-08-05 |
Family
ID=11467530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20793U Pending JPH0656763U (en) | 1993-01-08 | 1993-01-08 | Solid surface evaluation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0656763U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006189348A (en) * | 2005-01-06 | 2006-07-20 | Ccs Inc | Surface inspection method and surface inspection device |
| CN108871233A (en) * | 2018-07-31 | 2018-11-23 | 苏州天准科技股份有限公司 | A kind of bend glass contour degree detection device and detection method |
| CN109030501A (en) * | 2018-07-31 | 2018-12-18 | 苏州天准科技股份有限公司 | A kind of mobile phone glass AF film surface Defect Detection device and detection method |
| CN110967280A (en) * | 2018-09-28 | 2020-04-07 | 财团法人工业技术研究院 | Surface wettability detection system and surface wettability detection method |
| US11709133B2 (en) | 2018-09-28 | 2023-07-25 | Industrial Technology Research Institute | Solid surface wettability determination method |
-
1993
- 1993-01-08 JP JP20793U patent/JPH0656763U/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006189348A (en) * | 2005-01-06 | 2006-07-20 | Ccs Inc | Surface inspection method and surface inspection device |
| JP4488910B2 (en) * | 2005-01-06 | 2010-06-23 | シーシーエス株式会社 | Surface inspection method and surface inspection apparatus |
| CN108871233A (en) * | 2018-07-31 | 2018-11-23 | 苏州天准科技股份有限公司 | A kind of bend glass contour degree detection device and detection method |
| CN109030501A (en) * | 2018-07-31 | 2018-12-18 | 苏州天准科技股份有限公司 | A kind of mobile phone glass AF film surface Defect Detection device and detection method |
| CN110967280A (en) * | 2018-09-28 | 2020-04-07 | 财团法人工业技术研究院 | Surface wettability detection system and surface wettability detection method |
| US11709133B2 (en) | 2018-09-28 | 2023-07-25 | Industrial Technology Research Institute | Solid surface wettability determination method |
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