JPH0653204B2 - Ultra-fine water droplet manufacturing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to at least 706 million per cubic meter of air,
Preferably 176,570,000 or more, more preferably 353
The present invention relates to an apparatus for producing ultrafine water droplets containing 140,000 or more.

[Conventional technology]

Hospitals, drug manufacturing factories, food manufacturing factories, food refrigerating rooms, laboratories, laboratories, etc. require clean gas that does not contain dust and microbes, and for that purpose, clean air is sent using an air filter. Alternatively, measures are taken such as installing an air curtain at the entrance / exit.

[Problems to be Solved by the Invention]

However, the above method cannot obtain a sufficiently purified gas, and even if an air shower room is used, the objective cannot be sufficiently achieved. Furthermore, as in LSIs, VLSI manufacturing factories, biologics factories, operating rooms, precision machinery cleaning factories, sterile food manufacturing factories, refrigerating rooms, etc., contamination of bacteria and viruses, let alone dust of 0.5μ or less. It is now considered impossible to deliver ultra-clean clean gases on an industrial scale under strict and unacceptable conditions.

Therefore, it is widely desired in various industries to obtain such a highly purified refrigerating room, a room, and a factory, and the present invention has been made to meet the demands of such times.

[Means for Solving the Problems]

The present applicant has conducted earnest research on obtaining an ultra-clean clean gas on an industrial scale, and found that a water droplet admixed with air adsorbs dust mixed in the air to clean the air. Paying attention to the particle size of the water droplets, the particle size is reduced to 0.5 micron or less to form ultra-fine water droplets of 706 million or more per cubic meter of air, preferably 1765.
If 70,000 or more, more preferably 35,314,000 or more is contained in the air, fine dust in the air as well as bacteria, filamentous fungi, spores and even viruses are attached to clean and remove them. It turned out that it can be fungi.
And, in a gas atmosphere in which such ultra-fine water droplets are suspended, not only can the atmosphere be cleaned, but unexpectedly, in the case of ultra-fine water droplets, an object gets wet even though water droplets are present. It was found that the remarkable effect that the phenomenon does not occur is exhibited. As a result of further study, when a normal gas was passed through a fine water droplet suspended gas atmosphere, the normal gas was highly purified to an ultra-clean state, and each of such highly purified gases was We also found that it can be applied directly to rooms, departments, and other relevant parts.

The present invention is an apparatus for producing ultra-fine water droplets having a water injection device and a circulation pipe, wherein the water injection device has a cylindrical portion, an injection pipe, and an outlet pipe, and the cylindrical portion has an inner wall. Is used as a barrier for the jet water flow, the lower part is reduced in diameter to form a conical part, and the upper part has an inlet, the inlet is for feeding air into the cylindrical part, and the injection pipe is a cylinder. At least 30 nozzles are inserted in the center of the part from above and along the longitudinal direction at the peripheral surface, and at least 30 nozzles are provided. The nozzle ejects the jet water flow toward the inner wall of the cylindrical portion. The opening diameter of the nozzle is 0.2 to 8 mm, the distance between the nozzle and the inner wall of the cylinder is 10 to 150 cm, and the outlet pipe is a system for super-fine water droplets generated in the cylinder part. It is a pipe that conveys to the outside, is opened through the inside of the injection pipe into the cylindrical part, and the circulation pipe is It is connected between the lower opening of the conical part of the device and the injection pipe, and has a water tank and a pump, and the water tank is the water supplied to the water injection device and the water discharged from the water injection device. The pump pumps the water in the water tank to the water injection pipe, and jets water from each nozzle at a gauge pressure of 0.3 to 5.5 kg / cm ² , and 1 to 3 / min per nozzle. The water injection device has a wind speed of 15 that is press-fitted into the cylindrical portion from the inlet.
50 m / sec, under air flow 3~3000m ³ / min condition, and air, and a large water droplet particle size was centrifuged including by further dividing the water jets of the following ultra fine water droplets particle size 0.5 microns, It has a function of delivering air containing ultrafine water droplets to the outlet pipe.

[Action]

In the present invention, a large number of, for example, 30 to 1500 diameters of 0.2 to 8 m are provided around the injection pipe at the center of the water injection device.
Nozzles of m, preferably 0.5 to 3 mm are provided. Water is pumped at high pressure, with a gauge pressure of 0.3-5.5 kg /
Water is sprayed from each nozzle in cm ² , preferably 0.5 to 2.5 kg / cm ² , and a large amount of water is sprayed from 1 to 3 minutes per nozzle. Water is 10 to 150 cm from the nozzle
A very large number of ultra-fine water droplets are generated by colliding with a side part inside the separated water injection device, and air is introduced from here through an air introduction pipe at a wind speed of 15 to 50 m / sec and an air volume of 3 to 3000 m.
^{At a} rate of ³ / min, the jet water flow is further split to generate ultra-fine water droplets with a particle size of 0.5 micron or less per cubic meter of 70630,000 or more, preferably 176.57 million or more,
More preferably, air containing 3,531.4 million or more is obtained.

〔Example〕

Next, an embodiment of the device of the present invention is shown in FIGS.
The details will be described.

An evaporation pipe 47 of the refrigeration system is arranged in the cylindrical portion 41 of the water injection device 40. The positional relationship between the evaporation pipe 47 and the nozzle 45 may be completely displaced from each other or may be slightly displaced from each other, and the water from the injection nozzle 45 may be displaced from each other.
7 is arranged so as to be sprayed in a state perpendicular to 7 in an injection state. The nozzle 45 has 30 to 30 along the longitudinal direction of the injection pipe 44 inserted from above in the center of the cylindrical portion 41.
About 1500 nozzles are provided, the diameter is 0.2 to 8 mm, preferably 0.5 to 3 mm, the water has a gauge pressure of 0.3 to 5.5 kg / cm ² , preferably 0.5 to 2.5 kg / cm ² , and the amount of water is 1 nozzle. 1 hit
~ 3 / min injected. 1 from nozzle to sidewall
The length of 0 to 150 cm is not provided. The lower opening of the conical portion 51 of the water injection device is connected to the injection pipe 44 via a circulation pipe line 46, and the circulation pipe line 46 is provided with a filtration device 48, a water tank 49, and a pump 50 in this order. Therefore, the cold water is circulated in the direction of the arrow B, that is, the pump 50, the injection pipe 44, the cylindrical portion 41 of the water injector, the conical portion 51, the filtering device 48, the water tank 49, and the pump 50 in this order. Refrigerant,
Particularly, the high temperature refrigerant (1 ° C. to −5 ° C.) circulates in the evaporation pipe 47 in the direction of arrow C. Air passes through the air inlet pipe and is indicated by arrow A
In accordance with the direction of, the water is sent into the water injection device through the inlet 42 opened at the upper part of the cylindrical portion 41, contains fine water droplets in the water injection device, and at the same time, is cooled to become the target air, and the injection pipe 44 It is used for the respective purpose through an outlet pipe 43 which is opened in the cylindrical portion 41. From a nozzle 45 provided on the injection pipe 44, a gauge pressure of 0.3 to
5.5 kg / cm ^2, preferably by water jet in 0.5~2.5kg / cm ^2, when allowed to impinge on the side wall of the evaporation tube 47 and / or cylindrical portion 41 of a refrigeration apparatus away 10~150cm from the nozzle (E), Ultra-fine water droplets are generated (with it, the evaporation tube 4
The water flow that collided with 7 exchanges heat with the refrigerant passing through the pipe 47 and is cooled), and the water droplets are cooled. The air volume in such an atmosphere is 3 at a wind speed of 15 to 50 m / sec.
When passing through the air according to the arrow A at a standard of ˜3000 m ³ / min, this air contains ultrafine water droplets and exchanges heat with the cooled water droplets to be cooled by itself.
70 microscopic water droplets of 5 microns or less per cubic meter
Air containing 630,000 or more, preferably 1,765,700,000 or more, and more preferably 3,353,140,000 or more. At this time, the particles substantially larger than 0.5 micron are separated by the centrifugal action due to the circulation of air. If necessary, water can be removed by cyclone.

FIG. 4 is a schematic diagram showing a total system for actually applying the method of the present invention to a mass production plant of 64 kilobit RAM. As described above, the ultrafine water droplet suspended air produced by the water injection device 40 is sent to the droplet removing cyclone 50 according to the arrow A. That is, the gas emitted from 40 enters inside the cyclone through an inlet tangentially provided on the side wall of the dewatering cyclone 50, and while circulating in the cyclone 50, extra water droplets and large water droplets are removed to obtain 0.5 μ or less. The ultra-fine water droplets are prepared into a gas in which 90% or more of them are suspended and taken out from an outlet pipe provided in the center of the cyclone 50.

The ultrafine water droplet floating air thus taken out is sent to the air shower room 60 through a pipe P having a filter F to remove air particles substantially larger than 0.5 micron, and further to an adjacent ultraclean room. 70
Wash people working in. Further, a part of the air floating in the ultra-fine water droplets is directly sent to the ultra-clean room 70, and purified air containing no dust is sent into the room and is also used for cleaning the silicon plate used for the LSI. The air used in the ultra clean room 70 is taken out from the ultra clean room 70, returned to the water injection device 40 through the pipe P and the fan F, and this cycle is repeated. According to this method, it was found that the ultra-clean room was kept in an ultra-clean state in which there were only less than 35 dust particles of 0.5 μ or more in a space of 1 cubic meter. Incidentally, in an ordinary factory, hundreds of thousands of dusts are floating, and it should be understood from this that how the device of the present invention is excellent.

Further, as shown in FIG. 5 and FIG. 6, a heat exchanger 100 is provided next to the dewatering cyclone 50, and the ultrafine water droplet suspended gas is passed through the heat exchanger 100 to raise the temperature of the air to the optimum temperature. It is possible. The heat exchanger 100 will be described next. That is, an air discharge pipe 105 is vertically provided at the center of the can body 101 and communicates with an air conduit 105 ′ provided outside the can body 101. Therefore, the air intake pipe 10
The air from 4 reaches the lower part while swirling in the can body 101, rises from the lower part of the air discharge pipe 105, and moves in the arrow direction. Also, inside the can body 101, an outer pipe 106 is provided.
And an inner pipe 107 are provided, and each pipe 106, 10
The lower end of 7 communicates with a pump 108 provided outside the can 101 to allow hot water or cold water to flow therethrough, and upper drain ports 109, 110.
More drained. A large number of water outlets 111a, 111b, ... Of the wash water pipe 111 are provided in the upper and lower portions of the can body 101, which are desired above or below the upper and lower rows of the pipes 106 and 107. The cleaning water can be jetted toward the inner surface of the nozzle and the outer surface of the air discharge pipe 105. Also, below the cone 102,
A drain pipe 112 'is provided so that the cleaning water in the can or the drain by cooling the gas can be discharged.
Therefore, the air from the air intake 104 separates dust and the like in the can 101 due to the cyclone effect, and the pipes 106, 107
The air that has been heated or cooled to an appropriate temperature by the above and has reached an appropriate temperature is sent out through the air exhaust pipe 105. Further, the separated dust or the like is passed through the washing water pipe 111, and the nozzles 111a, 111b ...
It can be washed away more by spraying more water.

Since the air treated in this way is almost completely suspended in a large amount of ultra-fine water droplets of 0.5 microns or less,
It can be used to clean everything by treating the room.

〔The invention's effect〕

The ultrafine water droplets of 0.5 micron or less produced in the apparatus of the present invention have extremely low surface tension, and are attached to an object, or the ultrafine water droplets easily adhere to dust floating in the air, and the ultrafine water droplets are mutually separated. Collected and enlarged, the mass is remarkably increased, and dust is removed together with the blast. In addition, because ultra-fine water droplets are used, not only extremely fine dust but also bacteria and viruses can be removed, and the indoor and physical effects can be cleaned effectively. To be done. The virus was conventionally removed with an air filter or the like, but it was impossible to remove it sufficiently with an air filter because the virus was only 0.5 μ to 0.01 μ in size. Therefore, if the room of the present invention is used to clean the room, the number of cases of actually catching a cold is extremely reduced, and it is very suitable for use in hospitals, pharmacies, laboratories, maternity hospitals and the like.

Further, according to the device of the present invention, because of the feature that it is possible to eliminate miscellaneous bacteria, in the food manufacturing plant, cleaning of food,
It can be used for washing equipment, for example, it is very suitable for thawing frozen meat, for storing salads and vegetables, fresh fish, meat, etc. used in grocery stores, supermarkets, etc. Due to this, raw ham whose production was restricted can also be freely produced.

[Brief description of drawings]

FIG. 1 shows an apparatus for producing ultra-fine water droplets,
2 is a cross-sectional view of the upper portion of the apparatus shown in FIG. 1, FIG. 3 is a sectional view of the apparatus shown in FIG. 1 when the central portion is cut, and FIG. 4 is an actual semiconductor manufacturing process. It is a diagram schematically showing a total system when applied in a factory. Further, FIG. 5 is a view showing a heat exchanger which can be attached after the ultra-fine water droplet producing apparatus, and FIG. 6 is an upper transverse sectional view thereof. 40 ... Water injection device 45 ... Nozzle 43 ... Ultra fine water droplet floating gas outlet pipe 50 ... Droplet cyclone 60 ... Air shower room 70 ... Ultra clean room 100 ... Heat exchanger

Claims (1)

[Claims] 1. An apparatus for producing ultra-fine water droplets having a water injection device and a circulation pipe, wherein the water injection device has a cylindrical portion, an injection pipe, and an outlet pipe, and the cylindrical portion comprises: It is a cylinder whose inner wall is a barrier for jet water flow, the lower part is reduced in diameter to form a conical part, and the upper part has an inlet, the inlet is for sending air into the cylindrical part, and the injection pipe is It is inserted into the center of the cylinder from above and has at least 30 nozzles along the longitudinal direction at important points on its peripheral surface. The nozzle ejects a jet water flow toward the inner wall of the cylinder. The nozzle is opened at right angles to the axis of the tube, the diameter of the nozzle opening is 0.2 to 8 mm, the distance between the nozzle and the inner wall of the cylinder is 10 to 150 cm, and the outlet pipe collects the ultra-fine water droplets generated in the cylindrical portion. It is a pipe that conveys to the outside of the system, is opened through the inside of the injection pipe into the cylindrical part, and the circulation pipe is It is connected between the lower opening of the conical part of the injection device and the injection pipe, and has a water tank and a pump, and the water tank is the water supplied to the water injection device and discharged from the water injection device. It is for filling water, and the pump pumps the water in the water tank to the water injection pipe, and the gauge pressure is 0.3 to 5.5 kg / cm ² from each nozzle, and the water is 1 to 3 / min per nozzle. The water injection device is designed to pump the amount necessary for jetting, and the water injection device has a wind speed of 15
Under the conditions of -50 m / sec and air volume of 3-3000 m ³ / min, the jet water flow is further split to separate air containing ultrafine water droplets with a particle size of 0.5 micron or less and water droplets with a large particle size by centrifugal separation. An apparatus for producing ultra-fine water droplets having a function of delivering air containing ultra-fine water droplets to an outlet pipe.