JPS6268516A - Apparatus for producing ultrafine water droplets - Google Patents

Abstract

PURPOSE:To obtain an apparatus capable of producing air containing a large number of ultrafine water droplets with a diameter of less than 0.5mum, by providing in the central part of a water-spraying device a great number of nozzles having a diameter of 0.2-8mm through which water having gage pressure of 0.3-5.5kg/cm is sprayed. CONSTITUTION:A water spray pipe 44 is provided in the central part of a water-spraying device 40, a large number of water spraying nozzles 45 being provided on said water spray pipe. The 30-1,500 nozzles 45 are provided, the diameter thereof being in the range of 0.2-8mm preferably 0.5-3mm; while water having gage pressure of 0.3-5.5kg/cm preferably 0.5-2.5kg/cm is sprayed against a wall 10-150cm away. Air is introduced from an inlet 42, where air containing ultrafine water droplets with a particle diameter of less than 0.5mum of more than 2 millions in number pre cubic foot of air is produced and discharged through outlet pipe 43. And water is led in a direction of an arrow B, i.e., from a cone part 51 to a water tank 49 and then passed through a circulation pipe 46 by means of a pump 50 to be sprayed again.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an apparatus for producing ultrafine water droplets containing at least 2 million, preferably at least 5 million, more preferably at least 10 million per cubic foot of air.

Hospitals, drug manufacturing plants, food manufacturing plants, food refrigerated rooms, laboratories, laboratories, etc. require clean air that does not contain dust or microorganisms, and for this purpose air filters are used to supply purified air. Measures are being taken such as installing air curtains at entrances and exits. However, with such a method, it is not possible to obtain sufficiently purified gas, and even if an air shower room is used, the purpose cannot be fully achieved.

Even more so, LS1. Ultra LS [9] No contamination by bacteria or viruses, such as manufacturing factories, biolayer agent manufacturing factories, operating rooms, precision machinery cleaning factories, sterile food manufacturing factories, refrigerator rooms, etc.
．． It is currently considered impossible to supply ultra-clean gas on an industrial scale under strict conditions that do not allow the inclusion of dust of less than 5 microns.

However, it is widely desired in various industries to obtain refrigerating rooms, rooms, and factories that are highly purified in this way, and the present invention was made to meet the demands of this era.

Therefore, we conducted intensive research and focused on the phenomenon that water droplets mixed in the air adsorb dust mixed in the air and purify the air. If the air is supplied with ultra-fine water droplets of micron size or less, at least 2 million, preferably at least 5 million, and more preferably at least 10 million per cubic foot of air, it will eliminate microscopic dust and bacteria in the air. , filamentous fungi,
It has been found that not only spores but also viruses can be attached to the product and can be cleaned and sterilized. In a gaseous atmosphere in which such ultra-fine water droplets are suspended, not only can the atmosphere be purified, but also, quite unexpectedly, objects can become wet despite the presence of ultra-fine water droplets. It has been found that this phenomenon has a remarkable effect in that this phenomenon does not occur.

As a result of further investigation, we found that when normal gas was passed through a gas atmosphere containing suspended fine water droplets, the normal gas was highly purified to an ultra-clean state. We also found that it can be applied directly to rooms, departments, and other related areas.

The present invention provides a gauge pressure of 0.3 to 0.3 mm from a large number of nozzles with a diameter of 0.2 to 8 ffll+, preferably 0.5 to 3 mm, provided around a cylindrical injection tube installed in the center of a water injection device.
5゜5kg/aJ, preferably 0.5-2.5kg/c
Water is injected at a speed of 10 to 150 m2 and collides with the side of the water injection device that is 10 to 150 m2 away from the nozzle to generate an extremely large number of ultra-fine water droplets. This is an ultrafine water droplet producing apparatus characterized in that air containing the following ultrafine water droplets per cubic foot of air is 2 million or more, preferably 5 million or more, more preferably 10 million or more.

That is, in the present invention, a large number of pipes, for example 30 to 1500 pipes, are arranged around the cylindrical injection pipe at the center of the water injection device.
A nozzle with a diameter of 0.2 to 8 mm, preferably 0.5 to 3 mm, is provided. The water is pumped at high pressure, and the water is injected from each nozzle at a gauge pressure of 0.3-5.5 kg/d, preferably 0.5-2.5 kg/a#, but the amount of water is 1 A large amount of water of 1 to 3 QI is injected per nozzle. The water collides with the side of the water injection device 10 to 150 countries away from the nozzle to generate an extremely large number of ultra-fine water droplets, where the air is blown through an air introduction pipe at a wind speed of 15 to 50 m. The air volume is about 3 to 3000n? /
-i- as a guideline, to obtain air containing at least 2 million, preferably at least 5 million, more preferably at least 10 million, ultrafine water droplets with a particle size of 0.5 microns or less per cubic foot. be.

Next, embodiments of the device of the present invention are shown in FIGS. 1 to 6,
Explain in detail.

In the cylindrical portion 41 of the water injection device 40, an evaporation pipe 47 of the refrigeration device is arranged. The positional relationship between the evaporation tube 47 and the nozzle 45 may be completely shifted from each other.

Alternatively, it may be slightly shifted, and the water from the injection nozzle 45 is arranged so as to be sprayed perpendicularly to the evaporation tube 47. Approximately 30 to 1,500 nozzles are provided, and the diameter is 0.2 to 8 m, preferably 0.5 to 8 m.
3 pus, water gauge pressure 0.3-5.5 kg/aJ.

Preferably 0.5 to 2.5 kg/cm2, and the amount of water is 1
It is sprayed at a rate of 1 to 3 Q/min per nozzle. The distance from the nozzle to the side wall is 10 to 150 a1.

At the lower end of the conical part 51 of the water injection device, a filtration device 48,
A water tank 49 and a pump 50 are provided in this order. Therefore, the cold water flows in the direction of arrow B, that is, the pump 50, the circulation pipe 46, the injection pipe 44, the cylindrical part 41 of the water injection device, and the conical part 5.
1. The water is circulated in the following order: filtration device 48, water tank 49, and pump 50. Refrigerants, especially high temperature refrigerants (1℃~-5℃
) circulates within the evaporation tube 47 in the direction of arrow C. Air passes through the air introduction pipe and enters the inlet 42 in the direction of arrow A.
The air is fed through the water injection device into the water injection device, where it is simultaneously cooled to become the target air, which is used for each purpose through the outlet pipe 43.

A gauge pressure of 0. ．． 3～
5.5kg/aJ, preferably 0.5-2.5kg/-
When water is injected and collided with the evaporation pipe 47 and/or the side wall of the cylindrical part 41 of the refrigeration device, which is 10 to 150 aa away from the nozzle (E), ultrafine water droplets are generated and collide with the evaporation pipe 47. The water stream exchanges heat with the refrigerant passing through this tube 47 and is cooled), and the water droplets are cooled. The air in such an atmosphere has a wind speed of 15 to 50 m,
. 1. Air volume from 3 to 3000 rn'. If the air is allowed to pass according to arrow A as a guideline, this air contains ultrafine water droplets and exchanges heat with the cooled water droplets to cool itself. 2 million or more per foot, preferably 50
The air contains 00,000 or more, more preferably 10,000,000 or more. At this time, particles larger than 0.5 microns are substantially separated by centrifugal action due to air circulation. If necessary, a cyclone can be used to remove water. FIG. 7 is a schematic diagram showing a total system for actually applying the device of the present invention to a 64 kilobit RAM mass production factory. According to the above, the ultrafine water droplets suspended in the air produced by the water injection device are sent to the drip removing cyclone according to arrow A. In other words, the gas coming out of the cyclone enters the inside of the cyclone through an inlet provided in the tangential direction on the side wall of the drip-removing cyclone, and while circulating inside the cyclone, excess water droplets and large water droplets are removed and the gas is reduced to zero.
A gas containing 90% or more of ultra-fine water droplets of 5 microns or less is prepared and taken out from an outlet pipe installed in the center of a cyclone.

The ultrafine water droplets suspended in the air taken out in this way are sent to the same air shower room through a pipe P having a filter F to remove particles larger than 0.5 microns, and further to an adjacent air shower room. Cleaning of people working in ultra-clean room U. In addition, a part of the air floating in the ultrafine water droplets is directly sent to the ultra-clean room U, where purified air containing no dust is introduced into the room and is also used for cleaning silicon plates used in LSIs.

The air used in the ultra-lean room is taken out from there and returned to the water injection device via pipe P and fan F, and this cycle is repeated. According to this method, 1 cubic foot of space in an ultra-clean room has 0.
It was found that the building was kept in an extremely clean state with less than one particle of dust larger than 5 microns. By the way, tens of thousands of pieces of dust are floating in a normal factory, and this also shows how superior the device of the present invention is.

In addition, as shown in Figures 8 and 9, a heat exchanger is installed next to the drip removal cyclone, and by passing gas suspended in ultrafine water droplets through this, it is possible to raise the air to the optimum temperature. It is possible.

The heat exchanger field will be explained next. That is, an air exhaust pipe 105 is provided vertically in the center of the can body 101, and communicates with an air conduit ↓05'- provided outside the can body 101.

Therefore, the air from the air intake pipe 104 reaches the lower part while swirling inside the can body 101, rises from the lower part of the air exhaust pipe 105, and moves in the direction of the arrow. Furthermore, an outer pipe and an inner pipe 107 are provided inside the pipe body 101.
The lower end of each pipe 106, 107 communicates with a pump provided outside the can body 101, allowing hot or cold water to flow through the upper drain port 1.
The water will be drained from 09.110. At the upper and lower parts of the slow detour in the pipe, there are a number of water jets, water spouts, etc. of the washing water pipe Uyu, which can be seen above or below the upper and lower rows of the pipe 107 and the pipe 106. It is designed so that cleaning water can be sprayed towards the user. Further, a one-layer drain pipe is provided below the cone portion 102, so that washing water in the can or drain caused by gas cooling can be drained away. Therefore, the air from the air intake car is separated from dirt by the cyclone effect in the can 101, heated or cooled to an appropriate temperature by the pipes and the slow pipe, and the air at the appropriate temperature is sent out from the air discharge pipe. In addition, the separated garbage is passed through a washing pipe,
It can be washed away by spraying water from the nozzles 1lla and 1llb.

The air treated in this way is almost completely made up of a large amount of ultra-fine water droplets of 0.5 microns or less suspended, so by using this to treat the room, you can clean everything. It is.

The ultra-fine water droplets of 0.5 microns or less produced by the device of the present invention have extremely low surface tension, and can easily adhere to objects.
Ultra-fine water droplets easily attach to dust floating in the air,
Furthermore, these ultra-fine water droplets gather together and become larger, significantly increasing the weight and removing dust with the air blowing. In addition, since ultra-fine water 4 is used, it is possible to remove not only extremely fine dust, but also bacteria and viruses, and the room is effectively cleaned both physically and biologically. It is played. Conventionally, viruses were removed using air filters, etc., but viruses are only 0.5μ to 0.01μ.
Because of its size, it was impossible to remove it sufficiently with an air filter. Therefore, if the room is cleaned using the device of the present invention, the chances of actually catching a cold will be greatly reduced, making it extremely suitable for use in hospitals, pharmacies, laboratories, maternity hospitals, etc.

In addition, because the device of the present invention has the feature of being able to eliminate bacteria, it can be used in food manufacturing factories to clean food,
It can be used for cleaning equipment, such as thawing frozen meat, preserving salads, vegetables, fresh fish, and meat, etc. It is also extremely suitable for equipment used in grocery stores, supermarkets, etc., and is particularly suitable for use in equipment that is at risk of contamination with bacteria. Raw ham, which previously had restrictions on its production, can now be produced freely.

[Brief explanation of drawings]

FIG. 1 illustrates an ultrafine water droplet manufacturing device.
2 is a cross-sectional view of the upper part of the device shown in FIG. 1, and FIG. 3 is a sectional view taken through the center of the device shown in FIG.
FIG. 4 schematically shows a total system when applied in an actual semiconductor manufacturing factory. Moreover, FIG. 5 is a diagram showing a heat exchanger that can be attached after the ultrafine water droplet production apparatus, and FIG. 6 is a cross-sectional view of the upper part thereof. 40...Water injection device 45...Nozzle 43...Ultra fine water droplet suspended gas outlet pipe 50...Drop removal cyclone 60...Air shower room 70...Ultra clean room 100...Heat Switch agent Patent attorney Door 1) Parent Male No. 1 Figure 4 3

Claims (1)

[Claims] (1) A large number of injection pipes installed around the center of the water injection device have a diameter of 0.2 to 8 mm, preferably 0.5 mm.
Gauge pressure 0.3-5.5kg/c from ~3mm nozzle
Water is injected at m^2, preferably 0.5 to 2.5 kg/cm^2, and is caused to collide with the side of the water injection device at a distance of 10 to 150 cm from the nozzle to generate an extremely large number of ultrafine water droplets. Air is sent here from the air introduction pipe, and the particle size is 0.
．． 2 ultra-fine water droplets of 5 microns or less per cubic foot
An apparatus for producing ultrafine water droplets, characterized in that air containing at least 1 million, preferably at least 5 million, and more preferably at least 10 million is obtained.