JPH0652140B2 - He gas purification equipment - Google Patents
He gas purification equipmentInfo
- Publication number
- JPH0652140B2 JPH0652140B2 JP62160928A JP16092887A JPH0652140B2 JP H0652140 B2 JPH0652140 B2 JP H0652140B2 JP 62160928 A JP62160928 A JP 62160928A JP 16092887 A JP16092887 A JP 16092887A JP H0652140 B2 JPH0652140 B2 JP H0652140B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- stage
- adsorber
- heat exchanger
- refrigerator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/08—Separating gaseous impurities from gases or gaseous mixtures or from liquefied gases or liquefied gaseous mixtures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2205/00—Processes or apparatus using other separation and/or other processing means
- F25J2205/02—Processes or apparatus using other separation and/or other processing means using simple phase separation in a vessel or drum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2205/00—Processes or apparatus using other separation and/or other processing means
- F25J2205/20—Processes or apparatus using other separation and/or other processing means using solidification of components
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2205/00—Processes or apparatus using other separation and/or other processing means
- F25J2205/40—Processes or apparatus using other separation and/or other processing means using hybrid system, i.e. combining cryogenic and non-cryogenic separation techniques
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2205/00—Processes or apparatus using other separation and/or other processing means
- F25J2205/60—Processes or apparatus using other separation and/or other processing means using adsorption on solid adsorbents, e.g. by temperature-swing adsorption [TSA] at the hot or cold end
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2205/00—Processes or apparatus using other separation and/or other processing means
- F25J2205/84—Processes or apparatus using other separation and/or other processing means using filter
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2215/00—Processes characterised by the type or other details of the product stream
- F25J2215/10—Hydrogen
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2215/00—Processes characterised by the type or other details of the product stream
- F25J2215/30—Helium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2215/00—Processes characterised by the type or other details of the product stream
- F25J2215/32—Neon
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2270/00—Refrigeration techniques used
- F25J2270/90—External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Separation By Low-Temperature Treatments (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明はHeガス精製装置の改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an improvement of a He gas purification apparatus.
（従来技術） 従来の深冷式Heガス精製器は、第２図に示す如く真空断
熱容器１０内に収納された液体窒素容器１７内に熱交換
器２、気液分離フイルタ３、吸着器４等を納め、液体窒
素ＬN2で冷却し、100kg／cm2Ｇ以上の高圧力で運転され
ていた。従って液体窒素の入手および液体窒素の補給、
精製器再生時の液体窒素の排出の必要性、高圧力使用の
ための設備管理の必要性等の諸問題があった。(Prior Art) As shown in FIG. 2, a conventional deep-cooled He gas purifier has a heat exchanger 2, a gas-liquid separation filter 3, and an adsorber 4 in a liquid nitrogen container 17 housed in a vacuum heat insulating container 10. It was cooled by liquid nitrogen LN 2 and operated at a high pressure of 100 kg / cm 2 G or more. Therefore, obtaining liquid nitrogen and replenishing liquid nitrogen,
There were various problems such as the necessity of discharging liquid nitrogen when regenerating the purifier and the necessity of facility management for using high pressure.
（発明により解決しようとする問題点及び目的） 従来型Heガス精製器の問題点を改良し、性能の向上、省
力化、安全性並びに操作性の向上等を図ることを目的と
するものである。(Problems and Objectives to be Solved by the Invention) The objective is to improve the conventional He gas purifier by improving the problems, improving performance, saving labor, and improving safety and operability. .
（発明による解決手段） 真空断熱容器内に第１段熱交換器、第２段熱交換器並び
に蓄冷式He冷凍機を収納し、該蓄冷式He冷凍機の第１段
熱負荷フランジに気液分離フイルタと第１段吸着器を、
又蓄冷式He冷凍機の第２段熱負荷フランジに第２段吸着
器を設け、真空断熱容器外から流入した不純ガスを第１
段熱交換器から気液分離フイルタ、第１段吸着器、第２
段熱交換器、第２段吸着器を経て取出すようにした。(Solution by the Invention) A first stage heat exchanger, a second stage heat exchanger, and a regenerator He refrigerator are housed in a vacuum heat insulation container, and gas-liquid is placed on a first stage heat load flange of the regenerator He refrigerator. Separation filter and first stage adsorber
Also, a second-stage adsorber is installed on the second-stage heat load flange of the cold storage He refrigerator, and the impure gas that has flowed in from the outside of the vacuum insulation container becomes the first
Stage heat exchanger to gas-liquid separation filter, first stage adsorber, second stage
It was taken out through the stage heat exchanger and the second stage adsorber.
（実施例） 第１図に基いて説明する。８はギフォード・マクマホン
サイクル冷凍機（以下Ｇ−Ｍ冷凍機という）で、該Ｇ−
Ｍ冷凍機８の第１段熱負荷フランジ９に気液分離フイル
タ３と第１段吸着器４が、又第２段熱負荷フランジ9aに
第２段吸着器５が取付けられている。気液分離フイルタ
３の上部に第１段熱交換器２が、又第２段吸着器５の下
部に第２段熱交換器2aが取付けられている。これらは多
重層断熱材(SI)を巻付けられて真空断熱容器１０内に納
められている。(Example) It demonstrates based on FIG. Reference numeral 8 is a Gifford McMahon cycle refrigerator (hereinafter referred to as GM refrigerator).
The gas-liquid separation filter 3 and the first stage adsorber 4 are attached to the first stage heat load flange 9 of the M refrigerator 8, and the second stage adsorber 5 is attached to the second stage heat load flange 9a. The first stage heat exchanger 2 is attached to the upper part of the gas-liquid separation filter 3, and the second stage heat exchanger 2a is attached to the lower part of the second stage adsorber 5. These are wrapped in a multi-layered heat insulating material (SI) and housed in a vacuum heat insulating container 10.
１は精製ガス入口弁で熱交換器２を経て気液分離フイル
タ３に通ずる配管に装置されている。７は液体排出弁で
気液分離フイルタ３の下部に設けられた液体排出管7aに
設けられている。６は圧力調整器で第２段吸着器５から
第２段熱交換器2a及び第１段熱交換器２を通る配管に設
けられている。１２は気液分離フイルタ３、吸着器４，
５に設けられた電熱ヒータ、１１はシールオフバルブ、
１３は熱負荷フランジ９に設けた温度計である。Reference numeral 1 is a purified gas inlet valve, which is installed in a pipe communicating with a gas-liquid separation filter 3 via a heat exchanger 2. A liquid discharge valve 7 is provided in a liquid discharge pipe 7a provided below the gas-liquid separation filter 3. Reference numeral 6 denotes a pressure regulator which is provided in a pipe passing from the second-stage adsorber 5 to the second-stage heat exchanger 2a and the first-stage heat exchanger 2. 12 is a gas-liquid separation filter 3, an adsorber 4,
5 is an electric heater, 11 is a seal-off valve,
Reference numeral 13 is a thermometer provided on the heat load flange 9.
以上で明らかな通り、本考案においては第２図の従来型
ガス精製器に見られたような液体窒素容器１７がない。
従ってＧ−Ｍ冷凍機によって第１段吸着器４と第２段吸
着器５の温度を液体窒素温度７７Ｋより低くすることが
できるようになっている。As is clear from the above, the present invention does not have the liquid nitrogen container 17 as found in the conventional gas purifier of FIG.
Therefore, the temperature of the first stage adsorber 4 and the second stage adsorber 5 can be made lower than the liquid nitrogen temperature 77K by the GM refrigerator.
以上本発明はHe冷凍機、液化機用として発明したもので
あるが、第３図に示すように１段He冷凍機8aを用いれ
ば、Heガスの他H2，Neガス用の精製器としても使用する
ことができる。As described above, the present invention was invented for a He refrigerator and a liquefier, but if a one-stage He refrigerator 8a is used as shown in FIG. 3, it can be used as a purifier for H 2 and Ne gas in addition to He gas. Can also be used.
又吸着器を電熱ヒータ１２で温度コントロールすればH
e，H2,Ne以外の沸点の高いガス用としても使用すること
ができる。If the temperature of the adsorber is controlled by the electric heater 12, H
It can also be used for gases with a high boiling point other than e, H 2 , and Ne.
（作用） シールオフバルブ１１より真空度１×１０-5Torr以上に
真空断熱容器１０内を排気して、精製回路のHeガス置換
を常温で充分行ない、一般購入のHeガスを約９kg/cm2Ｇ
封入し、精製ガス入口弁１と圧力調整器６を閉じた状態
でＧ−Ｍ冷凍機８を起動する。数時間後第１段と第２段
の熱負荷フランジ９，9aを介して気液分離フイルタ３、
吸着器４及び２段吸着器５が冷却され、第１断熱負荷フ
ランジ９の温度を測定するための温度計１３が６５Ｋに
なると、精製ガス入口弁１を開いて不純Heガスを流入さ
せ、圧力調整器６を9.0〜9.9kg／cm2Ｇに調整する。精
製ガス入口弁１より流入した不純Heガスは第１段熱交換
器２の高温側を通り、低温側と熱交換して不純物H2O,
N2,O2,ＣＯ,CO2等の一部は液化または固化粉体化して気
液分離フイルタ３に入る。気液分離フイルタ３で分離さ
れた一部の粉体を含む液体は気液分離フイルタ３の下部
に溜り、液体排出管7aより液体排出弁７を通って大気側
へ排出させる。(Operation) The inside of the vacuum insulation container 10 is evacuated from the seal-off valve 11 to a degree of vacuum of 1 × 10 −5 Torr or more, and the He gas in the refining circuit is sufficiently replaced at room temperature. 2 G
After enclosing, the purified gas inlet valve 1 and the pressure regulator 6 are closed, and the GM refrigerator 8 is started. After a few hours, the gas-liquid separation filter 3, via the first and second stage heat load flanges 9 and 9a,
When the adsorber 4 and the two-stage adsorber 5 are cooled and the thermometer 13 for measuring the temperature of the first adiabatic load flange 9 reaches 65 K, the purified gas inlet valve 1 is opened to allow impure He gas to flow in, and Adjust the adjuster 6 to 9.0 to 9.9 kg / cm 2 G. The impure He gas flowing in from the purified gas inlet valve 1 passes through the high temperature side of the first stage heat exchanger 2 and exchanges heat with the low temperature side to obtain impurities H 2 O,
A part of N 2 , O 2 , CO, CO 2 and the like is liquefied or solidified into powder and enters the gas-liquid separation filter 3. The liquid containing a part of the powder separated by the gas-liquid separation filter 3 collects in the lower part of the gas-liquid separation filter 3 and is discharged from the liquid discharge pipe 7a to the atmosphere side through the liquid discharge valve 7.
一方気液分離フイルタ３の上部フイルタ部で、残りの粉
体が分離除去され吸着器４へ流れる。吸着器４では残り
の不純ガスがほぼ吸着除去され、第２段熱交換器2aの高
温側を通り、低温側と熱交換して約１８ＫのHeガスとな
る。さらに第２段吸着器５でHeガス以外の不純物H2,Ne
を吸着除去し、0.1ppm(V)以下の高純度Heガスとなっ
て、第１段熱交換器２と第２段熱交換器2aの低温側を通
って昇温し、圧力調整器６を通って流出する。On the other hand, in the upper filter part of the gas-liquid separation filter 3, the remaining powder is separated and removed and flows into the adsorber 4. In the adsorber 4, the remaining impure gas is almost adsorbed and removed, passes through the high temperature side of the second stage heat exchanger 2a, and exchanges heat with the low temperature side to become about 18K He gas. Furthermore, in the second stage adsorber 5, impurities H 2 and Ne other than He gas
Is adsorbed and removed, and becomes a high-purity He gas of 0.1 ppm (V) or less, and the temperature is raised through the low temperature side of the first stage heat exchanger 2 and the second stage heat exchanger 2a, and the pressure regulator 6 is set. Spill through.
その後の運転で気液分離フイルタ３のフイルタ部の目づ
まりや第１段及び第２段吸着器４，５の破過をきたした
らＧ−Ｍ冷凍機８を停止して、精製ガス入口弁１と圧力
調整器６を閉じ精製運転を停止する。その後液体排出弁
７よりHeガスを放出して、気液分離フイルタ３、第１段
吸着器４及び第２段吸着器５を電熱ヒータ１２で温度計
１３が常温を示すまで昇温し、系内の不純物を排出して
再生し、次の精製運転に備える。When the filter part of the gas-liquid separation filter 3 is clogged in the subsequent operation or the first and second stage adsorbers 4 and 5 are broken through, the GM refrigerator 8 is stopped and the purified gas inlet valve 1 Then, the pressure regulator 6 is closed and the refining operation is stopped. After that, He gas is released from the liquid discharge valve 7, and the gas-liquid separation filter 3, the first-stage adsorber 4 and the second-stage adsorber 5 are heated by the electric heater 12 until the thermometer 13 shows room temperature, The impurities inside are discharged and regenerated to prepare for the next refining operation.
（効果） 深冷式Heガス精製器に蓄冷式He冷凍機を用いて冷却する
ようにしたので、 １）吸着器の運転温度を液体窒素温度（７７Ｋ）以下に
することが出来るので、ガス圧力が１０kg／cm2Ｇ以下
でも高性能の運転が可能となった。(Effect) Since the cold storage He refrigerator was used to cool the deep-cooling He gas purifier, 1) the operating temperature of the adsorber can be kept below the liquid nitrogen temperature (77K). It is possible to operate with high performance even at 10 kg / cm 2 G or less.
２）液体窒素を使用しないので運転操作が簡単となっ
た。2) Since liquid nitrogen is not used, the operation is simple.
３）より能力の向上を計ろうとするならば従来型の高圧
（１０kg／cm2Ｇ以上）精製も可能である。3) Conventional high-pressure (10 kg / cm 2 G or more) refining is possible if the capacity is to be improved.
第１図は本発明に係るHeガス精製器を示す。 第２図は従来型Heガス精製器を示す。 第３図は１段He冷凍機付Heガス精製器を示す。 図において； １……精製ガス入口弁、２……第１段熱交換器 2a……第２段熱交換器、３……気液分離フイルタ ４……第１段吸着器、５……第２段吸着器 ６……圧力調整器、７……液体排出弁 7a……液体排出管、８……Ｇ−Ｍ冷凍機 ９……第１段熱負荷フランジ 9a……第２段熱負荷フランジ 10……真空断熱容器、11……シールオフバルブ 12……電熱ヒータ、13……温度計 14……液体窒素液面計、15……液体窒素供給弁 16……窒素ガス排出弁、17……液体窒素容器 FIG. 1 shows a He gas purifier according to the present invention. FIG. 2 shows a conventional He gas purifier. FIG. 3 shows a He gas purifier with a one-stage He refrigerator. In the figure; 1 ... Purified gas inlet valve, 2 ... First stage heat exchanger 2a ... Second stage heat exchanger, 3 ... Gas-liquid separation filter 4 ... First stage adsorber, 5 ... 2nd stage adsorber 6 …… Pressure regulator, 7 …… Liquid discharge valve 7a …… Liquid discharge pipe, 8 …… GM refrigerator 9 …… First stage heat load flange 9a …… Second stage heat load flange 10 …… Vacuum insulation container, 11 …… Seal off valve 12 …… Electric heater, 13 …… Thermometer 14 …… Liquid nitrogen level gauge, 15 …… Liquid nitrogen supply valve 16 …… Nitrogen gas discharge valve, 17… … Liquid nitrogen container
Claims (1)
熱交換器並びに蓄冷式He冷凍機を収納し、該蓄冷式He冷
凍機の第１段熱負荷フランジに気液分離フイルタと第１
段吸着器を、又蓄冷式He冷凍機の第２段熱負荷フランジ
に第２段吸着器を設け、真空断熱容器外から流入した不
純ガスを第１段熱交換器から気液分離フイルタ、第１段
吸着器、第２段熱交換器、第２段吸着器を経て取出すよ
うにしたことを特徴とするHeガス精製装置。1. A vacuum heat-insulating container containing a first-stage heat exchanger, a second-stage heat exchanger, and a regenerator He refrigerator, and a gas-liquid separation on a first-stage heat load flange of the regenerator He refrigerator. Filter and first
The second stage adsorber is installed on the second stage heat load flange of the regenerator He refrigerator, and the impure gas flowing from the outside of the vacuum insulation container is separated from the first stage heat exchanger by the gas-liquid separation filter. A He gas purifier characterized in that it is taken out through a first-stage adsorber, a second-stage heat exchanger, and a second-stage adsorber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62160928A JPH0652140B2 (en) | 1987-06-30 | 1987-06-30 | He gas purification equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62160928A JPH0652140B2 (en) | 1987-06-30 | 1987-06-30 | He gas purification equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS646656A JPS646656A (en) | 1989-01-11 |
| JPH0652140B2 true JPH0652140B2 (en) | 1994-07-06 |
Family
ID=15725292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62160928A Expired - Lifetime JPH0652140B2 (en) | 1987-06-30 | 1987-06-30 | He gas purification equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0652140B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0812024B2 (en) * | 1990-02-08 | 1996-02-07 | ダイキン工業株式会社 | Cryogenic refrigerator |
| JP4145673B2 (en) * | 2003-02-03 | 2008-09-03 | 独立行政法人科学技術振興機構 | Circulating liquid helium reliquefaction apparatus with pollutant discharge function, method for discharging pollutants from the apparatus, purifier and transfer tube used in the apparatus |
| US10352617B2 (en) | 2014-09-25 | 2019-07-16 | University Of Zaragoza | Apparatus and method for purifying gases and method of regenerating the same |
-
1987
- 1987-06-30 JP JP62160928A patent/JPH0652140B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS646656A (en) | 1989-01-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |