JPH0650931A - Solid-state ion sensor - Google Patents

Solid-state ion sensor

Info

Publication number
JPH0650931A
JPH0650931A JP4207825A JP20782592A JPH0650931A JP H0650931 A JPH0650931 A JP H0650931A JP 4207825 A JP4207825 A JP 4207825A JP 20782592 A JP20782592 A JP 20782592A JP H0650931 A JPH0650931 A JP H0650931A
Authority
JP
Japan
Prior art keywords
ion
solid
polyvinyl chloride
conductive plate
plate material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4207825A
Other languages
Japanese (ja)
Inventor
Yuji Miyahara
裕二 宮原
Yoshio Watanabe
▲吉▼雄 渡辺
Yasuhisa Shibata
康久 柴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4207825A priority Critical patent/JPH0650931A/en
Publication of JPH0650931A publication Critical patent/JPH0650931A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a compact multi-ion sensor, which can be manufactured in large quantity at a low cost and has the high measuring accuracy, by covering a plate material made of conductive material with polyvinyl chloride, and forming an ion sensitive film on the surface of a slice piece, which is sliced in the vertical direction of a major axis. CONSTITUTION:Polyvinyl chloride 2 is formed so as to cover the surrounding part of a circular conductive plate material 1. The surface of the conductive material 1 is made to be chloride 4 by electrochemical treatment. A signal line 3 is connected to the surface at the opposite side of the chloride 4. Tetrahydrofuran or tetrohydrofuran, wherein ion-sensitive film material is dissolved, is dropped on the surface, on which the chloride 4 is formed. Thus, an ion sensitive film 5 is provided. Both the polyvinyl chloride 2 and the ion sensitive film 5 around the conductive plate material are dissolved into the tetrahydrofuran. Therefore, after the evapolation of the tetrahydrofuran, the unitary body is obtained, and the ion sensitive film 5 is strongly bonded to the conductive plate material 1 and the covering layer of the polychloride 2. Thus, the ion sensitive film 5 is not peeled away, and the stable potential can be obtained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は医療用の血液分析装置の
中に組み込まれるイオンセンサに係り、特に、小型で、
複数項目のセンサを一体化した使い捨て可能な、マルチ
イオンセンサに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ion sensor incorporated in a blood analyzer for medical use, and more
The present invention relates to a disposable, multi-ion sensor that integrates a plurality of items of sensors.

【0002】[0002]

【従来の技術】フォトリソグラフィ技術を用いて製作さ
れた小型のカリウムイオンセンサがセンサーズ アンド
アクチュエーターズ、11(1987年)第23頁か
ら第36頁(Sensors and Actuators, 11(1986)
pp23−36)に記載されている。このセンサはシリ
コンチップ上に金属などの導電性電極を形成し、導電性
電極上にイオン感応膜を形成して製作されていた。
2. Description of the Related Art A small potassium ion sensor manufactured by using a photolithography technique is disclosed in Sensors and Actuators, 11 (1987), pages 23 to 36 (Sensors and Actuators, 11 (1986)).
pp23-36). This sensor was manufactured by forming a conductive electrode such as a metal on a silicon chip and forming an ion sensitive film on the conductive electrode.

【0003】[0003]

【発明が解決しようとする課題】しかし、従来技術は製
作プロセスが複雑であり、半導体製造装置などの特殊装
置が必要であるため低価格化が困難であった。また、導
電性電極が微小であるため、イオン感応膜形成法は半導
体製作プロセスとの整合性が悪く小型化,集積化が困難
であった。またイオン感応膜と導電性電極との接着性が
悪くセンサが不安定であり、測定精度が悪いという問題
があった。
However, in the prior art, the manufacturing process is complicated and a special device such as a semiconductor manufacturing device is required, so that it is difficult to reduce the cost. Further, since the conductive electrodes are minute, the ion-sensitive film forming method has a poor compatibility with the semiconductor manufacturing process and is difficult to be miniaturized and integrated. In addition, the adhesion between the ion-sensitive film and the conductive electrode is poor, and the sensor is unstable, resulting in poor measurement accuracy.

【0004】本発明は、安価に大量生産可能で測定精度
の高い、小型マルチイオンセンサを提供することにあ
る。
An object of the present invention is to provide a small multi-ion sensor which can be mass-produced at low cost and has high measurement accuracy.

【0005】[0005]

【課題を解決するための手段】上記目的は、導電性材料
の線材にポリ塩化ビニルを被覆し、前記被覆線材を長軸
の垂直方向にスライスし、前記スライス片の表面にイオ
ン感応膜を形成し、さらに前記膜を形成したスライス片
を基板又は流路に設置することにより達成される。
The above object is to coat a wire rod made of a conductive material with polyvinyl chloride, slice the coated wire rod in the direction perpendicular to the major axis, and form an ion-sensitive film on the surface of the sliced piece. In addition, the sliced piece on which the film is formed is placed on a substrate or a channel.

【0006】[0006]

【作用】本発明によれば、イオンセンサ製造におけるポ
リ塩化ビニルの線材への被覆,線材のスライス,スライ
ス片へのイオン感応膜の形成,基板又は流路への設置等
の一連の製作工程は自動化可能であり、大量生産に適し
ており、低価格のセンサを提供することができる。ま
た、本発明のセンサでは導電性電極の周囲をポリ塩化ビ
ニルで被覆してあるので、イオン感応膜被覆ポリ塩化ビ
ニルが強固に接着し、導電性電極との接着性も向上させ
ることができ安定性に優れたイオンセンサを提供するこ
とができる。
According to the present invention, a series of manufacturing steps such as coating polyvinyl chloride on a wire rod, slicing the wire rod, forming an ion-sensitive film on the sliced piece, and setting it on a substrate or a flow channel in the production of an ion sensor are performed. It is possible to provide a low-priced sensor that can be automated, is suitable for mass production. Further, in the sensor of the present invention, since the periphery of the conductive electrode is coated with polyvinyl chloride, the ion-sensitive film-coated polyvinyl chloride firmly adheres, and the adhesiveness with the conductive electrode can be improved and stable. An ion sensor having excellent properties can be provided.

【0007】[0007]

【実施例】図1は本発明の第1の実施例である。厚さ
0.5mm、直径0.5mmの円形導電性板材1の周囲に厚さ
0.2mm のポリ塩化ビニル2を被覆した。導電性板材1
の表面を電気化学的処理により塩化物とし、その面と反
対側の面に信号線3を接続した。
DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a first embodiment of the present invention. A circular conductive plate material 1 having a thickness of 0.5 mm and a diameter of 0.5 mm was coated with polyvinyl chloride 2 having a thickness of 0.2 mm. Conductive plate material 1
The surface of was converted into chloride by electrochemical treatment, and the signal line 3 was connected to the surface opposite to the surface.

【0008】図2は第1の実施例において塩化物4を形
成した表面に、テトラヒドロフランまたはイオン感応膜
材料を溶解させたテトラヒドロフランを滴下して、イオ
ン感応膜5を設けたもので、(a)は断面図、(b)は
斜視図である。導電性板材周囲のポリ塩化ビニル及びイ
オン感応膜はともにテトラヒドロフランに溶解するの
で、テトラヒドロフランが揮発した後は一体となりイオ
ン感応膜が強固に導電性板材及びポリ塩化ビニル被覆層
に接着する。従って、イオン感応膜が剥離せず、安定な
電位を得ることができる。
FIG. 2 shows an ion-sensitive membrane 5 provided by dropping tetrahydrofuran or tetrahydrofuran in which an ion-sensitive membrane material is dissolved onto the surface on which chloride 4 is formed in the first embodiment. Is a cross-sectional view and (b) is a perspective view. Since both the polyvinyl chloride and the ion-sensitive film around the conductive plate material are dissolved in tetrahydrofuran, they become united after the volatilization of tetrahydrofuran, and the ion-sensitive film firmly adheres to the conductive plate material and the polyvinyl chloride coating layer. Therefore, the ion sensitive film is not peeled off, and a stable potential can be obtained.

【0009】図3に本発明の第3の実施例を示す。
(a)が斜視図、(b)が(a)のAA′で切った断面図
である。第2の実施例で示したセンサ素子6をガラスエ
ポキシ基板7上に3個集積化したものである。センサ素
子6を基板上に強固に保持し、試料溶液から導電性板材
の裏面及び信号線を保護するために、基板に凹部8を設
け、その中にセンサ素子6を設置し、エポキシ樹脂9な
どの電気絶縁性,耐水性の優れた接着剤で固定した。ま
た、信号線を基板の裏面から取り出すために凹部に貫通
孔10を形成した。
FIG. 3 shows a third embodiment of the present invention.
(A) is a perspective view and (b) is a sectional view taken along the line AA 'in (a). Three sensor elements 6 shown in the second embodiment are integrated on a glass epoxy substrate 7. In order to firmly hold the sensor element 6 on the substrate and protect the back surface of the conductive plate material and the signal line from the sample solution, the concave portion 8 is provided in the substrate, the sensor element 6 is installed therein, and the epoxy resin 9 or the like is provided. It was fixed with an adhesive with excellent electrical insulation and water resistance. Further, the through hole 10 was formed in the recess for taking out the signal line from the back surface of the substrate.

【0010】図4に本発明の第4の実施例を示す。同図
(a)が斜視図、同図(b)が図(a)のBB′で切っ
た断面図である。ポリ塩化ビニル製直方体11の一対の
面の中央付近に貫通孔12が設けられており試料溶液が
通過する流路となる。流路側面の一部は図(b)に示す
ように削られており孔13があけられている。第2の実
施例で示したセンサ素子6を各孔13にテトラヒドロフ
ランまたはイオン感応膜材料を溶解させたテトラヒドロ
フランを用いて接着し、イオン感応膜が流路の内面の一
部となるように孔を塞ぐ。直方体11の中の温度変化を
小さく抑えるために、直方体11の中にシリコーンゴム
などの熱容量の大きい材料を充填しても良い。
FIG. 4 shows a fourth embodiment of the present invention. 9A is a perspective view, and FIG. 8B is a sectional view taken along line BB 'in FIG. A through hole 12 is provided in the vicinity of the center of a pair of surfaces of the polyvinyl chloride rectangular parallelepiped 11 and serves as a flow path through which the sample solution passes. A part of the side surface of the flow path is cut as shown in FIG. The sensor element 6 shown in the second embodiment is adhered to each hole 13 using tetrahydrofuran or tetrahydrofuran in which an ion sensitive membrane material is dissolved, and the holes are formed so that the ion sensitive membrane becomes a part of the inner surface of the flow channel. Close up. In order to suppress the temperature change in the rectangular parallelepiped 11 to be small, the rectangular parallelepiped 11 may be filled with a material having a large heat capacity such as silicone rubber.

【0011】第3及び第4の実施例で示したように、第
2の実施例を複数個集積化することにより使い勝手の良
い低価格なマルチイオンセンサを提供することができ
る。
As shown in the third and fourth embodiments, by integrating a plurality of the second embodiments, it is possible to provide a low cost multi-ion sensor which is easy to use.

【0012】図5に本発明のセンサ素子の製作法の一例
を示す。直径0.5mm の導電性線材14をポリ塩化ビニ
ルを溶解させたテトラヒドロフランの中に浸漬し、引き
上げた後、乾燥させポリ塩化ビニルの膜を表面に形成す
る。所望のポリ塩化ビニルの膜厚が得られないときは浸
漬,乾燥を所定回数繰り返す。つぎにポリ塩化ビニルで
被覆した導電性線材15を0.5mm の厚さにスライスす
る。良好な厚さの再現性及びスライスした面の平坦性を
得るためには、シリコンチップ等の切断に使用されてい
るダイシングソ−等を用いてスライスすることが有効で
ある。スライス片の一方の面に信号取り出し線を取り付
け、白金を対極として塩化カリウム水溶液中で電気化学
処理を行い導電性板材の表面にその塩化物を形成する。
その後テトラヒドロフラン等でイオン感応膜を塩化物表
面に接着する。
FIG. 5 shows an example of a method of manufacturing the sensor element of the present invention. A conductive wire 14 having a diameter of 0.5 mm is dipped in tetrahydrofuran in which polyvinyl chloride is dissolved, pulled up, and dried to form a polyvinyl chloride film on the surface. When the desired film thickness of polyvinyl chloride cannot be obtained, dipping and drying are repeated a predetermined number of times. Next, the conductive wire 15 coated with polyvinyl chloride is sliced to a thickness of 0.5 mm. In order to obtain good thickness reproducibility and flatness of the sliced surface, it is effective to slice using a dicing saw or the like used for cutting a silicon chip or the like. A signal extraction line is attached to one surface of the sliced piece, and an electrochemical treatment is performed in a potassium chloride aqueous solution with platinum as a counter electrode to form the chloride on the surface of the conductive plate material.
After that, the ion sensitive membrane is adhered to the chloride surface with tetrahydrofuran or the like.

【0013】図6に本発明を評価する測定系を示す。こ
の測定系において、本発明の第4の実施例に示した固体
イオンセンサを評価した。
FIG. 6 shows a measuring system for evaluating the present invention. In this measurement system, the solid-state ion sensor shown in the fourth embodiment of the present invention was evaluated.

【0014】標準液16,標準液17を切り替えバルブ
18を介してしごきポンプ19により固体イオンセンサ
20に導入し、廃液ボトル21に廃棄する。血液などの
試料はシリンジ22で流路に導入する。固体イオンセン
サの下流に設けた参照電極23と各イオンセンサの電位
差を増幅器24で計測し、記録機25に記録する。
The standard solution 16 and the standard solution 17 are introduced into the solid ion sensor 20 by the squeezing pump 19 through the switching valve 18 and discarded in the waste solution bottle 21. A sample such as blood is introduced into the flow path by the syringe 22. The potential difference between the reference electrode 23 provided downstream of the solid-state ion sensor and each ion sensor is measured by the amplifier 24 and recorded in the recorder 25.

【0015】図6の測定系で血清試料を用いた場合にお
いて、本発明のナトリウム,カリウムイオン測定用固体
イオンセンサによる測定結果と、従来のナトリウム,カ
リウムイオン電極による結果の相関を図7に示す。カリ
ウムイオン感応膜には、ポリ塩化ビニル,バリノマイシ
ン,ジオクチルアジペイトからなる膜、ナトリウムイオ
ン感応膜にはポリ塩化ビニル,ビスクラウン,ジオクチ
ルアジペイトからなる膜を用いた。ナトリウム及びカリ
ウムとも相関系数が0.99 以上であり良好な結果が得
られた。
FIG. 7 shows the correlation between the measurement results obtained by the solid ion sensor for measuring sodium and potassium ions of the present invention and the results obtained by the conventional sodium and potassium ion electrodes when a serum sample is used in the measurement system shown in FIG. . A film made of polyvinyl chloride, valinomycin and dioctyl adipate was used as the potassium ion sensitive film, and a film made of polyvinyl chloride, biscrown and dioctyl adipate was used as the sodium ion sensitive film. Correlation coefficients of both sodium and potassium were 0.99 or more, and good results were obtained.

【0016】以上のように、本発明の固体センサは大量
生産に適した方法で製作されるため安価であり、また導
電性電極の周囲にポリ塩化ビニルの被覆膜があるので、
イオン感応膜との接着が強固であるため安定性に優れ、
高精度な測定を行うことができる。
As described above, since the solid-state sensor of the present invention is manufactured by a method suitable for mass production, it is inexpensive, and since the conductive electrode has a polyvinyl chloride coating film around it,
Excellent adhesion due to strong adhesion to the ion-sensitive membrane,
Highly accurate measurement can be performed.

【0017】[0017]

【発明の効果】本発明によれば、大量生産に適した簡単
な方法で固体イオンセンサを製作することができるの
で、安価なセンサを提供することができる。また、導電
性電極の周囲にポリ塩化ビニルの被覆膜があるので、イ
オン感応膜との接着が強固であるため安定性に優れ、高
精度な測定を行うことができる。
According to the present invention, since a solid-state ion sensor can be manufactured by a simple method suitable for mass production, an inexpensive sensor can be provided. Further, since the polyvinyl chloride coating film is provided around the conductive electrode, the adhesion with the ion-sensitive film is strong, so that the stability is excellent and highly accurate measurement can be performed.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例の固体イオンセンサ素子
の斜視図。
FIG. 1 is a perspective view of a solid-state ion sensor element according to a first embodiment of the present invention.

【図2】本発明の第2の実施例の固体イオンセンサ素子
の縦断面図および斜視図。
FIG. 2 is a vertical sectional view and a perspective view of a solid-state ion sensor element according to a second embodiment of the present invention.

【図3】本発明の第3の実施例の集積化された固体イオ
ンセンサの斜視図および縦断面図。
FIG. 3 is a perspective view and a vertical sectional view of an integrated solid-state ion sensor according to a third embodiment of the present invention.

【図4】本発明の第4の実施例の集積化された固体イオ
ンセンサの斜視図および縦断面図。
FIG. 4 is a perspective view and a vertical sectional view of an integrated solid-state ion sensor according to a fourth embodiment of the present invention.

【図5】本発明の固体イオンセンサ素子の製造方法の実
施例を示した説明図。
FIG. 5 is an explanatory view showing an embodiment of a method for manufacturing a solid-state ion sensor element of the present invention.

【図6】本発明の固体イオンセンサの評価のための測定
系を示したブロック図。
FIG. 6 is a block diagram showing a measurement system for evaluating the solid-state ion sensor of the present invention.

【図7】本発明の効果を示す特性図。FIG. 7 is a characteristic diagram showing the effect of the present invention.

【符号の説明】[Explanation of symbols]

3…信号線、6…第2の実施例、11…ポリ塩化ビニル
直方体、12…貫通孔、13…孔。
3 ... Signal line, 6 ... 2nd Example, 11 ... Polyvinyl chloride rectangular parallelepiped, 12 ... Through hole, 13 ... Hole.

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】導電性板材の側面をポリ塩化ビニルで被覆
し、イオン感応膜を前記導電性板材及び前記ポリ塩化ビ
ニルから成る表面に設けたことを特徴とする固体イオン
センサ。
1. A solid-state ion sensor characterized in that a side surface of a conductive plate material is covered with polyvinyl chloride, and an ion sensitive film is provided on a surface composed of the conductive plate material and the polyvinyl chloride.
【請求項2】請求項1において、前記1個又は複数個の
固体イオンセンサを絶縁性基板上に配置し、前記導電性
板材に信号取り出し線を設けた固体イオンセンサ。
2. The solid-state ion sensor according to claim 1, wherein the one or more solid-state ion sensors are arranged on an insulating substrate, and the conductive plate member is provided with a signal extraction line.
【請求項3】請求項1において、1個又は複数個の前記
固体イオンセンサを、絶縁材料からなる流路の壁面に、
前記イオン感応膜が流路内部の方向を向いて配置し、前
記導電性板材に信号取り出し線を設けた固体イオンセン
サ。
3. The one or more solid ion sensors according to claim 1, wherein the wall surface of the flow path is made of an insulating material.
A solid-state ion sensor in which the ion-sensitive film is arranged so as to face the inside of a flow path, and a signal extraction line is provided on the conductive plate material.
【請求項4】請求項1において、前記ポリ塩化ビニルで
被覆した前記導電性板材は、揮発性溶剤に溶解させたポ
リ塩化ビニルで導電性線材の表面を被覆し、溶剤を揮発
させてポリ塩化ビニル被覆膜とした後、前記ポリ塩化ビ
ニルで導電性線材をスライスして製作される固体イオン
センサ。
4. The conductive plate material coated with polyvinyl chloride according to claim 1, wherein the surface of the conductive wire is coated with polyvinyl chloride dissolved in a volatile solvent, and the solvent is volatilized to form a polychlorinated material. A solid ion sensor manufactured by slicing a conductive wire with the polyvinyl chloride after forming a vinyl coating film.
【請求項5】請求項1において、前記イオン感応膜は、
母材,可塑剤,イオン感応物質、または添加剤から成
り、母材はポリ塩化ビニル又はシリコーンゴム、可塑剤
はアジピン酸ジオクチル(DOA),トリ(2−エチル
ヘキシル)トリメリテイト(TOTM),3,3′,
4,4−ベンゾフェノンテトラカルボン酸テトラ−1−
ウンデシルエステル(BTCU)、イオン感応物質はバ
リノマイシン,〔ビス(12−クラウン−4)メチル〕
メチルドデシルマロン酸,第4級アンモニウム塩、添加
材はテトラフェニルほう酸カリウム又はテトラフェニル
ほう酸ナトリウムを用い、揮発性溶剤に均一に溶解させ
て調製する固体イオンセンサ。
5. The ion sensitive film according to claim 1, wherein:
Consists of a base material, a plasticizer, an ion-sensitive substance, or an additive, the base material is polyvinyl chloride or silicone rubber, and the plasticizer is dioctyl adipate (DOA), tri (2-ethylhexyl) trimellitate (TOTM), 3,3 ′,
4,4-benzophenone tetracarboxylic acid tetra-1-
Undecyl ester (BTCU), ion sensitive substance is valinomycin, [bis (12-crown-4) methyl]
Methyldodecylmalonic acid, quaternary ammonium salt, solid ion sensor prepared by uniformly dissolving it in a volatile solvent using potassium tetraphenylborate or sodium tetraphenylborate as an additive.
【請求項6】請求項1において、前記導電性板材は銀,
金,白金または上記金属とその塩化物から成る固体イオ
ンセンサ。
6. The conductive plate material according to claim 1, wherein the conductive plate material is silver,
A solid ion sensor made of gold, platinum or the above metals and their chlorides.
JP4207825A 1992-08-04 1992-08-04 Solid-state ion sensor Pending JPH0650931A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4207825A JPH0650931A (en) 1992-08-04 1992-08-04 Solid-state ion sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4207825A JPH0650931A (en) 1992-08-04 1992-08-04 Solid-state ion sensor

Publications (1)

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JPH0650931A true JPH0650931A (en) 1994-02-25

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Family Applications (1)

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JP4207825A Pending JPH0650931A (en) 1992-08-04 1992-08-04 Solid-state ion sensor

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JP (1) JPH0650931A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000512743A (en) * 1996-05-16 2000-09-26 センデックス メディカル,インク. Sensor having microminiature through-holes and method of manufacturing such a sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000512743A (en) * 1996-05-16 2000-09-26 センデックス メディカル,インク. Sensor having microminiature through-holes and method of manufacturing such a sensor

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