JPH064955Y2 - 超音波洗浄装置 - Google Patents
超音波洗浄装置Info
- Publication number
- JPH064955Y2 JPH064955Y2 JP1988034655U JP3465588U JPH064955Y2 JP H064955 Y2 JPH064955 Y2 JP H064955Y2 JP 1988034655 U JP1988034655 U JP 1988034655U JP 3465588 U JP3465588 U JP 3465588U JP H064955 Y2 JPH064955 Y2 JP H064955Y2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- ultrasonic cleaning
- cooling
- cleaned
- cooling mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004506 ultrasonic cleaning Methods 0.000 title claims description 28
- 238000001816 cooling Methods 0.000 claims description 44
- 238000004140 cleaning Methods 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 14
- 239000003507 refrigerant Substances 0.000 description 7
- 238000004821 distillation Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 230000001172 regenerating effect Effects 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988034655U JPH064955Y2 (ja) | 1988-03-16 | 1988-03-16 | 超音波洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988034655U JPH064955Y2 (ja) | 1988-03-16 | 1988-03-16 | 超音波洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01139887U JPH01139887U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-09-25 |
| JPH064955Y2 true JPH064955Y2 (ja) | 1994-02-09 |
Family
ID=31261354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988034655U Expired - Lifetime JPH064955Y2 (ja) | 1988-03-16 | 1988-03-16 | 超音波洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH064955Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62152582A (ja) * | 1985-12-25 | 1987-07-07 | セイコーエプソン株式会社 | 洗浄機 |
-
1988
- 1988-03-16 JP JP1988034655U patent/JPH064955Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01139887U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-09-25 |