JPH0648077B2 - Transport fitting device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application This invention transfers and supplies a transport fluid such as a corrosive solution or a chemical solution from a transport tank to a storage tank or from a storage tank to a transport tank. The present invention relates to a transport pipe joint device used for the purpose.

(B) Prior Art Conventionally, as the above-mentioned transport pipe joint device, for example, there is a device (Japanese Patent Laid-Open No. 63-91188) for coupling the male transport pipe and the female transport pipe after cleaning them. is there.

This device uses a spray ring vertically installed in the washing chamber to fix a male type transport pipe inserted into the inside of the washing chamber and a female type transport pipe fixed to the inside of the washing chamber in close proximity, and The cleaning liquid is ejected from the water spout formed on the inner peripheral surface of the to clean and remove the dust and dust adhering to the outer peripheral surface of the joint between the male transport pipe and the female transport pipe, and then drive the air cylinder. , The male transport pipe and the female transport pipe are coupled and fixed.

(C) Problems to be Solved by the Invention However, in the above-described joint device, since the cleaning liquid is sprayed toward the outer peripheral surface of the connecting portion between the male transport pipe and the female transport pipe, the connection side end surface of the male transport pipe is sprayed. It is difficult to remove dust, dust, etc. adhering to the inner surface of the male transport pipe. Has a problem that it decreases.

In view of the above problems, the present invention sprays a cleaning fluid onto the connection-side end surface of the insertion-side transportation pipe to perform a cleaning treatment, whereby it is possible to reliably prevent dust or dust from being mixed into the transportation fluid. An object of the present invention is to provide a transport pipe joint device capable of maintaining a constant purity.

(D) Means for Solving the Problems The present invention provides a check valve at the connection side end portion of the transportation passage formed in the insertion side transportation pipe, and the connection side end portion of the transportation passage formed in the receiving side transportation pipe. A valve pressing portion for opening the check valve by pressing the receiving-side transport pipe against the insertion-side transport pipe, and at the rear end of the transport passage formed in the receiving-side transport pipe, the receiving-side A valve mechanism that opens and closes the transport passage by moving the transport pipe back and forth is provided to form a fluid passage that communicates with the transport passage of the receiving-side transport pipe to supply the cleaning fluid, and the outlet side end of the fluid passage is checked. It is a transport pipe joint device provided with a valve.

(E) Operation In the present invention, the pipe fixing means is driven to fix the insertion-side transportation pipe inserted into the cleaning chamber in proximity to the reception-side transportation pipe arranged in the cleaning chamber, and then the reception-side transportation pipe. Open the check valve of the fluid passage formed in the pipe, supply cleaning fluid such as pure water or dry air, spray the cleaning fluid toward the connection side end face of the insertion side transportation pipe, and connect side end face of the insertion side transportation pipe After cleaning and removing dust and dust adhering to the, the pipe moving means is driven to move the insertion side transport pipe and the receiving side transport pipe relatively in the connecting direction, and to the connecting side end of the inserting side transport pipe. To open the check valve of the male type transport pipe by pressing the valve pressing part formed at the connection side end of the receiving side transport pipe to the check valve provided, and to connect the mutual transport passages in an airtight state. At the time of transferring and supplying the transport fluid such as chemical liquid, Dust such as dust and dust can be prevented from contamination.

(F) Effects of the Invention According to the present invention, since the cleaning fluid is jetted from the transport passage of the receiving-side transport pipe facing the insertion-side transport pipe to clean, the cleaning fluid is directed toward the connection-side end face of the insertion-side transport pipe. Is positively sprayed, and it is possible to reliably wash and remove dust, dust, etc. adhering to the connection-side end surface of the insertion-side transport pipe.
After the cleaning process, these transport pipes are connected in an airtight state, so dust such as dust or dust can be prevented from entering the transport fluid.For example, from a transport tank to a storage tank or a storage tank. When the transport fluid is transferred from the tank to the transport tank, the purity of the transport fluid can be prevented from being lowered during the transfer, and the reliability of the device can be improved.

(G) Embodiment of the Invention One embodiment of the present invention will be described in detail below with reference to the drawings.

The drawing shows a transport pipe joint device used for the transfer of a chemical liquid as an example of a transport fluid. In FIG. 1, the transport pipe joint device 1 includes a cylindrical insertion side transport pipe 2 and a receiving side transport pipe. 3 is connected to communicate with and supply the chemical liquid N.

As shown in FIG. 3, the insertion side transport pipe 2 described above has a transport passage 5 formed in the axial center of a tubular body 4 formed in a tubular shape, and communicates with this transport passage 5 to connect the pipe body 4 with the transport passage 5. A liquid inlet / outlet 6 is formed at the center of the tip, and a conical valve element 7 (check valve) is inserted and retained inside the liquid inlet / outlet 6 so as to be retractable, and a stopper 8 and a valve element 7 screwed and fixed at the rear position. A coil spring 9 is tightly inserted between and, the outer peripheral surface of the valve body 7 and the inner peripheral surface of the liquid inlet / outlet port 6 are brought into close contact with each other by the biasing force of the coil spring 9, and the transport passage 5 is closed. Disc 7
A projection 7a formed at the center of the tip of the is projected from the liquid inlet / outlet 6 of the tube body 4.

A liquid passage hole 7b is formed on the outer peripheral surface of the central portion of the valve body 7 so as to communicate in the axial direction.

A sleeve 10 is screwed and fixed to the outer peripheral surface of the tip portion of the above-mentioned tube body 4, and a ball locking groove 10a is provided around the outer peripheral surface of the middle portion of the sleeve 10.

On the other hand, a key locking groove 4a is formed on the outer peripheral surface of the central portion of the pipe body 4 in the axial direction, and a liquid transport pipe 11 (shown by a virtual line in the figure) made of fluororesin is connected to the outer peripheral surface of the rear end portion. To do.

In the receiving side transport pipe 3, the case cover 12 and the flange 13 are closely fitted, and these are fastened and fixed by bolts 14 to form the cleaning chamber 15, and the flange 13 is also formed.
Then, the cylinder 16 and the flange connector 17 are tightly fitted together, and these are fastened and fixed by bolts 18 to form the receiving side body 19.

In the case cover 12, a pipe insertion hole 12a having a size corresponding to the outer diameter of the central portion of the insertion side transport pipe 2 is formed in the center of the pipe insertion side, and pure water W or dry air is formed on the lower peripheral surface. A drain hole 12b for discharging a cleaning fluid such as G is formed, and a lock mechanism 20 for inserting and fixing the insertion side transport pipe 2 is provided inside the case cover 12 to provide the case cover 1
A lock release mechanism 21 for releasing the insertion-side fixation of the insertion-side transport pipe 2 is provided on the outer side of 2, and a ball locking mechanism 22 is constituted by these mechanisms 20 and 21.

In the lock mechanism 20 described above, the inner case 23 is fitted to the inner peripheral edge of the pipe insertion hole 12a formed in the case cover 12, the bolt 24 is tightened and fixed, and the side plate is inserted and fitted on the outer peripheral surface of the inner case 23. 25 and the outer case 26 are fitted together and tightened and fixed by the bolts 27, and the ball holder 28 inserted into the tip side of the inner case 23 and the outer case 26 are screwed and fixed.

On the other hand, the inner diameter of the receiving portion 23a formed on the inner circumferential surface of the inner case 23 on the distal end side and the outer diameter of the insertion portion 28a formed on the insertion side of the ball holder 28 are gradually reduced in the insertion direction. The coil spring 29 is tightly inserted between the annular stepped portion 23b formed on the outer peripheral surface of the inner case 23 on the distal end side and the annular recess 25a formed in the side plate 25. By the urging force of the inner case 23
The insertion portion 28a of the ball holder 28 is urged toward 3a and the inner diameters of the inner case 23 and the ball holder 28 are adjusted to a size corresponding to the outer diameter of the insertion side transport pipe 2 on the tip side. Is forming.

A large number of ball insertion holes 28b are formed on the outer peripheral surface of the above-mentioned insertion portion 28a at regular intervals in the circumferential direction, and the lock balls 30 are loosely fitted in the respective ball insertion holes 28b. The lock balls 30 are held on the inner peripheral surface side and the outer peripheral surface side of the holder 28 so as to be retractable.

That is, by moving each of these lock balls 30 to a position facing the inner peripheral surface on the small diameter side of the receiving portion 23a formed in the inner case 23, the lock balls 30 are regulated to project toward the inner peripheral surface of the ball holder 28. The ball locking groove 10a provided around the insertion side transport pipe 2 and the lock balls 30 held by the ball holder 28 are engaged and fixed.

On the other hand, each of the lock balls 30 ... Moves to a position facing the large-diameter side inner peripheral surface of the receiving portion 23a, whereby the lock balls 30 ... Then, the engagement between the ball locking groove 10a and each lock ball 30 is released.

The lock release mechanism 21 described above, as shown in FIG.
The bases 31, 31 are fixed to the outer peripheral positions of the pipe insertion holes 12a formed in the case cover 12, and the bases 31, 3 are fixed.
A release lever 33 is screwed and fixed to an intermediate portion of a support shaft 32 which is mounted between the arms 34, 3 fixed to both ends of the support shaft 32.
Rollers 35, 35 are rotatably supported at the lower end of the shaft 4.

The above-mentioned rollers 35, 35 and the pusher ring 36 inserted into the outer peripheral edge portion 12d of the tube insertion hole 12a are brought into contact with each other, and the pusher ring 36 and the pusher pin 37 are connected to the bolt 3
8, and the pusher pin 37 is inserted into the guide hole 12c formed on the pipe insertion side of the case cover 12.
Is slidably inserted, and the pusher pin 37 and the side plate 25 are connected in the axial direction.

That is, by rotating the release lever 33, the roller 3
5, 35 are pressed against the pusher ring 36, and the side plate 25, the outer case 26, and the ball holder 28 are axially moved back and forth through the pusher ring 36 and the pusher pin 37.

A locking key 39 is fastened and fixed to the outer peripheral edge portion 12d with a bolt 40, and is fixed to the case cover 12 and the key locking groove 4a formed in the insertion side transport pipe 2 at the time of inserting the pipe. The locking key 39 is engaged and inserted.

That is, the key locking groove 4a formed in the insertion side transport pipe 2
By combining the engagement shape of the engagement key 39 fixed to the case cover 12, the number of engagements, and the engagement position, for example,
The engagement pattern can be set for each type of chemical liquid N,
The insertion-side transport pipe 2 and the receiving-side transport pipe 3 having the same engagement pattern are connected in correspondence with each other.

The receiving side main body 19 described above includes the flange 13 and the cylinder 1.
6 is closely fitted to form an airtight chamber 41.
Communicating with the air inlet / outlet port 16b on the outer peripheral surface of the cylinder 16;
16c is formed, and the piston 42 formed on the outer peripheral surface of the central portion of the receiving side transport pipe 3 is slidably inserted into the airtight chamber 41, and the guide hole 1 formed in the central portion of the flange 13 is formed.
Insert the tip of the receiving side transport pipe 3 into 3a,
The rear end portion of the receiving-side transport pipe 3 is inserted into the guide hole 16a formed in the inner peripheral surface of the central portion of 6.

On the liquid contact surface side of the above-mentioned flange 13, the insertion side transport pipe 2
A detection sensor S for detecting connection or disconnection between the receiving side transport pipe 3 and the receiving side transportation pipe 3 is provided, and supply and stop of the chemical liquid N are controlled based on the detection by the detection sensor S.

As shown in FIG. 3, the receiving-side transport pipe 3 has a transport passage 43 formed at the center of the shaft, and an indenter 44 is screwed and fixed to the tip end thereof, and the transport passage 43 is formed at the center of the indenter 44. The liquid inlet / outlet 45 is formed in communication with each other, and the pressing portion 44a is formed at the center of the liquid inlet / outlet 45 so as to face the protrusion 7a of the valve body 7 protruding from the liquid inlet / outlet 6 of the insertion side transport pipe 2 described above. The pressing portion 44a is supported by a rib 44b formed on the inner peripheral surface of the liquid inlet / outlet port 45.

An O-ring 46 is fitted and fixed in the dovetail groove 44 c provided around the connection side end surface of the indenter 44.

On the other hand, a bellows 47 is screwed and fixed to the rear end of the receiving-side transport pipe 3 so that the transport passage 43 of the receiving-side transport pipe 33 communicates with the inside of the bellows 47 and is formed at the rear end of the bellows 47. The outer peripheral edge portion 47a is sandwiched and fixed between the cylinder 16 and the flange connector 17.

An L-shaped fluid passage 48 is formed in the center of the flange connector 17 described above, and a valve body 49 is screwed and fixed to the insertion side end of the flange connector 17 inserted into the bellows 47. A fluid outlet 50 is formed in the portion communicating with the fluid passage 48, and a ball valve 51 (check valve) is slidably inserted inside the valve body 49.

A fluid supply port 52 that communicates with the fluid passage 48 and supplies the pure water W and the dry air G is formed at the upper end of the flange connector 17 described above, and the fluid supply port 53 (see FIG. (Indicated by the middle phantom line), and connect this fluid supply pipe 5
Reference numeral 3 connects a pure water supply device (not shown) and an air supply device (not shown) via a switching valve (not shown).

On the other hand, a transport passage 54 is formed below the flange connector 17 so as to communicate with the inside of the bellows 47.
A liquid inlet / outlet port 55 is formed at the lower end of the flange connector 17 so as to communicate with the flange connector 17, and a liquid transfer pipe 56 (shown by a virtual line in the figure) made of fluororesin is connected to the liquid inlet / outlet port 55.

In addition, each member of the liquid contact part 4, 7, 8, 17, 42, 44,
47 and 49 are made of PTFE resin or PFA resin, and each member 10, 12, 16, 23, 25 of the non-wetted portion,
26, 28, 36, 39 are made of PvdF resin,
Each of the bolts 14, 18, 24, 27, 40, the coil springs 3, 29, the liquid contact surface of the flange 13, the lock ball 30, and the ball valve 51 are coated with a fluorine resin.

Hereinafter, the connecting operation of the insertion-side transportation pipe 2 and the reception-side transportation pipe 3 by the transportation pipe joint device 1 will be described.

First, as shown in FIG. 2, the insertion side transportation pipe 2 is inserted into the pipe insertion hole 12a of the case cover 12 constituting the receiving side transportation pipe 3, and the key locking groove formed in the insertion side transportation pipe 2 is inserted. 4a and the locking key 39 fixed to the case cover 12 are engaged.

Further, the inner case 23 inserted into the cleaning chamber 15 is inserted.
When the insertion side transport pipe 2 is inserted into the ball holder 28 and the ball holder 28, the lock mechanism 20 operates, as shown in FIG.
The ball locking groove 10a provided around the insertion-side transportation pipe 2 and the lock balls 30 held by the ball holder 28 are engaged with each other, and the connection-side end surface of the insertion-side transportation pipe 2 and the receiving-side transportation pipe 3 are connected. Lock the connection side end face in the axially close state.

On the other hand, the pressurized air M is supplied from the air inlet / outlet port 16b of the cylinder 16.
Is supplied to slide the receiving-side transport pipe 3 backward, the bellows 47 is tightened, the bellows 47 and the valve body 49 are brought into close contact with each other, and the transport passage 54 is closed.
The pure water W is supplied from the fluid supply port 52 of the above, the ball valve 51 is opened to connect the fluid passage 48 and the transportation passage 43, and the pure water W is jetted from the liquid inlet / outlet 45 of the indenter 44,
Pure water W toward the connection-side end face of the insertion side transport pipe 2 which is close to
Is actively sprayed to remove dust such as dust and dust adhering to the connection-side end surface of the insertion-side transportation pipe 2, and at the same time, the transportation passage 43 of the receiving-side transportation pipe 3 is also cleaned.

Next, the supply of the pure water W is stopped, and the dry air G is supplied from the fluid supply port 52 to dry the inside of the transport passage 43 and the liquid inlet / outlet 45, and the connection-side end face of the washed insertion-side transport pipe 2 is also dried. Dry air G is blown toward the target to perform a drying process.

In addition, the used pure water W and dry air G are used in the cleaning chamber 15
The dust, which has fallen to the bottom, is discharged from the drain hole 12b of the case cover 12.

Next, the supply of the dry air G is stopped, the pressurized air M is supplied from the air inlet / outlet port 16c of the cylinder 16, the receiving-side transport pipe 3 is slid forward, and the bellows 47 is extended to the flange connector 17. The formed transport passage 54 is opened so that the transport passages 43, 54 are communicated with each other, and as shown in FIG. 3, it is fitted to the connection-side end face of the insertion-side transport pipe 2 and the connection-side end face of the receiving-side transport pipe 3. The O-ring 46 is closely attached and held in an airtight state.

At the same time, the pressing portion 44a formed in the liquid inlet / outlet 45 of the receiving side transport pipe 3 and the projection 7a of the valve body 7 protruding from the liquid inlet / outlet 6 of the insertion side transport pipe 2 are brought into contact with each other to make the coil spring 9
The valve body 7 is pushed in against, and the liquid inlet / outlet 6 of the insertion side transportation pipe 2 is opened, and the transportation passage 5 of the insertion side transportation pipe 2 and the transportation passage 43 of the receiving side transportation pipe 3 are connected and connected, When the completion of mutual connection is detected by the detection sensor S, transportation of the chemical liquid N is started.

For example, the insertion side transportation pipe 2 is attached to a transportation tank (not shown).
, And the receiving side transport pipe 3 is connected to a storage tank (not shown) to transfer and supply the chemical liquid N to either one.

At this time, the fluid passage 48 is closed by the ball valve 51.

On the other hand, when removing the insertion side transportation pipe 2, the pressurized air M is supplied from the air inlet / outlet port 16b of the cylinder 16 to slide the receiving side transportation pipe 3 rearward so that the bellows 47 is brought into close contact with the valve body 49 for transportation. When the passage 54 is closed and at the same time, the valve body 7 is brought into close contact with the liquid inlet / outlet 6 of the insertion side transport pipe 2 to close the transport passage 5 and the mutual separation is detected by the detection sensor S, the transport of the chemical liquid N is stopped. .

Next, the release lever 33 is operated to rotate (position of virtual line),
After releasing the engagement between the ball locking groove 10a provided around the insertion-side transportation pipe 2 and each lock ball 30 held by the ball holder 28, the case cover 12 that forms the receiving-side transportation pipe 3 is inserted. The insertion side transport pipe 2 is pulled out from the hole 12a.

In this way, since the pure water W is positively sprayed toward the connection-side end surface of the insertion-side transportation pipe 2, it is possible to reliably wash and remove dust, dust, etc. adhering to the connection-side end surface of the insertion-side transportation pipe 2. After the cleaning process, the insertion side transport pipe 2 and the receiving side transport pipe 3 are connected in an airtight state, so that the chemical liquid N
It is possible to prevent dust such as dust or dust from being mixed in, and, for example, in the case of transferring and supplying the chemical liquid N from the transport tank to the storage tank or from the storage tank to the transport tank,
It is possible to prevent the purity of the chemical liquid N from being lowered during the transfer and improve the reliability of the apparatus.

Further, the detection sensor S detects the connection or disconnection of the insertion-side transportation pipe 2 and the reception-side transportation pipe 3, and the supply and stop of the chemical liquid N are automatically controlled based on the detection by the detection sensor S, thereby mutually The next operation cannot be executed unless the connection or disconnection is surely made, and it is possible to surely prevent the insertion side transport pipe 2 from being dropped or leaked due to a connection failure during the transfer and supply.

Further, a key locking groove 4a formed in the insertion side transport pipe 2
And the engaging key 39 fixed to the case cover 12 are matched with each other in the engagement pattern, so that it is possible to prevent a rudimentary mistake such as connecting different types of chemical solution transport pipes.

In the correspondence between the configuration of the present invention and the above-described embodiment, the tube fixing means of the present invention is the ball locking mechanism 22 of the embodiment.
Similarly, the pipe moving means corresponds to the cylinder 16 and the piston 42, the check valve corresponds to the valve body 7 and the ball valve 51, and the valve mechanism corresponds to the bellows 47 and the valve body 49. However, the present invention is not limited to the configurations of the above-described embodiments.

In the above-described embodiment, the piston 42 constituting the receiving-side transport pipe 3 is slid in the connecting direction to connect the inserting-side transport pipe 2 and the receiving-side transport pipe 3, but, for example, by a driving means such as an air cylinder. It is also possible to move the insertion-side transportation pipe 2 in the connection direction to connect the insertion-side transportation pipe 2 and the reception-side transportation pipe 3.

Further, based on the detection by the detection sensor S, the connection or disconnection of the insertion side transportation pipe 2 and the reception side transportation pipe 3 may be notified by a lamp, a buzzer or the like.

[Brief description of drawings]

The drawings show one embodiment of the present invention. Fig. 1 is a vertical sectional side view of a transport pipe joint device, Fig. 2 is a front view of the transport pipe joint device on the side where the transport pipe is inserted, and Fig. 3 is a transport pipe and receiving side. It is an enlarged vertical side view of the connection part with a side transportation pipe. G ... Dry air, N ... Chemical solution W ... Pure water, 1 ... Transport pipe joint device 2 ... Insertion side transport pipe, 3 ... Receiving side transport pipe 5,43 ... Transport passage, 6, 45 ... ... Liquid inlet / outlet 7 ... Valve body, 7a ... Protrusion 15 ... Washing chamber, 16 ... Cylinder 22 ... Ball locking mechanism, 42 ... Piston 44 ... Indenter, 44a ... Pressing part 47 ... Bellows, 48 ...... Fluid passage 49 ...... Valve body, 51 ...... Ball valve

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification number Internal reference number FI Technical display location F16L 55/00 (72) Inventor Norihiro Takasaki 2419 Fujita, Hachiman Nishi-ku, Kitakyushu, Fukuoka Prefecture Ryoka Techno Co., Ltd. Kurosaki Plant (72) Inventor Eiji Kariya 2419 Fujita, Hachimansai-ku, Kitakyushu, Fukuoka Prefecture Ryoka Techno Co., Ltd.Kurosaki Plant (72) Inventor Toshiyuki Fukumoto 4-4.5-302 Toneyama, Toyonaka, Osaka (56) Reference Document JP-A-63-91188 (JP, A)

Claims (1)

[Claims] 1. A pipe fixing means for fixing an insertion-side transportation pipe to be inserted into a cleaning chamber in proximity to a reception-side transportation pipe arranged in the cleaning chamber so as to face the insertion-side transportation pipe, and the reception side. A transport pipe joint device comprising: a pipe moving means for moving the transport pipe in a direction of connecting to the insertion-side transport pipe and coupling the pipes with each other, wherein the connection-side end portion of the transport passage formed in the insertion-side transport pipe is provided. A check valve is provided, and at a connection-side end portion of the transport passage formed in the receiving-side transport pipe, a valve pressing portion that presses the receiving-side transport pipe against the inserting-side transport pipe to open the check valve is formed. A valve mechanism that opens and closes the transportation passage by the forward and backward movement of the receiving transportation pipe is provided at the rear end portion of the transportation passage formed in the receiving transportation pipe, and communicates with the transportation passage of the receiving transportation pipe for cleaning. Forming a fluid passage for supplying a fluid, A transportation pipe fitting with a check valve at the outlet end.