JPH0646584A - Micromachine driver - Google Patents
Micromachine driverInfo
- Publication number
- JPH0646584A JPH0646584A JP19547292A JP19547292A JPH0646584A JP H0646584 A JPH0646584 A JP H0646584A JP 19547292 A JP19547292 A JP 19547292A JP 19547292 A JP19547292 A JP 19547292A JP H0646584 A JPH0646584 A JP H0646584A
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- movable member
- electrodes
- substrates
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
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- Micromachines (AREA)
- Fluid-Pressure Circuits (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はマイクロマシンの駆動装
置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a driving device for a micromachine.
【０００２】[0002]
【従来の技術】近年、ミリ又はミクロンの領域で作業を
するマイクロマシン（微細機械）の研究開発が行われて
いる。例えば、フォトリソグラフィ技術等の進歩によっ
て、大きさ数ミクロンのモータ、歯車、ピストンが製造
されている。大きさ数ミクロンのモータ、歯車、ピスト
ン等のマイクロマシンは、従来の代表的な機械を参考に
してそれを小型化した構造として設計され、フォトリソ
グラフィ技術等の微細加工技術によって製作されること
ができる。2. Description of the Related Art In recent years, research and development of micromachines for working in the millimeter or micron range have been carried out. For example, advances in photolithography technology have produced motors, gears, and pistons having a size of several microns. Micromachines such as motors, gears, and pistons with a size of a few microns can be manufactured by microfabrication technology such as photolithography technology, which is designed as a downsized structure with reference to conventional typical machines. .
【０００３】[0003]
【発明が解決しようとする課題】マイクロマシンは、回
転子やピストン等の可動部分とコイルに相当する駆動部
分を有する。駆動部分は可動部分を駆動するが、そのよ
うな微細な可動部分の運動量は小さく、その動作は特殊
器具を使用しなければ確認できない。そのため、ミクロ
ンオーダーのマイクロマシンは、原理的には製造できる
が、実際に製造し、そして特定の用途に使用する段階に
はなかなか達せず、用途が模索されている段階である。
また、従来のマイクロマシンは、動作原理が通常の機械
と同様のままで微細にしたため、非常に小さな動作の制
御が困難であり、実用化にはいたっていない。本発明の
目的は、新しい原理の、実用性の高いマイクロマシン駆
動装置を提供することである。A micromachine has a movable part such as a rotor and a piston and a drive part corresponding to a coil. The drive part drives the movable part, but the momentum of such a fine movable part is small, and its movement cannot be confirmed without using special equipment. Therefore, micron-order micromachines can be manufactured in principle, but it is difficult to reach the stage where they are actually manufactured and used for a specific application, and the application is being sought.
Further, the conventional micromachine has the same operating principle as that of a normal machine and has been made finer. Therefore, it is difficult to control a very small operation, and it has not been put into practical use. An object of the present invention is to provide a micromachine drive device of a new principle and high practicability.
【０００４】[0004]
【課題を解決するための手段】本発明によるマイクロマ
シン駆動装置は、複数の電極１４，１６と、該電極間に
注入された液晶２４と、少なくとも一部が該液晶に接触
し、該液晶への電圧印加による該液晶の状態の変化に応
じて動作する可動部材２６とを備えたことを特徴とする
ものである。In the micromachine driving device according to the present invention, a plurality of electrodes 14 and 16, a liquid crystal 24 injected between the electrodes, and at least a part of the liquid crystal 24 are in contact with the liquid crystal, The movable member 26 that operates according to the change in the state of the liquid crystal due to the voltage application is provided.
【０００５】[0005]
【作用】上記した構成においては、液晶に電圧を印加す
ることにより、液晶の状態が変化し、液晶に振動や対流
等が生じる。従って、液晶に接触している可動部材が液
晶の状態の変化に応じて動作するようになる。この可動
部材の運動を運動源として外部に取り出し、微細モータ
の回転子や微細ピストン等を駆動することができる。In the above structure, when a voltage is applied to the liquid crystal, the state of the liquid crystal changes, and the liquid crystal vibrates or convection. Therefore, the movable member in contact with the liquid crystal operates according to the change in the state of the liquid crystal. The motion of the movable member can be taken out as a motion source to drive the rotor of the fine motor, the fine piston, and the like.
【０００６】[0006]
【実施例】図１は本発明の第１実施例を示す図である。
このマイクロマシン駆動装置は、一対の対向する基板１
０，１２を有し、この基板１０，１２の内面にそれぞれ
電極１４，１６、及び配向膜１８，２０が形成されてい
る。基板１０，１２は配向膜１８，２０を内側にしてス
ペーサ２２を介して貼り合わせてある。そして、基板１
０，１２及びスペーサ２２に囲まれた領域に液晶２４が
注入されている。さらに、可動部材２６が液晶２４に接
触するように基板１０，１２の間に配置されている。可
動部材２６は外部の部材（図示せず）に接続可能であ
る。FIG. 1 is a diagram showing a first embodiment of the present invention.
This micromachine driving device includes a pair of opposed substrates 1
0 and 12, and electrodes 14 and 16 and alignment films 18 and 20 are formed on the inner surfaces of the substrates 10 and 12, respectively. The substrates 10 and 12 are bonded to each other with the alignment films 18 and 20 inside with a spacer 22 interposed therebetween. And the substrate 1
The liquid crystal 24 is injected into the region surrounded by 0 and 12 and the spacer 22. Further, the movable member 26 is arranged between the substrates 10 and 12 so as to contact the liquid crystal 24. The movable member 26 can be connected to an external member (not shown).
【０００７】実施例においては、基板１０，１２は５０
×６０×１．１mmのガラス基板であり、電極１４，１６
は直径２０mmの丸ベタ透明電極（ＩＴＯ）である。配向
膜１８，２０はこの基板１０，１２の電極１４，１６の
上に３wtパーセントのポリイミド溶液（日産化学工業社
製サンエバ−ＲＮ−７２２）溶液をスピンコータを用い
て２０００rpm の回転数で塗布した後に、２５０℃で３
０分焼成したものである。In the embodiment, the substrates 10 and 12 are 50
It is a glass substrate of × 60 × 1.1 mm, and has electrodes 14, 16
Is a round solid transparent electrode (ITO) with a diameter of 20 mm. The alignment films 18 and 20 were applied on the electrodes 14 and 16 of the substrates 10 and 12 with a 3 wt% polyimide solution (San Ever-RN-722 manufactured by Nissan Chemical Industries, Ltd.) at a rotation speed of 2000 rpm using a spin coater. , At 250 ℃ 3
It was baked for 0 minutes.
【０００８】この基板１０，１２の間に、平均径が５．
５μｍ、長さが５０〜２００μｍのグラスファイバー
と、平均径が４μｍ、長さが５０〜２００μｍのグラス
ファイバーとを混合したものを挿入して基板１０，１２
を貼り合わせた（平均径が４μｍのグラスファイバーは
２０wtパーセント）。平均径が５．５μｍのグラスファ
イバーがスペーサ２２となるものであり、平均径が４μ
ｍのグラスファイバーが可動部材２６となるものであ
る。なお、平均径が４μｍのグラスファイバーは、径が
均一なもの、及び不均一なものを含んでいた。Between the substrates 10 and 12, an average diameter of 5.
Substrates 10 and 12 by inserting a mixture of glass fibers having a diameter of 5 μm and a length of 50 to 200 μm and glass fibers having an average diameter of 4 μm and a length of 50 to 200 μm.
Were pasted together (20 wt% for a glass fiber having an average diameter of 4 μm). The glass fiber having an average diameter of 5.5 μm serves as the spacer 22, and the average diameter is 4 μm.
The glass fiber of m serves as the movable member 26. The glass fibers having an average diameter of 4 μm included those having a uniform diameter and those having a non-uniform diameter.
【０００９】液晶２４は、フッ素系のネマチック液晶
に、カイラルネマチック液晶を３．６wtパーセント混合
した、ネマチック／コレステリック相転移型液晶を使用
した。この液晶２４は、電圧無印加時または低電圧印加
時にはコレステリック相となり、高電圧を印加したとき
には基板１０，１２の基板面に垂直に配向したネマチッ
ク相になる。As the liquid crystal 24, a nematic / cholesteric phase transition type liquid crystal in which 3.6 wt% of a chiral nematic liquid crystal is mixed with a fluorine-based nematic liquid crystal is used. The liquid crystal 24 has a cholesteric phase when no voltage is applied or a low voltage is applied, and has a nematic phase which is oriented perpendicular to the substrate surfaces of the substrates 10 and 12 when a high voltage is applied.
【００１０】この液晶パネルの電極１４，１６間に種々
の形体の電圧を印加してみた。例えば、サイン波、ラン
プ波、及び矩形波の電圧を印加し、電圧、周波数に応じ
た、平均径が４μｍのグラスファイバーからなる可動部
材２６の動きを顕微鏡で観察した。平均径が５．５μｍ
のグラスファイバーはスペーサ２２となっているため、
４μｍのグラスファイバーからなる可動部材２６は液晶
２４中で自由に動きうる状態になっている。Voltages of various shapes were applied between the electrodes 14 and 16 of this liquid crystal panel. For example, sine wave, ramp wave, and rectangular wave voltages were applied, and the movement of the movable member 26 made of glass fiber having an average diameter of 4 μm was observed with a microscope according to the voltage and frequency. Average diameter is 5.5 μm
Since the glass fiber of is the spacer 22,
The movable member 26 made of 4 μm glass fiber is freely movable in the liquid crystal 24.
【００１１】この状態で、電圧値Ｖppを±５０Ｖにし
て、周波数を０．１〜１KHz の範囲で変化させながら、
４μｍのグラスファイバーからなる可動部材２６の動き
を顕微鏡で観察し続けた。その結果、４μｍのグラスフ
ァイバーからなる可動部材２６は、周波数が６００Hz程
度を中心として数百Hzの範囲内でのみ、運動するが確認
された。そして、４μｍのグラスファイバーからなる可
動部材２６のうち、径が均一なものは並進運動し、径が
不均一のものは回転運動をするのが確認された。従っ
て、可動部材２６の運動を外部の部材に取り出せば、ミ
クロンオーダーの運動機構をもったマイクロマシンを構
成することができる。In this state, the voltage value Vpp is set to ± 50 V and the frequency is changed in the range of 0.1 to 1 kHz,
The movement of the movable member 26 made of 4 μm glass fiber was continuously observed with a microscope. As a result, it was confirmed that the movable member 26 made of 4 μm glass fiber moved only within a range of several hundred Hz centered on the frequency of about 600 Hz. It was confirmed that among the movable members 26 made of 4 μm glass fiber, those having a uniform diameter make translational movements, and those having a non-uniform diameter make rotational movements. Therefore, if the movement of the movable member 26 is taken out to an external member, a micromachine having a movement mechanism of the order of microns can be constructed.
【００１２】次に、周波数を６００Hzにして、電圧値Ｖ
ppを０〜１００Ｖの範囲内で変化させたところ、±１８
Ｖ程度から４μｍのグラスファイバーからなる可動部材
２６が回転運動、又は並進運動を初め、Ｖppを大きくす
るのに従って回転数が増加し、運動量が大きくなった。
さらに、径が４μｍで長さが１０μｍ程度のグラスファ
イバーについて回転数を測定したところ、Ｖpp＝２０Ｖ
で回転数が約３０rpm，Ｖpp＝１００Ｖで回転数が約４
００rpm 程度の変化が起こった。Next, the frequency is set to 600 Hz and the voltage value V
When pp is changed within the range of 0 to 100V, ± 18
The movable member 26 made of glass fiber having a size of about V to 4 μm started a rotational movement or a translational movement, and as Vpp was increased, the number of rotations increased and the momentum increased.
Furthermore, when the rotation speed of a glass fiber having a diameter of 4 μm and a length of about 10 μm was measured, Vpp = 20 V
And the rotation speed is about 30 rpm, Vpp = 100V and the rotation speed is about 4
A change of about 00 rpm occurred.
【００１３】図２は本発明の第２実施例を示す図であ
る。この実施例は微細モータに応用したものである。図
１と同様に、電極１４，１６及び配向膜１８，２０を有
する基板１０，１２及びスペーサ２２に囲まれた領域に
は液晶２４が満たされている。可動部材２６は、液晶２
４に接触するように基板１０，１２の間に配置されてい
る。この実施例では、可動部材２６はプロペラ状の形状
を有し、矢印で示されるように、液晶２４の状態が変化
すると回転が誘起されるようになっている。FIG. 2 is a diagram showing a second embodiment of the present invention. This embodiment is applied to a fine motor. Similar to FIG. 1, liquid crystal 24 is filled in a region surrounded by the substrates 10 and 12 having the electrodes 14 and 16 and the alignment films 18 and 20 and the spacer 22. The movable member 26 is the liquid crystal 2
It is arranged between the substrates 10 and 12 so as to contact the substrate 4. In this embodiment, the movable member 26 has a propeller-like shape, and rotation is induced when the state of the liquid crystal 24 changes, as indicated by the arrow.
【００１４】この可動部材２６は軸２６ａを有し、軸２
６ａは基板１０，１２に設けた微小な開口部１０ａ，１
２ａから外部に延びる。従って、この可動部材２６の軸
２６ａが微細モータの回転出力軸になる。この構成にお
いて、両電極間１４，１６に電圧を印加すると、液晶２
４が周波数に応じて振動あるいは対流し、その結果可動
部材２６が回転し、可動部材２６の軸２６ａから回転出
力が取り出される。The movable member 26 has a shaft 26a, and the shaft 2
6a denotes minute openings 10a, 1 provided on the substrates 10, 12.
It extends from 2a to the outside. Therefore, the shaft 26a of the movable member 26 becomes the rotation output shaft of the fine motor. In this configuration, when a voltage is applied between both electrodes 14 and 16, the liquid crystal 2
4 vibrates or convects depending on the frequency, and as a result, the movable member 26 rotates, and the rotation output is taken out from the shaft 26a of the movable member 26.
【００１５】図３は本発明の第３実施例を示す図であ
る。この実施例は微細ピストンに応用したものである。
図１と同様に、電極１４，１６及び配向膜１８，２０を
有する基板１０，１２及びスペーサ２２に囲まれた領域
には液晶２４が満たされている。可動部材２６は、液晶
２４に接触するように基板１０，１２の間に配置されて
いる。可動部材２６は一定の翼状の形状を有し、矢印で
示されるように、液晶２４の状態が変化すると並進運動
が誘起されるようになっている。FIG. 3 is a diagram showing a third embodiment of the present invention. This embodiment is applied to a fine piston.
Similar to FIG. 1, liquid crystal 24 is filled in a region surrounded by the substrates 10 and 12 having the electrodes 14 and 16 and the alignment films 18 and 20 and the spacer 22. The movable member 26 is arranged between the substrates 10 and 12 so as to contact the liquid crystal 24. The movable member 26 has a fixed wing shape, and as shown by an arrow, a translational motion is induced when the state of the liquid crystal 24 changes.
【００１６】この可動部材２６は軸２６ｂを有し、軸２
６ｂは基板１０，１２に設けた微小な開口部１０ａ，１
２ａから外部に延びる。従って、この可動部材２６の軸
２６ｂにピストン可動部分を接続しておくと、微細ピス
トンが得られる。両電極間１４，１６に電圧を印加する
と、液晶２４が周波数に応じて振動あるいは対流し、そ
の結果可動部材２６が並進運動し、可動部材２６の軸２
６ｂから並進出力が取り出される。The movable member 26 has a shaft 26b, and the shaft 2
6b denotes minute openings 10a, 1 provided on the substrates 10, 12.
It extends from 2a to the outside. Therefore, if a piston movable portion is connected to the shaft 26b of the movable member 26, a fine piston can be obtained. When a voltage is applied to both electrodes 14 and 16, the liquid crystal 24 vibrates or convects in accordance with the frequency, and as a result, the movable member 26 moves in translation and the axis 2 of the movable member 26 moves.
The translational output is taken from 6b.
【００１７】なお、図２、図３の装置は、露光とエッチ
ングを用いるフォトリソグラフィ技術によって微細に製
造可能である。また、可動部材２６は軸２６ａ又は軸２
６ｂは、基板１０，１２に設けた微小な開口部１０ａ，
１２ａから外部に延びる。このような構造は、可動部材
２６を基板１０，１２間に挿入し、軸２６ａ又は軸２６
ｂが基板１０，１２の開口部１０ａ，１２ａから外部に
突出した状態で、液晶２４を真空注入するとよい。すな
わち、軸２６ａ又は軸２６ｂが突出した基板１０，１２
を真空雰囲気にし、そこで開口部１０ａ，１２ａに液晶
２４を滴下し、そこで基板１０，１２を常圧状態に戻す
ことにより、圧力差及び毛細管現象により液晶２２が基
板１０，１２間に進入する。注入後は、液晶２４のもつ
表面張力のため、液晶２４は洩れずに基板１０，１２間
に保持され、軸受けにもなる。The apparatus shown in FIGS. 2 and 3 can be finely manufactured by a photolithography technique using exposure and etching. In addition, the movable member 26 is the shaft 26a or the shaft 2.
6b is a minute opening 10a provided on the substrates 10 and 12,
It extends from 12a to the outside. In such a structure, the movable member 26 is inserted between the substrates 10 and 12, and the shaft 26a or the shaft 26 is inserted.
It is advisable to inject the liquid crystal 24 in a vacuum while b is projected to the outside from the openings 10a and 12a of the substrates 10 and 12. That is, the substrates 10 and 12 with the shaft 26a or the shaft 26b protruding
Is made a vacuum atmosphere, the liquid crystal 24 is dropped in the openings 10a and 12a, and the substrates 10 and 12 are returned to the normal pressure state there, so that the liquid crystal 22 enters between the substrates 10 and 12 due to the pressure difference and the capillary phenomenon. After the injection, the liquid crystal 24 is held between the substrates 10 and 12 without leaking due to the surface tension of the liquid crystal 24 and also serves as a bearing.
【００１８】図４は本発明の第４実施例を示す図であ
る。この実施例は光を反射、遮断、又は吸収する光学素
子の一つとしてのマイクロポリゴンミラーに応用したも
のである。図１と同様に、電極１４，１６及び配向膜１
８，２０を有する基板１０，１２及びスペーサ２２に囲
まれた領域には液晶２４が満たされている。可動部材２
６は、液晶２４に接触するように基板１０，１２の間に
配置されている。可動部材２６はプロペラ状の形状を有
し、矢印で示されるように、液晶２４の状態が変化する
と回転が誘起されるようになっている。FIG. 4 is a diagram showing a fourth embodiment of the present invention. This embodiment is applied to a micropolygon mirror as one of optical elements that reflect, block, or absorb light. Similar to FIG. 1, the electrodes 14 and 16 and the alignment film 1
A liquid crystal 24 is filled in a region surrounded by the substrates 10 and 12 having 8 and 20 and the spacer 22. Movable member 2
6 is arranged between the substrates 10 and 12 so as to contact the liquid crystal 24. The movable member 26 has a propeller shape, and rotation is induced when the state of the liquid crystal 24 changes, as indicated by the arrow.
【００１９】この可動部材２６は軸２６ａを有し、軸２
６ａは基板１０，１２に設けた微小な開口部１０ａ，１
２ａから外部に延びる。この可動部材２６は多角錐状の
反射面２８を有し、入射光Ａが反射面２８の一つで反射
し、反射光Ｂと進むようになっている。可動部材２６が
回転するにつれて反射面２８の位置が変わることは公知
のポリゴンミラーと同様である。なお、実施例では、基
板１０，１２が透明であり、多角錐状の反射面２８は基
板１０，１２内に設けられているが、多角錐状の反射面
２８を基板１０，１２の外側に設けることもできる。The movable member 26 has a shaft 26a, and the shaft 2
6a denotes minute openings 10a, 1 provided on the substrates 10, 12.
It extends from 2a to the outside. The movable member 26 has a polygonal pyramidal reflecting surface 28, and the incident light A is reflected by one of the reflecting surfaces 28 and proceeds to the reflected light B. The position of the reflecting surface 28 changes as the movable member 26 rotates, similar to a known polygon mirror. In the embodiment, the substrates 10 and 12 are transparent, and the polygonal pyramidal reflecting surface 28 is provided inside the substrates 10 and 12, but the polygonal pyramidal reflecting surface 28 is provided outside the substrates 10 and 12. It can also be provided.
【００２０】図５は本発明の第５実施例を示す図であ
る。この実施例は光を反射、遮断、又は吸収する光学素
子の一つとしてのマイクロ光スイッチに応用したもので
ある。図１と同様に、電極１４，１６及び配向膜１８，
２０を有する基板１０，１２及びスペーサ２２に囲まれ
た領域には液晶２４が満たされている。可動部材２６
は、液晶２４に接触するように基板１０，１２の間に配
置されている。可動部材２６は一定の翼状の形状を有
し、矢印で示されるように、液晶２４の状態が変化する
と並進運動が誘起されるようになっている。FIG. 5 is a diagram showing a fifth embodiment of the present invention. This embodiment is applied to a micro optical switch as one of optical elements that reflect, block, or absorb light. Similar to FIG. 1, the electrodes 14, 16 and the alignment film 18,
The region surrounded by the substrates 10 and 12 having 20 and the spacer 22 is filled with the liquid crystal 24. Movable member 26
Are arranged between the substrates 10 and 12 so as to contact the liquid crystal 24. The movable member 26 has a fixed wing shape, and as shown by an arrow, a translational motion is induced when the state of the liquid crystal 24 changes.
【００２１】この可動部材２６は傾斜した反射面３０を
有し、入射光Ａが反射面３０で反射し、反射光Ｂとして
進む。可動部材２６が並進運動をするにつれて、実線及
び破線で示されるように、反射光Ｂの光路が切り替わ
る。また、光を反射、遮断、又は吸収する光学素子とし
ては、上記のマイクロポリゴンミラー及びマイクロ光ス
イッチの他に、マイクロチョッパ等とすることもでき
る。The movable member 26 has an inclined reflecting surface 30, and the incident light A is reflected by the reflecting surface 30 and travels as reflected light B. As the movable member 26 makes a translational motion, the optical path of the reflected light B switches as shown by the solid line and the broken line. Further, as an optical element that reflects, blocks, or absorbs light, a micro chopper or the like can be used in addition to the above micro polygon mirror and micro optical switch.
【００２２】[0022]
【発明の効果】以上説明したように、本発明によれば、
液晶をエネルギー伝達源とする新規のマイクロマシン駆
動装置を得ることができ、マイクロマシンの応用に寄与
するところが大きい。As described above, according to the present invention,
It is possible to obtain a novel micromachine driving device that uses liquid crystal as an energy transmission source, and it greatly contributes to the application of the micromachine.
【図１】本発明の第１実施例を示す図である。FIG. 1 is a diagram showing a first embodiment of the present invention.
【図２】本発明の第２実施例を示す図である。FIG. 2 is a diagram showing a second embodiment of the present invention.
【図３】本発明の第３実施例を示す図である。FIG. 3 is a diagram showing a third embodiment of the present invention.
【図４】本発明の第４実施例を示す図である。FIG. 4 is a diagram showing a fourth embodiment of the present invention.
【図５】本発明の第５実施例を示す図である。FIG. 5 is a diagram showing a fifth embodiment of the present invention.
１０，１２…基板 １４，１６…電極 ２４…液晶 ２６…可動部材 10, 12 ... Substrate 14, 16 ... Electrode 24 ... Liquid crystal 26 ... Movable member
Claims (4)
に注入された液晶（２４）と、少なくとも一部が該液晶
に接触し、該液晶への電圧印加による該液晶の状態の変
化に応じて動作する可動部材（２６）とを備えたマイク
ロマシン駆動装置。1. A plurality of electrodes (14, 16), a liquid crystal (24) injected between the electrodes, and at least a part of the liquid crystal (24) contacting the liquid crystal, and a state of the liquid crystal by applying a voltage to the liquid crystal. A micromachine driving device comprising a movable member (26) that operates according to a change.
数及び波形の少なくとも一つを変化させることにより、
該可動部材の動作を制御するようにしたことを特徴とす
る請求項１に記載のマイクロマシン駆動装置。2. By changing at least one of a voltage value, a frequency and a waveform of a voltage applied to the liquid crystal,
The micromachine driving device according to claim 1, wherein the operation of the movable member is controlled.
なくとも一方を行うようにしたことを特徴とする請求項
１に記載のマイクロマシン駆動装置。3. The micromachine driving device according to claim 1, wherein the movable member is configured to perform at least one of a rotational movement and a translational movement.
れた部材が、光を反射、遮断、又は吸収するようにした
ことを特徴とする請求項１に記載のマイクロマシン駆動
装置。4. The micromachine driving device according to claim 1, wherein a part of the movable member or a member connected to the movable member reflects, blocks, or absorbs light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19547292A JPH0646584A (en) | 1992-07-22 | 1992-07-22 | Micromachine driver |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19547292A JPH0646584A (en) | 1992-07-22 | 1992-07-22 | Micromachine driver |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0646584A true JPH0646584A (en) | 1994-02-18 |
Family
ID=16341656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19547292A Withdrawn JPH0646584A (en) | 1992-07-22 | 1992-07-22 | Micromachine driver |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0646584A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003031827A1 (en) * | 2001-10-01 | 2003-04-17 | Kochi University Of Technology | Mechanism and method for forming liquid crystal flow, and object moving mechanism using liquid crystal flow |
| JP2005121700A (en) * | 2003-10-14 | 2005-05-12 | Stanley Electric Co Ltd | Fluid and device using the fluid |
| JP2007071225A (en) * | 2005-09-02 | 2007-03-22 | Kochi Univ Of Technology | Liquid-crystal flow formation mechanism and method utilizing liquid-crystal defects, and object movement mechanism and method utilizing liquid-crystal flow |
| JP2008199824A (en) * | 2007-02-14 | 2008-08-28 | Kochi Univ Of Technology | Energy storage device |
| JP2010197685A (en) * | 2009-02-25 | 2010-09-09 | Kochi Univ Of Technology | Object moving mechanism using phase transition between liquid-liquid crystal, and method for moving object |
| JP2010275529A (en) * | 2010-03-29 | 2010-12-09 | Stanley Electric Co Ltd | Fluid, display using the fluid, and micromachine |
| WO2012029308A1 (en) * | 2010-09-01 | 2012-03-08 | 公立大学法人高知工科大学 | Object movement mechanism and object movement mechanism using interaction between liquid-liquid crystal phase transition and disturbance of orientation field |
| WO2012029307A1 (en) * | 2010-09-01 | 2012-03-08 | 公立大学法人高知工科大学 | Object movement mechanism and object selection mechanism using liquid-liquid crystal phase transition |
-
1992
- 1992-07-22 JP JP19547292A patent/JPH0646584A/en not_active Withdrawn
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003031827A1 (en) * | 2001-10-01 | 2003-04-17 | Kochi University Of Technology | Mechanism and method for forming liquid crystal flow, and object moving mechanism using liquid crystal flow |
| US7826029B2 (en) | 2001-10-01 | 2010-11-02 | Kochi University Of Technology | Liquid crystal flow forming mechanism, method of forming same, and object moving mechanism using liquid crystal flow |
| US8363172B2 (en) | 2001-10-01 | 2013-01-29 | Kochi University Of Technology | Liquid crystal motor making use of flow of liquid crystal |
| JP2005121700A (en) * | 2003-10-14 | 2005-05-12 | Stanley Electric Co Ltd | Fluid and device using the fluid |
| JP4558299B2 (en) * | 2003-10-14 | 2010-10-06 | スタンレー電気株式会社 | Fluid, display device using the fluid, and micromachine |
| JP2007071225A (en) * | 2005-09-02 | 2007-03-22 | Kochi Univ Of Technology | Liquid-crystal flow formation mechanism and method utilizing liquid-crystal defects, and object movement mechanism and method utilizing liquid-crystal flow |
| JP2008199824A (en) * | 2007-02-14 | 2008-08-28 | Kochi Univ Of Technology | Energy storage device |
| JP2010197685A (en) * | 2009-02-25 | 2010-09-09 | Kochi Univ Of Technology | Object moving mechanism using phase transition between liquid-liquid crystal, and method for moving object |
| JP2010275529A (en) * | 2010-03-29 | 2010-12-09 | Stanley Electric Co Ltd | Fluid, display using the fluid, and micromachine |
| WO2012029308A1 (en) * | 2010-09-01 | 2012-03-08 | 公立大学法人高知工科大学 | Object movement mechanism and object movement mechanism using interaction between liquid-liquid crystal phase transition and disturbance of orientation field |
| WO2012029307A1 (en) * | 2010-09-01 | 2012-03-08 | 公立大学法人高知工科大学 | Object movement mechanism and object selection mechanism using liquid-liquid crystal phase transition |
| JP2012072761A (en) * | 2010-09-01 | 2012-04-12 | Kochi Univ Of Technology | Object movement mechanism and object movement method using interaction between liquid-liquid crystal phase transition and liquid crystal defect |
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| A300 | Withdrawal of application because of no request for examination |
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