JP2001013895A - Minute object driving device, and driving method thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a device for moving a minute object as desired from being increased in electric power consumption and physical size. SOLUTION: When an alternating voltage of a specific waveform is applied to a couple of electrodes 3a and 3b, a minute object 5 moves in a plane almost parallel with substrates 1a and 1b in a region C1 between a couple of electrodes 3a, 3b. The device is simplified and miniaturized compared with a conventional device which moves such a minute object by using laser light. Moreover, since the movement of the minute object 5 is carried out in the region C1 as mentioned above, the transducing efficiency of the consumed electric energy into kinetic energy is improved, and the power consumption can be decreased.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micro object driving device for causing a micro object to perform a desired motion.

[0002]

2. Description of the Related Art In recent years, with the development of micromechanical technology, biotechnology, and the like, there has been an increasing need for a technology for causing a minute object to perform a desired motion. A method for causing a minute object to move as described above includes the following. A method of irradiating a laser beam passed through an objective lens to a minute object in a fluid and using a change in momentum caused by refraction or the like of the laser beam at that time; There is a method in which a voltage is applied to a fluid to generate convection, thereby moving a minute object in the fluid.

[0003] As the method A described above, A-1. A device in which a minute object is rotated (JP-A-5-168265), A-2. A device in which a minute object is trapped by a laser beam and moved in a desired direction; A-3. There have been proposed many types in which a minute object is made to make a circular motion on a desired orbit.

[0004] As the method B, B-1. As shown in FIG. 8, a liquid crystal (fluid) 22 is disposed in a gap between a pair of substrates 1a and 1b on which electrodes 23a and 23b are formed, respectively, and a region C ₂ not sandwiched between these electrodes 23a and 23b. (Hereinafter, this area is referred to as an “electrode non-opposed area C ₂ ”, and the electrodes 23a and 23b
(A region sandwiched between the electrodes is referred to as an “electrode facing region C ₁ ”) in which a rotator (a minute object) 25 is disposed in the liquid crystal. By applying a voltage to these electrodes 23 a and 23 b, to generate a liquid flow 26 from one electrode 23b in the direction of the other electrode 23a in C _1, the liquid crystal flow 26 to generate a convection vortex 27 due to the power to rotate the rotor 25 by convection vortex 27 What is generated (Japanese Patent Laid-Open No. 6-294374)
And B-2. Using an insulating oil containing a specific compound (organic fluorine compound) as a fluid, arranging a plurality of wire-like electrodes, and applying a DC voltage to these electrodes to cause the fluid to convect, thereby obtaining a fluid (Japanese Patent Application Laid-Open No. H8-210240) has been proposed in which a movable member (a minute object) disposed inside is rotated.

The direction of rotation of the movable member in B-2 is controlled by changing the electrode to which a voltage is applied among the plurality of electrodes. The flow of the fluid is formed by moving from one electrode to the other electrode.

[0006]

However, the above-mentioned prior art has various problems.

For example, in the case of the device A, there is a problem that an optical system such as a laser light source and an objective lens is required, and it is difficult to reduce the thickness. In particular, in the case of the above A-1, it is necessary to provide a plurality of laser light sources, and an optical system for circularly polarizing the laser light is required. In the case of the above A-2, the laser light An optical system or a mechanical system for moving the focal position in a desired moving direction is required, and it has been difficult to reduce the thickness of the apparatus.

On the other hand, in the case of the device B-1, the rotor 2
_No. 5 is only driven to rotate by the liquid crystal flow 26 on the side of the electrode facing region C ₁ , but is not driven to rotate on the side of the electrode non-facing region C ₂ . Therefore, the kinetic energy taken out through the rotor 25 is equal to the applied voltage (ie,
However, there is a problem that the energy conversion efficiency is low because of the small amount of consumed electric energy. Further, in the case of this device, the rotation axis of the rotor 25 must be arranged in a direction along the substrate surface (that is, a direction perpendicular to the paper surface of FIG. 8), and the substrate 1a and the substrate 1b In order to arrange and rotate the rotating shaft between them, a large gap of 100 μm or more (see reference symbol G) must be provided, and there is also a problem that there is a limit in reducing the thickness of the device. Furthermore, in the case of this device, it is impossible to arrange the rotor 25 in the electrode facing region C _1, the direction along the substrate surface, the electrode facing region C ₁
And a wide electrode non-facing region C _{2 where} the rotor 25 can be placed.
Has to be provided, and there is a problem that the apparatus is enlarged in the direction.

On the other hand, in the case of the device B-2,
There is a problem that the structure becomes complicated because a plurality of wire-like electrodes are arranged. In addition, in order to reverse the rotation direction of the movable member, it is necessary to reselect a specific electrode from among a plurality of electrodes, and there has been a problem that a driving method and a driving circuit are complicated.

Accordingly, an object of the present invention is to provide a micro object driving device that prevents the device from becoming large and complicated.

Another object of the present invention is to provide a minute object driving device that reduces waste of power consumption.

[0012]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has a pair of substrates arranged with a predetermined gap therebetween, and an electric field response arranged in a gap between these substrates. Liquid, at least one minute object movably disposed in the field responsive liquid, a pair of electrodes disposed so as to sandwich the field responsive liquid, and a voltage for applying a voltage to these electrodes Applying a predetermined voltage from the voltage applying means to the pair of electrodes, the micro object is applied to a region sandwiched between the pair of electrodes. And moving in a plane substantially parallel to the substrate.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS.
An embodiment of the present invention will be described.

First, the structure of a micro object driving device driven by the present invention will be described with reference to FIGS.

The minute object drive unit driven by the invention, for example as indicated at D ₁ in FIG. 1, a pair of substrates 1a arranged with a predetermined spacing, and 1b, these substrates 1a Field-responsive liquid 2 arranged in the gap between
And at least one micro object 5 movably arranged in the electro-responsive liquid, a pair of electrodes 3a, 3b arranged so as to sandwich the electro-responsive liquid 2, and these electrodes 3a, 3b Voltage applying means 4 for applying a voltage to
The micro object 5 is placed in a region C between the pair of electrodes 3a and 3b based on applying a predetermined voltage from the voltage applying unit 4 to the pair of electrodes 3a and 3b. ₁ (hereinafter referred to as “electrode facing region C ₁ ”)
Is configured to move in a plane substantially parallel to the substrates 1a and 1b.

The above-mentioned minute object 5 may be entirely immersed in the field-responsive liquid, or only a part thereof may be immersed in the field-responsive liquid. Also,
FIG. 1 shows only one micro object 5, but the number is one.
The number is not limited to two, and may be two or more or many. Further, the minute object 5 may be a dielectric material and does not dissolve in the electro-responsive liquid 2 (when a liquid crystal is used for the electro-responsive liquid 2 as described later, the micro object 5 has a temperature below the isotropic liquid transition temperature of the liquid crystal). The material is not particularly limited as long as it does not dissolve in the liquid crystal, and for example, polymer beads, metal oxide fine particles, organic molecular aggregates, or the like may be used. Further, the shape itself is not particularly limited, and may be spherical, flat, or acicular. However, the size of one minute object 5 must be smaller than the thickness of the liquid layer in a state of being immersed in the electro-responsive liquid 2 (even if the liquid is absorbed or chemically changed) and must be movable. Must. For example, 1 mm
The following sizes are preferred.

It should be noted that a power transmission mechanism (not shown) may be connected to each minute object 5 so that the movement of the minute object 5 is taken out of the apparatus as a driving force. Specifically, in the case of the rotation motion to the minute object 5 as described later, connected to the rotation shaft of the power transmission mechanism to the minute object 5, may be used apparatuses D ₁ as a micro-motor, a micro pump, etc. .

On the other hand, the electric field responsive liquid 2 used in the present invention means a liquid whose orientation, viscosity and optical properties of molecules constituting the liquid 2 are changed by applying a voltage. The electric field responsive liquid 2 may be made of any material as long as it can induce a desired movement of the minute object 5 by inducing a flow by applying a voltage. Examples thereof include liquid crystals and electrorheological fluids. When a liquid crystal is used, its type and structure are not particularly limited, and a mixed liquid crystal in which two or more types of liquid crystals are mixed may be used. However, in order to easily express the liquid crystal flow, the device is driven. It is preferable that the liquid crystal can exhibit at least a nematic phase or a cholesteric phase within a temperature range.

On the other hand, at least one of the pair of electrodes 3a and 3b (the electrode 3b in FIG. 1) or both electrodes may be formed in a stripe shape. The electrode formed in a stripe shape is denoted by reference numeral 3 in FIG. 2, for example.
As shown by b, it may be formed in an "E" shape in which only one end is connected, or a "day" shape in which both ends are respectively connected. Also, both electrodes 3a, 3b
Are formed in a stripe shape, they are preferably arranged so as to be orthogonal to each other. Further, in FIG. 1 and FIG.
b is in the form of three stripes, but need not be limited to this, and may be two or four or more.

On the other hand, a film 6 is provided on the surface of each of the electrodes 3a and 3b.
a and 6b may be formed respectively. Such films 6a, 6
Examples of b include those having an insulating function, those having a function of aligning the liquid crystal when a liquid crystal is used as the electric field responsive liquid, and those having both functions. Although there is no particular limitation on the material and the like of these films 6a and 6b, for example, a polyimide film is preferably used. In order to provide the films 6a and 6b with a function of aligning liquid crystal,
A horizontal alignment treatment such as a rubbing treatment is preferably performed on the film surface.
The rubbing treatment in this case may be performed on both the films 6a and 6b covering both the electrodes 3a and 3b, but in such a case, the rubbing directions may be opposite to each other. . In the case where the film 6a or 6b is formed on the surface of the electrode 3a or 3b formed in a stripe shape as described above, the concave portion E due to the gap between the stripe-shaped electrodes is formed by the film (in FIG. 1, the film E). It may be formed on the surface of 6b).

On the other hand, a spacer (not shown) may be arranged in the gap between the substrates to define the gap.

Next, a driving method of the micro object driving device according to the present invention will be described with reference to FIGS.

[0023] Now, the pair of electrodes 3a from the voltage applying means 4, the application of a voltage to 3b, the minute object 5, the pair of electrodes 3a, in the electrode facing region C ₁ sandwiched 3b It moves in a plane substantially parallel to the substrates 1a and 1b.

Here, the voltage applied to the pair of electrodes 3a and 3b may be an alternating voltage. Specifically, in addition to the alternating voltage of a rectangular wave as shown in FIG. Examples of the voltage include a voltage, an alternating voltage of a triangular wave, and an alternating voltage of a sawtooth wave. In this case, the peak value (V1) of the positive polarity pulse and the peak value (V2) of the negative polarity pulse may be made different. In order to create such an alternating voltage, the peak value of the positive polarity pulse and the negative pulse And the offset voltage may be combined with the alternating voltage having the same peak value. The magnitude of the absolute value of the offset voltage is not particularly limited as long as the desired motion can be expressed in the minute object 5.

By the way, if the frequency and peak value V1 and V2 of the alternating voltage are small, the flow of the electric field responsive liquid 2 is small, and if the frequency and peak value are large (the flow is large) 5 is the electrode 3a or 3
In this case, the minute object 5 cannot perform a desired movement in any case. Therefore, the frequency and peak value of the alternating voltage applied to the pair of electrodes 3a and 3b must be in a range where the minute object 5 can move. The range varies depending on the type of the electric field responsive liquid 2, the material and size of the minute object 5, and the material of the films 6a and 6b, but the frequency of the alternating voltage is preferably in a range of 10 Hz to 5 kHz. (More preferably, 50
Hz or more and 5 kHz or less), peak values V1 and V2 of the alternating voltage
Indicates that the electric field strength formed between the electrodes is 1 V / μm or more.
V / μm or less (more preferably 3 V / μm or more and 13 V /
μm or less, more preferably 10 V / μm or more and 13 V /
μm or less) is preferable.

When it is desired to cause the minute object 5 to move linearly, * films 6a and 6b are formed on the surfaces of the electrodes 3a and 3b, respectively. * Both films 6a and 6b are subjected to rubbing treatment, respectively. * The electrodes 3a, 3b have a shape extending at least along the rubbing direction (for example, if the electrodes are formed to be wide over substantially the entire surface of the substrate 1a, 1b, or to be elongated, the electrodes 3a, 3b have a longitudinal direction. In this case, the moving direction of the minute object 5 is a direction along the rubbing direction.

On the other hand, when it is desired to cause the minute object 5 to rotate, * the rubbing treatment as described above is not performed, * the width of the electrodes 3a and 3b and the gap between the electrodes (reference G in FIG. 1).
See), both substantially equal to the outer diameter of the minute object 5, * both electrodes 3a, by intersecting the 3b narrows the electrode facing region C ₁ which is the intersection, limits the movement area of the minute object 5 There is a need to.

When it is desired to make the minute object 5 make a circular motion, * the rubbing treatment is not performed, * the gap G between the electrodes is made larger than the outer diameter of the minute object 5, and * the width of the electrodes 3a, 3b is increased. wider than the outer diameter of the minute object 5 (e.g., more than twice), * both electrodes 3a, 3b crossed to narrow the electrode facing region C ₁ which is a cross portion, the area of movement of the minute object 5 Limited, need.

On the other hand, when there are a plurality of minute objects 5,
All the small objects 5 perform the same motion (rotational motion, circular motion or linear motion), but in the case of circular motion, circular motion in the same direction along a plurality of concentric orbits as shown in FIG. do. Note that both electrodes 3a, but occurs more electrodes facing region C ₁ in the case of arranging 3b the orthogonally in stripes, in such a case, the minute object 5 each disposed in each of the regions C ₁ the performing the circular motion or rotation motion at the region C _1.

Next, effects of the present embodiment will be described.

According to the present embodiment, various motions such as a linear motion, a circular motion, and a rotation motion can be expressed in the minute object 5.
When it is connected to a motor, the electric energy can be converted into kinetic energy and used as a micromotor or a micropump.

Further, according to the present embodiment, an optical system such as a laser light source is not required unlike the conventional example A, and a complicated electrode and a driving circuit are not required unlike the conventional example B-2. Therefore, the structure of the device can be simplified and its thickness can be reduced.

Further, according to the present embodiment, even when a rotary shaft is connected to each minute object 5 as a power transmission mechanism, the direction in which the rotary shaft extends is the same as that of the conventional example B.
The direction is not “direction along the substrate surface” like “−1” but “direction perpendicular to the substrate surface”. Therefore, the substrate 1a and the substrate 1
There is no need to provide a gap for rotating the rotating shaft between the rotating shaft and the rotating shaft b, and in this regard, the thickness of the device can be reduced.

Further, according to the present embodiment, the rotation of the minute object 5 is performed by the liquid flows generated in opposite directions on both sides of the minute object 5, and
It is not done with only one side flow 26 as in the case of the -1 device. For this reason, even when the rotary shaft is connected to the minute object 5 as a power transmission mechanism, the conversion efficiency in converting electric energy to kinetic energy is improved, and waste of power consumption can be reduced.

According to the present embodiment, the minute object 5
Rather than movement at the electrode non-facing region C ₂ as the above prior art B-1, moves in the electrode facing region C _1.
Therefore, the electrode non-facing region C ₂ can reduce without considering the space for the minute object 5 is moving, correspondingly, the apparatus can be downsized.

[0036]

The present invention will be described below in more detail with reference to examples.

(Embodiment 1) In this embodiment, a minute object driving device shown in FIG. 5 was manufactured.

That is, the substrates 1a and 1b have a size of 8 mm ×
Use a transparent material having a size of 8 mm, and use one transparent electrode 3
b is a stripe, and the other transparent electrode 3a is
It was formed on almost the entire surface of a. Hereinafter, the entirety of the electrode 3b formed in a stripe shape is referred to as “comb-shaped transparent electrode 3” as necessary.
b ", and one of the electrode portions is referred to as an" elongated electrode portion ". In this embodiment, the width of each elongated electrode portion is 1
00 μm, gap between adjacent elongated electrode portions is 50 μm
And

Further, polyimide thin films 6a and 6b are formed on the surfaces of these electrodes 3a and 3b, respectively.
A number of spacers (not shown) were arranged in the gap between the substrates, and the gap was defined to be 15 μm.

On the other hand, in this embodiment, 3
Polymer beads with a particle size of μm (trade name Micropearl B
B, using a large number (not shown) of Sekisui Fine Chemical Co., Ltd., and a nematic liquid crystal (trade name B)
L9, manufactured by Merck) (also not shown).

In driving, a rectangular wave alternating voltage as shown in FIG. 4 was applied to the electrodes 3a and 3b. However,
The duty ratio of this alternating voltage is 50%, the peak value V1 of the positive polarity pulse is 72 V, and the peak value −V2 of the negative polarity pulse.
Was −48 V, and a positive pulse was applied to the comb-shaped transparent electrode 3 b.

When the inventor observed with a microscope, FIG.
To As shown in detail, a plurality of polymer beads 5, with the application of the alternating voltage, the substrate 1a, a plurality of concentric circular orbits a substantially parallel plane with the electrode facing region C ₁ to 1b ( The diameter of the largest circular orbit is almost the same as the width of the elongated electrode part.
(Which was 0 μm) in a clockwise direction. It was also found that a plurality of such concentric orbits were generated along the electrode 3b.

Although the mechanism of the circular motion of the polymer beads 5 has not been completely elucidated, the edges of the electrodes are applied in the direction of the arrow F ₁ (that is, in the direction of the arrow F ₁ , ie, with the application of the voltage).
It is presumed that liquid crystal flows (in opposite directions) occur.

Next, the effect of this embodiment will be described.

According to the present embodiment, the polymer beads could make a circular motion.

Further, the structure of the device can be simplified as compared with the conventional device, and the device can be made thinner.

(Embodiment 2) In this embodiment, both electrodes 3a and 3b are arranged in a stripe shape so as to be orthogonal to each other, and neither polyimide thin film 6a nor 6b is rubbed. Other configurations were the same as in the first embodiment. The electrode width of one of the elongated electrode portions is 200
μm, the electrode width of the other elongated electrode portion is 100 μm,
The gap between adjacent elongated electrode portions is 5
It was set to 0 μm.

In driving, a rectangular wave alternating voltage as shown in FIG. 4 was applied to the electrodes 3a and 3b. However, the duty ratio of this alternating voltage is 50%, the peak value V1 of the positive polarity pulse is 108 V, and the peak value −V2 of the negative polarity pulse.
Was −32 V, and a positive pulse was applied to the electrode 3 b.

When the present inventor observed with a microscope, FIG.
Were found to be the same circular movement as in Example 1 as shown in detail, in the same electrode facing region C _1, one of the polymer beads 5 is a circular motion clockwise, the other polymer beads 5 was found to make a circular motion counterclockwise.

According to this embodiment, the same effects as those of the first embodiment were obtained.

(Embodiment 3) In this embodiment, the same particle driving device as in Embodiment 2 was used.

At the time of driving, a rectangular wave alternating voltage as shown in FIG. 4, a duty ratio of 90%, and a peak value V of a positive polarity pulse
1 is 58V, the peak value of the negative polarity pulse -V2 is -2V, the duty ratio is 90%, and the peak value V of the positive polarity pulse is
1 was 60 V, the peak value of the negative pulse was −4 V, and the following were sequentially applied to the electrodes 3 a and 3 b. However, in each of the alternating voltages, the positive polarity pulse was applied to the electrode 3b.

When the inventor observed with a microscope, the polymer beads 5 performed the same circular motion as in Example 2 when the above-mentioned alternating voltage was applied, and did not move when the above-mentioned alternating voltage was applied. It was found that a circular motion in the opposite direction to that of Example 2 was performed. That is, it was found that the direction of the circular motion could be reversed by the applied alternating voltage.

[0054] In Example 4 This example was prepared a minute object drive unit D ₂ shown in FIG.

That is, both electrodes 13a and 13b are formed on substantially the entire surfaces of the respective glass substrates 1a and 1b.
Both electrodes 13a, 13b are polyimide thin films 6a, 6b
Covered. The upper polyimide thin film 6a was rubbed in the + x direction, and the lower polyimide thin film 6b was rubbed in the -x direction. The sizes of the glass substrates 1a and 1b were set to 8 mm × 8 mm, and the gap between the substrates was set to 8 μm.

When driving, a rectangular wave alternating voltage as shown in FIG. 4, a duty ratio of 50%, and a peak value V of a positive polarity pulse
1 is 56V, and the peak value of the negative polarity pulse -V2 is -64V
And a duty cycle of 50%, and a peak value V of a positive polarity pulse.
1 is 64V and the peak value of the negative polarity pulse -V2 is -56V
And were sequentially applied to the electrodes 13a and 13b. However, in each of the alternating voltages, the positive pulse was applied to the lower electrode 13b in the figure.

When the inventor observed through a microscope, all the polymer beads 5 linearly move in the −x direction when the above-mentioned alternating voltage is applied, and when the above-mentioned alternating voltage is applied, Perform linear motion in the opposite direction (ie, + x direction). That is, it has been found that the polymer beads 5 can be linearly moved by the applied alternating voltage, and the moving direction can be controlled.

[0058] Although the polymer beads 5 has not been completely elucidated the mechanism for linear movement in this way, cause liquid flow in the direction of arrow F ₂ in accordance with the voltage application, the polymer beads according to the type of the alternating voltage to be applied It is presumed that 5 is attracted to the vicinity of one electrode 13a or the other electrode 13b by electrophoretic force, and thereafter linearly moves by liquid crystal flow.

Example 5 In this example, polymer beads (trade name: Micropearl BB, manufactured by Sekisui Fine Chemical Co., Ltd.) having a diameter of 14 μm were used as minute objects. Other configurations were the same as those of the third embodiment.

At the time of driving, as in the case of the third embodiment, the above two types of alternating voltages were applied.

When the inventor observed with a microscope, the polymer beads 5 rotated in the same direction as the circular motion direction when the alternating voltage was applied in the third embodiment when the alternating voltage was applied. It was found that, when the exercise was performed and the above-mentioned alternating voltage was applied, the rotation was performed in the opposite direction. In other words, it was found that the rotation can be realized by increasing the size of the polymer beads 5, and the rotation direction can be reversed by the applied alternating voltage.

[0062]

As described above, according to the present invention,
A variety of motions, such as linear motion, circular motion, and rotational motion, can be expressed in a minute object.When the above-mentioned power transmission mechanism is connected to each minute object, electrical energy is converted to kinetic energy and micro- It can be used as a motor or a micropump.

Further, according to the present invention, since a laser light source, a complicated electrode, and a drive circuit are not required unlike the conventional apparatus, the structure of the apparatus can be simplified and its thickness can be reduced.

Further, according to the present invention, when a rotating shaft is connected as a power transmission mechanism to each minute object, the direction in which the rotating shaft extends is not a direction along the substrate surface but a direction perpendicular to the substrate surface. Direction. Therefore, there is no need to provide a gap between the substrate and the substrate so that the rotation shaft is arranged and rotated. In this respect, the thickness of the device can be reduced.

Further, according to the present invention, the rotation of the minute object is performed by the liquid flows generated in opposite directions on both sides of the minute object, and is performed only by the liquid flow on one side as in the conventional apparatus. is not. Therefore, even when the rotating shaft is connected to the minute object as a power transmission mechanism, the conversion efficiency in converting electric energy to kinetic energy is improved, and waste of power consumption can be reduced.

According to the present invention, the minute object does not move in the non-electrode opposing region as in the conventional device,
It moves in the electrode facing area. Therefore, the non-electrode non-facing region can be reduced without considering the space for the movement of the minute object, and the device can be downsized accordingly.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing an example of the structure of a minute object driving device according to the present invention.

FIG. 2 is a perspective view showing an example of a structure (particularly, an electrode shape) of the minute object driving device according to the present invention.

FIG. 3 is a schematic diagram for explaining a state of movement of a minute object.

FIG. 4 is a waveform diagram showing a waveform of an alternating voltage applied to the minute object driving device according to the present invention.

FIG. 5 is a perspective view showing an example of the structure of the minute object driving device according to the present invention.

FIG. 6 is a schematic diagram for explaining a state of movement of a minute object.

FIG. 7 is a cross-sectional view showing an example of the structure of the minute object driving device according to the present invention.

FIG. 8 is a cross-sectional view illustrating an example of the structure of a conventional device.

[Explanation of symbols]

1a, 1b Substrate 2 Liquid crystal (electric field responsive liquid) 3a, 3b Electrode 4 Voltage applying means 5 Polymer bead (small object) 6a, 6b Polyimide thin film (film) D ₁ Small object driving device

Claims (16)

[Claims] 1. A pair of substrates arranged with a predetermined gap therebetween, an electric field responsive liquid arranged in a gap between these substrates, and at least one substrate movably arranged in the electric field responsive liquid. A minute object, a pair of electrodes arranged so as to sandwich the electro-responsive liquid, and voltage applying means for applying a voltage to these electrodes, a micro object driving device, comprising: Based on applying a predetermined voltage to the pair of electrodes, the minute object is configured to move in a plane substantially parallel to the substrate in a region sandwiched between the pair of electrodes. A small object driving device characterized by the above-mentioned. 2. The micro object driving device according to claim 1, wherein the electric field responsive liquid is a liquid crystal. 3. The device according to claim 2, wherein the electric field responsive liquid is a liquid crystal capable of exhibiting at least a nematic phase or a cholesteric phase within a temperature range for driving the device. 4. The micro object driving device according to claim 2, wherein the electric field responsive liquid is a mixed liquid crystal in which two or more liquid crystals are mixed. 5. A film is formed on the surface of each of the pair of electrodes, and rubbing is performed on each of the films. The electrodes have a shape extending at least along a rubbing direction, and The device for driving a minute object according to any one of claims 2 to 4, wherein the device is configured to perform a linear motion along the rubbing direction. 6. The small object driving device according to claim 5, wherein the rubbing directions of the pair of films are opposite to each other. 7. The width of the electrode and the gap between the electrodes are both substantially equal to the outer diameter of the minute object, the pair of electrodes are arranged to intersect, and the minute object is located at the intersection. The micro object driving device according to any one of claims 1 to 6, wherein the device is configured to perform a self-rotational motion. 8. The width of the electrode and the gap between the electrodes are both larger than the outer diameter of the minute object, the pair of electrodes are arranged to intersect, and the minute object is located at the intersection. The micro object driving device according to any one of claims 1 to 6, wherein the micro object driving device is configured to perform a circular motion. 9. The micro object driving device according to claim 1, wherein the pair of electrodes are arranged in a stripe shape so as to be orthogonal to each other. 10. The minute object driving device according to claim 1, wherein the minute object is a dielectric. 11. The micro object driving device according to claim 10, wherein the micro object does not dissolve in the electro-responsive liquid. 12. The micro object driving device according to claim 1, wherein the voltage applied by the voltage applying unit is an alternating voltage. 13. The device according to claim 12, wherein the alternating voltage includes a positive pulse and a negative pulse. 14. The micro object driving device according to claim 13, wherein the peak value of the positive pulse and the peak value of the negative pulse are different values. 15. The minute object driving device according to claim 12, wherein a frequency of the alternating voltage is 10 Hz or more and 5 kHz or less. 16. The peak value of the alternating voltage is in a range where an electric field intensity formed between the electrodes is 1 V / μm or more and 13 V / μm or less. Item 2. The minute object driving device according to Item 1.