JPH0645307A - Work cleaning apparatus - Google Patents

Abstract

PURPOSE:To reduce the size of a processing tank, reduce amount of cleaning solution and also reduce the solution remaining on a work in a work cleaning apparatus. CONSTITUTION:A rotatable spin head 6, which supports from the lower side a work 1 transferred by a transfer roller system 3 and also supports the work 1 inclined at the predetermined angle, is provided in the proximity to spray nozzles 4a to 4m within a processing tank 2 which receives the cleaning solution injected to the work 1 and a shaft 7 of this spin head 6 is provided with a rotating drive mechanism 8 which moves upward and downward the spin head 6 to the upper part from the lower part of the transfer roller system 3 and also rotates the spin head at a low speed. Thereby, the processing tank 2 can be reduced in size, amount of cleaning solution can also be reduced and the solution remaining on the work 1 can also be reduced.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work washing processing apparatus for washing a work such as a glass substrate after removing resist in a photoresist process in the manufacture of semiconductor parts and the like. Further, the present invention relates to a work cleaning processing device capable of reducing the residual liquid on the work.

[0002]

2. Description of the Related Art A conventional work cleaning device of this type is
As shown in FIG. 4, a processing tank 2 that receives a cleaning liquid sprayed onto a work 1 such as a glass substrate, and two workpieces 1 arranged at predetermined intervals from one end of the processing tank 2 toward the other end thereof. And a plurality of spray nozzles 4a to 4m which are provided above and below the transport roller system 3 so as to face each other and spray a cleaning liquid onto the upper and lower surfaces of the work 1. . And from the previous process to the transfer line 5
The work 1 conveyed by a conveyance roller (not shown) along the shutter is a shutter (not shown) at the entrance of the processing tank 2.
The transfer rollers 3a, 3 of the transfer roller system 3 are transferred to the processing tank 2 in an open state, and after the shutter is closed.
.., 3n are conveyed in the processing tank 2 and spray nozzles 4 provided above and below the conveying roller system 3 are conveyed.
.., 4 m, the cleaning liquid was sprayed from the spray nozzles 4 a to 4 m to clean the upper and lower surfaces of the work 1.

At this time, since the entire surface of the work 1 is thoroughly washed with the cleaning liquid, the conveyance rollers 3a to 3n rotate to move the work 1 forward or backward in the feeding direction by the length of one sheet. Spray nozzles 4a-4m
The cleaning liquid was sprayed from the cleaning.

[0004]

However, in such a conventional work cleaning processing apparatus, the work 1 is sprayed on the conveying rollers 3a to 3n while advancing and retreating in the feeding direction by the length of one sheet. Since the cleaning liquid was sprayed from the nozzles 4a to 4m, the work 1 would move back and forth by a distance of about two sheets at the time of cleaning, and the processing tank 2 would be moved by that much.
Was a big one. Further, in order to spray the cleaning liquid onto the work 1 better, the number of the spray nozzles 4a to 4m may increase. Therefore, the flow rate of the cleaning liquid is increased. Further, since the work 1 is held horizontally on the transport rollers 3a to 3n, the cleaning liquid attached to the upper surface of the work 1 is less likely to flow, and the work 1
As the above residual liquid, it was transferred to the next process as it was, and in the work of the next process, it may be scattered or dropped to cause contamination. Therefore, it is a cause of the final product quality deterioration and the yield reduction.

Therefore, the present invention addresses such a problem and provides a work cleaning apparatus capable of reducing the size of the processing tank, reducing the amount of cleaning liquid, and reducing the residual liquid on the work. With the goal.

[0006]

In order to achieve the above object, a work cleaning apparatus according to the present invention comprises a processing tank for receiving a cleaning liquid sprayed onto a work, and a processing tank from one end to the other end. A conveying roller system arranged in two rows at predetermined intervals for conveying the work, and a plurality of spray nozzles provided above and below the conveying roller system so as to face each other and ejecting a cleaning liquid onto the upper and lower surfaces of the work. In the work cleaning processing device, the work transferred by the transfer roller system is held from the lower surface side in the vicinity of the spray nozzle inside the processing tank, and the work can be tilted at a predetermined angle and supported and rotated. With a spin head
The shaft of the spin head is provided with a rotary drive mechanism that raises and lowers the spin head from below to above the transport roller system and rotates at low speed.

[0007]

The function of the work cleaning processing apparatus thus constructed is
The spin head provided in the vicinity of the spray nozzle inside the processing tank holds the work conveyed by the conveyance roller system from the lower surface side and supports the work while inclining the work at a predetermined angle. With the rotation drive mechanism provided on the shaft, the spin head is raised above the transport roller system and is rotated at a low speed, and the cleaning liquid is sprayed from the spray nozzle to the upper and lower surfaces of the work, so that the work can be performed as in the conventional case. It operates so as to rotate while rotating at a fixed position without moving it back and forth.
This makes it possible to reduce the size of the processing tank and
The residual liquid on the work can be reduced by the tilt support and low speed rotation of the work.

[0008]

Embodiments of the present invention will now be described in detail with reference to the accompanying drawings. FIG. 1 is a front sectional view showing an embodiment of a work cleaning processing apparatus according to the present invention. In the figure, a processing tank 2 receives a cleaning liquid sprayed from spray nozzles 4a to 4m described later on a work 1 such as a glass substrate, and is formed in a box shape with a bottom and an appropriate size. There is. A conveying roller system 3 is provided inside the processing tank 2. The carrying roller system 3 receives the work 1 carried along the carrying line 5 from the previous process outside the processing tank 2, processes it in the processing tank 2, and then sends it to the next process side. As shown in FIG. 3, the processing tank 2 comprises a plurality of transport rollers 3a, 3b, ..., 3d arranged in two rows from one end to the other end at predetermined intervals. In addition, on the transfer line 5, the inlet 2a and the outlet 2 of the processing tank 2 are
A shutter that can be opened and closed is provided at b.

Inside the processing tank 2, near the center,
A plurality of spray nozzles 4a, 4b, ..., 4m are provided. The spray nozzles 4a to 4m are for spraying a cleaning liquid onto the upper and lower surfaces of the work 1 conveyed into the processing tank 2 to clean the work 1. The cleaning liquid is dispersed so as to cover the area and is arranged so as to face each other, and the cleaning liquid is jetted toward the inside.

Here, in the present invention, the processing tank 2 is used.
In the vicinity of the spray nozzles 4a to 4m in the interior of FIG.
The spin head 6 is provided as shown in FIG. 1, and the rotation drive mechanism 8 is provided at the lower end of the shaft 7 of the spin head 6. The spin head 6 holds the work 1 conveyed by the conveyance roller system 3 from the lower surface side, supports the work 1 while inclining the work 1 at a predetermined angle, and rotates the work 1. For example, as shown in FIG. A horizontal arm 9 is provided at the upper end of the shaft 7, and two holding arms 10, 10 are provided horizontally and in parallel inside the two rows of transport rollers 3a to 3d at both ends of the horizontal arm 9. Has been. Then, as shown in FIG. 1, a short holding claw 1 is provided at one end of the two holding arms 10, 10.
1a is erected, and a tall holding claw 11b is erected on the other end. As shown in FIG. 1, a stepped portion on which the side portion of the work 1 is placed is formed inside the holding claws 11a and 11b facing each other.
Due to the difference in height b, an inclination angle θ for supporting the work 1 is provided, as shown in FIG. The inclination angle θ is, for example, about 5 ° to 15 °. Further, in FIG. 3, reference numerals 12a and 12b denote holding claws that hold the other side portions of the work 1 at both ends of the horizontal arm 9.

The rotation drive mechanism 8 provided at the lower end of the shaft 7 of the spin head 6 is for raising and lowering the spin head 6 from below to above the transport roller system 3 and rotating it at a low speed. Although illustration of the structure is omitted, it has a motor and a gear mechanism for vertically driving and a motor and a gear mechanism for rotational driving, and is configured to rotate slowly at about 1 to 3 revolutions per second, for example.

Next, the operation of the work cleaning processing apparatus thus configured will be described. First, in FIG.
The work 1 that has been conveyed from the previous step by a conveyance roller (not shown) along the conveyance line 5 has the shutter (not shown) of the inlet 2a (see FIG. 3) of the treatment tank 2 opened in the treatment tank. After being transferred to the inside of the transfer roller 2 and the shutter is closed, the transfer rollers 3a, 3b, ...
When the spin head 6 is conveyed by the rotation of d and is located directly above the spin head 6 that is retracted below the conveying roller system 3 at the center of the treatment tank 2, it is stopped. Next, the vertical drive motor in the rotary drive mechanism 8 is driven to raise the entire spin head 6 as shown by the arrow A, and while the spin head 6 is being raised, the holding claws 11a and 11b of the spin head 6 move the work 1 The both side portions are held from the lower surface side, and as shown in FIG. 2, the spin head 6 stops above the transport roller system 3 when it rises to an appropriate position below the upper spray nozzles 4a to 4c. At this time, the work 1 is supported while being inclined by a predetermined angle θ due to the difference in height of the holding claws 11a and 11b at both ends of the spin head 6.

Next, in this state, the rotation driving motor in the rotation driving mechanism 8 is driven to rotate the entire spin head 6 at a low speed in the direction of arrow B in FIG.
About a second). Then, in FIG. 2, the spray nozzles 4a to 4m located above and below the spin head 6, respectively.
The cleaning liquid is sprayed from the above and sprayed on the upper and lower surfaces of the work 1 which is supported by the spin head 6 and rotates. This allows
The upper and lower surfaces of the work 1 are cleaned, and foreign substances and the like generated in the work of the previous process can be washed away. At this time, since the workpiece 1 only rotates at a fixed position, the processing tank 2 can be downsized without requiring a large space for cleaning. Further, the cleaning liquid sprayed from the spray nozzles 4a to 4m is constantly applied to the entire surface of the work 1 rotating at a low speed, so that the amount of the cleaning liquid can be reduced. Further, since the work 1 is supported on the spin head 6 by being inclined by the angle θ, the cleaning liquid attached to the upper and lower surfaces of the work 1 flows in the tilting direction by the action of gravity, and the residual liquid on the work 1 remains. Can be reduced.

Thereafter, when the cleaning is completed as described above, the spraying of the cleaning liquid from the spray nozzles 4a to 4m is stopped, the rotation of the spin head 6 is stopped, and the vertical drive motor in the rotary drive mechanism 8 is driven. Then, the entire spin head 6 is lowered as shown by an arrow C in FIG. 2, and during this lowering operation, the work 1 is placed on the upper surface of the transport roller system 3 as shown in FIG. Then, the conveying rollers 3a to 3d rotate to convey the inside of the treatment tank 2, and the outlet portion 2b of the treatment tank 2 is conveyed.
In the state where the shutter (not shown) of (see FIG. 3) is opened, it is delivered to the carrying roller (not shown) of the external carrying line 5 and sent to the next step. As a result, the required work cleaning process is completed.

[0015]

Since the present invention is constructed as described above,
The spin head provided in the vicinity of the spray nozzle inside the processing tank holds the work conveyed by the conveyance roller system from the lower surface side and supports the work while inclining the work at a predetermined angle. With the rotation drive mechanism provided on the shaft, the spin head is raised above the transport roller system and is rotated at a low speed, and the cleaning liquid is sprayed from the spray nozzle to the upper and lower surfaces of the work, so that the work can be performed as in the conventional case. It is possible to wash while rotating at a fixed position without moving back and forth. Therefore, the work only rotates at a fixed position, and the processing tank can be downsized without requiring a large space for cleaning. Also, for workpieces that rotate at low speed,
Since the cleaning liquid sprayed from the spray nozzle is constantly applied over the entire surface, the amount of cleaning liquid can be reduced. Further, since the work is tilted and supported on the spin head by a predetermined angle, the cleaning liquid adhering to the work flows in the tilt direction by the action of gravity, and the residual liquid on the work can be reduced. From this, it is possible to reduce the transfer of the residual liquid to the next step, and to improve the final product quality and yield.

[Brief description of drawings]

FIG. 1 is a front sectional view showing an embodiment of a work cleaning apparatus according to the present invention,

FIG. 2 is a front cross-sectional view for explaining the operation of the above-mentioned workpiece cleaning processing device,

FIG. 3 is a plan view showing an embodiment of the above-mentioned work cleaning processing device,

FIG. 4 is a front sectional view showing a conventional work cleaning apparatus.

[Explanation of symbols]

1 ... Work, 2 ... Processing tank, 3 ... Conveying roller system, 4
a to 4 m ... Spray nozzle, 5 ... Conveying line, 6 ...
Spin head, 7 ... Shaft, 8 ... Rotation drive mechanism,
10 ... Holding arm, 11a, 11b ... Holding claw, θ
… Predetermined angle.

Claims (1)

[Claims] 1. A treatment tank for receiving a cleaning liquid sprayed onto a work, and a conveyance roller system for conveying the work arranged in two rows at a predetermined interval from one end of the treatment tank to the other end thereof.
In a work cleaning processing apparatus having a plurality of spray nozzles provided above and below the conveyance roller system so as to face each other and spraying a cleaning liquid on the upper and lower surfaces of the work, in the vicinity of the spray nozzles inside the processing tank, A spin head is provided which holds the work conveyed by the conveyance roller system from the lower surface side, supports the work inclined at a predetermined angle, and is rotatable. The spin head has a shaft on which the spin head is mounted. A work cleaning apparatus, which is provided with a rotation drive mechanism for raising and lowering the conveyance roller system from below to above and at low speed.