JPH064302Y2 - Metal diaphragm - Google Patents

Description

[Detailed Description of the Invention] (1) Purpose of the Invention The present invention relates to a metal diaphragm, and in particular, a strain gauge and a trimming resistor are provided on the outer peripheral portion of the strain sensitive portion, and the outer periphery of the trimming resistor is assisted. By arranging the electrodes in an arc shape and extending the electrodes of other strain gauges arranged in the central part of the strain sensitive part to the outer circumference of the strain sensing part The present invention relates to a metal diaphragm in which all gold wires for tying are arranged on the outer peripheral portion of a strain sensitive portion.

[Prior Art] Conventionally, as this type of metal diaphragm, a plurality of strain gauges 13 such as the metal diaphragm 10 shown in FIG. 3 is used.
A, ~, 13D and trimming resistors 14A ₁ , 14A ₂ ; 14B ₁ , 14B ₂ and auxiliary electrodes 15A, 15B are arranged around the strain sensitive portion at equal angles along the same circumference, and a plurality of strain gauges 13E at its center, -, leave arranged at a constant angle along the same circumference of 13H, these strain gauges 13A, ~ 13H and trimming resistors 14A _1, 14A _2; 14B ₁ , 14B ₂ or auxiliary electrode
There has been proposed a structure in which 15A and 15B are connected in a bridge shape by gold wires 16a to 16k as required.

[Problems to be Solved] However, in the conventional metal diaphragm 10 , the trimming resistors 14A ₁ , 14A ₂ ;
B ₁ and 14B ₂ electrodes and strain gauges arranged in the center of the strain sensitive area
Strain gauges 13B and 13D, which are connected to the electrodes of 13E and 13G by gold wires 16a and 16f, and which are arranged on the outer peripheral portion of the strain sensitive portion.
Strain gauges 13E and 13G placed in the center of the electrode and the strain sensitive part
Are connected by gold wires 16d, 16i, 16j and auxiliary electrode 15B, and the electrodes of strain gauges 13B, 13D arranged on the outer peripheral portion of the strain sensitive portion are connected by gold wires 16c, 16h, respectively. External electrodes 23c, 23d from auxiliary electrodes (not numbered) at the center of the strain-sensitive part connected to the electrodes of trimming resistors 14A ₁ , 14B ₁ via gold wires 16b, 16g, respectively.
Lead wires 17c and 17d are respectively drawn toward and the electrodes of the strain gauges 13G and 13E disposed in the central portion of the strain sensitive portion are connected via gold wires 16e and 16k to the central portion of the strain sensitive portion, respectively. Auxiliary electrodes (not numbered) to external electrodes 23a, 23b
Since the lead wires 17a and 17b are drawn toward each side, (i) there is a drawback in that the number of wires of the gold wire (and thus the number of welded parts) cannot be reduced, and (ii) the gold wire has an outer peripheral part And the central portion, and there is a drawback that (iii) the gold wire and the lead wire cross each other, and (iv) gold wires contact each other or gold wire Since the lead wire and the lead wire are in contact with each other, there is a drawback that reliability is impaired, and in addition, there is a drawback that (v) requires a large manufacturing time.

Therefore, in the present invention, in order to eliminate these defects, an auxiliary electrode is provided for the trimming resistor outer circumference between the strain gauges arranged on the outer peripheral portion of the strain sensitive portion and is arranged in the central portion of the strain sensitive portion. By extending the electrode from the strain gauge to the outer peripheral portion of the strain sensitive portion, the metal diaphragm provided with all the gold wires on the outer peripheral portion of the strain sensitive portion is provided.

(2) Configuration of the Invention [Means for Solving the Problems] The means for solving the problems provided by the present invention is to “dispose between the holder main body and the holder lid of the pressure sensor device. In the metal diaphragm that is connected to the strain-sensitive portion of the insulating layer formed on the surface in a bridge shape with gold wires through the plurality of trimming resistors, a strain gauge is provided along the outer peripheral portion of the strain-sensitive portion. A trimming resistor is arranged, an auxiliary electrode is arranged in an arc shape with respect to the outer periphery of the trimming resistor, and the electrodes of other strain gauges arranged in the central portion of the strain sensitive part as surrounded by the trimming resistor are strain-sensitive. By extending to the outer circumference of the part, it is possible to connect between the electrode of the strain gauge and the auxiliary electrode, between the electrode of the auxiliary electrode and the electrode of the trimming resistor, and between the electrode of the trimming resistor and the electrode of another strain gauge. It is a metal diaphragm "which characterized by being arranged on the outer periphery of all sense distortion section gold wire to be connected.

[Operation] The metal diaphragm according to the present invention is disposed between the holder main body and the holder lid of the pressure sensor device, and a plurality of strain gauges are provided in the strain sensitive portion of the insulating layer formed on the surface of the metal diaphragm main body. In a metal diaphragm in which a plurality of trimming resistors are connected to each other in a bridge shape by a gold wire, a strain gauge and a trimming resistor are arranged along the outer peripheral portion of the strain sensitive portion, and an auxiliary electrode is provided on the outer periphery of the trimming resistor. Is arranged in an arc shape, and the electrode of another strain gauge, which is arranged in the central portion of the strain sensitive portion as surrounded by the trimming resistor, is extended to the outer peripheral portion of the strain sensitive portion. And gold electrodes that connect between the auxiliary electrodes, between the auxiliary electrodes and trimming resistor electrodes, and between the trimming resistor electrodes and the electrodes of other strain gauges. Since it is characterized in that it is arranged in the peripheral part,
(i) It has a function of gathering the gold wire on the outer peripheral portion of the strain-sensitive portion, and (ii) it has a function of shortening the wiring distance of the gold wire and reducing the number of wiring (and thus the number of welded portions).
(iii) The gold wires do not cross each other or the gold wire and the lead wire do not cross each other. As a result, (iv) the gold wires contact each other or the gold wire and the lead wire contact each other. It also has the function of avoiding the loss of reliability, and also has the function of (v) shortening the manufacturing time.

[Embodiment] Next, one embodiment of the metal diaphragm according to the present invention will be specifically described with reference to a preferred embodiment thereof. However, the embodiments described below are described for facilitating or facilitating the understanding of the present invention, and not for limiting the present invention. In other words, each member disclosed in the embodiments described below includes all design changes and equivalent replacements within the spirit and technical scope of the present invention.

FIG. 1 is a plan view showing an embodiment of the metal diaphragm according to the present invention, in which a part of the insulating film 12 is removed.

FIG. 2 is a cross-sectional view showing the built-in pressure sensor device of the embodiment of FIG. 1, and for convenience of illustration, auxiliary electrodes 15A and 15B.
And the metal diaphragm 1 except the electrode 13d ₂ of the strain gauge 13D
The strain gauges 13A, 13D, 13D, etc. on 0 are omitted.

First, referring to FIGS. 1 and 2, the structure of an embodiment of the metal diaphragm according to the present invention will be described in detail. Reference numeral 10 denotes a metal diaphragm according to the present invention, which is formed on the surface of the metal diaphragm body 11 by using SiO ₂ , Si ₃ N.
₄ , a portion of the surface of the insulating film 12 formed by arranging an insulating material such as Al ₂ O _{3 to} have an appropriate thickness (for example, a thickness of about 1 μm) by vacuum vapor deposition and corresponding to a strain sensitive portion. A plurality of (four in this case) strain gauges 13A, ~, 13D arranged in parallel with each other and a strain gauge 13C from the vicinity of the strain gauge 13A.
Two trimming resistors 14A and 14B arranged in an arc shape so as to surround the strain gauges 13B and 13D toward the vicinity of, and two auxiliary electrodes 15A arranged in an arc shape with respect to the outer circumferences of the trimming resistors 14A and 14B. , 15B and. Strain gauge 13A, ~, 1
3D electrodes 13a ₁ , 13a ₂ ; 13b ₁ , 13b ₂ ; 13c ₁ , 13c ₂ ; 13d ₁ ,
13d ₂ is provided on the insulating film 12 by an appropriate means. At this time, at least the electrodes 13b ₁ of the strain gauges 13B and 13D,
It is preferable that 13b ₂ ; 13d ₁ and 13d ₂ respectively extend to the outer peripheral portion of the strain sensitive portion, and particularly reach to the circumference of the auxiliary electrodes 15A and 15B.

The metal diaphragm 10 according to the present invention is also a strain gauge.
A first gold wire 16a disposed between _one electrode 13a1 of 13A and the auxiliary electrode 15A, the auxiliary electrode 15A, and the trimming resistor 14
The second gold wire 16b arranged between one electrode 14a formed on A and the other one formed on the trimming resistor 14A.
One of the third gold wire 16c disposed between the outer peripheral edge portion of one of the electrodes 13b ₁ of the electrode 14a and the strain gauge 13B, the strain gauges 13C
The fourth gold wire 16d disposed between the one electrode 13c ₂ of one side and the auxiliary electrode 15B, the auxiliary electrode 15B and the trimming resistor 14B.
The fifth gold wire 16e arranged between the first gold wire 16e and the other electrode formed on the trimming resistor 14B.
It includes a sixth gold wire 16f arranged between one electrode 14b and the outer peripheral end of _one electrode 13d ₁ of the strain gauge 13D.

The metal diaphragm 10 according to the present invention further includes a strain gauge.
13A electrode 13a ₂ and strain gauge 13D electrode 13d ₂ and strain gauge
A lead wire 17 for connecting the electrode 13b _{2 of} 13B and the electrode 13c ₁ of the strain gauge 13C to external electrodes 23a and 23c described later, respectively.
a, 17c and auxiliary electrodes 15A, 15B are external electrodes described below.
It is provided with other lead wires 17b and 17d for connecting to 23b and 23d. Reference numeral 20 denotes a pressure sensor device in which the metal diaphragm 10 according to the present invention is incorporated, and includes a holder body 21 having a through hole 21A for guiding a pressure medium from one end surface 21a to the other end surface 21b. The screw member 22a formed on the inner peripheral surface of the holder main body 21 with respect to the screw member 21c formed on the outer peripheral surface
Is attached to the holder main body 21 by being screwed with, and the holder lid 22 having a through hole 22A on the bottom surface, and the external electrodes 23a to 23d arranged around the through hole 22A,
The holder body 21 is provided with an O-ring 24 which is disposed in a disposition hole formed in the other end surface 21b and seals the contact surface with the metal diaphragm 10 .

With reference to FIGS. 1 and 2, the operation of one embodiment of the metal diaphragm according to the present invention will be described in detail.

In the metal diaphragm 10 according to the present invention, the two strain gauges 13A and 13C are disposed on the outer peripheral portion of the strain sensitive portion on the surface of the insulating film 12 formed on the surface of the metal diaphragm body 11, and the other two Two strain gauges 13B and 13D are arranged at the center of the strain gauges 13B and 13D.
Trimming resistors 14A and 14B are arranged in an arc shape so as to surround B and 13D, and two arc-shaped trimming resistors 14A and 14B are formed around the trimming resistors 14A and 14B.
Two auxiliary electrodes 15A, 15B are provided, and in addition, electrodes 13a ₁ , 13a ₂ ; 13b ₁ , 13b ₂ ; 13c ₁ , of the strain gauges 13A, ~, 13D,
13c ₂ ; 13d ₁ and 13d ₂ are extended to the outer peripheral portion of the strain sensitive portion.

In the metal diaphragm 10 according to the present invention for this, during the strain of the electrodes 13a ₁ and the auxiliary electrode 15A of the strain gauges 13A gauges 13
Each gold wire 16a and between the C electrode 13c ₂ and the auxiliary electrode 15B, connected by 16d, and the between trimming resistor 14A of the electrode 14a and the electrode 14b between the trimming resistor 14B of the auxiliary electrode 15A and the auxiliary electrode 15B Each gold wire 16
b and 16e, and by connecting between the trimming resistor 14A and the electrode 13b ₁ of the strain gauge 13B and between the trimming resistor 14B and the electrode 13d ₁ of the strain gauge 13D by gold wires 16c and 16f, respectively, The wiring distance of the wire is shortened and the number of gold wires (and eventually the number of welds) is reduced.

Further, in the metal diaphragm 10 according to the present invention, the external electrode
Electrodes of the strain gauges 13A, 13D in which the lead wires 17a, ~, 17d connected to 23a, ~, 23d are located on the outer periphery of the strain sensitive portion, respectively.
13a ₂ and 13d ₂ and auxiliary electrode 15A and strain gauges 13B and 13C electrodes 13b
₂ , 13c ₂ and the auxiliary electrode 15B are drawn outward, so that the lead wires 17a, ˜, 17d are prevented from crossing the gold wires 16a, ˜, 16f.

(3) Effects of the Invention As is apparent from the above, the metal diaphragm according to the present invention is arranged between the holder main body and the holder lid of the pressure sensor device, and is formed on the surface of the metal diaphragm main body. In a metal diaphragm in which a plurality of strain gauges are connected to the strain-sensitive part of the layer in a bridge shape by gold wires via a plurality of trimming resistors, the strain gauge and the trimming resistor are arranged along the outer periphery of the strain-sensitive part. Then, the auxiliary electrode is arranged in an arc shape on the outer periphery of the trimming resistor, and the electrodes of other strain gauges arranged at the center of the strain sensitive part as if surrounded by the trimming resistor are extended to the outer periphery of the strain sensitive part. By doing so, the electrodes of the strain gauge and the auxiliary electrode, the electrodes of the auxiliary electrode and the trimming resistor, and the electrodes of the trimming resistor and the electrode of the strain gauge are connected respectively. Since all the gold wires are arranged on the outer peripheral portion of the strain sensitive portion, (i) the gold wire can be gathered on the outer peripheral portion of the strain sensitive portion, and (ii) the gold wire This has the effect of shortening the wiring distance and reducing the number of wires (and thus the number of joints), and (iii) the effect of avoiding crossing of gold wires or crossing of gold wires and lead wires. As a result, (iv) there is an effect that it is possible to avoid the gold wires coming into contact with each other, or the gold wires and the lead wires coming into contact with each other, impairing reliability, and (v) shortening the manufacturing time. Has the effect that can be done.

[Brief description of drawings]

FIG. 1 is a plan view showing an embodiment of a metal diaphragm according to the present invention, FIG. 2 is a sectional view showing a pressure sensor device incorporated in the embodiment of FIG. 1, and FIG. 3 is a plan view showing a conventional example. Is. 10 …… Metal diaphragm 11 …… Metal diaphragm body 12 …… Insulating film 13A, ～, 13D …… Strain gauge 13a ₁ , 13a ₂ ； 13b ₁ , 13b ₂ ； 3c ₁ , 13c ₂ ； 13d ₁ , 13d ₂ ……
Electrodes 14A, 14B ... Trimming resistors 15A, 15B ... Auxiliary electrodes 16a, ~, 16f ... Gold wires 17a, ~, 17d ... Lead wire 20 ... Pressure sensor device 21 ... Holder body 21A ... Through hole 21a ...... One end face 21b ...... Other end face 21c ...... Screw part 22 ...... Holder lid 22A ...... Through hole 22a ...... Screw part 23a, ~, 23d ...... External electrode 24 ...... O ring

Claims (1)

[Scope of utility model registration request] 1. A plurality of strain gauges, a plurality of trimming resistors, and a plurality of trimming resistors are provided in a strain sensitive portion of an insulating layer formed on the surface of a metal diaphragm body, which is disposed between a holder body and a holder lid of a pressure sensor device. In a metal diaphragm connected in a bridge shape with a gold wire via a strain gauge and a trimming resistor are arranged along the outer peripheral portion of the strain sensitive portion, and an auxiliary electrode is arranged in an arc shape with respect to the outer periphery of the trimming resistor. , And by extending the electrode of another strain gauge disposed in the central portion of the strain sensitive portion as surrounded by the trimming resistor to the outer peripheral portion of the strain sensitive portion, between the electrode of the strain gauge and the auxiliary electrode. A gold wire that connects between the auxiliary electrode and the electrode of the trimming resistor and between the electrode of the trimming resistor and the electrode of another strain gauge is disposed on the outer peripheral portion of the strain sensitive portion. Metal diaphragm that.