JPH0642767Y2 - 液体塗布装置 - Google Patents

液体塗布装置

Info

Publication number
JPH0642767Y2
JPH0642767Y2 JP5195989U JP5195989U JPH0642767Y2 JP H0642767 Y2 JPH0642767 Y2 JP H0642767Y2 JP 5195989 U JP5195989 U JP 5195989U JP 5195989 U JP5195989 U JP 5195989U JP H0642767 Y2 JPH0642767 Y2 JP H0642767Y2
Authority
JP
Japan
Prior art keywords
resist
liquid
ceramic material
wall
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5195989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02142663U (cg-RX-API-DMAC7.html
Inventor
元信 寺本
耕明 八野
朝昭 山根
博 寺尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuyama Corp
Original Assignee
Tokuyama Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuyama Corp filed Critical Tokuyama Corp
Priority to JP5195989U priority Critical patent/JPH0642767Y2/ja
Publication of JPH02142663U publication Critical patent/JPH02142663U/ja
Application granted granted Critical
Publication of JPH0642767Y2 publication Critical patent/JPH0642767Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • ing And Chemical Polishing (AREA)
JP5195989U 1989-05-06 1989-05-06 液体塗布装置 Expired - Lifetime JPH0642767Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5195989U JPH0642767Y2 (ja) 1989-05-06 1989-05-06 液体塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5195989U JPH0642767Y2 (ja) 1989-05-06 1989-05-06 液体塗布装置

Publications (2)

Publication Number Publication Date
JPH02142663U JPH02142663U (cg-RX-API-DMAC7.html) 1990-12-04
JPH0642767Y2 true JPH0642767Y2 (ja) 1994-11-09

Family

ID=31571855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5195989U Expired - Lifetime JPH0642767Y2 (ja) 1989-05-06 1989-05-06 液体塗布装置

Country Status (1)

Country Link
JP (1) JPH0642767Y2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2557822Y2 (ja) * 1992-07-31 1997-12-17 株式会社トクヤマ 液体塗布装置

Also Published As

Publication number Publication date
JPH02142663U (cg-RX-API-DMAC7.html) 1990-12-04

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term