JPH0641112B2 - Optical disc master - Google Patents

Description

TECHNICAL FIELD The present invention relates to an apparatus for performing a predetermined operation on a flat plate-shaped member in a clean room.

BACKGROUND ART An optical system is a system for recording video and audio information on a disc-shaped recording medium. In this optical method, a photoresist master is created by coating a photoresist on a glass disk that serves as a substrate, and a laser beam focused on a minute point on a resist film of the resist master is flickered according to video or audio information. Information is recorded by the length of pits (dents) obtained by exposing to light by a so-called bit-by-bit method, and then developing this, and the repetition cycle thereof.

In such a method, before the resist master is prepared, the glass master is cleaned, the primer is treated, the photoresist is applied, and the baking (heat treatment) is carried out. I dislike this, so these treatments are performed in a clean room (dust-proof room).
Done in. In addition, even in a clean room, fine dust that cannot be completely removed by the filter is floating in the atmosphere, so blow air to the glass master plate or resist master disc to prevent these fine dust particles from adhering to the surface. While each work is performed while the wind flow is disturbed, there are cases where the wind cannot provide sufficient dustproof effect.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and an object of the present invention is to provide a processing apparatus for an optical disc master that can obtain a sufficient dustproof effect by the wind by maintaining a good flow of the wind. To do.

An optical disk master processing apparatus according to the present invention includes a support means for supporting the optical disk master and a plurality of processing units for performing a predetermined process on the optical disk master on one line arranged in a clean room. A transfer means for transferring the support means between the plurality of processing units, and an air flow generating means for generating an air flow flowing along a flat plate surface of the optical disk master and in a direction substantially orthogonal to the line. However, the plurality of processing units are supported by a support above the moving passage of the supporting means, and the support is provided on the downstream side of the supporting means in the air flow passage.

Example Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a perspective view showing an embodiment of the present invention applied to, for example, a resist master forming apparatus.
An apparatus 1 as a so-called wet stage that performs cleaning of a glass master, which is a master for an optical disk, primer processing, and coating of photoresist, and a so-called wet stage, which performs defect inspection of the glass master, defect inspection of the resist master, and film thickness measurement. Device 2 as an inspection stage and device 3 as a so-called baking stage for performing a pre-baking process
And 1 to 3 are integrally configured and installed in a clean room. In this system, a series of processes including glass master cleaning and primer treatment, glass master defect inspection, photoresist coating, heat treatment, resist master inspection and film thickness inspection are automatically performed in a flow operation. Has become.

The polished and cleaned glass master (not shown) is temporarily stored in the wet stock chamber 4 and subjected to ultrasonic cleaning or the like to be kept in the best condition. The paper is fed in a horizontal state, and the series of processes described above is performed while maintaining this horizontal state. The glass master after the series of processing is discharged from the device 3. A clean bench 5 is arranged on the left side of the device with respect to the flow of the glass master disk from the device 1 to the device 3,
From this clean bench 5, wind is blown substantially parallel to the glass master disk on which a series of processes is performed. According to this, it is possible to prevent fine dust and the like that cannot be completely removed by the filter in the clean room and are floating in the atmosphere from adhering to the surface of the glass master. It should be noted that the worker is located below the devices 1 to 3 with respect to the air blown from the clean bench 5.

Next, specific structures of the devices 1 to 3 will be described with reference to FIGS. 2 to 4.

The glass master 6 is supported by the turntable 7 substantially horizontally. A turntable unit 10 including a turntable 7, a motor 8 that is a drive source, and a belt 9 that transmits the rotational driving force of the motor to the turntable 7 is provided on the upper surface of the device body 11 and extends between the devices 1 to 3. Each of the devices 1 to 1 is mounted on a pair of guide rails 12a and 12b arranged in parallel to each other, and a linear bearing (not shown) is interposed therebetween.
It is configured so that it can move freely between the three. In addition, the device body 1
A ball screw 13 is rotatably provided on the upper surface of the plate 1 in parallel with the guide rails 12a and 12b so as to be rotatable over substantially the movement range of the turntable unit 10. The ball screw 13 is attached to the turntable unit 10. The ball nut 14 is screwed. Then, by rotating the ball screw 13 by the feed motor 15, the turntable unit 10 can be moved in a direction corresponding to the rotation direction.

In the turntable unit 10, as shown in FIG. 4, the turntable 7 is fitted on the upper end of the spindle 16 having a through hole 16a in the axial direction. The spindle 16 is rotatably held by a housing 18 via a bearing 17, and a large pulley 19 is fixed to the lower end of the spindle 16, and a large pulley 19 and a small pulley 21 fixed to the rotation shaft of the motor 8 are provided. It is rotationally driven by a motor 8 via a belt 9 installed. It has a so-called belt drive configuration. With this belt drive structure, the vacuum seal 20 fixed to the lowermost end of the spindle 16 can be easily replaced. That is, in the case of the direct drive structure, when replacing the vacuum seal 20, it is difficult to remove heavy objects such as the motor, but in the case of the belt drive structure, it is not necessary. Can be exchanged very easily.

A pedestal 21 having a diameter larger than that of the glass master 6 having the maximum diameter is fixedly provided around the turntable 7, and the pedestal 21 has, for example, 2 to detect the size of the glass master 6. The individual size sensors 22a and 22b are arranged in the radial direction. Further, for example, two type sensors 23a and 23b for detecting the type of the glass master 6 are provided near the center hole of the pedestal 21.
A center cap 24 is attached to the upper end of the spindle 16.

2 and 3, the device 1 includes a cup 25 that moves up and down with respect to the device body 11. This cup 2
5 is normally held in a raised position so as not to hinder the movement of the turntable unit 10, and a linear drive motor 27 is provided via a connecting portion 26 (shown in FIG. 1) when performing each processing.
Driven downward by. As a drive source of the cup 25,
It is not limited to the linear drive motor 27, and in essence, any drive capable of vertically driving the cup 25 may be used. The lowered cup 25 is fitted to the peripheral edge of the pedestal 21 of the turntable unit 10 to maintain a hermetically sealed state. In this state, the vacuum pump 2 is placed on the turntable 7.
The glass master 6 vacuum-adsorbed by 8 is cleaned by a cleaning liquid sprayed from a nozzle (not shown) provided in the cup 25 while being rotationally driven by a motor 8.
Then, the primer process is performed. The glass master 6 that has been cleaned and primed is transferred to the apparatus 2 as the turntable unit 10 moves along the guide rails 12a and 12b.

The device 2 has an inspection unit (working unit) 29. The inspection unit 29 is supported by the device main body 11 by two columns 30a and 30b and is covered by a hood 31. Two columns 30a, 30
b does not act as a duct, and is provided so as to be located further downwind than the glass master 6, that is, so as to be located on the opposite side of the clean bench 5. According to this, the flow of the air blown in parallel from the clean bench 5 to the glass master 6 is not disturbed, and it is possible to favorably prevent adhesion of dust and the like to the surface of the glass master 6. become. In the apparatus 2, it is checked whether or not the glass master 6 cleaned and primed in the apparatus 1 has a defect such as a scratch and the like. The inspection unit 29 also measures the film thickness of the resist film at the same time that the inspection is performed.

On the other hand, the device 3 is a baking unit (working unit) 3
The baking unit 32 is supported by the two columns 33a and 33b with respect to the apparatus main body 11 and is covered by the hood 34. As in the case of the device 2, the two columns 33a and 33b do not function as ducts, and are provided so as to be located leeward of the glass master 6. In this apparatus 3, a pre-baking process using far infrared rays is performed on a resist master disk coated with a photoresist. In this pre-baking process, the radiation thermometer 35 detects the surface temperature of the resist master, and the surface temperature is controlled based on the detected temperature.

As is particularly apparent from FIG. 1, the hoods 31 and 34 in the devices 2 and 3 respectively have the upper surface inclined downward and the both side surfaces inclined toward the center at the end portion on the clean bench 5 side. It is composed. According to this, as shown by the arrows in FIGS. 1 and 3, the clean bench 5
Since the air sent from the air flows satisfactorily in the downstream direction along the upper surfaces of the hoods 31 and 34 and the inclined surfaces on both side surfaces, the air flow around each device is not disturbed.

In addition, as described above, the inspection unit 29, the hood 31
The columns 30a, 30b and 33a, 33b for supporting the baking unit 32 and the hood 34 are provided so as to be located leeward of the glass master 6 carried and conveyed by the turntable unit 11, and the columns 30a, 30b.
3, 33a and 33b are holding holes 37a, 37b and 38 formed in the upper surface of the apparatus main body 11 as shown in FIG.
It is held by a and 38b. On the other hand, in the case where the present device is a system in which, for example, a pair is arranged on the left and right with respect to the operator and air is blown from both sides, the support 30
The a, 30b and 33a, 33b are located on the windward side of the glass master 6, and the inclined surfaces of the hoods 31, 34 are located on the leeward side, which hinders the smooth flow of the wind. Therefore, as a countermeasure, the holding holes 37a, 37
b and 38a, 38b, columns 30a, 30b and 3
By making the holding of 3a, 33b detachable, holding holes 39a, 39b and 40a, 40b on the opposite side, and appropriately selecting the mounting positions of the columns 30a, 30b and 33a, 33b, As shown in the figure, always support column 3
It is possible to set so that 0a, 30b and 33a, 33b are located on the leeward side of the glass master 6, and the inclined surfaces of the hoods 31, 34 are located on the upwind side.

In FIG. 2, for example, six position sensors 36a to 36f are provided on the device body 11 in order to detect the moving position of the turntable unit 10.
Are arranged along the moving direction of. The six position sensors 36a to 36f are provided so as to correspond to each of the devices 1 to 2, and the moving position of the turntable unit 10 is detected from the combination of the outputs of the sensors 36a to 36f. It is. That is, as shown in FIG. 6, when only the position sensors 36a and 36b are in the ON state, the device 1 is provided. When only the position sensors 36c and 36d are provided in the device 2, the position sensors 36e and 36f are provided.
It is possible to detect the position of the turntable unit 10 in each of the devices 3 when only one of them is in the ON state. Further, when the turntable unit 10 is located at both ends of the moving path, only the position sensor 36a or 36f is in the ON state, and when it is located between the devices, only the position sensors 36b and 36c or only 36d and 36e are turned on. It becomes a state.

Therefore, by detecting the movement position of the turntable unit 10 from the combination of the outputs of the position sensors 36a to 36f, the unit 10 can be reliably stopped at the working position of each device, and the movement of the unit 10 can be performed. For example, if there is a power failure, the direction in which the unit 10 should move after that can be determined from the detection position after the power failure is restored, so that the work can be smoothly continued even after the power failure is restored.

In the configuration described above, the turntable unit 1
The movement of 0 and the stop position thereof, the operation control for performing each work in each of the devices 1 to 3, the speed control of the turntable, etc. are collectively performed by a system controller (not shown) including a microcomputer, for example. .

Next, the work procedure executed in this system will be described with reference to the flowchart of FIG.

First, in the device 1, when the glass master is placed on the turntable 7, the cup 25 descends and fits into the pedestal 21 of the turntable unit 10 to maintain a hermetically sealed state. The master is washed (step S1), and then the primer process is performed (step S2). The glass master that has been cleaned and primed moves to the device 2 as the turntable unit 10 moves while being placed on the turntable 7, and the defect inspection of the glass master is performed there (step S3). . The glass master that has passed the inspection is again transferred to the apparatus 1 and coated with a photoresist (step S4),
It becomes the resist master. As the turntable unit 10 moves, this resist master moves to the device 2 and then to the device 3, where the prebaking process by far infrared rays is performed (step S5). The heat-treated resist master is transferred to the apparatus 2 again, and defect inspection of the resist master and measurement of the resist film thickness are performed (step S).
6). Through the above procedure, a series of processes for forming the resist master disk is completed.

Here, in each of the devices 1 to 3, it goes without saying that each work is performed by rotationally driving the turntable 7, but in the present system, the turntable 7 rotates while moving between the devices. It is driven so that it can continue to rotate. According to this, since the glass master disk (or resist master disk) is constantly driven to rotate, it is possible to prevent adhesion of dust or the like on the board surface. Also,
Since the turn-up time of the turntable 7 is not required in each device, it is possible to smoothly shift to each work.

In the above embodiment, the case where the present invention is applied to the apparatus for producing the resist master using the glass master as the master for the optical disk has been described, but the present invention is not limited to this and various flat plate members can be used. On the other hand, it can be applied to all devices that perform a predetermined work.

Further, in the above embodiment, the case where a plurality of devices are integrated has been described, but it goes without saying that the invention can be applied to a single device.

EFFECTS OF THE INVENTION As described above, in the optical disk master processing apparatus according to the present invention, an air flow that is parallel to the (master) surface of the optical disk master is generated to generate a layer near the surface of the master. By forming an air flow close to a laminar flow or a laminar flow, and dust and the like in a floating state are placed on this flow and flowed downstream to be removed, adhesion to the master surface can be completely prevented.

Further, by making the air flow in a direction substantially orthogonal to the line, it is possible to efficiently remove dust in a floating state in the shortest path.

In addition, the support column that supports the processing unit is located downstream of the optical disk master in the air flow path, so that the turbulent flow conditions that occur in the vicinity of the support will not affect the air flow in the master area. It is possible to completely remove the dust in.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention applied to, for example, a resist master forming apparatus, and FIGS.
The front view including the partial cross section which shows the concrete structure of each apparatus in a figure, and the top view which contains a partial cross section, FIG. 4 is the cross section which shows the concrete structure of the turntable unit in FIG. 2 and FIG. 5 and 5 are plan views showing a configuration in which a pair of the present apparatus is arranged on the left and right with respect to an operator, and FIG. 6 shows the respective operating states of the position sensor and the moving position of the turntable unit in FIG. FIG. 7 shows the relationship, and FIG. 7 is a flowchart showing the work procedure for producing a resist master. Explanation of symbols of main parts 1, 2, 3 ... Device, 5 ... Clean bench 6 ... Glass master, 7 ... Turntable 10 ... Turntable unit 11 ... Device body, 25 ... Cup 29 ... Inspection unit 30a, 30b, 33a, 33b ... Support 32 ... Baking unit 31, 34 ... Hood 36a-36f ... Position sensor

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification number Reference number within the agency FI Technical indication location H01L 21/027 21/304 D 8831-4M (72) Inventor Shigeru Kono Nishi, Tatomi-cho, Nakakoma-gun, Yamanashi Prefecture 2680 Hanawa Pioneer Video Co., Ltd. (72) Inventor Chiharu Oshio Nishinashi, Tatomi-cho, Nakakoma-gun, Yamanashi Prefecture 2680 Waiwa Pioneer Video Co., Ltd. Ionia Video Co., Ltd. (56) References: Actual Development Sho 53-17885 (JP, U)

Claims (1)

[Claims] 1. A support means for supporting an optical disk master, a plurality of processing units for performing a predetermined process on the optical disk master, and the supporting means on one line arranged in a clean room. A plurality of processing units, and a transfer unit for transferring between the plurality of processing units, and an air flow generation unit for generating an air flow flowing along a flat plate surface of the optical disk master and in a direction substantially orthogonal to the line. An apparatus for processing an optical disk master, wherein the unit is supported above a moving passage of the supporting means by a supporting pillar, and the supporting pillar is provided on a downstream side of the supporting means in the air flow passage.