JPH0694303B2 - Optical disk master processing device - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a line work system, and more particularly to an optical disk master processing apparatus having a plurality of devices that perform different operations on an optical disk master that is rotationally driven by a turntable.

BACKGROUND ART An optical system is a system for recording video and audio information on a disc-shaped recording medium. In this optical method, a photoresist master is created by coating a photoresist on a glass disk that serves as a substrate, and a laser beam focused on a minute point on a resist film of the resist master is flickered according to video or audio information. Information is recorded by the length of pits (dents) obtained by exposing to light by a so-called bit-by-bit method, and then developing this, and the repetition cycle thereof.

In such a method, processes such as cleaning of the glass master, primer treatment, photoresist coating and baking (heat treatment) are performed before the resist master is prepared. Is
One method was prepared for one processing step, and the method of manually moving the glass master to the next apparatus each time one step was completed was adopted, so that the entire system becomes large and workability is improved. There was a defect that it was lacking.

Therefore, a number of processing units for performing different processes on the optical disk master are provided along one line in the clean room, and turntable units for rotating the turntable for rotating the optical disk master are sequentially arranged between the processing units. An optical disk processing device that can be moved is considered.

In such an optical disk master processing apparatus, air is filtered by an air filter to form a clean room atmosphere. However, even with such air filtration, it is inevitable that fine dust remains. Then, such fine dust causes dropout of the optical disc obtained by adhering to the master surface in each processing step.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an optical disk master processing apparatus that is compact as a whole and that prevents dust in the air from adhering to the optical disk master as much as possible during the processing.

The optical disk master processing apparatus according to the present invention has a plurality of devices that rotate a turntable arranged in a clean room at a predetermined number of rotations and perform different operations for the optical disk masters mounted on the turntable. An optical disk master processing apparatus, comprising: a turntable and a turntable unit including a drive source for rotationally driving the turntable;
The turntable unit includes guide means provided between the plurality of devices to guide the turntable unit, and drive means for moving the turntable unit between the plurality of devices. It is characterized in that the turntable is continuously driven to rotate while moving between the devices.

Example Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a perspective view showing an embodiment of the present invention which is a processing apparatus for an optical disk master, and this apparatus is a so-called wet stage for carrying out each processing of cleaning a glass master, primer processing and photoresist coating. Device 1 as
Device 2 as a so-called inspection stage for inspecting glass masters for defects, resist masters for defect inspection, and film thickness measurement 2
And a device 3 as a so-called baking stage that performs a pre-baking process, and these devices 1 to 3 are integrally configured and installed in a clean room (dust-proof room). In this system, cleaning and primer treatment of glass master, glass master defect inspection, photoresist coating, heat treatment and resist master inspection and film thickness inspection Has become.

The polished and cleaned glass master (not shown) is temporarily stored in the wet stock chamber 4 and subjected to ultrasonic cleaning or the like to be kept in the best condition. The paper is fed in a horizontal state, and the series of processes described above is performed while maintaining this horizontal state. The glass master after the series of processing is discharged from the device 3. A clean bench 5 is arranged on the left side of the device with respect to the flow of the glass master disk from the device 1 to the device 3,
From this clean bench 5, wind is blown substantially parallel to the glass master disk on which a series of processes is performed. According to this, it is possible to prevent fine dust and the like that cannot be completely removed by the filter in the clean room and are floating in the atmosphere from adhering to the surface of the glass master. It should be noted that the worker is located below the devices 1 to 3 with respect to the air blown from the clean bench 5.

Next, specific structures of the devices 1 to 3 will be described with reference to FIGS. 2 to 4.

The glass master 6 is supported by the turntable 7 substantially horizontally. The turntable unit 10, which includes the turntable 7, the motor 8 that is a drive source, and the belt 9 that transmits the rotational driving force of the motor to the turntable 7, is a device main body.
It is mounted on a pair of guide rails 12a and 12b arranged in parallel to each other on the upper surface of 11 and moves between the devices 1 to 3 via a linear bearing (not shown). It has a flexible structure. Further, a ball screw 13 is provided on the upper surface of the apparatus main body 11 in parallel with the guide rails 12a and 12b so as to be rotatable over substantially the moving range of the turntable unit 10. The ball nut 14 attached to is screwed. Then, by rotating the ball screw 13 by the feed motor 15, the turntable unit 10 can be moved in a direction according to the rotation direction.

In the turntable unit 10, as shown in FIG. 4, the turntable 7 is fitted to the upper end of a spindle 16 having a through hole 16a in the axial direction. Spindle 16
Is rotatably held by a housing 18 via a bearing 17, and a large pulley 19 is fixed to the lower end of the large pulley 19 and a small pulley 21 fixed to the rotation shaft of the motor 8. It has a so-called belt drive structure in which it is rotationally driven by the motor 8 via the belt 9. According to this belt drive configuration, the spindle
The vacuum seal 20 fixed to the lowermost end of 16 can be easily replaced. That is, in the case of the direct drive structure, when replacing the vacuum seal 20, it is difficult to remove heavy objects such as the motor, but in the case of the belt drive structure, it is not necessary. Can be exchanged very easily.

Around the turntable 7, a pedestal 21 having a diameter larger than that of the glass master 6 having the largest diameter is fixedly provided.
On this cradle 21, for example, two size sensors 22a, 22b for detecting the size of the glass master 6 are arranged in the radial direction. Further, for example, two type sensors 23a and 23b for detecting the type of the glass master 6 are provided in the vicinity of the center hole of the receiving table 21. A center cap 24 is attached to the upper end of the spindle 16.

2 and 3, the device 1 includes a cup 25 that moves up and down with respect to the device body 11. The cup 25 is normally held in a raised position so as not to hinder the movement of the turntable unit 10, and the connecting portion 26 is used when performing each process.
The linear drive motor 27 is driven downward via (shown in FIG. 1). The drive source of the cup 25 is not limited to the linear drive motor 27, and any drive capable of vertically driving the cup 25 may be used. The lowered cup 25 is fitted to the peripheral portion of the pedestal 21 of the turntable unit 10 to maintain the sealed state. In this state, the glass master 6 vacuum-adsorbed on the turntable 7 by the vacuum pump 28 is rotated by the motor 8 while being rotated.
It is cleaned with a cleaning liquid sprayed from a nozzle (not shown) provided in 25, and then a primer treatment is performed. Glass master 6 that has been cleaned and primed
Is transferred to the device 2 as the turntable unit 10 moves along the guide rails 12a and 12b.

The device 2 has an inspection unit 29, and the inspection unit 29 is supported on the device body 11 by two columns 30a and 30b and is covered by a hood 31. Two
The pillars 30a and 30b of the book also do not function as ducts, and are provided so as to be located leeward of the glass master 6, that is, so as to be located on the opposite side of the clean bench 5. According to this, the flow of the air blown in parallel from the clean bench 5 to the glass master 6 is not disturbed, and it is possible to favorably prevent adhesion of dust and the like to the surface of the glass master 6. become. In the apparatus 2, it is checked whether or not the glass master 6 cleaned and primed in the apparatus 1 has a defect such as a scratch and the like. The inspection unit 29 also measures the thickness of the resist film at the same time that the inspection is performed.

On the other hand, the apparatus 3 has a baking unit 32, and the baking unit 32 is supported on the apparatus main body 11 by two columns 33a and 33b and is covered by a hood 34. As in the case of the device 2, the two columns 33a and 33b do not act as ducts, and the glass master 6 is used.
It is provided to be located leeward. In this apparatus 3, a pre-baking process using far infrared rays is performed on a resist master disk coated with a photoresist. In this pre-baking process, the surface temperature of the resist master is detected by the radiation thermometer 35, and the surface temperature is controlled based on the detected temperature.

As is particularly apparent from FIG. 1, the hoods 31 and 34 in the devices 2 and 3 respectively have the upper surfaces inclined downward and the both side surfaces inclined toward the center at the end portion on the clean bench 5 side. It is composed. According to this, as shown by the arrows in FIGS. 1 and 3, the wind blown out from the clean bench 5 satisfactorily flows in the downstream direction along the upper surfaces of the hoods 31, 34 and the inclined surfaces of both side surfaces. Therefore, the flow of wind around each device is not disturbed.

Further, as described above, the columns 30a and 30b that support the inspection unit 29, the foot 31, the baking unit 32, and the hood 34.
And 33a, 33b are provided so as to be located leeward of the glass master 6 carried and conveyed by the turntable unit 11, and the support columns 30a, 30b and 33a, 33b are, as shown in FIG. It is held by holding holes 37a, 37b and 38a, 38b formed in the upper surface of the. On the other hand, when this device is arranged, for example, in a pair on the left and right with respect to the operator, and the system is such that air is blown in from both sides, the support 30a,
30b and 33a, 33b are located on the windward side of the glass master 6, and the inclined surfaces of the hoods 31, 34 are located on the leeward side, which hinders the smooth flow of the wind. Therefore, as a countermeasure against this, the support holes 30a, 37b and the columns 30a, 38a, 38b
By holding the 30b and 33a, 33b detachable, holding holes 39a, 39b and 40a, 40b are also formed on the opposite side, by appropriately selecting the mounting positions of the columns 30a, 30b and 33a, 33b, Fifth
As shown in the drawing, the columns 30a, 30b and 33a, 33b can be set so that they are always located on the leeward side of the glass master 6, and the inclined surfaces of the hoods 31, 34 are located on the windward side.

In FIG. 2, for example, six position sensors 36a to 36f are arranged in the apparatus body 11 along the moving direction of the turntable unit 10 in order to detect the moving position of the turntable unit 10. The six position sensors 36a to 36f are provided so as to correspond to each of the devices 1 to 3 by two,
The movement position of the turntable unit 10 is detected from the combination of the outputs of the sensors 36a to 36f.
That is, as shown in FIG. 6, when only the position sensors 36a and 36b are in the ON state, the position sensors 36c and 36c are provided to the device 1.
When only d is in the ON state, the position sensor 36
When only e and 36f are in the ON state, it can be detected that the turntable unit 10 is located in the device 3, respectively. Further, when the turntable unit 10 is located at both ends of the moving path, only the position sensor 36a or 36f is in the ON state, and when it is located between the devices, the position sensor 36b,
Only 36c or 36d and 36e are turned on.

Therefore, by detecting the moving position of the turntable unit 10 from the combination of the outputs of the position sensors 36a to 36f, the unit 10 can be reliably stopped at the working position of each device, and the movement of the unit 10 For example, when there is a power failure, the direction in which the unit 10 should move after that can be determined from the detection position after the power failure is restored, so that the work can be smoothly continued even after the power failure is restored.

In the configuration described above, the turntable unit 10
Control of the movement and stop position thereof, operation control for performing each work in each of the devices 1 to 3, speed control of the turntable, etc. are collectively performed by a system controller (not shown) including a microcomputer, for example.

Next, the work procedure executed in this apparatus will be described with reference to the flowchart of FIG.

First, in the device 1, when the glass master is placed on the turntable 7, the cup 25 descends and fits into the pedestal 21 of the turntable unit 10 to maintain a hermetically sealed state. The master is washed (step S1), and then a primer treatment is performed (step S2). The cleaned and primed glass master moves to the device 2 as the turntable unit 10 moves while being placed on the turntable 7, where the glass master is inspected for defects (step S3). . The glass master that has passed the inspection is again transferred to the apparatus 1 and coated with a photoresist (step S4) to become a resist master. As the turntable unit 10 moves, this resist master moves through the device 2 to the device 3 where the prebaking process with far infrared rays is performed (step S).
Five). The heat-treated resist master is transferred again to the apparatus 2, where defect inspection of the resist master and measurement of the resist film thickness are performed (step S6). Through the above procedure, a series of processes for forming the resist master disk is completed.

Here, in each of the devices 1 to 3, it goes without saying that each work is performed by rotationally driving the turntable 7, but in the present system, the turntable 7 rotates while moving between the devices. It is driven so that it can continue to rotate. According to this, since the glass master disk (or resist master disk) is constantly driven to rotate, it is possible to prevent adhesion of dust or the like on the board surface. Also,
Since the turn-up time of the turntable 7 is not required in each device, it is possible to smoothly shift to each work.

Effects of the Invention As described above, in the optical disk master processing device according to the present invention, a plurality of devices performing different operations are integrated, and a plurality of turntable units including a turntable and a drive source for rotationally driving the turntable are provided. Since it is movably provided between the devices, and the turntable is driven to rotate even when the devices are moved, the overall system can be made compact and work by integrating the devices. In addition to the improvement of the property, it is possible to prevent adhesion of dust or the like to the surface of the glass master disk for an optical disk, which is the work piece.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention applied to, for example, a resist master forming apparatus, and FIGS.
The front view including the partial cross section which shows the concrete structure of each apparatus in a figure, and the top view which contains a partial cross section, FIG. 4 is the cross section which shows the concrete structure of the turntable unit in FIG. 2 and FIG. 5 and 5 are plan views showing a configuration in which a pair of the present apparatus is arranged on the left and right with respect to an operator, and FIG. 6 shows the respective operating states of the position sensor and the moving position of the turntable unit in FIG. FIG. 7 shows the relationship, and FIG. 7 is a flowchart showing the work procedure for producing a resist master. Explanation of symbols of main parts 1,2,3 …… Device, 5 …… Clean bench 6 …… Glass master, 7 …… Turntable 10 …… Turntable unit 11 …… Device body, 25 …… Cup 29 …… Inspection unit 30a, 30b, 33a, 33b …… Brace 32 …… Baking unit 31,34 …… Hood 36a to 36f …… Position sensor

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Shigeru Kono 2680 Nishi Hanawa, Tatomi-cho, Nakakoma-gun, Yamanashi Pioneer Video Co., Ltd. Incorporated (72) Inventor Kazuhiko Nagata 2680 Nishi Hanawa, Tatomi-cho, Nakakoma-gun, Yamanashi Pioneer Video Co., Ltd. (56) Reference JP-A-59-223623 (JP, A)

Claims (1)

[Claims] 1. An optical disk master processing apparatus comprising a plurality of devices for rotationally driving a turntable arranged in a clean room at a predetermined number of rotations and performing different operations for the optical disk masters mounted thereon. A turntable unit including the turntable and a drive source for rotationally driving the turntable, guide means provided between the plurality of devices for guiding the turntable unit, and the turntable unit. An optical disk master processing device comprising: drive means for moving the plurality of devices, and the drive source continues to rotate and drive the turntable even while the turntable unit moves between the devices. .