JPH0636479Y2 - ヒータ装置 - Google Patents

ヒータ装置

Info

Publication number
JPH0636479Y2
JPH0636479Y2 JP8931989U JP8931989U JPH0636479Y2 JP H0636479 Y2 JPH0636479 Y2 JP H0636479Y2 JP 8931989 U JP8931989 U JP 8931989U JP 8931989 U JP8931989 U JP 8931989U JP H0636479 Y2 JPH0636479 Y2 JP H0636479Y2
Authority
JP
Japan
Prior art keywords
heater element
heater
support portion
lifting piece
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8931989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0331296U (US20100012521A1-20100121-C00001.png
Inventor
隆之 大越
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP8931989U priority Critical patent/JPH0636479Y2/ja
Publication of JPH0331296U publication Critical patent/JPH0331296U/ja
Application granted granted Critical
Publication of JPH0636479Y2 publication Critical patent/JPH0636479Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
JP8931989U 1989-07-28 1989-07-28 ヒータ装置 Expired - Lifetime JPH0636479Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8931989U JPH0636479Y2 (ja) 1989-07-28 1989-07-28 ヒータ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8931989U JPH0636479Y2 (ja) 1989-07-28 1989-07-28 ヒータ装置

Publications (2)

Publication Number Publication Date
JPH0331296U JPH0331296U (US20100012521A1-20100121-C00001.png) 1991-03-27
JPH0636479Y2 true JPH0636479Y2 (ja) 1994-09-21

Family

ID=31638902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8931989U Expired - Lifetime JPH0636479Y2 (ja) 1989-07-28 1989-07-28 ヒータ装置

Country Status (1)

Country Link
JP (1) JPH0636479Y2 (US20100012521A1-20100121-C00001.png)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003092946A (ja) * 2001-09-21 2003-04-02 Ricoh Co Ltd 飼主音声再生システムの動作方法、飼主音声情報送信装置、飼主音声再生システムの動作方法、飼主音声出力装置を動作させるためのプログラム、食料供給システムの動作方法、食料供給装置を動作させるためのプログラム、被保護動物映像配信システムの動作方法および被保護動物映像配信装置
US9064912B2 (en) 2009-07-21 2015-06-23 Hitachi Kokusai Electric, Inc. Heating device, substrate processing apparatus, and method of manufacturing semiconductor device
JP5544121B2 (ja) 2009-07-21 2014-07-09 株式会社日立国際電気 加熱装置、基板処理装置、及び半導体装置の製造方法
JP5824082B2 (ja) * 2014-02-05 2015-11-25 株式会社日立国際電気 加熱装置、基板処理装置、及び半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0331296U (US20100012521A1-20100121-C00001.png) 1991-03-27

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