JPH0635362Y2 - イオン注入装置のチャージアップ低減用の電子銃装置 - Google Patents
イオン注入装置のチャージアップ低減用の電子銃装置Info
- Publication number
- JPH0635362Y2 JPH0635362Y2 JP1988010214U JP1021488U JPH0635362Y2 JP H0635362 Y2 JPH0635362 Y2 JP H0635362Y2 JP 1988010214 U JP1988010214 U JP 1988010214U JP 1021488 U JP1021488 U JP 1021488U JP H0635362 Y2 JPH0635362 Y2 JP H0635362Y2
- Authority
- JP
- Japan
- Prior art keywords
- filament
- slit
- anode
- terminal
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004020 conductor Substances 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000005452 bending Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 230000008602 contraction Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 102100025490 Slit homolog 1 protein Human genes 0.000 description 1
- 101710123186 Slit homolog 1 protein Proteins 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988010214U JPH0635362Y2 (ja) | 1988-01-26 | 1988-01-26 | イオン注入装置のチャージアップ低減用の電子銃装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988010214U JPH0635362Y2 (ja) | 1988-01-26 | 1988-01-26 | イオン注入装置のチャージアップ低減用の電子銃装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01113952U JPH01113952U (enrdf_load_stackoverflow) | 1989-07-31 |
| JPH0635362Y2 true JPH0635362Y2 (ja) | 1994-09-14 |
Family
ID=31217670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988010214U Expired - Lifetime JPH0635362Y2 (ja) | 1988-01-26 | 1988-01-26 | イオン注入装置のチャージアップ低減用の電子銃装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0635362Y2 (enrdf_load_stackoverflow) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6210850A (ja) * | 1985-07-08 | 1987-01-19 | Matsushita Electric Ind Co Ltd | 電子ビ−ム静電レンズ |
| JPH0535557Y2 (enrdf_load_stackoverflow) * | 1986-02-24 | 1993-09-09 |
-
1988
- 1988-01-26 JP JP1988010214U patent/JPH0635362Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01113952U (enrdf_load_stackoverflow) | 1989-07-31 |
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