JPH06346095A - Fluorine based cleansing solvent composition - Google Patents
Fluorine based cleansing solvent compositionInfo
- Publication number
- JPH06346095A JPH06346095A JP13051293A JP13051293A JPH06346095A JP H06346095 A JPH06346095 A JP H06346095A JP 13051293 A JP13051293 A JP 13051293A JP 13051293 A JP13051293 A JP 13051293A JP H06346095 A JPH06346095 A JP H06346095A
- Authority
- JP
- Japan
- Prior art keywords
- hcfc
- solvent composition
- pentafluoropropane
- dichloro
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- Detergent Compositions (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は洗浄溶剤として優れた特
性を有するフッ素系洗浄溶剤組成物に関する。更に詳し
くは、半導体製造時に使用されるフラックス類の洗浄あ
るいは機械油の洗浄用に使用される溶剤組成物に関する
ものである。FIELD OF THE INVENTION The present invention relates to a fluorine-based cleaning solvent composition having excellent properties as a cleaning solvent. More specifically, the present invention relates to a solvent composition used for cleaning fluxes used in semiconductor manufacturing or cleaning machine oil.
【0002】[0002]
【従来の技術】従来、洗浄溶剤としては、1,1,2−
トリクロロ−1,2,2−トリフルオロエタン(CFC
−113)などのクロロフルオロエタン系化合物が広く
使用されている。これらの溶剤は、不燃性であり、さら
に、プラスチックなどの高分子材料を侵さず、油脂、グ
リース、ワックスなどを溶解するという選択的溶解性を
有するなどの性能を有している。2. Description of the Related Art Conventional cleaning solvents have been 1,1,2-
Trichloro-1,2,2-trifluoroethane (CFC
Chlorofluoroethane compounds such as -113) are widely used. These solvents are nonflammable, and further have such properties that they do not attack polymer materials such as plastics and have selective solubility of dissolving oils and fats, grease, wax and the like.
【0003】しかしながら、これらのクロロフルオロエ
タン系化合物が大気中に放出された場合に、成層圏のオ
ゾン層を破壊し、その結果、地球上の生態系に悪影響を
及ぼすことが指摘され、これらの化合物は使用規制が実
施されることとなった。However, it has been pointed out that, when these chlorofluoroethane compounds are released into the atmosphere, they destroy the ozone layer in the stratosphere, and as a result, adversely affect the ecosystem on the earth. Regulations have been enforced.
【0004】[0004]
【発明が解決しようとする課題】CFC−113のよう
に分子内の水素が全て塩素およびフッ素で置換されたク
ロロフルオロエタン系化合物に替えて、分子内に水素原
子を残し対流圏での分解を可能とし、その結果大気中で
の寿命を短くする事によりオゾン層破壊及び地球温暖化
に与える影響を低減する方策が検討されている。It is possible to decompose in the troposphere by leaving a hydrogen atom in the molecule instead of a chlorofluoroethane compound in which all the hydrogen in the molecule is replaced by chlorine and fluorine like CFC-113. As a result, measures to reduce the effects on ozone layer depletion and global warming by shortening the life in the atmosphere are being studied.
【0005】例えば、1,1−ジクロロ−2,2,3,
3,3−ペンタフルオロプロパン(HCFC−225c
a)及び1,3−ジクロロ−1,2,2,3,3−ペン
タフルオロプロパン(HCFC−225cb)などのヒ
ドロハロゲノプロパン類、及びその性能向上のため、こ
れに数種類のフッ素化アルコール(2,2,2−トリフ
ルオロエタノール、2,2,3,3−テトラフルオロプ
ロパノール、2,2,3,3,3−ペンタフルオロプロ
パノール)を混合した溶剤組成物等が提案されている
(特開平3−17034号公報等)。For example, 1,1-dichloro-2,2,3,
3,3-Pentafluoropropane (HCFC-225c
a) and hydrohalogenopropanes such as 1,3-dichloro-1,2,2,3,3-pentafluoropropane (HCFC-225cb), and several fluorinated alcohols (2 , 2,2-trifluoroethanol, 2,2,3,3-tetrafluoropropanol, 2,2,3,3,3-pentafluoropropanol) have been proposed as a solvent composition, etc. 3-17034, etc.).
【0006】しかしながら、これらフッ素化アルコール
は、単独では可燃性であったり、また、いずれも基剤と
なるHCFC−225ca及びHCFC−225cbと
の沸点差が大きいために再利用時の組成変化が大きい等
の問題点を有しており、未だ高性能な代替フロン溶剤の
探索が検討されている。[0006] However, these fluorinated alcohols are flammable by themselves, and since the difference in boiling point between HCFC-225ca and HCFC-225cb, both of which are base materials, is large, the composition change during reuse is large. However, the search for a high-performance alternative CFC solvent is still under consideration.
【0007】[0007]
【課題を解決するための手段】本発明者らは、上記の如
き現状を鑑み研究を重ねた結果、個々の沸点、表面張力
等の物性値が従来の2,2,2−トリフルオロエタノー
ル、2,2,3,3−テトラフルオロプロパノール、及
び2,2,3,3,3−ペンタフルオロプロパノールよ
りも優れているフッ素化アルコールと、ハロゲン化炭化
水素としてHCFC−225ca(沸点:51.1℃)
及び/又はHCFC−225cb(沸点:56.1℃)
を混合することにより、溶剤としての性能が高く、かつ
地球環境への影響が小さい溶剤となることを見いだし本
発明を完成するに至った。Means for Solving the Problems As a result of repeated studies in view of the above-mentioned present conditions, the present inventors have found that the physical properties such as individual boiling points and surface tensions of conventional 2,2,2-trifluoroethanol, Fluorinated alcohols that are superior to 2,2,3,3-tetrafluoropropanol and 2,2,3,3,3-pentafluoropropanol, and HCFC-225ca (boiling point: 51.1) as a halogenated hydrocarbon. ℃)
And / or HCFC-225cb (boiling point: 56.1 ° C)
It has been found that a solvent having a high performance as a solvent and having a small influence on the global environment can be obtained by mixing the above. Thus, the present invention has been completed.
【0008】すなわち、本発明は、1,1,1,3,
3,3−ヘキサフルオロプロパン−2−オール、1,
1,1,3,3,4,4,4−オクタフルオロブタン−
2−オール、2−トリフルオロメチル−1,1,1,
3,3,3−ヘキサフルオロプロパン−2−オール、及
び2−トリフルオロメチル−1,1,1−トリフルオロ
プロパン−2−オールから選ばれるフッ素化アルコール
の少なくとも1種と、HCFC−225ca及びHCF
C−225cbの少なくとも1種とを含むフッ素系洗浄
溶剤組成物に関するものである。That is, the present invention is 1, 1, 1, 3,
3,3-hexafluoropropan-2-ol, 1,
1,1,3,3,4,4,4-octafluorobutane-
2-ol, 2-trifluoromethyl-1,1,1,
HCFC-225ca and at least one fluorinated alcohol selected from 3,3,3-hexafluoropropan-2-ol and 2-trifluoromethyl-1,1,1-trifluoropropan-2-ol HCF
The present invention relates to a fluorine-based cleaning solvent composition containing at least one of C-225cb.
【0009】本発明で使用されるフッ素化アルコール
は、1,1,1,3,3,3−ヘキサフルオロプロパン
−2−オール[CF3 CH(OH)CF3 ]、1,1,
1,3,3,4,4,4−オクタフルオロブタン−2−
オール[CF3 CH(OH)CF2 CF3 ]、2−トリ
フルオロメチル−1,1,1,3,3,3−ヘキサフル
オロプロパン−2−オール[(CF3 )3 COH]、2
−トリフルオロメチル−1,1,1−トリフルオロプロ
パン−2−オール[(CF3 )2 (CH3 )COH]で
あり、これらは単独でもあるいは2種類以上の混合物と
しても使用できる。The fluorinated alcohol used in the present invention is 1,1,1,3,3,3-hexafluoropropan-2-ol [CF 3 CH (OH) CF 3 ], 1,1,
1,3,3,4,4,4-octafluorobutane-2-
All [CF 3 CH (OH) CF 2 CF 3 ], 2-trifluoromethyl-1,1,1,3,3,3-hexafluoropropan-2-ol [(CF 3 ) 3 COH], 2
- trifluoromethyl-1,1,1-trifluoro-2-ol [(CF 3) 2 (CH 3) COH], they can be used as alone or mixture of two or more.
【0010】本発明で用いるフッ素化アルコールの代表
的な物性値を表1に示す。比較のため、従来のアルコー
ルの対応する物性値を表1に示すが、いずれも本発明の
フッ素化アルコールのほうが優れておりハロゲン化炭化
水素と混合した場合に、ハロゲン化炭化水素のもつ低沸
点、低表面張力の利点を損なうことなく溶剤としての性
能を高めることができる。Table 1 shows typical physical properties of the fluorinated alcohol used in the present invention. For comparison, the corresponding physical property values of conventional alcohols are shown in Table 1. In all cases, the fluorinated alcohols of the present invention are superior, and when they are mixed with halogenated hydrocarbons, they have a low boiling point. The performance as a solvent can be enhanced without impairing the advantage of low surface tension.
【0011】[0011]
【表1】 [Table 1]
【0012】本発明で使用されるハロゲン化炭化水素H
CFC−225ca及びHCFC−225cbは、それ
ぞれ単独で使用しても、あるいは混合して使用してもよ
い。これら2種の混合物として使用する場合の混合比
は、製造法に由来する経済性により決定されるが、好ま
しくはHCFC−225caが40〜60重量%、HC
FC−225cbが40〜60重量%である。Halogenated hydrocarbon H used in the present invention
CFC-225ca and HCFC-225cb may be used alone or in combination. The mixing ratio when used as a mixture of these two kinds is determined by the economic efficiency derived from the production method, but preferably HCFC-225ca is 40 to 60% by weight, HC
FC-225cb is 40 to 60% by weight.
【0013】本発明で用いられるフッ素系洗浄溶剤組成
物のハロゲン化炭化水素HCFC−225ca及びHC
FC−225cbとフッ素化アルコールの混合比は、H
CFC−225ca及びHCFC−225cbの単独若
しくはこれらの混合物が60〜99重量%、及びフッ素
化アルコール1〜40重量%であり、特に好ましくは、
HCFC−225ca及びHCFC−225cbの単独
若しくはこれらの混合物が75〜95重量%、及びフッ
素化アルコール5〜25重量%である。Halogenated hydrocarbons HCFC-225ca and HC of the fluorine-based cleaning solvent composition used in the present invention
The mixing ratio of FC-225cb and fluorinated alcohol is H
CFC-225ca and HCFC-225cb alone or in a mixture thereof are 60 to 99% by weight, and fluorinated alcohol is 1 to 40% by weight, and particularly preferably,
HCFC-225ca and HCFC-225cb alone or in a mixture thereof are 75 to 95% by weight, and fluorinated alcohol is 5 to 25% by weight.
【0014】本発明の組成物の具体的な用途としては、
フラックス、グリース、油、ワックス、インキ等の除去
剤、塗料用溶剤、抽出剤、ガラス、セラミックス、プラ
スチック、ゴム、金属製各種物品、特にIC部品、電気
機器、精密機械、光学レンズ等の洗浄剤等を挙げること
ができる。洗浄方法としては、手拭き、浸漬、スプレ
ー、揺動、超音波洗浄、蒸気洗浄等を採用すればよい。Specific uses of the composition of the present invention include:
Flux, grease, oil, wax, ink remover, paint solvent, extractant, glass, ceramics, plastic, rubber, metal products, especially IC parts, electrical equipment, precision machinery, optical lenses, etc. Etc. can be mentioned. As a cleaning method, hand-wiping, dipping, spraying, shaking, ultrasonic cleaning, steam cleaning or the like may be adopted.
【0015】[0015]
【実施例】以下に実施例を挙げ、本発明をさらに具体的
に説明する。 [実施例1〜4]HCFC−225ca及びHCFC−
225cbの混合物、HCFC−225ca/cb(重
量組成比HCFC−225ca/HCFC−225cb
=1/1)と、これにフッ素化アルコールを表2に示す
割合で混合した溶剤組成物を用いてフラックスの洗浄試
験を行った。EXAMPLES The present invention will be described in more detail with reference to the following examples. [Examples 1 to 4] HCFC-225ca and HCFC-
225cb mixture, HCFC-225ca / cb (weight composition ratio HCFC-225ca / HCFC-225cb
= 1/1) and a solvent composition in which fluorinated alcohol was mixed at a ratio shown in Table 2 to perform a flux cleaning test.
【0016】プリント基板全面にフラックス(タムラF
−AL−4、タムラ製作所製)を塗布し、200℃の電
気炉で2分間焼成後、本発明の組成物中に3分間浸漬し
た。比較例として、2,2,3,3,3−ペンタフルオ
ロプロパノール(比較例1)及びCFC−113の単独
(比較例2)を使用して同様の試験を行った。これらの
結果を表2に示す。Flux (Tamura F
-AL-4, manufactured by Tamura Seisakusho Co., Ltd.) was applied, baked in an electric furnace at 200 ° C. for 2 minutes, and then immersed in the composition of the present invention for 3 minutes. As a comparative example, the same test was performed using 2,2,3,3,3-pentafluoropropanol (Comparative Example 1) and CFC-113 alone (Comparative Example 2). The results are shown in Table 2.
【0017】[0017]
【表2】 [Table 2]
【0018】[実施例5〜8]本発明の組成物を用いて
機械油の洗浄試験を行った。SUS−304のテストピ
ース(25mm×30mm×2mm厚)を機械油(CQ
−30 日本石油(株)製)中に浸漬した後、本発明の
組成物中に3分間浸漬した。比較例として、2,2,
3,3,3−ペンタフルオロプロパノール(比較例3)
及びCFC−113の単独(比較例4)を使用して同様
の試験を行った。これらの結果を表3に示す。[Examples 5 to 8] Machine oil washing tests were conducted using the compositions of the present invention. A test piece of SUS-304 (25 mm x 30 mm x 2 mm thick) was machine oil (CQ
-30 After immersion in Nippon Oil Co., Ltd., it was immersed in the composition of the present invention for 3 minutes. As a comparative example, 2,2
3,3,3-Pentafluoropropanol (Comparative Example 3)
And CFC-113 alone (Comparative Example 4) were used to perform the same test. The results are shown in Table 3.
【0019】[0019]
【表3】 [Table 3]
【0020】[0020]
【発明の効果】本発明のフッ素系洗浄溶剤組成物は、従
来のアルコール類に較べて不燃性かつ低沸点のフッ素化
アルコールを使用するので、HCFC−225ca及び
HCFC−225cbと混合した場合、組成の経時変化
が小さく、安全でかつ安定な溶剤となるとともに、フラ
ックスや油等の溶解除去性に優れ、さらに従来のCFC
−113等と同様の使い方ができるため、従来技術の大
幅な変更を要しない等の利点がある。The fluorine-based cleaning solvent composition of the present invention uses a fluorinated alcohol which is incombustible and has a low boiling point as compared with conventional alcohols, and therefore, when mixed with HCFC-225ca and HCFC-225cb, the composition Has a small change over time, becomes a safe and stable solvent, and is excellent in the ability to dissolve and remove flux, oil, etc.
Since it can be used in the same manner as -113 or the like, it has an advantage that it does not require a significant change from the conventional technique.
フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 C11D 7:28 7:30) (71)出願人 000003300 東ソー株式会社 山口県新南陽市開成町4560番地 (71)出願人 000002200 セントラル硝子株式会社 山口県宇部市大字沖宇部5253番地 (74)上記4名の代理人 弁理士 内田 明 (外2名) (72)発明者 関屋 章 茨城県つくば市東1丁目1番 工業技術院 物質工学工業技術研究内 (72)発明者 高橋 満 東京都文京区本郷2−40−17本郷若井ビル 財団法人地球環境産業技術研究機構内 (72)発明者 後藤 嘉彦 東京都文京区本郷2−40−17本郷若井ビル 財団法人地球環境産業技術研究機構内 (72)発明者 須賀 淳雄 東京都文京区本郷2−40−17本郷若井ビル 財団法人地球環境産業技術研究機構内Continuation of the front page (51) Int.Cl. 5 Identification number Reference number within the agency FI Technical display location C11D 7:28 7:30) (71) Applicant 000003300 Tosoh Co., Ltd. 4560 Kaiseicho, Shinnanyo, Yamaguchi Prefecture (71 ) Applicant 000002200 Central Glass Co., Ltd. 5253 Oki Ube, Ube-shi, Yamaguchi Prefecture (74) Attorney Aki Uchida (2 outside) Attorney Aki Uchida (72) Inventor Akira Sekiya 1-1-1 Higashi, Tsukuba-shi, Ibaraki (72) Inventor Mitsuru Takahashi Hongo 2-40-17 Hongo, Bunkyo-ku, Tokyo Hongo Wakai Building Institute for Global Environmental Industrial Technology (72) Inventor Yoshihiko Goto Hongo, Bunkyo-ku, Tokyo 2-40-17 Hongo Wakai Building, Research Institute for Global Environmental Industries (72) Inventor Atsushi Suga Hongo, Bunkyo-ku, Tokyo 2-40-17 Hongo Wakai Building Research Institute for Global Environmental Industries
Claims (2)
ロプロパン−2−オール、1,1,1,3,3,4,
4,4−オクタフルオロブタン−2−オール、2−トリ
フルオロメチル−1,1,1,3,3,3−ヘキサフル
オロプロパン−2−オール、及び2−トリフルオロメチ
ル−1,1,1−トリフルオロプロパン−2−オールか
ら選ばれるフッ素化アルコールの少なくとも1種と、
1,1−ジクロロ−2,2,3,3,3−ペンタフルオ
ロプロパン及び1,3−ジクロロ−1,2,2,3,3
−ペンタフルオロプロパンの少なくとも1種とを含むフ
ッ素系洗浄溶剤組成物。1. 1,1,1,3,3,3-hexafluoropropan-2-ol, 1,1,1,3,3,4
4,4-octafluorobutan-2-ol, 2-trifluoromethyl-1,1,1,3,3,3-hexafluoropropan-2-ol, and 2-trifluoromethyl-1,1,1 -At least one fluorinated alcohol selected from trifluoropropan-2-ol;
1,1-dichloro-2,2,3,3,3-pentafluoropropane and 1,3-dichloro-1,2,2,3,3
A fluorine-based cleaning solvent composition containing at least one of pentafluoropropane.
1,1−ジクロロ−2,2,3,3,3−ペンタフルオ
ロプロパン及び1,3−ジクロロ−1,2,2,3,3
−ペンタフルオロプロパンの少なくとも1種60〜99
重量%からなる請求項1に記載のフッ素系洗浄溶剤組成
物。2. 1-40% by weight of fluorinated alcohol and 1,1-dichloro-2,2,3,3,3-pentafluoropropane and 1,3-dichloro-1,2,2,3,3.
At least one of pentafluoropropane 60-99
The fluorine-based cleaning solvent composition according to claim 1, which is composed by weight.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5130512A JP2763083B2 (en) | 1993-06-01 | 1993-06-01 | Fluorine-based cleaning solvent composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5130512A JP2763083B2 (en) | 1993-06-01 | 1993-06-01 | Fluorine-based cleaning solvent composition |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06346095A true JPH06346095A (en) | 1994-12-20 |
JP2763083B2 JP2763083B2 (en) | 1998-06-11 |
Family
ID=15036071
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5130512A Expired - Lifetime JP2763083B2 (en) | 1993-06-01 | 1993-06-01 | Fluorine-based cleaning solvent composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2763083B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002086191A1 (en) * | 2001-04-24 | 2002-10-31 | 3M Innovative Properties Company | Use of fluorinated ketones as wet cleaning agents for vapor reactors |
WO2004000987A1 (en) * | 2002-06-19 | 2003-12-31 | Asahi Glass Company, Limited | Method of cleaning chamber of vacuum evaporation apparatus for production of organic el element |
EP1900801A1 (en) | 2006-09-14 | 2008-03-19 | FUJIFILM Corporation | Substrate water-removing agent, and water-removing method and drying method employing same |
JP2009073835A (en) * | 2008-09-11 | 2009-04-09 | Central Glass Co Ltd | Fluorine-containing compound, dissolution-suppressing agent and resist material using them |
CN116000000A (en) * | 2016-04-27 | 2023-04-25 | 神户合成株式会社 | Detergent composition and aerosol composition thereof |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0327328A (en) * | 1989-06-23 | 1991-02-05 | Asahi Glass Co Ltd | Fluorinated hydrocarbon-based solvent composition |
JPH0327329A (en) * | 1989-06-23 | 1991-02-05 | Asahi Glass Co Ltd | Fluorinated hydrocarbon-based solvent composition |
-
1993
- 1993-06-01 JP JP5130512A patent/JP2763083B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0327328A (en) * | 1989-06-23 | 1991-02-05 | Asahi Glass Co Ltd | Fluorinated hydrocarbon-based solvent composition |
JPH0327329A (en) * | 1989-06-23 | 1991-02-05 | Asahi Glass Co Ltd | Fluorinated hydrocarbon-based solvent composition |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002086191A1 (en) * | 2001-04-24 | 2002-10-31 | 3M Innovative Properties Company | Use of fluorinated ketones as wet cleaning agents for vapor reactors |
WO2004000987A1 (en) * | 2002-06-19 | 2003-12-31 | Asahi Glass Company, Limited | Method of cleaning chamber of vacuum evaporation apparatus for production of organic el element |
US7037380B2 (en) | 2002-06-19 | 2006-05-02 | Asahi Glass Company, Limited | Method for cleaning chamber of deposition apparatus for organic EL device production |
EP1900801A1 (en) | 2006-09-14 | 2008-03-19 | FUJIFILM Corporation | Substrate water-removing agent, and water-removing method and drying method employing same |
JP2009073835A (en) * | 2008-09-11 | 2009-04-09 | Central Glass Co Ltd | Fluorine-containing compound, dissolution-suppressing agent and resist material using them |
CN116000000A (en) * | 2016-04-27 | 2023-04-25 | 神户合成株式会社 | Detergent composition and aerosol composition thereof |
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