JP2763083B2 - Fluorine-based cleaning solvent composition - Google Patents
Fluorine-based cleaning solvent compositionInfo
- Publication number
- JP2763083B2 JP2763083B2 JP5130512A JP13051293A JP2763083B2 JP 2763083 B2 JP2763083 B2 JP 2763083B2 JP 5130512 A JP5130512 A JP 5130512A JP 13051293 A JP13051293 A JP 13051293A JP 2763083 B2 JP2763083 B2 JP 2763083B2
- Authority
- JP
- Japan
- Prior art keywords
- hcfc
- fluorine
- solvent composition
- cleaning solvent
- based cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
Description
【０００１】[0001]
【産業上の利用分野】本発明は洗浄溶剤として優れた特
性を有するフッ素系洗浄溶剤組成物に関する。更に詳し
くは、半導体製造時に使用されるフラックス類の洗浄あ
るいは機械油の洗浄用に使用される溶剤組成物に関する
ものである。The present invention relates to a fluorine-based cleaning solvent composition having excellent properties as a cleaning solvent. More specifically, the present invention relates to a solvent composition used for cleaning fluxes or machine oil used in the production of semiconductors.
【０００２】[0002]
【従来の技術】従来、洗浄溶剤としては、１，１，２−
トリクロロ−１，２，２−トリフルオロエタン（ＣＦＣ
−１１３）などのクロロフルオロエタン系化合物が広く
使用されている。これらの溶剤は、不燃性であり、さら
に、プラスチックなどの高分子材料を侵さず、油脂、グ
リース、ワックスなどを溶解するという選択的溶解性を
有するなどの性能を有している。2. Description of the Related Art Conventionally, 1,1,2-
Trichloro-1,2,2-trifluoroethane (CFC
Chlorofluoroethane compounds such as -113) are widely used. These solvents are nonflammable, and have properties such as selective solubility of dissolving fats, oils, greases, waxes, etc., without corroding polymer materials such as plastics.
【０００３】しかしながら、これらのクロロフルオロエ
タン系化合物が大気中に放出された場合に、成層圏のオ
ゾン層を破壊し、その結果、地球上の生態系に悪影響を
及ぼすことが指摘され、これらの化合物は使用規制が実
施されることとなった。[0003] However, it has been pointed out that when these chlorofluoroethane compounds are released into the atmosphere, they destroy the ozone layer in the stratosphere and, as a result, adversely affect ecosystems on the earth. Has been regulated for use.
【０００４】[0004]
【発明が解決しようとする課題】ＣＦＣ−１１３のよう
に分子内の水素が全て塩素およびフッ素で置換されたク
ロロフルオロエタン系化合物に替えて、分子内に水素原
子を残し対流圏での分解を可能とし、その結果大気中で
の寿命を短くする事によりオゾン層破壊及び地球温暖化
に与える影響を低減する方策が検討されている。Instead of chlorofluoroethane compounds in which all hydrogens in the molecule are substituted with chlorine and fluorine, such as CFC-113, hydrogen atoms remain in the molecule and decomposition in the troposphere is possible. As a result, measures to reduce the impact on the ozone layer depletion and global warming by shortening the life in the atmosphere are being studied.
【０００５】例えば、１，１−ジクロロ−２，２，３，
３，３−ペンタフルオロプロパン（ＨＣＦＣ−２２５ｃ
ａ）及び１，３−ジクロロ−１，２，２，３，３−ペン
タフルオロプロパン（ＨＣＦＣ−２２５ｃｂ）などのヒ
ドロハロゲノプロパン類、及びその性能向上のため、こ
れに数種類のフッ素化アルコール（２，２，２−トリフ
ルオロエタノール、２，２，３，３−テトラフルオロプ
ロパノール、２，２，３，３，３−ペンタフルオロプロ
パノール）を混合した溶剤組成物等が提案されている
（特開平３−１７０３４号公報等）。For example, 1,1-dichloro-2,2,3
3,3-pentafluoropropane (HCFC-225c
a) and hydrohalogenopropanes such as 1,3-dichloro-1,2,2,3,3-pentafluoropropane (HCFC-225cb), and several kinds of fluorinated alcohols (2 , 2,2-trifluoroethanol, 2,2,3,3-tetrafluoropropanol, 2,2,3,3,3-pentafluoropropanol) and the like. No. 3-17034).
【０００６】しかしながら、これらフッ素化アルコール
は、単独では可燃性であったり、また、いずれも基剤と
なるＨＣＦＣ−２２５ｃａ及びＨＣＦＣ−２２５ｃｂと
の沸点差が大きいために再利用時の組成変化が大きい等
の問題点を有しており、未だ高性能な代替フロン溶剤の
探索が検討されている。[0006] However, these fluorinated alcohols are flammable by themselves or have a large change in composition upon reuse due to a large boiling point difference between HCFC-225ca and HCFC-225cb as bases. However, the search for a high-performance alternative CFC solvent is still under study.
【０００７】[0007]
【課題を解決するための手段】本発明者らは、上記の如
き現状を鑑み研究を重ねた結果、個々の沸点、表面張力
等の物性値が従来の２，２，２−トリフルオロエタノー
ル、２，２，３，３−テトラフルオロプロパノール、及
び２，２，３，３，３−ペンタフルオロプロパノールよ
りも優れているフッ素化アルコールと、ハロゲン化炭化
水素としてＨＣＦＣ−２２５ｃａ（沸点：５１．１℃）
及び／又はＨＣＦＣ−２２５ｃｂ（沸点：５６．１℃）
を混合することにより、溶剤としての性能が高く、かつ
地球環境への影響が小さい溶剤となることを見いだし本
発明を完成するに至った。Means for Solving the Problems As a result of repeated studies in view of the current situation as described above, the present inventors have found that physical properties such as the boiling point and surface tension of conventional 2,2,2-trifluoroethanol, Fluorinated alcohols which are superior to 2,2,3,3-tetrafluoropropanol and 2,2,3,3,3-pentafluoropropanol, and HCFC-225ca as a halogenated hydrocarbon (boiling point: 51.1 ℃)
And / or HCFC-225cb (boiling point: 56.1 ° C)
Was found to be a solvent having a high performance as a solvent and a small effect on the global environment, and completed the present invention.
【０００８】 すなわち、本発明は、１，１，１，３，
３，４，４，４−オクタフルオロブタン−２−オール、
２−トリフルオロメチル−１，１，１，３，３，３−ヘ
キサフルオロプロパン−２−オール、及び２−トリフル
オロメチル−１，１，１−トリフルオロプロパン−２−
オールから選ばれるフッ素化アルコールの少なくとも１
種と、ＨＣＦＣ−２２５ｃａ及びＨＣＦＣ−２２５ｃｂ
の少なくとも１種とを含むフッ素系洗浄溶剤組成物に関
するものである。That is, the present invention relates to 1 , 1 , 1 , 3,
3,4,4,4-octafluorobutan-2-ol,
2-trifluoromethyl-1,1,1,3,3,3-hexafluoropropan-2-ol and 2-trifluoromethyl-1,1,1-trifluoropropan-2-
At least one of the fluorinated alcohols selected from all
Species and HCFC-225ca and HCFC-225cb
And a fluorine-based cleaning solvent composition comprising at least one of the following.
【０００９】 本発明で使用されるフッ素化アルコール
は、１，１，１，３，３，４，４，４−オクタフルオロ
ブタン−２−オール〔ＣＦ3 ＣＨ（ＯＨ）ＣＦ2Ｃ
Ｆ3 〕、２−トリフルオロメチル−１，１，１，３，
３，３−ヘキサフルオロプロパン−２−オール〔（ＣＦ
3 ）3 ＣＯＨ〕、及び２−トリフルオロメチル−１，
１，１−トリフルオロプロパン−２−オール〔（Ｃ
Ｆ3 ）2 （ＣＨ3 ）ＣＯＨ〕であり、これらは単独でも
あるいは２種類以上の混合物として使用できる。[0009] Fluorinated alcohols used in the present invention, 1, 1,1,3,3,4,4,4- octafluoro-2-ol [CF 3 CH (OH) CF 2 C
F 3 ], 2-trifluoromethyl-1,1,1,3,
3,3-hexafluoropropan-2-ol [(CF
3 ) 3 COH], and 2-trifluoromethyl-1,
1,1-trifluoropropan-2-ol [(C
F 3 ) 2 (CH 3 ) COH], which can be used alone or as a mixture of two or more.
【００１０】本発明で用いるフッ素化アルコールの代表
的な物性値を表１に示す。比較のため、従来のアルコー
ルの対応する物性値を表１に示すが、いずれも本発明の
フッ素化アルコールのほうが優れておりハロゲン化炭化
水素と混合した場合に、ハロゲン化炭化水素のもつ低沸
点、低表面張力の利点を損なうことなく溶剤としての性
能を高めることができる。Table 1 shows typical physical properties of the fluorinated alcohol used in the present invention. For comparison, the corresponding physical property values of the conventional alcohol are shown in Table 1. In all cases, the fluorinated alcohol of the present invention is superior, and when mixed with the halogenated hydrocarbon, the low boiling point of the halogenated hydrocarbon is obtained. The performance as a solvent can be enhanced without impairing the advantage of low surface tension.
【００１１】[0011]
【表１】 ┌──────────────────────────────────┐ │フッ素化アルコール 沸点 表面張力 蒸発潜熱 引火点│ │ （℃） （注１） （注２） （℃）│ ├──────────────────────────────────┤ │ＣＦ3 ＣＨ（ＯＨ）ＣＦ2 ＣＦ3 ６７．９ １５．９ ３９．６ なし│ │（ＣＦ3 ）3 ＣＯＨ ４５．５ １３．７ ３２．１ なし│ │（ＣＦ3 ）2 （ＣＨ3 ）ＣＯＨ ６２．１ １６．９ ４６．７ なし│ ├──────────────────────────────────┤ │ＣＦ3 ＣＨ2 ＯＨ ７８．３ ２０．１ ９５．１ ３１│ │ＣＨＦ2 ＣＦ2 ＣＨ2 ＯＨ １０８．０ ２６．５ ７６．６ ４６│ │ＣＦ3 ＣＦ2 ＣＨ2 ＯＨ ８０．７ １７．７ ６６．０ なし│ ├──────────────────────────────────┤ │注１：単位ｄｙｎ／ｃｍ，測定温度 ２３℃ │ │注２：単位ｃａｌ／ｇ， 測定温度 ２３℃ │ └──────────────────────────────────┘[Table 1] │ │ Fluorinated alcohol Boiling point Surface tension Evaporation latent heat Ignition Point | | (° C) (Note 1) (Note 2) (° C) | ───┤ │CF 3 CH (OH) CF 2 CF 3 67.9 15.9 39.6 None││ (CF 3 ) 3 COH 45.5 13.7 32.1 None││ (CF 3 ) 2 (CH 3 ) COH 62.1 16.9 46.7 None | ├───────────────────────────────── || CF 3 CH 2 OH 78.3 20.1 95.1 31 | | CHF 2 CF 2 CH 2 OH 108.0 26.5 76.6 46 | | CF 3 CF 2 CH 2 OH 80.7 17 .7 66.0 None│ ├ ──────────────────────────────────┤ │Note 1: Unit dyn / cm, Measurement temperature 23 ℃ │ │ Note 2: Unit cal / g, Measurement temperature 23 ℃ │ └──────────────────────────────────┘
【００１２】本発明で使用されるハロゲン化炭化水素Ｈ
ＣＦＣ−２２５ｃａ及びＨＣＦＣ−２２５ｃｂは、それ
ぞれ単独で使用しても、あるいは混合して使用してもよ
い。これら２種の混合物として使用する場合の混合比
は、製造法に由来する経済性により決定されるが、好ま
しくはＨＣＦＣ−２２５ｃａが４０〜６０重量％、ＨＣ
ＦＣ−２２５ｃｂが４０〜６０重量％である。The halogenated hydrocarbon H used in the present invention
CFC-225ca and HCFC-225cb may be used alone or in combination. When used as a mixture of these two types, the mixing ratio is determined by the economics derived from the production method. Preferably, HCFC-225ca is 40 to 60% by weight, HC
FC-225cb is 40 to 60% by weight.
【００１３】本発明で用いられるフッ素系洗浄溶剤組成
物のハロゲン化炭化水素ＨＣＦＣ−２２５ｃａ及びＨＣ
ＦＣ−２２５ｃｂとフッ素化アルコールの混合比は、Ｈ
ＣＦＣ−２２５ｃａ及びＨＣＦＣ−２２５ｃｂの単独若
しくはこれらの混合物が６０〜９９重量％、及びフッ素
化アルコール１〜４０重量％であり、特に好ましくは、
ＨＣＦＣ−２２５ｃａ及びＨＣＦＣ−２２５ｃｂの単独
若しくはこれらの混合物が７５〜９５重量％、及びフッ
素化アルコール５〜２５重量％である。The halogenated hydrocarbons HCFC-225ca and HC of the fluorine-based cleaning solvent composition used in the present invention
The mixing ratio of FC-225cb and fluorinated alcohol is H
CFC-225ca and HCFC-225cb alone or in a mixture thereof are 60 to 99% by weight, and 1 to 40% by weight of a fluorinated alcohol, and particularly preferably,
HCFC-225ca and HCFC-225cb alone or in a mixture thereof are 75 to 95% by weight, and 5 to 25% by weight of fluorinated alcohol.
【００１４】本発明の組成物の具体的な用途としては、
フラックス、グリース、油、ワックス、インキ等の除去
剤、塗料用溶剤、抽出剤、ガラス、セラミックス、プラ
スチック、ゴム、金属製各種物品、特にＩＣ部品、電気
機器、精密機械、光学レンズ等の洗浄剤等を挙げること
ができる。洗浄方法としては、手拭き、浸漬、スプレ
ー、揺動、超音波洗浄、蒸気洗浄等を採用すればよい。Specific uses of the composition of the present invention include:
Remover for flux, grease, oil, wax, ink, etc., solvent for paint, extractant, glass, ceramics, plastic, rubber, various metal articles, especially IC parts, electrical equipment, precision machinery, cleaning agent for optical lenses, etc. And the like. As a cleaning method, hand wiping, dipping, spraying, rocking, ultrasonic cleaning, steam cleaning, or the like may be employed.
【００１５】[0015]
ＨＣＦＣ−２２５ｃａ及びＨＣＦＣ−２２５ｃｂの混合
物、ＨＣＦＣ−２２５ｃａ／ｃｂ（重量組成比ＨＣＦＣ
−２２５ｃａ／ＨＣＦＣ−２２５ｃｂ＝１／１）と、こ
れにフッ素化アルコールを表２に示す割合で混合した溶
剤組成物を用いてフラックスの洗浄試験を行った。HCFC-225ca and a mixture of HCFC-225cb, HCFC-225ca / cb (weight composition ratio HCFC
-225ca / HCFC-225cb = 1/1) and a solvent composition in which a fluorinated alcohol was mixed in the ratio shown in Table 2 to conduct a flux washing test.
【００１６】プリント基板全面にフラックス（タムラＦ
−ＡＬ−４、タムラ製作所製）を塗布し、２００℃の電
気炉で２分間焼成後、本発明の組成物中に３分間浸漬し
た。比較例として、２，２，３，３，３−ペンタフルオ
ロプロパノール（比較例１）及びＣＦＣ−１１３の単独
（比較例２）を使用して同様の試験を行った。これらの
結果を表２に示す。A flux (Tamura F
-AL-4, manufactured by Tamura Seisakusho Co., Ltd.), baked in an electric furnace at 200 ° C. for 2 minutes, and immersed in the composition of the present invention for 3 minutes. As a comparative example, a similar test was performed using 2,2,3,3,3-pentafluoropropanol (Comparative Example 1) and CFC-113 alone (Comparative Example 2). Table 2 shows the results.
【００１７】[0017]
【表２】 ┌────┬──────────────────┬─────┐ │ │ 組 成 比 │フラックス│ │ │ （重量％） │の除去効果│ ├────┼──────────────────┼─────┤ │実施例１│ＨＣＦＣ−２２５ｃａ／ｃｂ ９０│ ◎ │ │ │ＣＦ3 ＣＨ（ＯＨ）ＣＦ2 ＣＦ3 １０│ │ │実施例２│ＨＣＦＣ−２２５ｃａ／ｃｂ ９５│ ◎ │ │ │（ＣＦ3 ）3 ＣＯＨ ５│ │ │実施例３│ＨＣＦＣ−２２５ｃａ／ｃｂ ７５│ ◎ │ │ │（ＣＦ3 ）2 （ＣＨ3 ）ＣＯＨ ２５│ │ ├────┼──────────────────┼─────┤ │比較例１│ＨＣＦＣ−２２５ｃａ／ｃｂ ９０│ ○ │ │ │ＣＦ3 ＣＦ2 ＣＨ2 ＯＨ １０│ │ │比較例２│ＣＦＣ−１１３ １００│ △ │ ├────┴──────────────────┴─────┤ │ ◎：良好に除去できる ○：ほぼ良好 │ │ △：微量残存 ×：かなり残存 │ └─────────────────────────────┘[Table 2] ┌────┬──────────────────┬─────┐ │ │ Composition ratio │ Flux │ │ │ (weight%) │ Example 1 | HCFC-225ca / cb 90 | ◎ │ │ │CF 3 CH (OH) CF 2 CF 3 10│││Example 2│HCFC-225ca / cb 95│ │││││ (CF 3 ) 3 COH 5│││Example 3│HCFC-225ca / cb 75 │ ◎ │ │ │ (CF 3 ) 2 (CH 3 ) COH 25│ │ ├────┼──────────────────┼─────┤ │ Comparative Example 1│HCFC-225ca / cb 90│ ○ │ │ │CF 3 CF 2 CH 2 OH 10│ │ │ Comparative Example 2│CFC-113 100│ △ │ ├────┴─ │ │ ◎: good removal ○: almost good │ │ △: trace residual ×: considerable residual │ ──────────────────────────┘
【００１８】〔実施例４〜６〕 本発明の組成物を用いて機械油の洗浄試験を行った。Ｓ
ＵＳ−３０４のテストピース（２５ｍｍ×３０ｍｍ×２
ｍｍ厚）を機械油（ＣＱ−３０ 日本石油（株）製）中
に浸漬した後、本発明の組成物中に３分間浸漬した。比
較例として、２，２，３，３，３−ペンタフルオロプロ
パノール（比較例３）及びＣＦＣ−１１３の単独（比較
例４）を使用して同様の試験を行った。これらの結果を
表３に示す。[Examples 4 to 6 ] Using the composition of the present invention, a washing test of machine oil was performed. S
US-304 test piece (25 mm x 30 mm x 2
mm thickness) was immersed in machine oil (CQ-30 manufactured by Nippon Oil Co., Ltd.), and then immersed in the composition of the present invention for 3 minutes. As a comparative example, a similar test was performed using 2,2,3,3,3-pentafluoropropanol (Comparative Example 3) and CFC-113 alone (Comparative Example 4). Table 3 shows the results.
【００１９】[0019]
【表３】 ┌────┬──────────────────┬─────┐ │ │ 組 成 比 │ 機械油 │ │ │ （重量％） │の除去効果│ ├────┼──────────────────┼─────┤ │実施例４│ＨＣＦＣ−２２５ｃａ／ｃｂ ９０│ ◎ │ │ │ＣＦ3 ＣＨ（ＯＨ）ＣＦ2 ＣＦ3 １０│ │ │実施例５│ＨＣＦＣ−２２５ｃａ／ｃｂ ９５│ ◎ │ │ │（ＣＦ3 ）3 ＣＯＨ ５│ │ │実施例６│ＨＣＦＣ−２２５ｃａ／ｃｂ ７５│ ◎ │ │ │（ＣＦ3 ）2 （ＣＨ3 ）ＣＯＨ ２５│ │ ├────┼──────────────────┼─────┤ │比較例１│ＨＣＦＣ−２２５ｃａ／ｃｂ ９０│ ○ │ │ │ＣＦ3 ＣＦ2 ＣＨ2 ＯＨ １０│ │ │比較例２│ＣＦＣ−１１３ １００│ ○ │ ├────┴──────────────────┴─────┤ │ ◎：良好に除去できる ○：ほぼ良好 │ │ △：微量残存 ×：かなり残存 │ └─────────────────────────────┘[Table 3] ┌────┬──────────────────┬─────┐ │ │ Composition ratio │ Machine oil │ │ │ (% by weight) Example 4 | HCFC-225ca / cb 90 | | ││CF 3 CH (OH) CF 2 CF 3 10│││Example 5│HCFC-225ca / cb 95│ │││││ (CF 3 ) 3 COH 5│││Example 6│HCFC-225ca / cb 75│ ◎ │ │ │ (CF 3 ) 2 (CH 3 ) COH 25│ │ ├────┼──────────────────┼─────┤ │ Comparative example 1│HCFC-225ca / cb 90│ ○ │ │ │CF 3 CF 2 CH 2 OH 10│ │ │ Comparative example 2│CFC-113 100│ ○ │ ├────┴── │ │ ◎: good removal ○: almost good │ │ △: trace residual ×: considerable residual │ ────────────────────────┘
【００２０】[0020]
【発明の効果】本発明のフッ素系洗浄溶剤組成物は、従
来のアルコール類に較べて不燃性かつ低沸点のフッ素化
アルコールを使用するので、ＨＣＦＣ−２２５ｃａ及び
ＨＣＦＣ−２２５ｃｂと混合した場合、組成の経時変化
が小さく、安全でかつ安定な溶剤となるとともに、フラ
ックスや油等の溶解除去性に優れ、さらに従来のＣＦＣ
−１１３等と同様の使い方ができるため、従来技術の大
幅な変更を要しない等の利点がある。The fluorine-based cleaning solvent composition of the present invention uses a fluorinated alcohol which is more inflammable and has a lower boiling point than conventional alcohols, and therefore, when mixed with HCFC-225ca and HCFC-225cb, Is a safe and stable solvent with little change over time, and is excellent in dissolving and removing fluxes and oils.
Since it can be used in the same manner as -113 or the like, there is an advantage that a significant change of the prior art is not required.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 ＦＩ Ｃ１１Ｄ 7:28 7:30） (73)特許権者 000002200 セントラル硝子株式会社 山口県宇部市大字沖宇部5253番地 (74)上記４名の代理人 弁理士 内田 明 （外２名） (72)発明者 関屋 章 茨城県つくば市東１丁目１番 工業技術 院物質工学工業技術研究内 (72)発明者 高橋 満 東京都文京区本郷２−40−17本郷若井ビ ル 財団法人地球環境産業技術研究機構 内 (72)発明者 後藤 嘉彦 東京都文京区本郷２−40−17本郷若井ビ ル 財団法人地球環境産業技術研究機構 内 (72)発明者 須賀 淳雄 東京都文京区本郷２−40−17本郷若井ビ ル 財団法人地球環境産業技術研究機構 内 審査官 平山 美千恵 (56)参考文献 特開 平３−27328（ＪＰ，Ａ) 特開 平３−27329（ＪＰ，Ａ)──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 6 Identification code FI C11D 7:28 7:30) (73) Patent holder 000002200 Central Glass Co., Ltd. 5253, Oki Ube, Oji, Ube City, Yamaguchi Prefecture (74) Above 4 agents Patent Attorney Akira Uchida (2 outside) (72) Inventor Akira Sekiya 1-1-1, Higashi, Tsukuba, Ibaraki Pref. Industrial Technology Research Institute for Material Engineering and Technology (72) Inventor Mitsuru Takahashi Hongo, Bunkyo-ku, Tokyo 2-40-17 Hongo Wakai Building (72) Inventor Yoshihiko Goto Inventor Yoshihiko Goto 2-40-17 Hongo Wakai Building Hongo Wakai Building (72) ) Inventor Atsushi Suga 2-40-17 Hongo, Hongo, Bunkyo-ku, Tokyo Hongo Wakai Building Examiner at the Institute for Global Environmental Technology, Michie Hirayama (56) References JP 3-27328 (JP, A) JP flat 3-27329 (JP, A)
Claims (2)
タフルオロブタン−２−オール、２−トリフルオロメチ
ル−１，１，１，３，３，３−ヘキサフルオロプロパン
−２−オール、及び２−トリフルオロメチル−１，１，
１−トリフルオロプロパン−２−オールから選ばれるフ
ッ素化アルコールの少なくとも１種と、１，１−ジクロ
ロ−２，２，３，３，３−ペンタフルオロプロパン及び
１，３−ジクロロ−１，２，２，３，３−ペンタフルオ
ロプロパンの少なくとも１種とを含むフッ素系洗浄溶剤
組成物。1. A 1,1,1,3,3,4,4,4-octafluorobutan-2-ol, 2-trifluoromethyl-1,1,1,3,3,3-hexafluoropropane -2-ol and 2-trifluoromethyl-1,1,
At least one fluorinated alcohol selected from 1-trifluoropropan-2-ol and 1,1-dichloro-2,2,3,3,3-pentafluoropropane and 1,3-dichloro-1,2 A cleaning solvent composition comprising at least one of 2,3,3-pentafluoropropane.
１，１−ジクロロ−２，２，３，３，３−ペンタフルオ
ロプロパン及び１，３−ジクロロ−１，２，２，３，３
−ペンタフルオロプロパンの少なくとも１種６０〜９９
重量％からなる請求項１に記載のフッ素系洗浄溶剤組成
物。2. A fluorinated alcohol having a content of 1 to 40% by weight, 1,1-dichloro-2,2,3,3,3-pentafluoropropane and 1,3-dichloro-1,2,2,3,3.
At least one of pentafluoropropane 60 to 99
2. The fluorine-based cleaning solvent composition according to claim 1, wherein the composition comprises about 10% by weight.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5130512A JP2763083B2 (en) | 1993-06-01 | 1993-06-01 | Fluorine-based cleaning solvent composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5130512A JP2763083B2 (en) | 1993-06-01 | 1993-06-01 | Fluorine-based cleaning solvent composition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06346095A JPH06346095A (en) | 1994-12-20 |
| JP2763083B2 true JP2763083B2 (en) | 1998-06-11 |
Family
ID=15036071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5130512A Expired - Lifetime JP2763083B2 (en) | 1993-06-01 | 1993-06-01 | Fluorine-based cleaning solvent composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2763083B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6394107B1 (en) * | 2001-04-24 | 2002-05-28 | 3M Innovative Properties Company | Use of fluorinated ketones as wet cleaning agents for vapor reactors and vapor reactor components |
| TWI258515B (en) * | 2002-06-19 | 2006-07-21 | Asahi Glass Co Ltd | Method of cleaning chamber of vacuum evaporation apparatus for production of organic EL element |
| DE602007007161D1 (en) | 2006-09-14 | 2010-07-29 | Fujifilm Corp | Agent for removing water from a substrate, method of water removal and drying method therewith |
| JP2009073835A (en) * | 2008-09-11 | 2009-04-09 | Central Glass Co Ltd | Fluorine-containing compound, dissolution-suppressing agent and resist material using them |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0327328A (en) * | 1989-06-23 | 1991-02-05 | Asahi Glass Co Ltd | Fluorinated hydrocarbon-based solvent composition |
| JPH0327329A (en) * | 1989-06-23 | 1991-02-05 | Asahi Glass Co Ltd | Fluorinated hydrocarbon-based solvent composition |
-
1993
- 1993-06-01 JP JP5130512A patent/JP2763083B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06346095A (en) | 1994-12-20 |
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