JPH0634372Y2 - 不純物蒸発装置 - Google Patents

不純物蒸発装置

Info

Publication number
JPH0634372Y2
JPH0634372Y2 JP11172789U JP11172789U JPH0634372Y2 JP H0634372 Y2 JPH0634372 Y2 JP H0634372Y2 JP 11172789 U JP11172789 U JP 11172789U JP 11172789 U JP11172789 U JP 11172789U JP H0634372 Y2 JPH0634372 Y2 JP H0634372Y2
Authority
JP
Japan
Prior art keywords
evaporation
impurity
vaporizer
carbon
evaporation device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11172789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0350055U (cg-RX-API-DMAC7.html
Inventor
忠夫 石橋
弘 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP11172789U priority Critical patent/JPH0634372Y2/ja
Publication of JPH0350055U publication Critical patent/JPH0350055U/ja
Application granted granted Critical
Publication of JPH0634372Y2 publication Critical patent/JPH0634372Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP11172789U 1989-09-25 1989-09-25 不純物蒸発装置 Expired - Lifetime JPH0634372Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11172789U JPH0634372Y2 (ja) 1989-09-25 1989-09-25 不純物蒸発装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11172789U JPH0634372Y2 (ja) 1989-09-25 1989-09-25 不純物蒸発装置

Publications (2)

Publication Number Publication Date
JPH0350055U JPH0350055U (cg-RX-API-DMAC7.html) 1991-05-15
JPH0634372Y2 true JPH0634372Y2 (ja) 1994-09-07

Family

ID=31660194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11172789U Expired - Lifetime JPH0634372Y2 (ja) 1989-09-25 1989-09-25 不純物蒸発装置

Country Status (1)

Country Link
JP (1) JPH0634372Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH0350055U (cg-RX-API-DMAC7.html) 1991-05-15

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