JPH06339830A - Vacuum sucking table device - Google Patents

Abstract

PURPOSE:To provide a vacuum sucking table device which can facilitate taking- out sucked works. CONSTITUTION:A vacuum chamber 15 is formed inside a table board whose surface is formed with vacuum sucking holes 12 and pin protruding holes 16 to store a lifting base 17 in the vacuum chamber 15. Ejector pins 19 are made to stand at arbitrary positions which face the pin protruding holes 16 in the lifting base 17. When the lifting base 17 is raised, the ejector pins 19 are protruded from the pin protruding holes 16 to separate the works sucked by the table board 5.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum suction table device. More specifically, the present invention relates to a vacuum suction table device for adsorbing a work placed on a table board to fix the work on the table board.

[0002]

2. Description of the Related Art FIG. 7 is a sectional view showing a structure of a table board 61 of a vacuum suction table which has been conventionally used.
This table board 61 has a vacuum chamber 64 on the upper surface.
Is covered with a suction plate 63, and the suction plate 63 covers the upper surface of the table body 62 whose bottom surface has an exhaust port 65.
3 is provided with a large number of vacuum suction holes 66. The work 67 is placed on the table board 61, and the exhaust port 65
When the inside of the vacuum chamber 64 is decompressed by an exhaust device (not shown) through, the whole work 67 is adsorbed on the surface of the table board 61 through the vacuum suction holes 66. Further, when the work 67 is fixed on the table board 61 in this way and the work 67 is subjected to necessary processing or treatment, when the work 67 is taken out, the exhaust port 6 is used.
5 to open the vacuum chamber 64 to normal pressure,
The work 67 is released.

[0003]

However, since the work piece once adsorbed on the table board is in close contact with the surface of the table board, it is difficult for the work piece to be peeled off even when the inside of the vacuum chamber is opened, and the work piece is peeled off by a robot hand or the like. It was difficult to get him to do it. Particularly, in the case of a vacuum suction table device used as a part of a fluid application device, a fluid-coated work such as a glass plate has to be peeled off from the table board, and the work is applied to the surface of the work. It was extremely difficult to automate the work of taking out the work from the table board so as not to damage the coating film.

The present invention has been made in view of the drawbacks of the above conventional examples, and an object of the present invention is to provide a vacuum suction table device capable of easily taking out a sucked work. is there.

[0005]

A vacuum suction table device according to the present invention has a vacuum suction hole for sucking a work on a surface of a table board, and a tip portion of an ejector pin for separating the work from the table board. Is projected from a pin projecting hole provided on the surface of the table board.

Further, in the above vacuum suction table device, the table board may be movable, and a driving device for causing the ejector pin to project may be arranged at the work take-out position.

[0007]

In the vacuum suction table device of the present invention, the tip of the ejector pin is made to project from the pin projecting hole provided on the surface of the table board. When ejected from the table, the ejector pin can be projected from the table board and the work can be ejected by the ejector pin to forcibly separate the work. Therefore, the work adsorbed on the table board can be easily separated from the table board and carried out.

Further, in the vacuum suction table device in which the table board is movable, if the driving device for ejecting the ejector pin is arranged at the work take-out position, the driving device is separated from the table board. Therefore, it is not necessary to incorporate the table inside the table board, and the structure of the vacuum suction table device can be simplified.

[0009]

1 is a sectional view showing a vacuum suction table device 1 according to an embodiment of the present invention. The vacuum suction table device 1 sucks a work 2 such as a glass substrate and horizontally conveys it at a constant speed. A pair of parallel guide rails 4 are provided on the upper surface of the base 3, and the table board 5
The four sliders 6 provided on the lower surface of the table are slidably supported by the guide rails 4, and the table board 5 runs smoothly along the guide rails 4. Also,
A male screw shaft 7 is arranged in parallel with the guide rail 4 in a central portion of the base 3, and both ends of the male screw shaft 7 are rotatably supported by the base 3 via angular bearings 8 and the table board 5 is provided. A female screw tube 9 and a male screw shaft 7 which are fixed to the lower surface of the above are screwed together to form a ball screw mechanism. A servo motor 10 is fixed to an end of the base 3, and an output shaft of the servo motor 10 is connected to a male screw shaft 7 via a joint 11. Therefore, the table board 5 can be moved at a constant speed along the guide rail 4 by rotating the male screw shaft 7 at a constant rotation speed by the servo motor 10.

FIG. 2 is a sectional view showing the table board 5 of the vacuum suction table device 1 in detail, showing a plate-shaped suction plate 13 having a large number of vacuum suction holes 12 and a plurality of pin projecting holes 16. It is mounted on the table body 14, a vacuum chamber 15 is recessed on the upper surface of the table body 14, and an exhaust port (not shown) is provided on the bottom surface inside the vacuum chamber 15. Therefore, when the valve is opened and the air in the vacuum chamber 15 is discharged from the exhaust port, the inside of the vacuum chamber 15 can be evacuated or negative pressure, and the lower surface of the work 2 placed on the suction plate 13 is sucked. be able to.

An elevating base 17 as shown in FIG. 3 is housed in the vacuum chamber 15, and one is provided at a position facing the pin projecting hole 16 on the upper surface of the elevating base 17.
One pin seat 18 is provided, and the base end of the ejector pin 19 made of resin is detachably screwed to an appropriate position of the pin seat 18 according to the shape of the work 2 and the like. The tip end portion of the ejector pin 19 which is erected on the upper surface of the base 17 is inserted into the pin projecting hole 16 of the suction plate 13. Four guide shafts 20 are provided on the lower surface of the elevating base 17, and the guide shafts 20 are provided.
Is inserted into a through hole 21 formed in the lower surface of the table body 14, and the lower ends of the guide shafts 20 are integrally connected by a connecting plate 22. Further, the guide shaft 20 is
A linear bearing 23 fixed to the lower surface of the table body 14 is slidably supported under the through hole 21, and the linear bearing 23 and the guide shaft 20 are supported.
An O-ring 24 interposed between the vacuum chamber 15 and the vacuum chamber 15 prevents the vacuum chamber 15 from leaking vacuum from the through hole 21. 25a and 25b are the supply position of the work 2 and the work 2
Is a drive device such as an air cylinder installed at a position lower than the connecting plate 22 at the take-out position, and each has a piston 26 for pushing up the connecting plate 22.

Next, the operation of the vacuum suction table device 1 will be described. First, when the table board 5 is moved to the supply position of the work 2 (above the driving device 25a), the piston 26 projects from the driving device 25a to push up the elevating base 17 together with the connecting plate 22, as shown in FIG. Thus, the ejector pin 19 is pushed upward from the pin projecting hole 16. Then, when the work 2 is supplied and positioned on the ejector pin 19 by a loading device (not shown), the piston 26 of the drive device 25a retracts and the ejector pin 19 retracts into the pin projection hole 16 and the work 2 Is gently placed on the upper surface of the table board 5. After that, when the inside of the vacuum chamber 15 is depressurized, the work 2 is adsorbed and fixed to the table board 5 through the vacuum suction holes 12, and the work 2 is conveyed together with the table board 5 for processing or treatment.

When the machining or processing of the work 2 is completed, the table board 5 is moved to the take-out position of the work 2 (driving device 25b).
(Above), the inside of the vacuum chamber 15 is opened to normal pressure. Then, as shown in FIG.
The piston 26 projects from 5b and pushes up the connecting plate 22,
The ejector pin 19 is pushed upward from the pin projecting hole 16. Therefore, the work 2 is pushed up by the ejector pin 19 and forcibly separated from the table board 5. Therefore, since the work 2 is supported in the air by the ejector pin 19, the work 2 can be easily held by the unloading device (not shown), and the work 2 can be easily taken out. When the processed work 2 is discharged, the piston 26 of the drive device 25b retreats again, and the ejector pin 19 retracts into the pin projecting hole 16 as shown in FIG. 2, and the table board 5 returns to the work 2 supply position. Return.

FIG. 5 is a sectional view showing a table board 31 according to still another embodiment of the present invention. This table board 31
In this case, the elevating base 17 is arranged below the table body 14, and the elevating base 1 is provided by the four guide pins 32.
7 is supported, and the lifting base 17 can be moved up and down while maintaining a horizontal state. Further, a pin seat 18 is provided on the upper surface of the elevating base 17 at a position facing the pin projecting hole 16, and the pin projecting hole 16 of the table body 14 is provided.
Through holes 33 for inserting the ejector pins 19 are bored at positions facing each other. The ejector pin 19 is screwed to an appropriate pin seat 18 in consideration of the shape and size of the work 2, and the ejector pin 19 standing on the elevating base 17 is slidably inserted into the through hole 33. The tip end portions of are inserted into the pin projecting holes 16 facing each other. Further, the ejector pin 19 has a through hole 33.
It is slidably supported by a linear bearing 34 attached to. Furthermore, the ejector pin 19
In the through hole 33 through which the linear bearing 3 is inserted,
A vacuum leakage is prevented by an O ring interposed between the ejector pin 4 and the ejector pin 19, and a through hole 33 facing the pin seat 18 to which the ejector pin 19 is not attached is provided.
Is sealed by a blind plug 35 to prevent vacuum leaks.

In the table board 31, however, the ejector pins 19 can be projected from the pin projecting holes 16 by directly pushing up the elevating base 17 by the pistons 36 of the driving devices 35a and 35b. In addition, in this table board 31, the ejector pin 1
Since the elevating base 17 for standing 9 is arranged outside the table board 5, when the position of the ejector pin 19 is changed in accordance with the work 2, the table main body 14 as in the vacuum suction table device 31 of FIG. It is not necessary to disassemble the suction plate 13 and the position and the number of the ejector pins 19 can be easily changed from the outside of the table board 5. That is, at the location where the ejector pin 19 is added, the through hole 3
It suffices to remove the blind plug 35 from 3 and attach the linear bearing 34, and insert the ejector pin 19 newly erected on the elevating base 17 into the linear bearing 34 and the through hole 33. In addition, at a portion other than the ejector pin 19, the ejector pin 19 is connected to the linear bearing 34 and the through hole 33.
Pull out the ejector pin 19 from the lift base 1
7, the linear bearing 34 may be removed from the through hole 33 through which the ejector pin 19 is inserted, and the linear bearing 34 may be closed with a blind plug 35.

The use of the transport table device 1 is not particularly limited, but it can be used for a fluid application device (slot-type mucus spray application device) 41 as shown in FIG. 6, for example. The fluid application device 41 mainly includes a transfer table device 1 and a work (application target) 2
A coating head 42 for coating the coating liquid on the surface of the
The measuring head 43 measures the plate thickness of the work 2. The coating head 42 is attached to a vertically movable coating arm 44 provided so as to straddle the conveyance path of the workpiece 2. The coating arm 44 is driven up and down by an air cylinder 45 and the like, and at the time of lowering, it is a numerical control type linear. The lowered position is limited by the actuator 46. Therefore, when the work 2 is placed on the table board 5 and conveyed, the plate thickness of the work 2 is measured by the measuring head 43, the coating head 42 descends, and the measured work 2 is measured.
The height of the coating head 42 is positioned by the linear actuator 46 so that the distance between the work 2 and the coating head 42 becomes constant based on the plate thickness of the work, and the coating liquid adjusted to have a constant film thickness by the coating head 42 is applied to the work. 2 is applied to the surface.

A vacuum suction table device 1 having the above-described table boards 5 and 31 in the fluid coating device 41.
By using, the work 2 can be easily taken out without damaging the coating film applied to the work 2.

[0018]

According to the present invention, since the ejector pin can be made to project from the pin projecting hole of the table board and the work piece can be made to stick out by the ejector pin and forcibly separated, the work piece adsorbed on the table board can be removed. It can be easily peeled from the table board and taken out. In particular, since a gap can be created between the table board and the work by pushing up the work with the ejector pin, it is possible to easily automate the work removal by the unloading device or the like.

Further, in the vacuum suction table device in which the table board is movable, if the driving device for ejecting the ejector pin is arranged at the work take-out position, the driving device is separated from the table board. Therefore, it is not necessary to incorporate the table board inside the table board, the table board can be downsized, and the structure of the vacuum suction table device can be simplified.

[Brief description of drawings]

FIG. 1 is a sectional view showing a vacuum suction table device according to an embodiment of the present invention.

FIG. 2 is a detailed cross-sectional view of a table board in the above vacuum suction table device.

FIG. 3 is a plan view showing the inside of the above table board.

FIG. 4 is an explanatory view of the operation of the above vacuum suction table.

FIG. 5 is a sectional view showing a table board according to another embodiment of the present invention.

FIG. 6 is a partially cutaway perspective view showing a fluid application device using the above-described transport table device.

FIG. 7 is a cross-sectional view showing a conventional vacuum suction table.

[Explanation of symbols]

 5 table board 12 vacuum suction hole 15 vacuum chamber 16 pin projecting hole 19 ejector pin 25a, 25b drive device

Claims (2)

[Claims] 1. A vacuum suction hole for adsorbing a work is formed on the surface of the table board, and a tip of an ejector pin for separating the work from the table board is projected from a pin projecting hole provided on the surface of the table board. Vacuum suction table device. 2. The vacuum suction table device according to claim 1, wherein the table board is movable, and a drive device for projecting the ejector pin is arranged at a work take-out position.