JPH06331306A - Angle-of-rotation detector - Google Patents

Angle-of-rotation detector

Info

Publication number
JPH06331306A
JPH06331306A JP14537593A JP14537593A JPH06331306A JP H06331306 A JPH06331306 A JP H06331306A JP 14537593 A JP14537593 A JP 14537593A JP 14537593 A JP14537593 A JP 14537593A JP H06331306 A JPH06331306 A JP H06331306A
Authority
JP
Japan
Prior art keywords
rotor
coils
angle
coil
yokes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14537593A
Other languages
Japanese (ja)
Other versions
JP2764521B2 (en
Inventor
Hisahiro Ishihara
久寛 石原
Kenji Kusama
健司 草間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Sankyo Corp
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Priority to JP14537593A priority Critical patent/JP2764521B2/en
Publication of JPH06331306A publication Critical patent/JPH06331306A/en
Application granted granted Critical
Publication of JP2764521B2 publication Critical patent/JP2764521B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE:To provide the title detector having the characteristic of a conventional resolver, simple in structure and suitable for miniaturization (flattening) and cost reduction. CONSTITUTION:An angle-of-rotation detector has the rotor 8 integrated with a rotary shaft and different in the diameter from the center of the shaft to the outer periphery thereof at every half periphery and a stator having four ring-shaped magnetic yokes 4-7 concentric to the rotor 8 and formed by superposing three coils 1-3 positioned around the rotor in the axial direction of the rotor 8 and holding three coils therebetween in the axial direction of the rotor 8 and the inner peripheries of the yokes 1-4 protrude toward the rotary shaft from the inner peripheries of the coils 1-3 and the protruding quantities thereof are formed into diameters different at every half periphery and the yokes 4-7 are overlapped so as to form a structure wherein large and small diameters are reversed every one and the coil 2 positioned at the center among three coils 1-3 are excited by an AC signal and the induced voltages from the upper and lower coils 1, 3 are subjected to analogue/digital conversion and the ratio of two digital values is operated to obtain an angle-of-rotation detection signal.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、回転体の回転角度を検
出する回転角度検出装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotation angle detecting device for detecting a rotation angle of a rotating body.

【0002】[0002]

【従来の技術】回転体の回転角度を検出するためのエン
コーダ等の回転角度検出装置は、インクリメンタル・タ
イプとアブソリュート・タイプとに大別される。前者は
単位回転角度毎に出力されるパルスの数を計数処理する
事で回転位置情報を得ている。これに対しアブソリュー
ト・タイプの回転角度検出装置は、計測器内の回転体自
体が何らかの手段により回転位置情報を有しているた
め、信号処理回路内のカウンタ等で計数データを記憶し
ておく必要がない。従って回転途中に停電等により回路
への電源供給が中断されても、1回転内の位置を見失う
事がなく、インクリメンタル・タイプに比べての優位性
を持っている。この様なアブソリュート・タイプの回転
角度検出装置の中でも、レゾルバは光式エンコーダ等の
他方式の検出装置に比べ機械的に堅牢で振動に対して強
く、また粉塵/油滴等の環境に対する耐性も強いという
特質を持つ事から、工作機械等へ盛んに使用されてい
る。
2. Description of the Related Art A rotation angle detecting device such as an encoder for detecting a rotation angle of a rotating body is roughly classified into an incremental type and an absolute type. The former obtains rotational position information by counting the number of pulses output for each unit rotational angle. On the other hand, in the absolute type rotation angle detection device, since the rotating body itself in the measuring instrument has rotational position information by some means, it is necessary to store the count data in a counter or the like in the signal processing circuit. There is no. Therefore, even if the power supply to the circuit is interrupted due to a power failure or the like during the rotation, the position within one rotation is not lost, and it has an advantage over the incremental type. Among such absolute type rotation angle detectors, the resolver is mechanically more robust and resistant to vibration than other detectors such as optical encoders, and also resistant to environment such as dust / oil droplets. Because of its strong character, it is widely used in machine tools.

【0003】[0003]

【発明が解決しようとする課題】ところが、従来のレゾ
ルバは巻線構造が複雑で、装置を小型化(特に扁平化)
する事が容易ではなく、小型モータ等への応用に難があ
った。また信号処理用の回路も複雑で、コスト低減への
妨げとなっていた。そこで本発明は、堅牢で耐環境性に
優れるという従来のレゾルバの特質を備えつつ、構造が
簡単で小型(扁平)化、低コスト化に適した回転角度検
出装置を提供する事を目的とするものである。
However, in the conventional resolver, the winding structure is complicated and the device is miniaturized (especially flattened).
It was not easy to do, and it was difficult to apply it to small motors. In addition, the circuit for signal processing is complicated, which has been an obstacle to cost reduction. Therefore, an object of the present invention is to provide a rotation angle detection device having a simple structure, a small size (flattened), and a low cost while having the characteristics of a conventional resolver that is robust and has excellent environment resistance. It is a thing.

【0004】[0004]

【問題を解決するための手段】本発明による回転角度検
出装置は、回転軸と一体で、該軸の中心から外周までの
径が半周毎に異なるロータと、該ロータと同心でロータ
の周囲に位置させた3つのコイルを軸方向に重ね、該3
つのコイルを軸方向から挟む様にリング状の4つの磁性
体ヨークを設けたステータとを有し、前記ヨークの内周
は前記コイルの内周よりも回転軸側に飛び出ており、そ
の飛び出し量を半周毎に異なる径に形成し、前記ヨーク
の重なり方が1つ毎に大小径を反転した構造にした事お
よび、前記3つのコイルのうち中央に位置するコイルを
交流信号で励磁し、上下のコイルからの誘起電圧をアナ
ログ/デジタル変換器によりデジタル信号に変換した
後、該2つのデジタル値の比を演算して回転角度検出信
号を得る信号処理回路を備えた事を特徴とする。
A rotation angle detecting device according to the present invention is a rotor which is integral with a rotary shaft and has a diameter different from the center of the shaft to the outer circumference every half circumference, and a rotor which is concentric with the rotor and surrounds the rotor. The three positioned coils are stacked in the axial direction, and the three
And a stator provided with four magnetic yokes in a ring shape so as to sandwich one coil from the axial direction, and the inner circumference of the yoke protrudes toward the rotary shaft side from the inner circumference of the coil. Is formed to have a different diameter for each half circumference, and the size of the yoke is inverted for each one, and the central coil of the three coils is excited by an AC signal to After the induced voltage from the coil is converted into a digital signal by an analog / digital converter, a signal processing circuit for calculating a ratio of the two digital values to obtain a rotation angle detection signal is provided.

【0005】[0005]

【作用】この様な構成を有する装置に於いては、励磁コ
イルによって発生した磁束のうち、2つの検出コイルの
各々に鎖交する量はロータの回転位置に依存するため、
両検出コイルからの出力電圧がロータ角度の関数とな
る。この2つの検出電圧をA/D変換した後両者の比を
とる事で、電気的、磁気的なドリフトの影響が相殺さ
れ、ロータ角度依存した信号データを再現性良く得る事
ができる。このデータから、ロータ回転位置が求められ
る訳である。
In the device having such a structure, the amount of the magnetic flux generated by the exciting coil that interlinks with each of the two detection coils depends on the rotational position of the rotor.
The output voltage from both sensing coils is a function of rotor angle. By performing A / D conversion of these two detection voltages and then taking the ratio of the two, the effects of electrical and magnetic drift are canceled out, and signal data dependent on the rotor angle can be obtained with good reproducibility. From this data, the rotor rotational position can be obtained.

【0006】[0006]

【実施例】以下、本発明の実施例について図面を用いて
詳細に説明する。図1に、本発明の一実施例の角度検出
装置の模式的な構造図を示す。全体構成は、図示しない
計測対象の回転体と共に回転するロータ8と、そのロー
タと同心でロータの周囲に離間対向したステータから成
る。ステータは、2つの検出コイル1、3に挟まれた1
つの励磁コイル2から成る3つのコイルで基本ユニット
が構成されロータ8と同心に配置されている。これら各
コイル1〜3を軸方向から挟む様にリング状のヨーク4
〜7が設けられており、該ヨークの内周はコイルの内周
よりも小径にして内側に飛び出ており、かつその飛び出
し量が大径部4a〜7a、小径部4b〜7bと半周毎に
異なっていて、その凸凹具合が1つ毎に反転した構成に
なっている。ヨーク4〜7は磁性板で構成されている。
一方ロータ8は回転軸8cに固定してあって、外径が半
周毎に異なった小径部8a、大径部8b(径の異なった
2つの半円8a、8bをくっつけた様な横断面形状)と
なっている。ロータ8と回転軸8cは一体成形品でもよ
い。
Embodiments of the present invention will be described in detail below with reference to the drawings. FIG. 1 shows a schematic structural diagram of an angle detection device according to an embodiment of the present invention. The overall configuration is composed of a rotor 8 that rotates together with a rotating body (not shown) to be measured, and a stator that is concentric with the rotor and that faces the rotor around the rotor. The stator is 1 sandwiched between two detection coils 1 and 3.
A basic unit is composed of three coils, which are one exciting coil 2, and is arranged concentrically with the rotor 8. A ring-shaped yoke 4 that sandwiches these coils 1 to 3 from the axial direction.
To 7 are provided, and the inner circumference of the yoke is smaller than the inner circumference of the coil and protrudes inward, and the protrusion amount is large half portions 4a to 7a and small diameter portions 4b to 7b every half circumference. It is different, and the degree of unevenness is reversed one by one. The yokes 4 to 7 are magnetic plates.
On the other hand, the rotor 8 is fixed to the rotating shaft 8c and has a small diameter portion 8a and a large diameter portion 8b having different outer diameters for each half circumference (a cross-sectional shape like two semicircles 8a, 8b having different diameters attached to each other. ). The rotor 8 and the rotary shaft 8c may be an integrally molded product.

【0007】この様な構造の角度検出原理の概略を、図
2、3を用いて説明する。両図は、ロータ8外周とステ
ータのヨーク4〜7内周との位置関係を示す縦断面模式
図である。ロータ8の大径部8bがヨーク4の小径部4
bおよびヨーク6の小径部6bと対向している図2の状
態に於いては、励磁コイル2と検出コイル1とを磁気結
合させる磁路に対する磁気抵抗が最小(「空隙長/空隙
幅」が最小)となり、逆に励磁コイル2と検出コイル3
とを結合させる磁路に対しては磁気抵抗が最大となる。
従って、この状態では励磁コイル2と検出コイル1が密
結合、励磁コイル2と検出コイル3が粗結合となるの
で、図2中点線矢印で示した様に磁路が形成される。
The outline of the angle detection principle of such a structure will be described with reference to FIGS. Both figures are schematic vertical sectional views showing the positional relationship between the outer circumference of the rotor 8 and the inner circumferences of the yokes 4 to 7 of the stator. The large diameter portion 8b of the rotor 8 is the small diameter portion 4 of the yoke 4.
In the state of FIG. 2 in which b and the small diameter portion 6b of the yoke 6 are opposed to each other, the magnetic reluctance to the magnetic path for magnetically coupling the exciting coil 2 and the detecting coil 1 is minimum (“air gap length / air gap width” is (Minimum), and conversely excitation coil 2 and detection coil 3
The magnetic resistance is maximum for the magnetic path that couples and.
Therefore, in this state, the exciting coil 2 and the detecting coil 1 are tightly coupled, and the exciting coil 2 and the detecting coil 3 are loosely coupled, so that a magnetic path is formed as shown by a dotted arrow in FIG.

【0008】一方、ロータが半回転して図3の位置に来
た状態では上述の磁気抵抗の関係が入れ替わり、励磁コ
イル2と検出コイル3が密結合、励磁コイル2と検出コ
イル1が粗結合となるので、図3中点線矢印で示した様
に磁路が形成される。この様な励磁コイル−検出コイル
間の磁気結合の粗密状態のロータ角度依存性により、励
磁信号に対する検出コイル1、3からの各検出電圧がロ
ータ角度に依存して増減する事になり、図2・図3の2
つの状態から、互いにロータ角1/2回転分シフトした
2つの電圧パターン(検出電圧の角度依存性)が得られ
る。
On the other hand, in the state where the rotor has half rotated to the position shown in FIG. 3, the relationship of the above-mentioned magnetic resistance is exchanged, and the exciting coil 2 and the detecting coil 3 are tightly coupled and the exciting coil 2 and the detecting coil 1 are loosely coupled. Therefore, a magnetic path is formed as shown by the dotted arrow in FIG. Due to the rotor angle dependence of the density of the magnetic coupling between the exciting coil and the detecting coil as described above, each detected voltage from the detecting coils 1 and 3 with respect to the exciting signal increases or decreases depending on the rotor angle.・ 2 in Figure 3
From the two states, two voltage patterns (angle dependence of the detected voltage) obtained by shifting the rotor angle by 1/2 rotation are obtained.

【0009】この電圧パターンの振る舞いを説明するた
めに、ロータとステータ・ヨークの位置関係を平面展開
して大径部8bと小径部4b〜7bの重なり具合を模式
的に表した図を、図4に示す。検出コイル1、3の検出
電圧はパーミアンスに比例すると近似できるので、凸凹
差(ロータ、ステータ・ヨーク各々に於ける、径の変化
量)が十分大きく、ロータとステータ・ヨークの間隔長
が大小2つの値にステップ的に切り替わる場合には、ロ
ータ、ステータの凸部8b、4bが対向する領域の幅に
よってパーミアンス値が決定される。従って、検出電圧
値は凸部の重なり領域(狭間隔領域)の長さに比例して
直線的な変化を呈する事になる。
In order to explain the behavior of this voltage pattern, a diagram schematically showing the overlapping state of the large diameter portion 8b and the small diameter portions 4b to 7b by expanding the positional relationship between the rotor and the stator yoke in a plane is shown in the figure. 4 shows. Since the detection voltage of the detection coils 1 and 3 can be approximated to be proportional to the permeance, the unevenness (the amount of change in the diameter of each of the rotor and the stator yoke) is sufficiently large, and the distance between the rotor and the stator yoke is large or small. In the case of stepwise switching to one value, the permeance value is determined by the width of the region where the protrusions 8b, 4b of the rotor and the stator face each other. Therefore, the detected voltage value exhibits a linear change in proportion to the length of the overlapping region (narrow interval region) of the convex portions.

【0010】この2つの検出コイル1、3からの出力電
圧のロータ角度依存性を、図5に示す。各検出電圧(e
1 、e2 )、及び両者の比(e1 /e2 )共に、ロータ
が1回転する間に同一の値を2度とり、角度−信号関係
が「2対1の対応」になっているが、これはθ<180
゜orθ≧180゜を補完的な1P/Rエンコーダ等で
判別する事で「1対1対応」に修正できるので、これら
の値からロータ角度を読み取る事が可能となる。検出電
圧e1、e2の独立の値は温度特性等の電気(磁気)的
ドリフトの影響を直接受け再現性に劣るが、両者の比
(e1 /e2 )をとる事でこの変動効果がキャンセルさ
れ、再現性に優れた角度検出を行なう事ができる。
FIG. 5 shows the rotor angle dependence of the output voltage from the two detection coils 1 and 3. Each detection voltage (e
Both 1, 1 and e2) and the ratio of both (e1 / e2) take the same value twice during one revolution of the rotor, and the angle-signal relationship is "two-to-one correspondence". Is θ <180
Since it is possible to correct “one-to-one correspondence” by discriminating ∘orθ ≧ 180 ° with a complementary 1P / R encoder or the like, it is possible to read the rotor angle from these values. The independent values of the detection voltages e1 and e2 are directly affected by electric (magnetic) drift such as temperature characteristics and are inferior in reproducibility, but by taking the ratio (e1 / e2) of the two, this fluctuation effect is canceled, Angle detection with excellent reproducibility can be performed.

【0011】但し、図5から判る様に比のパターンには
非線形性が現れてくる(角度依存性が直線的でなくなっ
てくる)ので、精度を上げるには補正のためのデータ処
理が必要となるが、データの再現性(安定度)が高いの
でROM補正等の手段により容易に補正できる。
However, as can be seen from FIG. 5, non-linearity appears in the ratio pattern (the angle dependency becomes non-linear), and therefore data processing for correction is necessary to improve accuracy. However, since the reproducibility (stability) of data is high, it can be easily corrected by means such as ROM correction.

【0012】上述の構成を用いた角度検出装置のシステ
ム概略構成を、図6に示す。2つの検出コイル1、3の
出力電圧をA/D変換したデータを割り算してその比を
とり(図7)、その後、角度判定用センサ9によるθ<
180゜orθ≧180゜の判定結果から角度−信号関
係が「1対1の対応」になる様にデータ処理を加える構
成になっている。ここで「180゜前後判定」用に、本
実施例では低透磁率/高導電性の材料(ex.真鍮)で
ステータ・ヨークと同形状(厚さは異)のリングをコイ
ル・ユニットに隣接して設け、そのリングとロータ間の
容量変化を測定する方法を用いた。この真鍮リングの凸
凹位置(大小径部)を、ヨークの凸凹具合いと1/4回
転ずらす事で、コイル電圧比信号から1/4回転分シフ
トした角度依存パターンの容量信号が得られるので、そ
れらの信号を演算1部分で演算処理する事で「1対1対
応化(θ≧180゜の値を図8のように逆勾配に補
正)」が行なえ、演算2によって座標修正が行われる
(図9)。あとは必要に応じて、ROM補正等のデータ
処理を追加すればよい。信号処理回路10はほとんどが
デジタル回路となり、簡単に構成できる。
FIG. 6 shows a schematic system configuration of an angle detection device using the above configuration. Data obtained by A / D converting the output voltages of the two detection coils 1 and 3 is divided to obtain the ratio (FIG. 7), and then θ <by the angle determination sensor 9 is set.
From the determination result of 180 ° or θ ≧ 180 °, data processing is added so that the angle-signal relationship is “one-to-one correspondence”. In this embodiment, a ring having a low magnetic permeability / high conductivity (ex. Brass) and having the same shape (different thickness) as the stator yoke is adjacent to the coil unit for "judgment around 180 °". Then, the method of measuring the capacitance change between the ring and the rotor was used. By shifting the uneven position (large and small diameter parts) of this brass ring from the uneven condition of the yoke by 1/4 rotation, the capacitance signal of the angle dependent pattern shifted by 1/4 rotation from the coil voltage ratio signal can be obtained. It is possible to perform "one-to-one correspondence (correct the value of θ ≧ 180 ° to the reverse slope as shown in FIG. 8)" by processing the signal of 1 in the calculation 1 portion, and the coordinates are corrected by calculation 2 (Fig. 9). After that, data processing such as ROM correction may be added if necessary. Most of the signal processing circuit 10 is a digital circuit and can be easily configured.

【0013】[0013]

【発明の効果】以上述べた様に、本発明による回転角度
検出装置は既存のレゾルバ・システムに比べて、構造、
回路構成共に極めてシンプルであり、小型(扁平)化、
低コスト化への対応に優れている。
As described above, the rotation angle detection device according to the present invention has a structure,
The circuit configuration is extremely simple and compact (flat),
Excellent in responding to cost reduction.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例による回転数検出装置の構造
模式図である。
FIG. 1 is a schematic structural diagram of a rotation speed detection device according to an embodiment of the present invention.

【図2】上記実施例に於けるロータ、ステータの位置関
係を示す説明図である。
FIG. 2 is an explanatory diagram showing a positional relationship between a rotor and a stator in the above embodiment.

【図3】上記実施例に於けるロータ、ステータの位置関
係を示す説明図である。
FIG. 3 is an explanatory diagram showing a positional relationship between a rotor and a stator in the above embodiment.

【図4】上記実施例に於けるロータ、ステータの大小径
部の重なり具合いを平面展開して示し、各位置での検出
電圧との関係を示す特性図である。
FIG. 4 is a characteristic diagram showing a relationship between a rotor voltage and a stator large-small diameter portion overlapping state in the above-described embodiment in a plan view and a relationship with a detection voltage at each position.

【図5】上記実施例に於ける検出電圧のロータ角度依存
性を示す特性図である。
FIG. 5 is a characteristic diagram showing the rotor angle dependence of the detected voltage in the above embodiment.

【図6】本発明の一実施例による回転数検出装置の模式
的なシステム構成を示したブロック図である。
FIG. 6 is a block diagram showing a schematic system configuration of a rotation speed detection device according to an embodiment of the present invention.

【図7】図6のA点に於ける出力信号のロータ角度依存
性を示す特性図である。
7 is a characteristic diagram showing the rotor angle dependence of the output signal at point A in FIG.

【図8】図6のB点に於ける出力信号のロータ角度依存
性を示す特性図である。
8 is a characteristic diagram showing the rotor angle dependency of the output signal at point B in FIG.

【図9】図6のC点に於ける出力信号のロータ角度依存
性を示す特性図である。
9 is a characteristic diagram showing the rotor angle dependence of the output signal at point C in FIG.

【符号の説明】[Explanation of symbols]

1、3 検出コイル 2、 励磁コイル 4〜7 ヨーク 8 ロータ 10 信号処理回路 1, 3 Detection coil 2, Excitation coil 4-7 Yoke 8 Rotor 10 Signal processing circuit

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 回転軸と一体で、該軸の中心から外周ま
での径が半周毎に異なるロータと、該ロータと同心でロ
ータの周囲に位置させた3つのコイルを軸方向に重ね、
該3つのコイルを軸方向から挟む様にリング状の4つの
磁性体ヨークを設けたステータとを有し、前記ヨークの
内周は前記コイルの内周よりも回転軸側に飛び出てお
り、その飛び出し量を半周毎に異なる径に形成し、前記
ヨークの重なり方が1つ毎に大小径を反転した構造にし
た事を特徴とする回転角度検出装置。
1. A rotor, which is integral with a rotating shaft and has a diameter from the center of the shaft to the outer periphery which is different for each half circumference, and three coils which are concentric with the rotor and which are positioned around the rotor are overlapped in the axial direction.
A stator provided with four magnetic yokes in a ring shape so as to sandwich the three coils from the axial direction, and the inner circumference of the yoke projects toward the rotary shaft side from the inner circumference of the coil. A rotation angle detecting device characterized in that the protrusion amount is formed to have a different diameter for each half circumference, and the large and small diameters of the yokes are overlapped one by one.
【請求項2】 前記3つのコイルのうち中央に位置する
コイルを交流信号で励磁し、上下のコイルからの誘起電
圧をアナログ/デジタル変換器によりデジタル信号に変
換した後、該2つのデジタル値の比を演算して回転角度
検出信号を得る信号処理回路を備えた請求項1の回転角
度検出装置。
2. A coil located in the center of the three coils is excited by an AC signal, and induced voltages from the upper and lower coils are converted into digital signals by an analog / digital converter, and then the two digital values are converted. The rotation angle detection device according to claim 1, further comprising a signal processing circuit that calculates a ratio to obtain a rotation angle detection signal.
JP14537593A 1993-05-26 1993-05-26 Rotation angle detector Expired - Lifetime JP2764521B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14537593A JP2764521B2 (en) 1993-05-26 1993-05-26 Rotation angle detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14537593A JP2764521B2 (en) 1993-05-26 1993-05-26 Rotation angle detector

Publications (2)

Publication Number Publication Date
JPH06331306A true JPH06331306A (en) 1994-12-02
JP2764521B2 JP2764521B2 (en) 1998-06-11

Family

ID=15383781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14537593A Expired - Lifetime JP2764521B2 (en) 1993-05-26 1993-05-26 Rotation angle detector

Country Status (1)

Country Link
JP (1) JP2764521B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002090177A (en) * 2000-09-14 2002-03-27 Tokyo Cosmos Electric Co Ltd Displacement detection device without contact-making

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002090177A (en) * 2000-09-14 2002-03-27 Tokyo Cosmos Electric Co Ltd Displacement detection device without contact-making

Also Published As

Publication number Publication date
JP2764521B2 (en) 1998-06-11

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