JPH0632694A - Device for growing crystal - Google Patents

Abstract

PURPOSE:To provide the crystal-growing device good in the measuring precision of crystal weight, having a simple structure, and capable of measuring the weight even when a rotation shaft is rotated. CONSTITUTION:The device is characterized by fixing a weight detector 10 to a detector base 90, installing a support shaft 13 on the weight detector 10 in a downward projected state, attaching a bearing 17 to the inner peripheral surface of a hollow columnar part 22 disposed on the upper end of a crystal- suspending bar 20, rotatably engaging the bearing 17 with the support shaft 13, coaxially suspending the suspending bar 20 from the support shaft 13, placing the hollow columnar part 22 in the central hole 26 of a gear 25, engaging the gear 25 with a gear 36 attached to a motor 40, projectedly arranging bearings 50, 52 on the outer peripheral surface of the hollow columnar part 22 at suitable angle intervals, extending projected fittings 51, 53 to the bearings 50, 52, and further engaging the projected fittings 51, 53 with a circular wall 27 formed on the upper surface of the bearing 25.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a crystal growing apparatus for measuring the weight of a crystal with a weight detector while growing the crystal. More specifically, the crystal is grown while rotating, but the weight detector does not rotate. The present invention relates to a crystal growing device configured as described above.

[0002]

2. Description of the Related Art A crystal growing apparatus used to obtain a crystal such as a compound semiconductor and a single crystal is equipped with a weight detector for growing the crystal while rotating it and measuring the weight of the crystal one by one. In general, this type of device is immersed in a solution for crystal growth placed in a container, immersing a rotating shaft having a crystal nucleus attached near the tip, and growing the crystal around the crystal nucleus while rotating the rotating shaft. The weight is detected by a weight detector.

[0003]

However, in the conventional crystal growing apparatus, since the weight detector is configured to rotate together with the rotating shaft, the measurement accuracy of the crystal weight is not so high, and the rotation of the weight detector is not so high. The mechanism for supporting is complicated and large. In addition, it is impossible in terms of accuracy to measure the weight while the weight detector is rotating (that is, while the rotating shaft is rotating).

Therefore, the present invention has been made in view of the above-mentioned problems, and it has a high accuracy of measuring the crystal weight, has a simple structure, and can measure the weight even when the rotary shaft is rotated. The purpose is to provide.

[0005]

In order to achieve the above object, in the crystal growing apparatus of the present invention, a weight detector having a supporting shaft projecting downward is fixed to a frame and rotatable about the supporting shaft. A crystal suspension rod having suspension supporting means engaged with the support shaft, is hung coaxially with the support shaft from the support shaft, and a power transmission component having a hole in the center is arranged below the weight detector. , The crystal suspension rod is rotatably inserted into the hole of the power transmission component, and the power transmission component on the motor side is engaged with the power transmission component, and the crystal suspension rod and the power transmission component through which the crystal suspension rod is inserted. In addition, a drive transmission means for transmitting the rotational force of the motor to the crystal suspension rod is interposed.

According to this structure, when the power transmission component on the motor side rotates, this rotation is transmitted from the power transmission component inserted through the crystal suspension rod to the crystal suspension rod via the drive transmission means, and the suspension rod rotates. The rotation of the suspension rod causes the suspension support means that engages the support shaft of the weight detector to rotate about the support shaft so that the suspension rod rotates under the support of the suspension support means (i.e., the weight detector). ) Does not rotate.
Moreover, since the suspension bar is suspended from the support shaft by the suspension support means, the weight of the crystal attached to the suspension bar is transmitted to the support shaft via the suspension support means and measured by the weight detector.

In the apparatus of the present invention, the suspension supporting means may support the rotation of the crystal suspension rod, do not transmit the rotation to the support shaft, and have a frictional force with the support shaft as small as possible, for example, a bearing. (Rolling bearing) is common. Further, the drive transmission means transmits the rotational force of the motor from the power transmission component to the crystal suspension rod, and substantially includes the power transmission component system (including the motor) and the crystal suspension rod system (including the support shaft and the weight detector). The rotational force is efficiently transmitted to the crystal suspension rod system because it also plays a role of mechanically separating, but the weight of the power transmission component system that is not necessary for crystal weight measurement and the load direction that affects the measurement accuracy. It is important to prevent unnecessary forces such as the frictional force of the crystal from being transmitted to the crystal suspension rod system (that is, the weight detector). Specifically, for example, it is driven by a protrusion or a recess provided on the crystal suspension rod and a recess or a protrusion provided on the power transmission component through which the crystal suspension rod is inserted so as to face the protrusion or the recess so that they can engage with each other. It constitutes a transmission means.

Further, in the apparatus of the present invention, the weight detector is stopped, so that the shape and size thereof are not caught. Therefore, the weight detector is not limited to the load cell that is usually used, but general small scales, precision electronic scales, and other devices that measure weight can be widely used, and high-precision detectors can also be adopted. .

[0009]

EXAMPLES The crystal growth apparatus of the present invention will be described below based on examples. FIG. 1 shows a cross-sectional view of a main part of the embodiment. The weight detector 10 for measuring the weight of the crystal is fixed to a detector base 90, and the base 90 is supported by a column 93 of a base 95. There is a circular hole 91 in the portion of the base 90 located under the detector 10, and the lower hook 11 of the detector 10 projects downward from this circular hole 91. A joint metal fitting 15 for connecting the support shaft 13 to the lower hook 11 is attached to the lower hook 11 with a screw or the like, and the support metal shaft 15 is provided below the detector 10 by the joint metal fitting 15 so as to project therefrom. However, the shape of the fitting 15 is the lower hook 11
The shape may be changed as appropriate. The lower end of the support shaft 13 is enlarged in a disc shape, and a bearing 17 as a suspension supporting means is arranged on the enlarged portion.

The bearing 17 is, for example, a ball bearing, which is rotatably engaged with the periphery of the support shaft 13 and fixed to the inner peripheral surface of a hollow cylindrical portion 22 provided at the upper end of the crystal suspension rod 20. There is. As can be seen from the drawing, the crystal suspension rod 20 is in a state of being hung coaxially with the support shaft 13 via the bearing 17, and the bearing 17 is rotated with the rotation of the suspension rod 20.
Rotates around the support shaft 13 and supports the rotation of the suspension bar 20.

The hollow cylindrical portion 22 is located in a hole 26 formed at the center of a gear 25 as a power transmission component, and the crystal suspension rod 20 is inserted into a sleeve-shaped portion 28 extending downward from the gear 25. The suspension rod 20 in the gear 25.
The hollow cylindrical portion 22 is rotatable. Although not specifically shown in FIG. 1, the crystal suspension rod 20 extends to a container for containing a crystal growth solution, and a nucleus serving as the center of the crystal is attached near the lower end. The sleeve-shaped portion 28 is supported by two upper and lower bearings (for example, ball bearings) 32 and 34 attached to a bearing box 30 fixed to a base 95, and the bearings 32 and 34 are the sleeve-shaped portion 28 (that is, the gear 25). The movement of the sleeve in a direction other than the rotation direction of the sleeve 2
8 has the function of rotating the suspension rod 20 coaxially with the axis of the suspension rod 20. A gear 36, which is a power transmission component on the motor side, is meshed with the gear 25, and the gear 36 is attached to a shaft 42 of a motor 40 fixed to a base 95.

As is well understood from FIG. 2 which is a plan view taken along the line A--A of FIG. 1, two bearings 50 and 52 are projected on the outer peripheral surface of the hollow columnar portion 22 at appropriate angular intervals. It is installed and hits from each bearing 50, 52 (metal fitting)
51 and 53 extend outward. This hit metal fitting 51,
53 is an arcuate wall 2 formed in a protruding shape on the upper surface of the gear 25.
7 is engaged with the side surface. The bearings 50 and 52, the contact fittings 51 and 53, and the arcuate wall 27 constitute drive transmission means. Therefore, when the gear 25 rotates, the arcuate wall 2
The metal fitting 51 or 53 is pushed by 7 and the hollow cylindrical portion 22 rotates in the same direction as the gear 25. With such a drive transmission means, the rotational force of the motor 40 is transmitted to the hollow cylindrical portion 22 (that is, the crystal suspension rod 20), but unnecessary weight such as the weight of the gear 25 and frictional force in the load direction is hollow. It is convenient because it does not participate in the cylindrical portion 22 and thus the weight detector 10. Further, in this embodiment, another bearing 56 that engages with the outer peripheral surface of the hollow cylindrical portion 22 is arranged on the upper surface of the gear 25, thereby preventing the runout of the crystal suspension rod 20.

The control system such as the power supply of the device, the operation / stop switch of the motor, the display of the weight detector, etc. are provided on the control panel separately provided for the device, and these are the same as the conventional ones. Well, it is omitted here because it is not particularly related to the characteristic configuration of the present invention. In the crystal growing apparatus configured as described above, the crystal suspension rod 20 having crystal nuclei near the tip is immersed in a container (not shown) containing the crystal growth solution as described above. Then, the motor 40 is driven. Then, the gear 36 rotates in one direction and the gear 25 rotates in the opposite direction.
Assuming that the gear 36 rotates in the arrow A direction as shown in FIG. 2, the gear 25 rotates in the arrow B direction. Since the arcuate wall 27 naturally rotates in the same direction as the gear 25 rotates, the arcuate wall 27 pushes the metal fitting 53, and the rotating force is applied to the hollow columnar portion 22, that is, the crystal suspension rod 20, through the bearing 52. As a result, the suspension bar 20 rotates in the arrow B direction.

On the other hand, the rotation of the suspension rod 20 causes the bearing 17 in the hollow cylindrical portion 22 to rotate around the support shaft 13. Of course, the support shaft 13 does not rotate, and only the weight of the suspension bar 20 and the hollow cylindrical portion 22 is added to the support shaft 13.
Further, while the suspension rod 20 is rotating, the hollow columnar portion 22 is held in a fixed position by the bearing 56 to prevent the runout of the suspension rod 20, and the rotational movement of the sleeve-shaped portion 28 of the gear 25 is performed by the bearing. It is supported by 32 and 34.

In actual crystal growth, rotation of the crystal suspension rod 20 in the forward and reverse directions is periodically repeated. However, in the case of reverse rotation, the arcuate wall 27 pushes against the metal fitting 51, so that the suspension rod 20 is reversed. Rotate in a clockwise direction. During repeated forward and reverse rotations, the crystal eventually grows around the nucleus and gradually grows. Along with this, the weight of the suspension bar 20 gradually increases, and this weight is transmitted via the bearing 17 to the support shaft 1.
It is transmitted to 3. In the weight detector 10, the increased amount is calculated,
The weight of the grown crystal is calculated.

[0016]

Since the crystal growing apparatus of the present invention is constructed as described above, it has the following effects. (1) Since the suspension supporting means provided on the crystal suspension rod rotates around the support shaft of the weight detector, the crystal suspension rod rotates, but the support shaft (that is, the weight detector) does not rotate, Only the weight of the suspension bar is transmitted to the support shaft, which improves the accuracy of crystal weight measurement by the weight detector. (2) The mechanism that rotatably supports the crystal suspension rod and does not rotate the support shaft and transmits only the weight of the crystal suspension rod to the support shaft is simple and compact, which is advantageous in terms of cost. (3) Since the weight detector stops without rotating, many types of weight detectors can be used without being caught by the shape and size, and a highly accurate detector can also be adopted. (4) It is possible to perform accurate weight measurement even while the crystal suspension rod is rotating.

[Brief description of drawings]

FIG. 1 is a sectional view of an essential part of a crystal growth apparatus according to an embodiment of the present invention.

FIG. 2 is a plan view taken along the line AA shown in FIG.

[Explanation of symbols]

 10 Weight Detector 13 Support Shaft 17 Bearing (Suspension Supporting Means) 20 Crystal Suspension Rod 25 Gear (Power Transmission Component) 26 Hole of Gear 25 27 Arc Wall 36 Motor Side Gear (Power Transmission Component) 40 Motor 50, 52 Bearing 51, 53 per fitting

Claims (2)

[Claims] 1. A crystal suspension rod having a suspension support means in which a weight detector having a support shaft projecting downward is fixed to a frame, and the support shaft is rotatably engaged with the support shaft. The power transmission component having a hole at the center thereof is disposed below the weight detector, and the crystal suspension rod is rotatably inserted into the hole of the power transmission component. The power transmission component on the motor side is engaged with this power transmission component, and the drive transmission means for transmitting the rotational force of the motor to the crystal suspension rod is interposed between the crystal suspension rod and the power transmission component inserted therethrough. A crystal growing apparatus characterized in that 2. The suspension support means is a bearing, and the drive transmission means includes a crystal suspension rod so as to face a protrusion or a recess provided on the crystal suspension rod and the protrusion or the recess so as to be engageable with the protrusion or the recess, respectively. The crystal growing apparatus according to claim 1, wherein the crystal growing apparatus comprises a recess or a protrusion provided on the power transmission component inserted.