JP2519626B2 - Crystal growth equipment - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a crystal growing apparatus for measuring the weight of a crystal with a weight detector while growing the crystal. More specifically, the crystal is grown while rotating, but the weight detector does not rotate. The present invention relates to a crystal growing device configured as described above.

[0002]

2. Description of the Related Art A crystal growing apparatus used to obtain a crystal such as a compound semiconductor and a single crystal is equipped with a weight detector for growing the crystal while rotating it and measuring the weight of the crystal one by one. In general, this type of device is immersed in a solution for crystal growth placed in a container, immersing a rotating shaft having a crystal nucleus attached near the tip, and growing the crystal around the crystal nucleus while rotating the rotating shaft. The weight is detected by a weight detector.

[0003]

[0007] However, in the conventional crystal growth apparatus, since the weight detector together with the rotating shaft is also Ru configured to rotate is customary (e.g. JP-A-2
However , the measurement accuracy of the crystal weight is not so high, and the mechanism for supporting the rotation of the weight detector is complicated and large. Moreover, it is difficult in terms of accuracy to measure the weight while the weight detector is rotating (that is, while the rotating shaft is rotating). On the other hand, according to Japanese Patent Publication No. 3-41434, rotation
The structure for making the weight detector non-rotating with respect to the shaft is
Although disclosed, the crystal growth apparatus in this publication
Have taken appropriate measures to prevent runout.
However, this has forced the measurement accuracy to deteriorate.
It

[0004] Accordingly, the present invention has been made in focusing on the problems, good measurement accuracy of the crystal weight is simple structure, it is possible to perform the weight measurement, even during the rotation of the rotating shaft, moreover rotation Properly and efficiently prevent shaft runout
It is an object of the present invention to provide a compact crystal growing apparatus that can be used .

[0005]

In order to achieve the above object, the crystal growing apparatus of the present invention comprises a weight detector fixed to a frame and having a supporting shaft projecting downward,
A crystal suspension rod that is hung coaxially below the support shaft;
The inner surface side of the hollow part formed at the upper end of the crystal suspension bar and the above
It is installed between the outer surface of the support shaft and the phase of both.
Suspension support means allowing pair rotation, and above the crystal suspension rod
It has a hole for the end to be loosely inserted and is driven by a motor.
And a power transmission part to be moved, and the crystal suspension rod.
A part that extends between the outer peripheral side of the hollow part of the
At a position surrounding the suspension support means.
A drive for transmitting the rotational force from the force transmission component to the crystal suspension bar.
Pivoting for preventing eccentricity of the motion transmitting means and the crystal suspension rod
It is characterized in that an anti-slip means is provided.

[0006]

Actions and effects of the present invention According to the above configuration, the motor
When the power transmission component is driven to rotate,
Drive transmission means is attached to the crystal suspension rod that is loosely inserted in the hole of the accessory part.
The rotational force is transmitted via. In this case, the weight detector
The support shaft and the crystal suspension bar allow relative rotation of both.
Since it is supported by the suspension supporting means,
While the crystal suspension rod rotates, the support shaft (that is, the weight detection
Container) is in a non-rotating state. Therefore, attach it to the above crystal suspension bar.
The weight of the attached crystal is supported by the suspension supporting means.
It is transmitted to the shaft and measured by a non-rotating weight detector.
By the way, from the power transmission component to the crystal suspension rod,
The drive transmission means for transmitting the rolling force is the suspension support.
Due to the fact that it is placed in a position that surrounds the means, its rotation
The force acts on the connecting part (suspension support part) between the crystal suspension rod and the support shaft.
It is transmitted through. In this way, the rotational force transmission action is
This is done at the connecting part, so that
If the crystal suspension rod receives the rotational force and tilts,
It is less likely to occur and smooth rotation of the crystal suspension rod can be ensured.
Will be. In addition, the core runout prevention means also transmits the drive.
Since it is arranged at the same position as the means,
The effect of preventing runout with the support shaft is also provided at the connecting part between the two.
Done. Therefore, the gap that may inevitably occur at this connecting portion
Prevents tampering and misalignment directly at the location of occurrence.
It can be stopped, and even if only this position is
It becomes possible to carry out an anti-skid effect. As mentioned above,
Both the motion transmission means and the core runout prevention means are suspended and supported.
By arranging in a position that surrounds the
As the device is made smaller, the crystal suspension bar is not tilted.
After maintaining the state (accurate posture) and rotating it,
The core can be surely prevented from running out. And the above conclusion
As a result, it will be possible to perform extremely accurate weight measurement.
In addition, the cost can be reduced as the device becomes smaller.
become. Also, the weight detector does not rotate even when the crystal suspension bar is rotating.
It is in a rotating state, which also improves the accuracy of weight measurement.
It goes without saying that it will be done.

In the apparatus of the present invention, the suspension supporting means may support the rotation of the crystal suspension rod, do not transmit the rotation to the support shaft, and have a frictional force with the support shaft as small as possible, for example, a bearing. (Rolling bearing) is common. Further, the drive transmission means transmits the rotational force of the motor from the power transmission component to the crystal suspension rod, and substantially includes the power transmission component system (including the motor) and the crystal suspension rod system (including the support shaft and the weight detector). The rotational force is efficiently transmitted to the crystal suspension rod system because it also plays a role of mechanically separating, but the weight of the power transmission component system that is not necessary for crystal weight measurement and the load direction that affects the measurement accuracy. It is important to prevent unnecessary forces such as the frictional force of (3) from being transmitted to the crystal suspension rod system (that is, the weight detector). Specifically, for example, it is driven by a protrusion or a recess provided on the crystal suspension rod and a recess or a protrusion provided on the power transmission component through which the crystal suspension rod is inserted so as to face the protrusion or the recess so that they can engage with each other. It constitutes a transmission means.

Further, in the apparatus of the present invention, the weight detector is stopped, so that the shape and size thereof are not caught. Therefore, the weight detector is not limited to the load cell that is usually used, but general small scales, precision electronic scales, and other devices that measure weight can be widely used, and high-precision detectors can also be adopted. .

[0009]

EXAMPLES The crystal growth apparatus of the present invention will be described below based on examples. FIG. 1 shows a cross-sectional view of a main part of the embodiment. The weight detector 10 for measuring the weight of the crystal is fixed to a detector base 90, and the base 90 is supported by a column 93 of a base 95. There is a circular hole 91 in the portion of the base 90 located under the detector 10, and the lower hook 11 of the detector 10 projects downward from this circular hole 91. A joint metal fitting 15 for connecting the support shaft 13 to the lower hook 11 is attached to the lower hook 11 with a screw or the like, and the support metal shaft 15 is provided below the detector 10 by the joint metal fitting 15 so as to project therefrom. However, the shape of the fitting 15 is the lower hook 11
The shape may be changed as appropriate. The lower end of the support shaft 13 is enlarged in a disc shape, and a bearing 17 as a suspension supporting means is arranged on the enlarged portion.

The bearing 17 is, for example, a ball bearing, which is rotatably engaged with the periphery of the support shaft 13 and fixed to the inner peripheral surface of a hollow columnar portion 22 provided at the upper end of the crystal suspension rod 20. There is. As can be seen from the drawing, the crystal suspension rod 20 is in a state of being hung coaxially with the support shaft 13 via the bearing 17, and the bearing 17 is rotated as the suspension rod 20 rotates.
Rotates around the support shaft 13 and supports the rotation of the suspension bar 20.

The hollow cylindrical portion 22 is located in a hole 26 formed at the center of a gear 25 as a power transmission component, and the crystal suspension rod 20 is inserted into a sleeve-shaped portion 28 extending downward from the gear 25. The suspension rod 20 in the gear 25.
The hollow cylindrical portion 22 is rotatable. Although not specifically shown in FIG. 1, the crystal suspension rod 20 extends to a container for containing a crystal growth solution, and a nucleus serving as the center of the crystal is attached near the lower end. The sleeve-shaped portion 28 is supported by two upper and lower bearings (for example, ball bearings) 32 and 34 attached to a bearing box 30 fixed to a base 95, and the bearings 32 and 34 are the sleeve-shaped portion 28 (that is, the gear 25). The movement of the sleeve in a direction other than the rotation direction of the sleeve 2
8 has the function of rotating the suspension rod 20 coaxially with the axis of the suspension rod 20. A gear 36, which is a power transmission component on the motor side, is meshed with the gear 25, and the gear 36 is attached to a shaft 42 of a motor 40 fixed to a base 95.

As can be seen from FIG. 2 which is a plan view taken along the line A--A of FIG. 1, the two shaft portions 50 and 52 are arranged on the outer peripheral surface of the hollow cylindrical portion 22 at appropriate angular intervals. It is projected (fixed) , and hitting pieces (metal fittings) 51, 53 extend outward from the respective shaft portions 50, 52. The contact fittings 51 and 53 are engaged with the side surfaces of the arcuate wall 27 formed in a protruding shape on the upper surface of the gear 25. These shaft portion 50, 5
The drive transmission means is composed of the 2 and the contact fittings 51, 53 and the arcuate wall 27. Therefore, when the gear 25 rotates, the metal fitting 51 or 53 is pushed by the arcuate wall 27,
The hollow cylindrical portion 22 rotates in the same direction as the gear 25.
According to such a drive transmission means, the rotational force of the motor 40 is transmitted to the hollow cylindrical portion 22 (that is, the crystal suspension rod 20), but unnecessary weight such as the weight of the gear 25 and frictional force in the load direction is hollow. It is convenient because it does not participate in the cylindrical portion 22 and thus the weight detector 10. In addition, the middle empty cylindrical portion 22
Another bearing 56 that engages with the outer peripheral surface of the crystal is disposed on the upper surface of the gear 25, thereby preventing center runout of the crystal suspension rod 20. The bearing 56 constitutes a core runout preventing means.
It In this case, the drive transmission means and the core runout prevention means
Is the position surrounding the suspension support means 17 (ie the suspension support hand).
It is arranged at the same height position as the step 17.

The control system such as the power supply of the device, the operation / stop switch of the motor, the display of the weight detector, etc. are provided on the control panel separately provided for the device, and these are the same as the conventional ones. Well, it is omitted here because it is not particularly related to the characteristic configuration of the present invention. In the crystal growing apparatus configured as described above, the crystal suspension rod 20 having crystal nuclei near the tip is immersed in a container (not shown) containing the crystal growth solution as described above. Then, the motor 40 is driven. Then, the gear 36 rotates in one direction and the gear 25 rotates in the opposite direction.
Assuming that the gear 36 rotates in the arrow A direction as shown in FIG. 2, the gear 25 rotates in the arrow B direction. For rotation in an arc wall 27 is also of course the same direction with the rotation of the gear 25, the arc-shaped wall 27 press the contact fittings 53. That
As a result, the hollow cylindrical portion having the hitting metal fitting 53 at the tip
Through the shaft portion 52 protruding from the minute portion 22, the hollow circle
The rotational force is transmitted to the columnar portion 22 and further to the crystal suspension rod 20, and the suspension rod 20 rotates in the arrow B direction.

On the other hand, the rotation of the suspension rod 20 causes the bearing 17 in the hollow cylindrical portion 22 to rotate around the support shaft 13. Of course, the support shaft 13 does not rotate, and only the weight of the suspension bar 20 and the hollow cylindrical portion 22 is added to the support shaft 13.
Further, while the suspension rod 20 is rotating, the hollow columnar portion 22 is held in a fixed position by the bearing 56 to prevent the runout of the suspension rod 20, and the rotational movement of the sleeve-shaped portion 28 of the gear 25 is performed by the bearing. It is supported by 32 and 34. This place
When the runout prevention of the suspension bar 20 is performed in
The specific operation of the bearing will be described below.
56 is 2 etc. of the arrangement position of two hitting metal fittings 51, 53
The hollow cylindrical portion 2 of the suspension rod 20 along the line of division.
It is pressed against the outer peripheral surface of 2, and
Therefore, on both end faces of the arc-shaped wall 27 of the gear 25 in a plane shape.
In the state that two hitting metal fittings 51 and 53 are in contact with each other.
is there. The movement is restricted by this contact.
Two shafts 5 with fittings 51, 53 at the tip
0, 52 and the bearing 56 of the above-mentioned runout preventing means, a total of 3 pieces
Due to the pressing force from the place, the hollow cylindrical portion 22
Is held in place with core runout prevented. Obey
Strictly speaking, the hitting metal fitting 51 and the shaft portion 50 are contacted with each other.
Equal angle between the bracket 53 and the shaft 52 and the bearing 56
The core is prevented from running out by a total of three places with an interval.
Will be. Furthermore, the drive transmission means and the runout
Each element 27, 50, 51, 52, 5 constituting the prevention means
3, 56 are bearings 17 which are all suspension support means.
Since it is placed in a state of being surrounded, it can be used when torque is transmitted.
Inclining the suspension bar 20 with the bearing 17 as a fulcrum
The force does not work, and the bearing 56 is
Even when pressed against the hollow cylindrical portion 22,
The force that tilts the suspension bar 20 does not work. Obey
Therefore, the suspension bar 20 can rotate smoothly while maintaining an accurate posture.
You will be able to work. Further, the bearing 1 which is a suspension supporting means.
Occurrence of rattling or deviation that may inevitably occur in 7
And prevent it directly and at the same time prevent core runout
Install the means at a plurality of positions in the longitudinal direction of the suspension bar 20.
Even without this, the core runout prevention function is efficiently performed only at this position.
It also becomes possible. In addition, the layout as above
As a result, parts are integrated and the device is made compact.
There is also an advantage that

In actual crystal growth, rotation of the crystal suspension rod 20 in the forward and reverse directions is periodically repeated. However, in the case of reverse rotation, the arcuate wall 27 pushes against the metal fitting 51, so that the suspension rod 20 is reversed. Rotate in a clockwise direction. During repeated forward and reverse rotations, the crystal eventually grows around the nucleus and gradually grows. Along with this, the weight of the suspension bar 20 gradually increases, and this weight is transmitted via the bearing 17 to the support shaft 1.
Transfer to 3. In the weight detector 10, the increased amount is calculated,
The weight of the grown crystal is calculated.

[0016]

[Brief description of drawings]

FIG. 1 is a sectional view of an essential part of a crystal growth apparatus according to an embodiment of the present invention.

FIG. 2 is a plan view taken along the line AA shown in FIG.

[Explanation of symbols]

10 weight detector 13 support shaft 17 bearing (suspension support means) 20 crystal suspension rod 25 a gear (power transmission part) 26 gear 25 hole 27 arcuate wall (drive transmitting means) 40 motor 50, 52 shaft portion (drive transmitting means ) 51, 53 Contact fittings (drive transmission means) 56 Bearings (core runout prevention means)

Claims (1)

(57) [Claims] 1. A support shaft having a downwardly projecting support shaft and a frame.
The weight detector fixed to the arm and the
Crystal suspension bar suspended on the axis and the upper end of the crystal suspension bar
The inner surface side of the hollow portion formed on the outer surface side of the support shaft
It is interposed between and allows relative rotation of both
The suspension supporting means and the upper end of the crystal suspension rod are loosely inserted.
Power transmission that has a hole and is driven to rotate by a motor
And the outer periphery of the hollow portion of the crystal suspension rod.
Side portion and the power transmission component, and the
At the position surrounding the hanging support means,
A drive transmission means for transmitting a rotational force to the crystal suspension rod, and
A core runout prevention device is installed to prevent runout of the crystal suspension bar.
Crystal growing apparatus characterized by being.