JPH06325993A - Uptime ratio totalization system of semiconductor manufacturing equipment - Google Patents

Uptime ratio totalization system of semiconductor manufacturing equipment

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Publication number
JPH06325993A
JPH06325993A JP11060993A JP11060993A JPH06325993A JP H06325993 A JPH06325993 A JP H06325993A JP 11060993 A JP11060993 A JP 11060993A JP 11060993 A JP11060993 A JP 11060993A JP H06325993 A JPH06325993 A JP H06325993A
Authority
JP
Japan
Prior art keywords
semiconductor manufacturing
operating
manufacturing apparatus
rate
uptime ratio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP11060993A
Other languages
Japanese (ja)
Inventor
Shinichi Saito
藤 信 一 斉
Hitoshi Yoshinaka
中 仁 志 由
Koji Kitajima
島 浩 二 北
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Toshiba Electronic Device Solutions Corp
Original Assignee
Toshiba Corp
Toshiba Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Microelectronics Corp filed Critical Toshiba Corp
Priority to JP11060993A priority Critical patent/JPH06325993A/en
Publication of JPH06325993A publication Critical patent/JPH06325993A/en
Withdrawn legal-status Critical Current

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Abstract

PURPOSE:To provide an uptime ratio totalization system of a semiconductor equipment capable of effectively using the entire facility by a method wherein the uptime ratio of the semiconductor equipment is raised as occasion demands. CONSTITUTION:This system comprises semiconductor equipment 23 having an operation status detecting part 28; and a controller 21 having an uptime ratio managing part 25 into which working status detecting signals derived from the operation status detecting part 28 are inputted. The uptime ratio managing part 25 finds the uptime ratio of the semiconductor equipment based on the operation status detecting signals derived from the operation status detecting part 28 and also outputs alarm signals into an operating board 22 when the uptime ratio is below a specific value.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は半導体製造装置の稼動率
集計システムに係り、とりわけ半導体製造装置の稼動率
の上昇を図ることができる半導体製造装置の稼動率集計
システムに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a system for accumulating an operating rate of a semiconductor manufacturing apparatus, and more particularly to a system for accumulating an operating rate of a semiconductor manufacturing apparatus capable of increasing the operating rate of the semiconductor manufacturing apparatus.

【０００２】[0002]

【従来の技術】従来の半導体製造装置において、その稼
動率を求める場合は、各半導体製造装置の稼動時間を作
業者が集計し、その集計結果をシートに記入している。
このようにシートに記入された集計結果は保管され、そ
の後半導体製造装置の稼動において利用される。2. Description of the Related Art In a conventional semiconductor manufacturing apparatus, when obtaining the operating rate, an operator totals the operating time of each semiconductor manufacturing apparatus, and the totaled result is entered on a sheet.
The tabulated result thus entered on the sheet is stored and then used in the operation of the semiconductor manufacturing apparatus.

【０００３】[0003]

【発明が解決しようとする課題】上述のように、従来の
半導体製造装置では、各半導体製造装置の稼動時間を作
業者が集計し、集計結果をシートに記入して保管してい
る。As described above, in the conventional semiconductor manufacturing apparatus, the operator totals the operating time of each semiconductor manufacturing apparatus, and the totaled result is entered and stored in a sheet.

【０００４】しかしながら、従来の稼動率の集計方法
は、作業員により行なわれるため、稼動率の集計結果に
対する信頼性が低く、稼動していない装置の発見がむず
かしいという問題がある。この場合は、半導体製造装置
が有効に利用されないため、製造コストそのものに影響
が出てしまう。However, since the conventional method of calculating the operating rate is performed by the worker, there is a problem that the reliability of the result of calculating the operating rate is low and it is difficult to find a device that is not in operation. In this case, the semiconductor manufacturing apparatus is not effectively used, which affects the manufacturing cost itself.

【０００５】本発明はこのような点を考慮してなされた
ものであり、半導体製造装置の稼動率を迅速かつ精度良
く集計することができる半導体製造装置の稼動率集計シ
ステムを提供することを目的とする。The present invention has been made in consideration of the above points, and an object thereof is to provide an operation rate totalization system for semiconductor manufacturing equipment, which can quickly and accurately total the operation rates of semiconductor production equipment. And

【０００６】[0006]

【課題を解決するための手段】本発明は、稼動状態検知
部を有する半導体製造装置と、稼動状態検知部からの稼
動状態検知信号が入力される稼動率管理部を有する制御
装置とを備え、前記稼動率管理部は、稼動状態検知信号
に基づいて半導体製造装置の稼動率を求めるとともに、
この稼動率が所定値を下回った場合に警報信号を出力す
ることを特徴とする半導体製造装置の稼動率集計システ
ムである。The present invention comprises a semiconductor manufacturing apparatus having an operating state detecting section, and a control apparatus having an operating rate managing section to which an operating state detecting signal from the operating state detecting section is inputted. The operation rate management unit obtains the operation rate of the semiconductor manufacturing device based on the operation state detection signal,
An operating rate totaling system for a semiconductor manufacturing apparatus, which outputs an alarm signal when the operating rate falls below a predetermined value.

【０００７】[0007]

【作用】半導体製造装置の稼動状態が稼動状態検知部に
より検知され、稼動状態検知部からの稼動状態検知信号
に基づいて、稼動率管理部において半導体製造装置の稼
動率が求められる。稼動率管理部において、稼動率が所
定値と比較され、所定値を下回った場合に警報信号が出
力される。The operating state of the semiconductor manufacturing apparatus is detected by the operating state detecting section, and the operating rate managing section obtains the operating rate of the semiconductor manufacturing apparatus based on the operating state detection signal from the operating state detecting section. In the operation rate management unit, the operation rate is compared with a predetermined value, and when it falls below the predetermined value, an alarm signal is output.

【０００８】[0008]

【実施例】以下、図面を参照して本発明の実施例につい
て説明する。Embodiments of the present invention will be described below with reference to the drawings.

【０００９】図１および図２は、本発明による半導体製
造装置の稼動率集計システムの一実施例を示す図であ
る。まず、図２により、半導体製造装置の稼動率集計シ
ステムの概略について説明する。FIG. 1 and FIG. 2 are views showing an embodiment of an operation rate totalizing system for semiconductor manufacturing equipment according to the present invention. First, with reference to FIG. 2, an outline of an operation rate totaling system of a semiconductor manufacturing apparatus will be described.

【００１０】図２に示すように、半導体製造装置の稼動
率集計システムは、公知の処理工程により半導体製造装
置を製造する複数の半導体製造装置１３，１３と、半導
体製造装置１３，１３に接続された制御装置１１とを備
えている。また制御装置１１には、操作盤１２が接続さ
れている。As shown in FIG. 2, the operation rate totaling system for semiconductor manufacturing equipment is connected to a plurality of semiconductor manufacturing equipment 13, 13 for manufacturing semiconductor manufacturing equipment by known processing steps. And a control device 11 having An operation panel 12 is connected to the control device 11.

【００１１】次に図１により、本発明による半導体製造
装置の稼動率集計システムの具体例について詳述する。
図１に示すように、半導体製造装置の稼動率集計システ
ムは半導体製造装置２３と、半導体製造装置２３に接続
された制御装置２２とを備えている。Next, referring to FIG. 1, a specific example of the operation rate totalizing system for semiconductor manufacturing equipment according to the present invention will be described in detail.
As shown in FIG. 1, the operation rate totaling system of the semiconductor manufacturing apparatus includes a semiconductor manufacturing apparatus 23 and a controller 22 connected to the semiconductor manufacturing apparatus 23.

【００１２】また、半導体製造装置２３は、内部に半導
体製造装置の稼動状態を検知する稼動状態検知部２８
と、半導体製造装置の稼動内容を検知する稼動内容検知
部２９とを有している。Further, the semiconductor manufacturing apparatus 23 has an operating state detecting section 28 therein for detecting the operating state of the semiconductor manufacturing apparatus.
And an operation content detection unit 29 for detecting the operation content of the semiconductor manufacturing apparatus.

【００１３】このうち、稼動状態検知部２８は、半導体
製造装置の稼動状態、すなわち「稼動」または「中断」
を検知し、通信部２７を介して制御装置２２の通信部２
６にこの検知信号を送るようになっている。他方、稼動
内容検知部２９は、半導体製造装置の「稼動中」、「中
断中」、「完全中止中」、「メンテナンス中」等の現在
の稼動内容を検知し、通信部２７を介して制御装置２２
の通信部２６に検知信号を送るようになっている。Of these, the operating state detecting section 28 is used for operating the semiconductor manufacturing apparatus, that is, "operating" or "interrupted".
Is detected, and the communication unit 2 of the control device 22 is detected via the communication unit 27.
This detection signal is sent to 6. On the other hand, the operation content detection unit 29 detects the current operation content of the semiconductor manufacturing apparatus such as “in operation”, “suspended”, “completely stopped”, and “in maintenance”, and controls it via the communication unit 27. Device 22
A detection signal is sent to the communication unit 26 of the.

【００１４】また、稼動状態検知部２８および稼動内容
検知部２９からの検知信号は、操作盤２４に送られ、操
作盤２４に稼動状態および稼動内容が表示されるように
なっている。Further, detection signals from the operating state detecting section 28 and the operating content detecting section 29 are sent to the operation panel 24, and the operating state and the operating content are displayed on the operating panel 24.

【００１５】さらに、制御装置２２は、その内部に稼動
率管理部２５を有している。この稼動率管理部２５は、
稼動状態検知部２８からの検知信号に基づいて、半導体
製造装置の稼動率を求めるとともに、この稼動率が所定
値を下回った場合に警報信号を操作盤２２に出力して、
操作盤２２に警報表示を行なうようになっている。Further, the control unit 22 has an operating rate management unit 25 inside. This availability management unit 25
Based on the detection signal from the operating state detection unit 28, the operating rate of the semiconductor manufacturing apparatus is obtained, and when the operating rate is below a predetermined value, an alarm signal is output to the operation panel 22,
An alarm display is provided on the operation panel 22.

【００１６】次に、このような構成からなる本実施例の
作用について説明する。まず、図１に示すように、半導
体製造装置がＴ時間稼動した後一時的にｔ時間中断し、
その後再び稼動した場合について考える。この場合は、
稼動→中断および中断→稼動という遷移状態を半導体製
造装置２３の稼動状態検知部２８が検知し、この遷移時
の検知信号が通信部２７および通信部２６を介して稼動
率管理部２５に送られる。次に稼動率管理部２５におい
て、半導体製造装置の稼動率Ｗが次のようにして求めら
れる。Next, the operation of this embodiment having such a configuration will be described. First, as shown in FIG. 1, after the semiconductor manufacturing apparatus operates for T hours, it is temporarily interrupted for t hours,
Consider the case where it is restarted after that. in this case,
The operating state detection unit 28 of the semiconductor manufacturing apparatus 23 detects the transition states of operation → interruption and interruption → operation, and a detection signal at this transition is sent to the operation rate management unit 25 via the communication units 27 and 26. . Next, the operating rate management unit 25 obtains the operating rate W of the semiconductor manufacturing apparatus as follows.

【００１７】 次に稼動率管理部２５内で、上述のようにして求められ
た稼動率Ｗが予め入力された所定値Ｗ1 と比較され、Ｗ
＜Ｗ1 となった場合に、操作盤２１へ稼動率低下の警報
信号が出力され、操作盤２１に警報表示が行なわれる。[0017] Next, in the operating rate management unit 25, the operating rate W obtained as described above is compared with a predetermined value W 1 input in advance, and W
When <W 1 is reached, an alarm signal indicating that the operating rate has dropped is output to the operation panel 21, and an alarm display is displayed on the operation panel 21.

【００１８】同時に、稼動状態検知部２８および稼動内
容検知部２９からの検知信号が操作盤２４に送られ、半
導体製造装置の稼動状態および稼動内容が操作盤２４に
表示される。At the same time, detection signals from the operating state detecting unit 28 and the operating content detecting unit 29 are sent to the operation panel 24, and the operating state and operating content of the semiconductor manufacturing apparatus are displayed on the operating panel 24.

【００１９】以上説明したように、本実施例によれば、
操作盤２４により半導体製造装置の稼動状態（「稼動」
または「中断」）および稼動内容（「稼動中」、「メン
テナンス中」等）がわかるとともに、半導体製造装置の
稼動率が低下した場合に、この稼動率の低下を示す警報
表示を操作盤２２に表示することができる。このため、
作業者は、操作盤２２，２４の表示から、半導体製造装
置の稼動率を上昇させることができ、製造設備の有効利
用を図ることができる。As described above, according to this embodiment,
The operating status of the semiconductor manufacturing equipment (“operating”
Or "interruption") and the operation contents ("in operation", "maintenance", etc.) are known, and when the operation rate of the semiconductor manufacturing equipment is reduced, an alarm display indicating this decrease in operation rate is displayed on the operation panel 22. Can be displayed. For this reason,
From the display on the operation panels 22 and 24, the operator can increase the operating rate of the semiconductor manufacturing apparatus, and can effectively utilize the manufacturing equipment.

【００２０】[0020]

【発明の効果】以上説明したように、本発明によれば、
半導体製造装置の稼動率が所定値を下回った場合に、警
報信号が出力されるので、この場合、作業者は半導体製
造装置の稼動率を上昇させることができる。このよう
に、半導体製造装置の稼働率を必要に応じて上昇させる
ことにより、半導体製造設備全体の有効利用を図ること
ができる。As described above, according to the present invention,
When the operating rate of the semiconductor manufacturing apparatus falls below a predetermined value, an alarm signal is output. In this case, the operator can increase the operating rate of the semiconductor manufacturing apparatus. In this way, by increasing the operating rate of the semiconductor manufacturing apparatus as needed, it is possible to effectively utilize the entire semiconductor manufacturing facility.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明による半導体製造装置の稼動率集計シス
テムの概略図。FIG. 1 is a schematic diagram of an operation rate totaling system for a semiconductor manufacturing apparatus according to the present invention.

【図２】本発明による半導体製造装置の稼動率集計シス
テムの具体例を示す図。FIG. 2 is a diagram showing a specific example of an operation rate totaling system for semiconductor manufacturing equipment according to the present invention.

【符号の説明】[Explanation of symbols]

１１ 制御装置 １３ 半導体製造装置 ２１ 制御装置 ２３ 半導体製造装置 ２５ 稼動率管理部 ２８ 稼動状態検知部 ２９ 稼動内容検知部 11 Control Device 13 Semiconductor Manufacturing Device 21 Control Device 23 Semiconductor Manufacturing Device 25 Operating Rate Management Unit 28 Operating State Detection Unit 29 Operating Content Detection Unit

───────────────────────────────────────────────────── フロントページの続き (72)発明者 北 島 浩 二 神奈川県川崎市幸区堀川町72番地 株式会 社東芝堀川町工場内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Koji Kitajima 72 Horikawa-cho, Saiwai-ku, Kawasaki-shi, Kanagawa Stock Company Toshiba Horikawa-cho Factory

Claims (1)

【特許請求の範囲】[Claims] 【請求項１】稼動状態検知部を有する半導体製造装置
と、稼動状態検知部からの稼動状態検知信号が入力され
る稼動率管理部を有する制御装置とを備え、 前記稼動率管理部は、稼動状態検知信号に基づいて半導
体製造装置の稼動率を求めるとともに、この稼動率が所
定値を下回った場合に警報信号を出力することを特徴と
する半導体製造装置の稼動率集計システム。1. A semiconductor manufacturing apparatus having an operating state detecting section, and a control device having an operating rate managing section to which an operating state detecting signal from the operating state detecting section is inputted, wherein the operating rate managing section is operated. An operation rate totaling system for a semiconductor manufacturing apparatus, which calculates an operation rate of a semiconductor manufacturing apparatus based on a state detection signal and outputs an alarm signal when the operation rate falls below a predetermined value.
JP11060993A 1993-05-12 1993-05-12 Uptime ratio totalization system of semiconductor manufacturing equipment Withdrawn JPH06325993A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11060993A JPH06325993A (en) 1993-05-12 1993-05-12 Uptime ratio totalization system of semiconductor manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11060993A JPH06325993A (en) 1993-05-12 1993-05-12 Uptime ratio totalization system of semiconductor manufacturing equipment

Publications (1)

Publication Number Publication Date
JPH06325993A true JPH06325993A (en) 1994-11-25

Family

ID=14540172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11060993A Withdrawn JPH06325993A (en) 1993-05-12 1993-05-12 Uptime ratio totalization system of semiconductor manufacturing equipment

Country Status (1)

Country Link
JP (1) JPH06325993A (en)

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