JPH0632179Y2 - Shut-off valve for vacuum equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention is connected to a vacuum chamber for the purpose of, for example, observing an internal state while maintaining a vacuum state for various devices provided in the vacuum chamber. The present invention relates to a shutoff valve for a vacuum device, which can insert or shut off a detection device or the like in such a state.

(Prior Art) Conventionally, as the shut-off valve, the one having a structure as shown in FIG. 7 has been used. That is, in FIG. 7, a shutoff valve 100 includes a hollow main body 101 interposed in a communication passage B communicating with the vacuum chamber A, and a valve seat 102 formed on an opening end surface of the communication passage B facing the main body 101. , The valve seat 1
02, a rotating shaft 103 extending in a direction perpendicular to the central axis L of the communication passage B and having both ends sealedly supported by the side wall 101a of the main body 101, and a swinging member having a base portion fixed to the rotating shaft 103. 104, a valve plate 105 having a rear surface 105a slightly separated from the swinging member 104 and attached to a tip end portion of the swinging member 104 by a hinge 106 so as to swing and pivot. Surface 1 of valve plate 105
05b is composed of an O-ring 107 as an annular cushioning sealing material that is recessed on the outer periphery of 05b, and a transmission operating means (not shown) that is linked to the rotating shaft 103 and can be operated from the outside.

(Problems to be Solved by the Invention) In the swing-type shutoff valve 100 described above, the valve plate 1
The swing member 1 is capable of swinging and swinging 05 by a hinge 106.
04, the valve seat 102 when closed and shut off
With the uniform crushing of the O-ring 107 between the valve seat 10
2 and the valve plate 105 surface 105b are designed to be uniformly crimped. Therefore, when the shutoff valve 100 is opened / closed, dust is generated due to slippage or rattling of the pin 106a in the hinge 106, or gas is released from the slipping material, which adversely affects the degree of vacuum. Of course, even if a swingable ball joint (not shown) is used in place of the hinge 106, the above-mentioned problems of dust generation and gas release cannot be avoided.

(Means for Solving Problems) Although the shutoff valve for a vacuum device of the present invention is of a swing type as in the past, the connecting means between the swing member and the valve plate has both ends with a slight gap formed therebetween. It is characterized in that it is constituted by a short-sized plastic or elastically deformable support pin fixed to the tip end portion of the rocking member and the back surface of the valve plate.

(Operation) When the rotating shaft, the swinging member, and the valve plate are integrally rotated in the closing direction by the operation of the transmission operation means, when the valve plate is crimped to the valve seat, an O-ring ( One point (with diameter D) contacts the valve seat. As a result, a moment obtained by multiplying the reaction force R of the crimping force F to the valve seat by D / 2 acts on the support pin. When the reaction force R reaches a certain value (for example, more than 10% of the total crimping force), the support pin is plastically or elastically deformed, whereby the O-ring is crushed uniformly and the space between the valve seat and the valve body is reduced. Uniform pressing force can be obtained. Since the connecting means composed of support pins has no slippage or backlash,
At least there is no danger of dusting or outgassing in this connecting means.

(Embodiment) FIG. 1 is an embodiment of the present invention showing a state in which a shutoff valve with a mini camera is connected to a vacuum chamber, which will be described in detail below.

In FIGS. 1 to 6, reference numeral 1 denotes a vacuum chamber in which a device can be enclosed and a vacuum state can be set by a vacuum pump (not shown), and a valve connecting flange 1a is provided at one end.

2 is a shut-off valve, and the main body 3 has side plates 4 and 5 with connecting flanges 4b and 5b having elongated holes 4a and 5a of the same central axis L attached to both ends of the circular hollow chamber 3a, and the O-ring 6 is used to Except for the long holes 4a and 5a, the long holes 4a form a communication passage to the vacuum chamber 1 and project into the hollow chamber 3a in a boss shape and the inner end (that is, the opening of the communication passage) is formed. A valve seat 4c is formed on the end surface).

Reference numeral 7 denotes a headed rotating shaft that penetrates the main body 3 at right angles to the surface of the valve seat 4c, and the head has a worm chamber 3 formed by cutting the main body 3
A fan-shaped worm wheel 8 is integrally fitted in b, rotatably supported by two bushes 9 press-fitted into the main body 3, and an outer end is fixed by a C-ring 11 via a flat washer 10. There is.

Reference numerals 12 and 12 denote O-rings fitted to the rotating shaft 7 so as to be located in the annular groove formed in the main body 3 inside the bushes 9. Reference numeral 13 is a base portion so as to be located in the hollow chamber 3a. An oscillating member integrally fixed to an intermediate portion of the rotary shaft 7, is bent substantially at a right angle and extends, and a small through hole 13a is formed at a tip portion thereof. 14 is a short stepped support pin as a connecting means in the both end portions to the central portion and the large diameter portion 14a and the small diameter portion _14b 1 · _{14b 2,} the through hole 13a of one of the small-diameter portion 14b ₁
And is welded (w) inside the through hole 13a. Reference numeral 15 denotes a valve plate arranged so as to face the inner side surface 13b. A stepped through hole 15a is bored in the central portion, and the rear surface 15b side of the through hole 15a is sufficiently larger than the large diameter portion 14a of the support pin 14. A large hole 15a ₁ is formed, and the surface 15c side that can abut against the valve seat 4c is formed as a hole 15a ₂ having substantially the same diameter as the small diameter portion 14b ₂ . And said the other of the small diameter portion 14b ₂ welded (w) in the holes 15a ₂ which is fitted into the hole 15a ₂ than the hole 15a ₁ side, rear and the inner 13b 15
With a slight gap S formed between the support pin 14 and
The swing member 13 and the valve plate 15 are integrally held by. The size and material of the support pin 14 are determined so that it can be slightly plastically or elastically deformed by an external force of a predetermined value or more. In particular, regarding the material, not only the support 14, but also the rotating shaft 7, the swinging member 13, the valve plate 15 and the like are materials having a good vacuum performance, that is, a metal material such as SUS or A, which emits a small amount of gas and a small amount of impurities. And Reference numeral 16 is an O-ring as a cushioning sealant that is recessed in the outer periphery of the surface 15c.

Thus, the swinging member 13 and the valve plate 15 have the rotating shaft 7
The rotation of the valve allows the valve seat 4c to swing from the closed position shown in FIG. 4 to the open position shown in FIG.

Reference numeral 17 denotes a worm shaft that is inserted into the main body 3 in a direction orthogonal to the rotary shaft 7, and is rotated by two bushes 19 in which a handle 18 is integrally fixed to the outer end and an intermediate portion and a tip are press-fitted into the main body 3. Freely supported, both bushes 19/1
The worm 20 is positioned between the worm chamber 3b and the worm wheel 8 so as to be engaged with the worm wheel 8, and the worm shaft 17, the handle 18, the worm wheel 8 and the worm 20 are provided.
And the like constitute transmission operation means. Reference numeral 21 is a cover plate of the worm chamber 3b.

Reference numeral 22 is a detector insertion device, which has the following configuration.

That is, 23 is an insertion rod holding tube, and the flange 5b is provided at one end.
A connecting flange 23a having the same size as that of the insert rod 25 is integrally formed, and an inserting rod 25 is supported in a slidable manner by an O-ring 24 for two pieces fitted in an annular groove to be cut inward. A mini camera 26 is provided at the tip of 25. Reference numeral 27 denotes a vacuum pump provided as a vacuum holding means, which is connected to a position of the insertion rod holding pipe 23 near the flange 23a by a pipe line 28.

Reference numeral 29 is a joint pipe in which connecting flanges 29a and 29b of the same size as the flanges 1a and 4b are formed at both ends, and coupling pipes 32 and 33 are provided via O-rings 30 and 31, respectively.
The flanges 1a and 4b are connected by.

Reference numeral 34 denotes a coupling, which connects both flanges 5b and 23a via an O-ring 35.

Next, the operation will be described. In the closed state of the valve plate 15 shown in FIG. 4, the vacuum in the vacuum chamber 1 is cut off from the hollow chamber 3a by the valve plate 15. In this case, insert rod 2
5 is in the retracted position, the vacuum pump 27 is stopped, and the inside of the hollow chamber 3a is in communication with the atmosphere via the pipe line 28.

When detecting the state of the equipment in the vacuum chamber 1, first, the vacuum pump 27 is operated to bring the inside of the hollow chamber 3a into the same vacuum state as that in the chamber 1, and then the handle 18 is rotated to rotate the worm 20, the worm wheel 8 times. When the valve plate 15 is set to the open position via the moving shaft 7 and the swinging member 13 and the insertion rod 25 is pushed to a predetermined position, the mini camera 26 detects the target device while maintaining the degree of vacuum in the vacuum chamber 1. This can be done (state of FIG. 6).

When the device detection is completed, first insert the rod 25 in the reverse order.
And the valve plate 15 is closed by rotating the handle 18 in the opposite direction, the valve seat 4C is completely shut off by the O-ring 16, and the worm 20 from the worm wheel 8 side at a normal lead angle. Since it cannot be rotated, the closed state of the valve plate 15 is reliably maintained.

The valve seat 4c shutoff operation by the valve plate 15 will be described in more detail.
One point (whose overall diameter is D) contacts the valve seat 4c.
As a result, the support pin 14 has a pressing force F against the valve seat 4c.
The reaction force R of R is multiplied by D / 2 to act. When the reaction force R reaches a certain value (for example, a dozen percent of the total pressure bonding force Fm), the support pin 14 is plastically or elastically deformed, whereby the O-ring 16 is pushed uniformly over the entire circumference. When the valve plate 15 is crushed, the surface 15c of the valve plate 15 comes into close contact with the valve seat 4c, and a uniform pressure force is obtained between the two.

In the above-described embodiment, either the support pin 14, the swing member 13 or the valve plate 15 may be cut out and formed. If the opening of the valve seat 4c is large, the swing plate 15 and the support pins 14 may be plural to support the valve plate 15.

(Effect of the Invention) As described above, the shutoff valve of the present invention is formed by integrally fixing the swinging member and the valve plate with the support pin in a state in which the swing member and the valve plate are slightly separated from each other, and receives the external force of a certain value or more. Since it can be plastically or elastically deformed when it is shut off, a uniform crimping between the valve plate and the valve seat is achieved at the time of shutoff, and a uniform balance effect is exerted in all directions. Since there is no slipping or rattling, there is no risk of dust generation and gas emission. Since the structure is simple and the support pin has the above-mentioned self-balancing action, the manufacturing accuracy is not required so much and the manufacturing is easy. Therefore, not only the function of the valve itself is improved but also an additional effect on the manufacturing is obtained.

[Brief description of drawings]

1 to 6 show an embodiment of the present invention.
The figure shows the overall layout of a vacuum device that employs the shut-off valve of the present invention, and figures 2 and 3 show II-II and II in Figure 1, respectively.
III-III arrow sectional view, FIG. 4 is an IV-IV arrow sectional view in FIG. 2, FIG. 5 is an enlarged detailed view of V portion of FIG. 4, and FIG. 6 is an operation explanatory view. FIG. 7 is a sectional view showing a conventional shutoff valve. In the figure, 1 is a vacuum chamber, 2 is a shutoff valve, 3 is a main body,
4c is a valve seat, 7 is a rotating shaft, 13 is a swinging member, 14 is a support pin, 15 is a valve plate, and 16 is an O-ring.

Claims (1)

[Scope of utility model registration request] 1. A hollow main body interposed in a communication passage communicating with a vacuum chamber, a valve seat formed on an opening end face of the communication passage facing the main body, and a center of the communication passage at a side of the valve seat. A rotating shaft extending in a direction perpendicular to the axis and having both ends supported by the side wall of the main body, a swinging member having a base fixed to the rotating shaft, and a valve attached to the tip end of the swinging member via connecting means. A plate, an annular cushioning sealant mounted on the outer periphery of the surface of the valve plate that can come into contact with the valve seat when shut off, and a transmission operating means that is linked to the rotating shaft and can be operated from the outside. The connecting means is constituted by a plastic or elastically deformable support pin fixed at the front end of the rocking member and the back surface of the valve plate at both ends with a slight gap formed between the rocking member and the valve plate. A special shutoff valve for vacuum equipment.