JPS62140938U - - Google Patents
Info
- Publication number
- JPS62140938U JPS62140938U JP2721786U JP2721786U JPS62140938U JP S62140938 U JPS62140938 U JP S62140938U JP 2721786 U JP2721786 U JP 2721786U JP 2721786 U JP2721786 U JP 2721786U JP S62140938 U JPS62140938 U JP S62140938U
- Authority
- JP
- Japan
- Prior art keywords
- valve seat
- valve plate
- valve
- communication passage
- swinging member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000002955 isolation Methods 0.000 claims 1
- 239000003566 sealing material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Lift Valve (AREA)
Description
第１乃至第６図は本考案の一実施例を示すもの
で、第１図は本考案の遮断バルブを採用した真空
装置の全体配置図、第２・３図は第１図における
それぞれ〜および〜矢視断面図、第４図
は第２図における〜矢視断面図、第５図は第
４図の部拡大詳細図、第６図は作用説明図であ
る。第７図は従来の遮断バルブを示す断面図であ
る。
図中、１は真空チヤンバ、２は遮断バルブ、３
は本体、４ｃは弁座、７は回動軸、１３は揺動部
材、１４は支持ピン、１５は弁板、１６はＯリン
グである。
Figures 1 to 6 show an embodiment of the present invention. Figure 1 is an overall layout diagram of a vacuum device employing the shutoff valve of the present invention, and Figures 2 and 3 are respectively shown in Figure 1. 4 is a sectional view taken in the direction of the arrows in FIG. 2, FIG. 5 is an enlarged detailed view of a portion of FIG. 4, and FIG. FIG. 7 is a sectional view showing a conventional shutoff valve. In the figure, 1 is a vacuum chamber, 2 is a shutoff valve, and 3 is a vacuum chamber.
4c is a main body, 4c is a valve seat, 7 is a rotating shaft, 13 is a swinging member, 14 is a support pin, 15 is a valve plate, and 16 is an O-ring.
Claims (1)
空の本体と、該本体内に臨む前記連通路の開口端
面に形成した弁座と、該弁座の側方において連通
路の中心軸線に対し直角な方向に延び両端を本体
側壁に支承した回動軸と、該回動軸に基部を固定
した揺動部材と、該揺動部材の先端部に連結手段
を介して取付けた弁板と、遮断時に前記弁座に衝
接し得る前記弁板の表面外周に装着した環状緩衝
性密封材と、前記回動軸に連係し外部より操作し
得る伝動操作手段とから成るものにおいて、前記
連結手段は揺動部材と弁板との間に若干の隙間を
形成した状態で両端を揺動部材の先端部および弁
板の背面に固着した塑性または弾性変形可能な支
持ピンにより構成したことを特徴とする、真空装
置用遮断バルブ。 A hollow body interposed in a communication passage communicating with the vacuum chamber, a valve seat formed on the opening end surface of the communication passage facing into the main body, and a valve seat perpendicular to the central axis of the communication passage on the side of the valve seat. A rotating shaft extending in the direction and having both ends supported on the side wall of the main body, a swinging member having a base fixed to the swinging shaft, and a valve plate attached to the tip of the swinging member via a connecting means. The device comprises an annular shock-absorbing sealing material attached to the outer periphery of the surface of the valve plate that can come into contact with the valve seat, and a transmission operation means that is linked to the rotation shaft and can be operated from the outside, wherein the connection means swings. A vacuum device characterized by having support pins that can be plastically or elastically deformed fixed at both ends to the tip of the swinging member and the back of the valve plate with a slight gap formed between the member and the valve plate. Isolation valve for equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2721786U JPH0632179Y2 (en) | 1986-02-25 | 1986-02-25 | Shut-off valve for vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2721786U JPH0632179Y2 (en) | 1986-02-25 | 1986-02-25 | Shut-off valve for vacuum equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62140938U true JPS62140938U (en) | 1987-09-05 |
| JPH0632179Y2 JPH0632179Y2 (en) | 1994-08-24 |
Family
ID=30829034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2721786U Expired - Lifetime JPH0632179Y2 (en) | 1986-02-25 | 1986-02-25 | Shut-off valve for vacuum equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632179Y2 (en) |
-
1986
- 1986-02-25 JP JP2721786U patent/JPH0632179Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0632179Y2 (en) | 1994-08-24 |
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