JPH0630847Y2 - ストリツプ温度検出装置 - Google Patents
ストリツプ温度検出装置Info
- Publication number
- JPH0630847Y2 JPH0630847Y2 JP9537187U JP9537187U JPH0630847Y2 JP H0630847 Y2 JPH0630847 Y2 JP H0630847Y2 JP 9537187 U JP9537187 U JP 9537187U JP 9537187 U JP9537187 U JP 9537187U JP H0630847 Y2 JPH0630847 Y2 JP H0630847Y2
- Authority
- JP
- Japan
- Prior art keywords
- strip
- temperature detector
- reflecting mirror
- rotary scanning
- flat reflecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9537187U JPH0630847Y2 (ja) | 1987-06-23 | 1987-06-23 | ストリツプ温度検出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9537187U JPH0630847Y2 (ja) | 1987-06-23 | 1987-06-23 | ストリツプ温度検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS642067U JPS642067U (ko) | 1989-01-09 |
JPH0630847Y2 true JPH0630847Y2 (ja) | 1994-08-17 |
Family
ID=30959826
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9537187U Expired - Lifetime JPH0630847Y2 (ja) | 1987-06-23 | 1987-06-23 | ストリツプ温度検出装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0630847Y2 (ko) |
-
1987
- 1987-06-23 JP JP9537187U patent/JPH0630847Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS642067U (ko) | 1989-01-09 |
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