JPH0630170B2 - Optical disc master and method of manufacturing the same - Google Patents

Optical disc master and method of manufacturing the same

Info

Publication number
JPH0630170B2
JPH0630170B2 JP59245051A JP24505184A JPH0630170B2 JP H0630170 B2 JPH0630170 B2 JP H0630170B2 JP 59245051 A JP59245051 A JP 59245051A JP 24505184 A JP24505184 A JP 24505184A JP H0630170 B2 JPH0630170 B2 JP H0630170B2
Authority
JP
Japan
Prior art keywords
master
manufacturing
photoresist
optical disk
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59245051A
Other languages
Japanese (ja)
Other versions
JPS61123035A (en
Inventor
孝一 東
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59245051A priority Critical patent/JPH0630170B2/en
Publication of JPS61123035A publication Critical patent/JPS61123035A/en
Publication of JPH0630170B2 publication Critical patent/JPH0630170B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】 産業上の利用分野 本発明はディジタルオーディオディスク(例えばコンパ
クトディスク)、ビデオディスク、静止画、文書ファイ
ルなどのディジタル信号を記録、再生、または消去可能
なディスクを製造するための光ディスク用の原盤および
その製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is for producing a disc capable of recording, reproducing or erasing digital signals such as digital audio discs (eg compact discs), video discs, still images, document files, etc. And a method for manufacturing the same.

従来例の構成とその問題点 この種の光ディスクは、その情報密度が極めて大きいこ
とや、S/Nが大きく、ノイズが少ないことなどから情
報媒体として有望視され、ディジタルオーディオディス
クやビデオディスクとして商品化され、ディジタル信号
記録、再生、消去可能ディスクとしても近年研究開発さ
れている。
Structure of conventional example and its problems This kind of optical disk is promising as an information medium due to its extremely high information density, large S / N, and low noise, and it is commercialized as a digital audio disk or video disk. Recently, it has been researched and developed as a disc capable of recording, reproducing and erasing digital signals.

第1図に一般的なディジタルオーディオディスクである
コンパクトディスクの概要を示す。
FIG. 1 shows an outline of a compact disc which is a general digital audio disc.

これはPCM変換されたディジタル信号が樹脂基板にピ
ット列状に記録され、半導体レーザにより再生されるも
のである。第1図において、1はディスク全体、2は樹
脂基板、3は樹脂基板に設けられたディジタル信号、4
はその表面に形成された反射膜、5は反射膜上にコーテ
ィングされた保護膜、6はディスク読取面から照射され
る再生用の半導体レーザである。
In this method, a PCM-converted digital signal is recorded on a resin substrate in the form of pits and reproduced by a semiconductor laser. In FIG. 1, 1 is the whole disc, 2 is a resin substrate, 3 is a digital signal provided on the resin substrate, 4
Is a reflective film formed on the surface thereof, 5 is a protective film coated on the reflective film, and 6 is a semiconductor laser for reproduction irradiated from the disc reading surface.

樹脂基板2は、一般的に射出成形や射出・圧縮成形など
の成形法で量産される。光ディスク用原盤はディスク形
成の際に必要な成形金型に取付かるものである。
The resin substrate 2 is generally mass-produced by a molding method such as injection molding or injection / compression molding. The optical disc master is attached to a molding die required for forming the disc.

第2図に従来の光ディスク用原盤とその製造方法を示
す。第2図a〜fは各々の工程における断面図である。
FIG. 2 shows a conventional optical disk master and its manufacturing method. 2A to 2F are cross-sectional views in each step.

ガラス原盤7にフォトレジスト8が塗布され、レーザ露
光されたのち現像されディジタル信号9が記録される。
次に、Niなどの金属薄膜10が設けられ、Niメッキ
層11が設けられる。その後、ガラス原盤を除去すれば
光ディスク用原盤12が得られる。
Photoresist 8 is applied to glass master 7, laser-exposed and then developed to record digital signal 9.
Next, a metal thin film 10 of Ni or the like is provided, and a Ni plating layer 11 is provided. After that, the optical disk master 12 is obtained by removing the glass master.

この様にして得られた光ディスク用の原盤を成形金型に
取付け、ポリカーボネートなどの樹脂を射出成形し樹脂
基板を得る。この場合、一般的に原盤の面粗度は小さい
ため、原盤と樹脂との摩擦抵抗は大きくなり、原盤表面
での樹脂の流れが悪くなり、ディスク全体の複屈折率を
小さくすることが困難であり、樹脂の乱流による外観不
良など光学的な特性が悪くなるなどの問題点を有してい
た。
The master for optical disk thus obtained is attached to a molding die, and a resin such as polycarbonate is injection-molded to obtain a resin substrate. In this case, since the surface roughness of the master is generally low, the friction resistance between the master and the resin is large, the flow of the resin on the master surface is deteriorated, and it is difficult to reduce the birefringence of the entire disc. However, there is a problem that the optical characteristics are deteriorated such as a poor appearance due to the turbulent flow of the resin.

発明の目的 本発明はこれらの問題点を解消するものであり光学的特
性の優れた光ディスクを形成するための光ディスク用原
盤およびその製造方法を提供するものである。
SUMMARY OF THE INVENTION The present invention solves these problems and provides an optical disk master for forming an optical disk having excellent optical characteristics and a method for manufacturing the same.

発明の構成 本発明は、ガラス原盤にフォトレジストを塗布し、記録
現像したのち、物理的または化学的な処理を施こし、原
盤表面を10Å〜100Åの面粗度にした光ディスク用
原盤およびその製造方法である。
The present invention relates to an optical disk master having a surface roughness of 10Å to 100Å, which is obtained by applying a photoresist to a glass master, recording and developing it, and then physically or chemically treating the master to manufacture the same. Is the way.

実施例の説明 第3図に本発明の光ディスク用原盤およびその製造方法
の一実施例を示す。第3図a〜gは各々の工程における
断面図である。
Description of Embodiments FIG. 3 shows an embodiment of an optical disk master and a manufacturing method thereof according to the present invention. 3A to 3G are cross-sectional views in each step.

ガラス原盤7にフォトレジスト8が塗布され、レーザ露
光され、現像されて、ディジタル信号9が形成される。
その後、イオンボンバードにより第3図dに示されるよ
うにフォトレジストの表面を荒し、面粗度が10Å〜1
00Åとなる表面の粗いフォトレジスト膜13を形成す
る。次にNi などの金属薄膜14を設け、Ni メッキ層
15を設ける。その後ガラス原盤を除去すれば光ディス
ク用原盤16が得られる。この場合、フォトレジスト表
面状態がそのまま転写されるため、原盤表面の面粗度は
10Å〜100Åとなる。
The glass master 7 is coated with a photoresist 8, laser-exposed and developed to form a digital signal 9.
Then, the surface of the photoresist is roughened by ion bombardment as shown in FIG. 3d, and the surface roughness is 10Å-1.
A photoresist film 13 having a rough surface to be 00Å is formed. Next, a metal thin film 14 of Ni or the like is provided, and a Ni plating layer 15 is provided. Then, the glass master disk is removed to obtain the optical disk master disk 16. In this case, since the photoresist surface state is transferred as it is, the surface roughness of the master surface becomes 10Å to 100Å.

この様にして得られた光ディスク用原盤を成形金型に取
付け、ポリカーボネートなどの樹脂にて射出成形すれ
ば、原盤表面の面粗度は10Å〜100Åと大きいた
め、原盤表面と樹脂との摩擦抵抗が小さくなり、樹脂の
流動性が良くなり、複屈折率の良化が図れ、樹脂の乱流
による外観的な不良などが発生しにくくなる。
When the optical disk master thus obtained is mounted on a molding die and injection molded with a resin such as polycarbonate, the surface roughness of the master disk is as large as 10Å to 100Å, so the friction resistance between the master surface and the resin is large. Is smaller, the fluidity of the resin is improved, the birefringence is improved, and the appearance defects due to the turbulent flow of the resin are less likely to occur.

光ディスク原盤の表面粗度に関して実験したがこれはN
i など金属薄膜の粒径とも関連があるが、電子顕微鏡に
おける観察の結果、10Å〜100Åが最適であること
が判明した。
An experiment was conducted on the surface roughness of the optical disk master, but this is N
Although it is also related to the grain size of the metal thin film such as i, observation with an electron microscope revealed that 10Å to 100Å is optimal.

フォトレジスト表面を荒くする処理方法としては、オゾ
ン洗浄、スパッタリング、逆スパッタリングなどの物理
的またはエッチング、電解洗浄、逆電解メッキなどの化
学的方法も有効であった。
As a treatment method for roughening the photoresist surface, physical methods such as ozone cleaning, sputtering and reverse sputtering, or chemical methods such as etching, electrolytic cleaning and reverse electrolytic plating were effective.

発明の効果 以上のように本発明によれば、ガラス原盤にフォトレジ
ストを塗布し、記録,現像したのち、フォトレジスト表
面を荒くし、面粗度10Å〜100Åの光ディスク用原盤
を設ければ、原盤表面と溶融樹脂との摩擦抵抗が小さく
なり、樹脂の流動性が良くなり、複屈折率も小さく、樹
脂の乱流による外観不良なども発生しないなど光学的特
性の優れた光ディスクを信頼性よく大量に安価に提供で
きるなどの効果がある。
EFFECTS OF THE INVENTION As described above, according to the present invention, after applying a photoresist to a glass master, recording and developing the photoresist, roughening the photoresist surface and providing a master for optical disks having a surface roughness of 10Å to 100Å, Frictional resistance between the master surface and molten resin is small, the fluidity of the resin is good, the birefringence is small, and there is no appearance failure due to turbulent flow of the resin. There is an effect that a large amount can be provided at low cost.

【図面の簡単な説明】[Brief description of drawings]

第1図a,b,cは光ディスクの一種であるディジタル
オーディオディスクの平面図、断面図、および要部拡大
図、第2図a〜fは従来の光ディスク用原盤およびその
製造工程を示す断面図、第3図a〜gは本発明の一実施
例を示す製造工程の断面図である。 1……ディスク、2……樹脂基板、3……ディジタル信
号、4……反射膜、5……保護膜、6……半導体レー
ザ、7……ガラス原盤、8……フォトレジスト、9……
ディジタル信号、13……フォトレジスト、14……ニ
ッケル薄膜、15……ニッケルメッキ層、16……光デ
ィスク用原盤。
1a, 1b, 1c, and 1c are a plan view, a sectional view, and an enlarged view of a main part of a digital audio disc, which is a type of optical disc, and FIGS. 2a to 2f are sectional views showing a conventional optical disc master and its manufacturing process. 3A to 3G are sectional views of manufacturing steps showing one embodiment of the present invention. 1 ... Disk, 2 ... Resin substrate, 3 ... Digital signal, 4 ... Reflective film, 5 ... Protective film, 6 ... Semiconductor laser, 7 ... Glass master, 8 ... Photoresist, 9 ...
Digital signal, 13 ... Photoresist, 14 ... Nickel thin film, 15 ... Nickel plated layer, 16 ... Optical disc master.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】信号面の表面が10Å〜100Åの面粗度
を有することを特徴とする光ディスク用原盤。
1. An optical disk master, wherein the surface of the signal surface has a surface roughness of 10Å to 100Å.
【請求項2】ガラス原盤にフォトレジストを塗布し、記
録現像してディジタル信号を形成したのち、上記フォト
レジスト表面を物理的または化学的処理を施こし、表面
の面粗度を10Å〜100Åにしたのち、Ni メッキ処
理を施こしてなることを特徴とする光ディスク用原盤の
製造方法。
2. A glass master disk is coated with a photoresist, recorded and developed to form a digital signal, and then the photoresist surface is subjected to a physical or chemical treatment to obtain a surface roughness of 10 Å to 100 Å. After that, a method of manufacturing an optical disk master, characterized by being subjected to Ni plating treatment.
【請求項3】フォトレジスト表面を荒くする処理方法と
して、オゾン洗浄、イオンボンバード、スパッタリン
グ、逆スパッタリングなどの物理的処理方法あるいはエ
ッチング、電解洗浄、逆電解メッキなどの化学的方法を
用いることを特徴とする特許請求の範囲第2項記載の光
ディスク用原盤の製造方法。
3. As a treatment method for roughening the photoresist surface, a physical treatment method such as ozone cleaning, ion bombardment, sputtering, reverse sputtering or a chemical method such as etching, electrolytic cleaning, reverse electrolytic plating is used. The method of manufacturing an optical disk master according to claim 2.
JP59245051A 1984-11-20 1984-11-20 Optical disc master and method of manufacturing the same Expired - Lifetime JPH0630170B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59245051A JPH0630170B2 (en) 1984-11-20 1984-11-20 Optical disc master and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59245051A JPH0630170B2 (en) 1984-11-20 1984-11-20 Optical disc master and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JPS61123035A JPS61123035A (en) 1986-06-10
JPH0630170B2 true JPH0630170B2 (en) 1994-04-20

Family

ID=17127847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59245051A Expired - Lifetime JPH0630170B2 (en) 1984-11-20 1984-11-20 Optical disc master and method of manufacturing the same

Country Status (1)

Country Link
JP (1) JPH0630170B2 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5188201A (en) * 1975-01-31 1976-08-02
JPS5690439A (en) * 1979-12-20 1981-07-22 Sumitomo Chem Co Ltd Material for reproducing optical signal records
JPS60182031A (en) * 1984-02-29 1985-09-17 Daicel Chem Ind Ltd Information recording mother disk and its production
JPS61100425A (en) * 1984-10-23 1986-05-19 Sekisui Chem Co Ltd Mold for molding plastic
JPS61113142A (en) * 1984-11-07 1986-05-31 Hitachi Ltd Producing method of stamper for optical disk

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5188201A (en) * 1975-01-31 1976-08-02
JPS5690439A (en) * 1979-12-20 1981-07-22 Sumitomo Chem Co Ltd Material for reproducing optical signal records
JPS60182031A (en) * 1984-02-29 1985-09-17 Daicel Chem Ind Ltd Information recording mother disk and its production
JPS61100425A (en) * 1984-10-23 1986-05-19 Sekisui Chem Co Ltd Mold for molding plastic
JPS61113142A (en) * 1984-11-07 1986-05-31 Hitachi Ltd Producing method of stamper for optical disk

Also Published As

Publication number Publication date
JPS61123035A (en) 1986-06-10

Similar Documents

Publication Publication Date Title
US20050167867A1 (en) Method and apparatus for making a stamper for patterning CDs and DVDs
JPH0630170B2 (en) Optical disc master and method of manufacturing the same
JPS59177744A (en) Recording and reproducing disc carrier
JPH11515131A (en) Single-sided ultra-high density optical disk
JP3014065B2 (en) Optical discs, glass masters, glass stampers, glass substrates, and their manufacturing methods
JPH10106047A (en) Production of optical recording medium
JP3655928B2 (en) Optical disc substrate and optical disc and mold using the same
JPH09134547A (en) Optical recording medium and its manufacture
JPH08180457A (en) Optical disk and its manufacture
JPS60173737A (en) Manufacture of stamper for optical disk
JPS61160850A (en) Optical disk
JPH0648551B2 (en) Manufacturing method for optical disk master
JPS61153850A (en) Original disk for optical disk and its manufacture
JPS59215036A (en) Optical disk medium
JP2523947B2 (en) Optical disc stamper manufacturing method
JPH07272239A (en) Magnetic recording medium including reproduction-only region and its production
JPH0461417B2 (en)
KR100219690B1 (en) A stamper for a optical disk
JPS60151852A (en) Manufacture of digital signal recording and reproducing disk
JP2000348393A (en) Stamper for optical disk and its production
JPS5968848A (en) Optical disc medium
JPS60197959A (en) Manufacture of optical disk
JPH04146539A (en) Optical disk
JPH06267117A (en) Production of master disk for optical disk
JPH04307443A (en) Master disk for optical disk and production

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term