JPH06292841A - Liquid draining method of treating liquid and surface treating device - Google Patents

Liquid draining method of treating liquid and surface treating device

Info

Publication number
JPH06292841A
JPH06292841A JP5107486A JP10748693A JPH06292841A JP H06292841 A JPH06292841 A JP H06292841A JP 5107486 A JP5107486 A JP 5107486A JP 10748693 A JP10748693 A JP 10748693A JP H06292841 A JPH06292841 A JP H06292841A
Authority
JP
Japan
Prior art keywords
bucket
objects
treated
main shaft
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5107486A
Other languages
Japanese (ja)
Inventor
Mitsuo Wazawa
光男 和沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP5107486A priority Critical patent/JPH06292841A/en
Publication of JPH06292841A publication Critical patent/JPH06292841A/en
Pending legal-status Critical Current

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  • Centrifugal Separators (AREA)
  • Chemical Treatment Of Metals (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Abstract

PURPOSE:To completely remove a treating liquid even if objects to be treated have bent holes, etc., by rotating a bucket at a low speed around an inclined axis and repeating the rising and falling actions of the objects to be treated within this bucket. CONSTITUTION:After the bucket 36 is pulled upward out of the treating liquid 38, a motor 15 with a brake is driven to move a moving plate 5 and to incline a supporting frame 6 and a spindle 18. The objects to be treated in the bucket 36 rotate and move upward together with the bucket 36 when a driving motor 33 is rotated at a low speed in this state. The objects are then dropped by gravity. The postures of the objects to be treated are changed and the treating liquid 38 remaining in the bent holes is discharged when such actions are repeated. The bucket 36 is thereafter returned in a vertical direction and is rotated at a high speed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、表面処理や表面洗浄
の過程で被処理物の表面に付着した処理液を分離除去す
る、いわゆる液切り方法及びその実施に好適な表面処理
装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a so-called liquid draining method for separating and removing a treatment liquid adhering to the surface of an object to be treated in the course of surface treatment and surface cleaning, and a surface treatment apparatus suitable for carrying out the method. is there.

【0002】[0002]

【従来の技術】従来から行われている液切り方法は、鉛
直方向に装架したバケットに多数の被処理物を収容し、
処理終了後バケットを鉛直軸回りに高速回転して被処理
物の表面に付着した処理液を遠心力で振り切るものであ
った。
2. Description of the Related Art A conventional draining method is to store a large number of objects to be processed in a bucket mounted vertically.
After completion of the treatment, the bucket was rotated at a high speed around the vertical axis to shake off the treatment liquid adhering to the surface of the object to be treated by centrifugal force.

【0003】このような方法の実施に使用されている表
面処理装置は、主軸が鉛直軸回りに回動可能に支持され
ており、この主軸の下端に被処理物を収容するバケット
を装架すると共に主軸を一方向回転ないし往復回動する
回転駆動源を設けたものである。
In a surface treatment apparatus used for carrying out such a method, a main shaft is supported rotatably around a vertical axis, and a bucket for accommodating an object to be processed is mounted on a lower end of the main shaft. At the same time, a rotary drive source for rotating the main shaft in one direction or reciprocally is provided.

【0004】[0004]

【発明が解決しようとする課題】しかし上記液切り方法
では、図7に示すように、被処理物61が横穴62とそ
の先端に連通した縦孔63からなる曲がり孔64を有す
る形状のものであるとき、処理終了後バケットを引き上
げたときに、被処理物の縦孔63が下方に向いて横穴6
2が内側を向いた状態となると、バケットを鉛直軸回り
に高速回転したとしても、縦孔の底部に溜まった処理液
を除去することができないという問題がある。
However, in the above liquid draining method, as shown in FIG. 7, the object 61 to be processed has a shape having a lateral hole 62 and a curved hole 64 consisting of a vertical hole 63 communicating with the tip thereof. At some point, when the bucket is pulled up after the processing is completed, the vertical hole 63 of the object to be processed faces downward and the horizontal hole 6
When 2 is oriented inward, there is a problem that the processing liquid accumulated at the bottom of the vertical hole cannot be removed even if the bucket is rotated at high speed around the vertical axis.

【0005】本発明は、被処理物が曲がり孔のような処
理液を残留しやすい形状であっても、処理液を完全に除
去することができる液切り方法及びその実施に好適な表
面洗浄装置を提供することを目的としている。
The present invention is directed to a liquid draining method capable of completely removing a treatment liquid even if an object to be treated has a shape such as a curved hole where the treatment liquid is likely to remain, and a surface cleaning apparatus suitable for carrying out the method. Is intended to provide.

【0006】[0006]

【課題を解決するための手段】本発明の液切り方法は、
多数の被処理物61を収容したバケット36を鉛直方向
に装架して、上記被処理物61と処理液38とを接触さ
せて被処理物61の表面処理ないし表面洗浄を行う表面
処理において、バケット36を処理液から引き上げたあ
と傾斜させて傾斜軸まわりに低速回転し、次にバケット
36を鉛直方向に戻して高速回転させることを特徴とす
るものである。
The liquid draining method of the present invention comprises:
In the surface treatment in which the bucket 36 accommodating a large number of the objects to be treated 61 is vertically mounted and the object to be treated 61 and the treatment liquid 38 are brought into contact with each other to perform surface treatment or surface cleaning of the object to be treated 61, It is characterized in that the bucket 36 is pulled up from the treatment liquid, then tilted and rotated at a low speed around the tilt axis, and then the bucket 36 is returned to the vertical direction and rotated at a high speed.

【0007】本発明の表面処理装置は、鉛直軸まわりに
回動可能に支持された主軸18とこの主軸を一方向回転
ないし往復回動する回転駆動源33とを備え、上記主軸
18の下端に装架されたバケット36に収容された多数
の被処理物61の表面処理ないし表面洗浄を一括して行
う表面処理装置において、上記主軸18および回転駆動
源33が傾動可能な支枠6に装着されており、回転駆動
源33はバケット36を低速で回転させる低速回転モー
ドを備え、処理終了後支枠6を一旦傾斜させて主軸18
を低速回転させた後、主軸18を高速回転させて液切り
を行うことを特徴とするものである。
The surface treatment apparatus of the present invention comprises a main shaft 18 rotatably supported around a vertical shaft and a rotary drive source 33 for rotating the main shaft in one direction or reciprocatingly, and at the lower end of the main shaft 18. In a surface treatment apparatus for collectively performing surface treatment or surface cleaning of a large number of objects to be treated 61 accommodated in a mounted bucket 36, the main shaft 18 and the rotary drive source 33 are mounted on a tiltable support frame 6. The rotary drive source 33 has a low-speed rotation mode in which the bucket 36 is rotated at a low speed.
Is rotated at a low speed, and then the main shaft 18 is rotated at a high speed to drain the liquid.

【0008】[0008]

【作用】本発明方法は、処理液38から引き上げたバケ
ット36を傾斜させ、バケット36を傾斜軸回りに低速
回転させるものであるから、被処理物61がバケット内
で上方に移動したあと落下するという動作を繰り返し、
被処理物61の姿勢が変化して曲がり孔64(図7参
照)等に残留した処理液が排出される。このような操作
を一定時間行ったあと、バケット36を鉛直方向に戻し
て主軸18を高速回転して表面に付着した処理液を遠心
力で振り切るので、被処理物61に付着した余分な処理
液を完全に除去することができる。
In the method of the present invention, the bucket 36 pulled up from the processing liquid 38 is tilted and the bucket 36 is rotated at a low speed around the tilt axis. Therefore, the object 61 to be processed moves upward in the bucket and then falls. Repeatedly,
The posture of the object 61 to be processed changes, and the processing liquid remaining in the curved holes 64 (see FIG. 7) and the like is discharged. After performing such an operation for a certain period of time, the bucket 36 is returned to the vertical direction and the main shaft 18 is rotated at a high speed to shake off the processing liquid adhering to the surface by centrifugal force. Can be completely removed.

【0009】本発明の装置は、主軸を支持している支枠
6を傾動させて主軸下端に装架したバケット36を傾動
軸回りに低速で回転するものであるから、軸振れを起こ
すことがなくバケット36に収容された多数の被処理物
61の姿勢を確実に変化させることができる。
Since the apparatus of the present invention tilts the support frame 6 supporting the main shaft to rotate the bucket 36 mounted on the lower end of the main shaft at a low speed around the tilting shaft, shaft runout can occur. Instead, it is possible to reliably change the postures of the many objects to be processed 61 accommodated in the bucket 36.

【0010】[0010]

【実施例】図2ないし図5は本発明の表面処理装置の一
実施例を示すものである。図2において、図示しないレ
ールに沿って水平移動する台車から垂下されたキャリア
1に昇降台車2が昇降自在に設けられている。昇降台車
2の前面には支持ブラケット3が設けられており、その
下部前面に扇形のレール部材4が固着されている。レー
ル部材の前面にはレール部材に沿って移動する正面へ字
形の移動板5が設けられており、その前面左側に矩形の
支枠6が固設されている。移動板の背面(レール部材側
の面)には、図4に示すように水平軸回りに回動する4
個の上下のローラ7、8と、垂直軸回りに回動する8個
の前後のローラ9、10とがそれぞれ離隔した位置に設
けられている。上方ローラ7はレール部材の外径側レー
ル11に、下方ローラ8はレール部材の内径側レール1
2にそれぞれ当接し、前側ローラ9はレール部材4の前
面の上下部に当接し、後側ローラ10はレール部材後面
の上下部にそれぞれ当接している。
2 to 5 show an embodiment of the surface treatment apparatus of the present invention. In FIG. 2, an elevating carriage 2 is provided to be vertically movable on a carrier 1 hung from a carriage that horizontally moves along a rail (not shown). A support bracket 3 is provided on the front surface of the lift truck 2, and a fan-shaped rail member 4 is fixed to the lower front surface of the support bracket 3. On the front surface of the rail member is provided a front-shaped moving plate 5 that moves along the rail member, and a rectangular support frame 6 is fixedly provided on the left side of the front surface. On the back surface (surface on the rail member side) of the moving plate, as shown in FIG.
The upper and lower rollers 7 and 8 and the eight front and rear rollers 9 and 10 which rotate around a vertical axis are provided at positions separated from each other. The upper roller 7 is on the outer diameter side rail 11 of the rail member, and the lower roller 8 is on the inner diameter side rail 1 of the rail member.
2, the front roller 9 contacts the upper and lower parts of the front surface of the rail member 4, and the rear roller 10 contacts the upper and lower parts of the rear surface of the rail member 4, respectively.

【0011】図5に示すように、移動板5の前面には、
ブレーキ付きモータ15が設けられており、その出力軸
は移動板5を貫通してレール部材4の前面中央に配設さ
れた円弧形のラック16の上方まで延びており、その先
端にラック16に噛合するピニオン17が固着されてい
る。支枠6の中心には、鉛直方向に延びる主軸18が軸
受19、19で回転自在に支持されており、その上端に
は従動プーリ20が固着され、下端には把持爪21を軸
支する水平アーム22が固着されている。主軸18の軸
心に設けられた貫通孔23には、操作ロッド24が摺動
自在に設けられており、その上端には、回転継手25が
設けられ、下端には把持爪21を操作するリンク26に
連結された連結具27が固着されている。
As shown in FIG. 5, on the front surface of the moving plate 5,
A motor 15 with a brake is provided, the output shaft of which extends through the moving plate 5 to a position above an arc-shaped rack 16 arranged in the center of the front surface of the rail member 4, and the rack 16 is provided at the tip thereof. The pinion 17 that meshes with is fixed. In the center of the support frame 6, a vertically extending main shaft 18 is rotatably supported by bearings 19 and 19, a driven pulley 20 is fixed to the upper end thereof, and a lower end of the main shaft 18 horizontally supports a grip claw 21. The arm 22 is fixed. An operating rod 24 is slidably provided in a through hole 23 provided in the shaft center of the main shaft 18, a rotary joint 25 is provided at an upper end thereof, and a link for operating the grip claw 21 is provided at a lower end thereof. A connector 27 connected to 26 is fixed.

【0012】図3に示すように、支枠6の上面に固設さ
れた補助枠30には、チャックシリンダ31がそのロッ
ド32を下方に向けて装着されており、ロッド32の先
端が回転継手25を介して操作ロッド24に連結されて
いる。このロッド24を進退させることにより把持爪2
1を開閉することができる。支枠6の右側面には、正逆
転可能な駆動モータ33が設けられており、その出力軸
に固着された駆動プーリ34と主軸18の従動プーリ2
0とにベルト35が巻回されている。駆動モータ33
は、主軸18を低速で回転させる低速回転モードを備え
ている。チャックシリンダのロッドを進出させてリンク
26を揺動させ、把持爪21を外方に開くことにより、
主軸18の下端にバケット36が装架される。37はバ
ケット36の直下に配置された処理槽であり、この中に
処理液38が収容されている。
As shown in FIG. 3, a chuck cylinder 31 is mounted on an auxiliary frame 30 fixed to the upper surface of the support frame 6 with its rod 32 facing downward, and the tip of the rod 32 is a rotary joint. It is connected to the operating rod 24 via 25. By moving the rod 24 back and forth, the gripping claw 2
1 can be opened and closed. A drive motor 33 capable of rotating in the forward and reverse directions is provided on the right side surface of the support frame 6. The drive pulley 34 fixed to the output shaft of the drive motor 33 and the driven pulley 2 of the main shaft 18 are provided.
The belt 35 is wound around 0. Drive motor 33
Has a low speed rotation mode for rotating the main shaft 18 at a low speed. By advancing the rod of the chuck cylinder, swinging the link 26, and opening the grip claw 21 outward,
A bucket 36 is mounted on the lower end of the main shaft 18. Reference numeral 37 denotes a processing tank arranged immediately below the bucket 36, and a processing liquid 38 is stored in this processing tank.

【0013】次に図1に基づき本発明の液切り方法を説
明する。鉛直方向に向いたバケット36に図7に示す被
処理物41を多数入れ、昇降台車2を下降させて処理槽
37内の処理液38に浸漬する。駆動モータ33を起動
させてバケット36を一方向回転又は往復回動して表面
処理を行う。次にバケット36を処理液38から引き上
げブレーキ付きモータ15を駆動して、移動板5を図2
上の想像線の位置まで移動させてモータを停止する。こ
れにより支枠6及び主軸18が傾斜するので、バケット
が傾斜軸回りに回動可能となる。
Next, the liquid draining method of the present invention will be described with reference to FIG. A large number of objects to be treated 41 shown in FIG. 7 are put in a bucket 36 that is oriented in the vertical direction, and the lift truck 2 is lowered and immersed in the treatment liquid 38 in the treatment tank 37. The surface treatment is performed by activating the drive motor 33 and rotating the bucket 36 in one direction or reciprocally. Next, the bucket 36 is pulled up from the processing liquid 38 and the motor 15 with a brake is driven to move the moving plate 5 to the position shown in FIG.
Move to the position indicated by the imaginary line above and stop the motor. As a result, the support frame 6 and the main shaft 18 are tilted, so that the bucket can be rotated around the tilt axis.

【0014】この状態で駆動モータ33を低速で回転す
ると、バケット内の被処理物61は、バケットとともに
回転して上方に移動し、重力により落下する。このよう
な動作が繰り返されることにより、被処理物61の姿勢
が変化して曲がり孔62に残留している処理液が排出さ
れる。一定時間経過後、ブレーキ付きモータ15を逆転
させ移動板5を図2の右方向に移動してモータを停止す
る。鉛直方向に向いた主軸18を駆動モータ33で高速
回転して遠心力により被処理物の表面に付着している余
分な処理液を振り切る。
When the drive motor 33 is rotated at a low speed in this state, the object 61 in the bucket rotates with the bucket and moves upward, and falls due to gravity. By repeating such an operation, the posture of the object to be processed 61 is changed and the processing liquid remaining in the bending hole 62 is discharged. After a lapse of a certain time, the motor with brake 15 is reversely rotated to move the moving plate 5 to the right in FIG. 2 and stop the motor. The main shaft 18 oriented in the vertical direction is rotated at a high speed by the drive motor 33 to shake off the excess processing liquid adhering to the surface of the object to be processed by centrifugal force.

【0015】図6は本発明の表面処理装置の他の実施例
である。本実施例の装置は、主軸をスライドベアリング
42で上下動かつ回転自在に支持するとともに、主軸1
8の中央に溝付き円板43を固着し、この円板の溝44
にローラ45を嵌装したものであり、ローラ45は、支
枠6にベアリング46で回転自在に軸支された水平軸4
7の左側端面の偏心位置に植立されたピン48に装着さ
れている。水平軸47はその右側端面の中心線上にプー
リ49が固着されており、このプーリ49と支枠の下方
に配置された揺動モータ50の出力軸に設けたプーリ5
1とにベルト52が巻回されている。
FIG. 6 shows another embodiment of the surface treatment apparatus of the present invention. In the device of this embodiment, the main shaft is supported by a slide bearing 42 so as to be vertically movable and rotatable, and the main shaft 1
A grooved disc 43 is fixed to the center of the disc 8 and a groove 44
A roller 45 is fitted to the horizontal shaft 4 which is rotatably supported by a bearing 46 on a support frame 6.
7 is attached to a pin 48 that is erected at an eccentric position on the left end face of the device 7. A pulley 49 is fixed on the center line of the right end surface of the horizontal shaft 47, and the pulley 5 provided on the output shaft of the swing motor 50 arranged below the pulley 49 and the supporting frame.
A belt 52 is wound around the belt 1.

【0016】主軸18の上部外周には、スプライン53
が設けられており、このスプラインに支枠6にベアリン
グ54で回転自在に支持された従動プーリ20のスプラ
イン溝55が嵌合している。チャックシリンダ31を支
持する補助枠30は主軸18の上端面に固着されてお
り、チャックシリンダ31のロッド32の先端と操作ロ
ッド24の上端とが連結されている。本実施例の装置で
は、表面洗浄ないし表面処理の作業時や傾斜軸回りの低
速回転時にバケットを軸方向に揺動させることができ、
より効率的な処理及び残留処理液の排出を行うことがで
きる。
A spline 53 is provided on the outer periphery of the upper portion of the main shaft 18.
Is provided, and the spline groove 55 of the driven pulley 20 rotatably supported by the bearing 54 on the support frame 6 is fitted to the spline. The auxiliary frame 30 that supports the chuck cylinder 31 is fixed to the upper end surface of the main shaft 18, and the tip of the rod 32 of the chuck cylinder 31 and the upper end of the operation rod 24 are connected. In the apparatus of the present embodiment, the bucket can be swung in the axial direction during surface cleaning or surface treatment work or during low speed rotation around the tilt axis,
More efficient processing and discharge of residual processing liquid can be performed.

【0017】[0017]

【発明の効果】以上のように本発明の方法は、傾斜軸回
りにバケットを低速回動して、被処理物をバケット内で
上昇落下動作を繰り返させるものであるから、被処理物
の姿勢がいろんな方向に変化し、曲がり孔のように処理
液が残留し易い形状の被処理物であっても、処理液を完
全に除去することができる。また、本発明の表面処理装
置は、バケットが装架された主軸を傾動可能な支枠で支
持したので、バケットを傾動軸回りに回転させることが
できる。また、バケットの回転駆動源が低速回転モード
を備えているので、傾斜軸回りのバケットの低速回転に
より曲がり孔などに溜まった処理液を円滑に排出でき
る。
As described above, according to the method of the present invention, the bucket is rotated at a low speed around the tilt axis so that the object to be processed is repeatedly moved up and down in the bucket. The treatment liquid can be completely removed even in the case of an object having a shape in which the treatment liquid changes in various directions and in which the treatment liquid tends to remain, such as a curved hole. Further, in the surface treatment apparatus of the present invention, since the main shaft on which the bucket is mounted is supported by the tiltable support frame, the bucket can be rotated about the tilt axis. Further, since the rotation driving source of the bucket has the low speed rotation mode, the processing liquid accumulated in the bending hole or the like can be smoothly discharged by the low speed rotation of the bucket around the tilt axis.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の液切り操作を示すフローチャートFIG. 1 is a flowchart showing a liquid draining operation of the present invention.

【図2】本発明の表面処理装置の断面側面図FIG. 2 is a sectional side view of the surface treatment apparatus of the present invention.

【図3】本発明の表面処理装置の正面図FIG. 3 is a front view of the surface treatment apparatus of the present invention.

【図4】図2のA部断面図FIG. 4 is a sectional view of part A in FIG.

【図5】傾動機構の拡大断面図FIG. 5 is an enlarged sectional view of a tilting mechanism.

【図6】本発明の表面処理装置の他の実施例を示す断面
側面図
FIG. 6 is a sectional side view showing another embodiment of the surface treatment apparatus of the present invention.

【図7】被処理物の断面図FIG. 7 is a cross-sectional view of an object to be processed

【符号の説明】[Explanation of symbols]

6 支枠 18 主軸 33 回動モータ 36 バケット 38 処理液 61 被処理物 6 Support frame 18 Spindle 33 Rotation motor 36 Bucket 38 Treatment liquid 61 Workpiece

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 多数の被処理物(61)を収容したバケット
(36)を鉛直方向に装架して、上記被処理物(61)と処理液
(38)とを接触させて被処理物(61)の表面処理ないし表面
洗浄を行う表面処理において、バケット(36)を処理液か
ら引き上げたあと傾斜させて傾斜軸まわりに低速回転
し、次にバケット(36)を鉛直方向に戻して高速回転させ
ることを特徴とする、処理液の液切り方法。
1. A bucket containing a large number of objects to be processed (61)
(36) is mounted vertically, and the object to be treated (61) and the treatment liquid are
In the surface treatment of contacting with (38) and the surface treatment or surface cleaning of the object to be treated (61), the bucket (36) is lifted from the treatment liquid and then tilted and rotated at a low speed around the tilt axis, then A method of draining a processing liquid, which comprises returning the bucket (36) to a vertical direction and rotating at high speed.
【請求項2】 鉛直軸まわりに回動可能に支持された主
軸(18)とこの主軸を一方向回転ないし往復回動する回転
駆動源(33)とを備え、上記主軸(18)の下端に装架された
バケット(36)に収容された多数の被処理物(61)の表面処
理ないし表面洗浄を一括して行う表面処理装置におい
て、上記主軸(18)および回転駆動源(33)が傾動可能な支
枠(6) に装着されており、回転駆動源(33)はバケット(3
6)を低速で回転させる低速回転モードを備え、処理終了
後支枠(6) を一旦傾斜させて主軸(18)を低速回転させた
後、主軸(18)を高速回転させて液切りを行うことを特徴
とする、表面処理装置。
2. A main shaft (18) rotatably supported around a vertical shaft, and a rotary drive source (33) for rotating the main shaft in one direction or reciprocatingly, the lower end of the main shaft (18). In a surface treatment apparatus for collectively performing surface treatment or surface cleaning of a large number of objects (61) housed in a mounted bucket (36), the spindle (18) and the rotation drive source (33) tilt. It is mounted on a possible support frame (6) and the rotary drive source (33) is
It is equipped with a low-speed rotation mode that rotates 6) at a low speed.After completion of processing, the support frame (6) is once tilted to rotate the spindle (18) at a low speed, and then the spindle (18) is rotated at a high speed to perform draining. A surface treatment device characterized by the above.
JP5107486A 1993-04-08 1993-04-08 Liquid draining method of treating liquid and surface treating device Pending JPH06292841A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5107486A JPH06292841A (en) 1993-04-08 1993-04-08 Liquid draining method of treating liquid and surface treating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5107486A JPH06292841A (en) 1993-04-08 1993-04-08 Liquid draining method of treating liquid and surface treating device

Publications (1)

Publication Number Publication Date
JPH06292841A true JPH06292841A (en) 1994-10-21

Family

ID=14460441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5107486A Pending JPH06292841A (en) 1993-04-08 1993-04-08 Liquid draining method of treating liquid and surface treating device

Country Status (1)

Country Link
JP (1) JPH06292841A (en)

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