JPH06291475A - Manufacture of chassis for precision apparatus - Google Patents

Manufacture of chassis for precision apparatus

Info

Publication number
JPH06291475A
JPH06291475A JP7804193A JP7804193A JPH06291475A JP H06291475 A JPH06291475 A JP H06291475A JP 7804193 A JP7804193 A JP 7804193A JP 7804193 A JP7804193 A JP 7804193A JP H06291475 A JPH06291475 A JP H06291475A
Authority
JP
Japan
Prior art keywords
mounting seat
chassis
height
sheet metal
plastic working
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7804193A
Other languages
Japanese (ja)
Other versions
JP3273655B2 (en
Inventor
Kohei Muramoto
弘平 村元
Shoji Wada
庄次 和田
Yukihiro Yamashita
幸博 山下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP07804193A priority Critical patent/JP3273655B2/en
Publication of JPH06291475A publication Critical patent/JPH06291475A/en
Application granted granted Critical
Publication of JP3273655B2 publication Critical patent/JP3273655B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Shaping Metal By Deep-Drawing, Or The Like (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)

Abstract

PURPOSE:To manufacture a chassis at low cost in such a way that its accuracy, its rigidity and its strength can be ensured. CONSTITUTION:A mounting seat 11 which protrudes from one face side is formed in a chassis 1 which has been formed of a sheet metal, and the surface height of the mounting seat 11 is reduced to a prescribed height from a reference face by a high-spin plastic working operation in which a punch 5 performing a conical vibration motion is pressed to the surface of the mounting seat 11.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はヴィデオテープレコーダ
ー(以下VTRと称す)やフロッピーディスクドライブ
のような磁気記録再生装置、光ディスクレコーダーのよ
うな光学機器等の各種精密機器用シャシーの製造方法に
関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a chassis for various precision equipment such as a magnetic recording / reproducing apparatus such as a video tape recorder (hereinafter referred to as VTR) and a floppy disk drive, and optical equipment such as an optical disk recorder. Is.

【0002】[0002]

【従来の技術】VTR等の精密機器用のシャシーは、そ
のシリンダーヘッドのような重要部品の取付部に高い精
度と剛性及び強度が要求される。上記シリンダーヘッド
が取り付けられる部分について言えば、たとえば傾き角
度12.8°に形成されるとともに、その高さ精度は±
2/100が要求されており、また剛性及び強度にしても、
回転駆動されるシリンダーヘッドを支えることになるた
めに、他の部品の取付部に比してより高いものが求めら
れる。
2. Description of the Related Art A chassis for a precision instrument such as a VTR is required to have high precision, rigidity and strength at a mounting portion of an important part such as a cylinder head. As for the portion to which the cylinder head is attached, for example, the inclination angle is 12.8 ° and the height accuracy is ±
2/100 is required, and in terms of rigidity and strength,
In order to support the rotationally driven cylinder head, it is required to be higher than the mounting portion of other components.

【0003】ここにおいて、一般的用途のシャシーとし
ては製造コストが低い板金製のものが多用されている。
しかし、このような板金製のシャシーを上記用途に用い
るには、精度はもちろん、剛性及び強度の点でも問題が
ある。すなわち、板金プレスや絞り成形等によって形成
する板金製シャシーでは、素材の板厚ばらつきや、加工
時のスプリングバック、金型へのセッティング具合、素
材硬さのばらつき等により、寸法精度は±15/100〜30/1
00mmを確保するのが精々であり、これを補うために、重
要部品の取付部に切削加工や研磨加工を行うことで必要
とする精度を得ようとしても、板金製の場合、切削箇所
に切削代を肉付けすることができないために、素材の厚
みが1.6mm〜2.0mmであれば、切削仕上げを施す
と、この厚みが必要とする剛性及び強度を確保すること
ができない値まで大きく減ってしまうことが多々生じて
しまうものであり、これが理由で実用化されていない。
Here, as a chassis for general use, a chassis made of sheet metal having a low manufacturing cost is often used.
However, when using such a sheet metal chassis for the above-mentioned purpose, there are problems in terms of rigidity, strength as well as accuracy. That is, in a sheet metal chassis formed by sheet metal pressing, drawing, etc., the dimensional accuracy is ± 15 / due to variations in material thickness, springback during processing, setting in the mold, variation in material hardness, etc. 100-30 / 1
In order to compensate for this, it is necessary to secure the 00 mm, and even if trying to obtain the required accuracy by cutting or polishing the attachment part of the important part, if it is made of sheet metal, cut at the cutting location. Since the thickness cannot be increased, if the thickness of the material is 1.6 mm to 2.0 mm, cutting finish will reduce the thickness and rigidity to the required value. However, it is not practically used because of this.

【0004】このために、上記用途のシャシーには、従
来からダイキャスト製品が使用されていた。この場合、
各部の肉厚を求められる剛性や強度に応じたものとする
ことができる上に、精密切削加工を施すことで、必要と
する精度を確保することができる。
For this reason, die-cast products have been conventionally used for the chassis for the above applications. in this case,
The thickness of each part can be made to correspond to the required rigidity and strength, and the precision required can be ensured by performing precision cutting.

【0005】[0005]

【発明が解決しようとする課題】しかし、ダイキャスト
製品である上に切削加工が必要ということは、その製造
コストがきわめて大なものであり、また切削加工では切
削工具の摩耗による寸法狂いが生じるために、精度安定
が困難であって管理が難しく、さらには切り屑の清掃処
理も必要である。
However, since the die-cast product requires a cutting process, the manufacturing cost thereof is extremely high, and the cutting process causes dimensional deviation due to wear of the cutting tool. Therefore, it is difficult to stabilize accuracy and control, and it is necessary to clean chips.

【0006】シャシーの大半を板金製とし、重要部品の
取付部付近のみはダイキャスト製としたものも提供され
てはいるが、精度の点で切削加工が必要なダイキャスト
製品を用いることには変わりはなく、製造コストを十分
下げることができるには至っていない。本発明はこのよ
うな点に鑑み為されたものであり、その目的とするとこ
ろは精度や剛性及び強度をいずれも確保することができ
る上に安価にシャシーを製造することができる精密機器
用シャシーの製造方法を提供するにある。
Although most of the chassis are made of sheet metal and die-cast only in the vicinity of the mounting parts of important parts are provided, it is not possible to use die-cast products which require cutting in terms of accuracy. There is no change, and the manufacturing cost has not been sufficiently reduced. The present invention has been made in view of the above points, and an object of the present invention is to provide a chassis for precision equipment, which can secure precision, rigidity, and strength, and can inexpensively manufacture the chassis. In order to provide the manufacturing method of.

【0007】[0007]

【課題を解決するための手段】しかして本発明は、板金
にて形成したシャシーに一面側に突出する取付座を設
け、この取付座の表面に円錐振れ運動を行うパンチを押
し付けるハイスピン塑性加工にて取付座の表面高さを基
準面からの所定高さまで減じることに主たる特徴を有し
ている。
SUMMARY OF THE INVENTION The present invention, however, provides high-spin plastic working in which a chassis formed of sheet metal is provided with a mounting seat projecting to one side, and a punch performing a conical wobbling motion is pressed against the surface of the mounting seat. The main feature is to reduce the surface height of the mounting seat to a predetermined height from the reference surface.

【0008】[0008]

【作用】本発明によれば、板金加工による精度不足は、
精度のあるハイスピン塑性加工によって補正して求めら
れる精度まで高めることができるものであり、しかもハ
イスピン塑性加工では切削や研磨加工とは異なって素材
厚みを減らすことがないために、剛性及び強度が低下す
ることがないものである。
According to the present invention, the lack of accuracy due to sheet metal working is
High-spin plastic processing can correct to the required accuracy, and high-spin plastic processing, unlike cutting and polishing, does not reduce the material thickness, resulting in reduced rigidity and strength. There is nothing to do.

【0009】そしてハイスピン塑性加工を行うにあた
り、シャシーにおける取付座付近の裏面を、シャシー全
体を受ける下型に対して上下動自在であり且つ上記裏面
に接触状態で固定される受け台で受けた状態で、取付座
表面に円錐振れ運動を行うパンチを押し付ければ、シャ
シーにおける取付座付近の裏面が基準面と一致していな
いものにおいても、上記作用を得ることができる。
When performing high-spin plastic working, the back surface of the chassis near the mounting seat is received by a pedestal that is vertically movable with respect to a lower die that receives the entire chassis and is fixed in contact with the back surface. By pressing a punch that performs a conical wobbling motion on the surface of the mounting seat, the above-described action can be obtained even if the rear surface of the chassis near the mounting seat does not match the reference surface.

【0010】なお、ここで言うハイスピン塑性加工は、
かしめ加工に用いる技術として知られており、通常は、
図5に示すように、丸軸かしめパンチ5を回転駆動され
る主軸の下端に傾きを持たせた状態で保持して、主軸を
回転させることでパンチ5に味噌摺り状の円錐振れ運動
を行わせつつ油圧等で押し下げることにより、軸7や鋲
の先端を塑性変形させて鋲頭部71を形成するのである
が、本発明者らは、このハイスピン塑性加工による加工
部は、その加工高さに関する精度が高く、加工部以外の
部分に歪みや変形を与えてしまうことが少ない上に、加
工硬化による剛性及び強度向上が期待できることに着目
し、従来、かしめ加工にのみ用いられていたこの加工技
術をシャシーにおける重要部品の取付部の精度向上のた
めの仕上げ加工に利用したものである。
The high-spin plastic working referred to here is
It is known as a technique used for caulking, and usually
As shown in FIG. 5, the round shaft caulking punch 5 is held in a state where the lower end of the rotationally driven main spindle is tilted, and the main spindle is rotated to cause the punch 5 to perform a miso-like conical wobbling motion. Although the shaft 7 and the tip of the tack are plastically deformed to form the tack head 71 by pushing down with hydraulic pressure and the like, the inventors of the present invention have found that the working portion by the high spin plastic working is the working height. It has been used only for caulking in the past, focusing on the fact that it is highly accurate in that it does not cause distortion or deformation to parts other than the processed part and that rigidity and strength can be improved by work hardening. The technology was used for finishing to improve the accuracy of the mounting parts of important parts in the chassis.

【0011】[0011]

【実施例】以下本発明を図示の実施例に基づいて詳述す
ると、図2に示すシャシー1は、VTR用のもので、打
ち抜き加工による板金製であり、その一部には絞り加工
によって環状の周壁12を備えているとともに所定の角
度に傾斜する傾斜面部10が形成されている。そしてこ
の傾斜面部10の上面外周部には、ほぼ等間隔で複数の
取付座11が設けられている。なお、傾斜面部10を絞
り加工で形成して環状の周壁12を形成しているのは、
傾斜面部10の剛性及び強度を確保するためである。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to the illustrated embodiments. The chassis 1 shown in FIG. 2 is for VTR and is made of punched sheet metal. The peripheral surface 12 is provided and the inclined surface portion 10 that is inclined at a predetermined angle is formed. A plurality of mounting seats 11 are provided on the outer peripheral portion of the upper surface of the inclined surface portion 10 at substantially equal intervals. The inclined surface portion 10 is formed by drawing to form the annular peripheral wall 12,
This is to ensure the rigidity and strength of the inclined surface portion 10.

【0012】そしてシリンダーヘッド2は、傾斜面部1
0上に配されて、取付座11の下方から取付座11に設
けた小孔を通じてシリンダーヘッド2に螺合するビスに
よって、取付座11の上面に接した状態で固定されるわ
けであるが、前述のように、板金製であるシャシー1
は、取付座11の上面の高さ精度が十分ではなく、その
ままシリンダーヘッド2を取り付けたのでは、シリンダ
ーヘッド2に必要とする精度を与えることができない。
The cylinder head 2 has an inclined surface portion 1.
It is fixed on the upper surface of the mounting seat 11 in a state of being in contact with the upper surface of the mounting seat 11 by a screw which is arranged on the mounting seat 11 from below the mounting seat 11 and is screwed into the cylinder head 2 through a small hole provided in the mounting seat 11. As mentioned above, the chassis 1 is made of sheet metal.
, The height accuracy of the upper surface of the mounting seat 11 is not sufficient, and if the cylinder head 2 is mounted as it is, the required accuracy cannot be given to the cylinder head 2.

【0013】このために、ここでは図1に示すように、
取付座11を傾斜面部10からやや上方に突出したもの
として形成するとともに、基準面Lから取付座11の上
面までの高さHを、正規寸法Hsより高めにしておき、
次いで取付座11の上面に味噌摺り状の円錐振れ運動を
行うパンチ5を押し付けるハイスピン塑性加工によっ
て、取付座11の上面を押さえ付けて塑性変形させるこ
とで、取付座11の上面を正規寸法高さHsに矯正して
いる。すなわち、シャシー1の素材の板厚ばらつき(通
常5/100mmぐらい)を含む板金加工で取付座11を形成
する際の取付座11の高さ精度が±20/100mmであるとす
れば、取付座11の上面の基準面Lからの設計高さを正
規寸法Hsより+20/100mm高いものとして、誤差が0〜
+40/100mmの範囲内に入るようにしておき、その後、ハ
イスピン塑性加工によって、取付座11上面を正規寸法
の高さHsのところまで低くするのである。
For this reason, here, as shown in FIG.
The mounting seat 11 is formed to project slightly upward from the inclined surface portion 10, and the height H from the reference plane L to the upper surface of the mounting seat 11 is set higher than the regular dimension Hs.
Next, the upper surface of the mounting seat 11 is pressed and plastically deformed by high-spin plastic working in which the punch 5 that performs the conical wobble motion of the miso sill is pressed against the upper surface of the mounting seat 11, thereby causing the upper surface of the mounting seat 11 to have a regular dimension height. It is corrected to Hs. That is, assuming that the height accuracy of the mounting seat 11 when forming the mounting seat 11 is ± 20/100 mm when the mounting seat 11 is formed by the sheet metal working including the plate thickness variation of the chassis 1 material (usually about 5/100 mm), the mounting seat Assuming that the design height of the upper surface of 11 from the reference plane L is +20/100 mm higher than the regular dimension Hs, the error is 0
It is set within the range of +40/100 mm, and then the upper surface of the mounting seat 11 is lowered to the height Hs of the regular dimension by high spin plastic working.

【0014】この時、高速で円錐振れ運動を行うパンチ
5で取付座11を押し下げて塑性変形させるために、ハ
ンマー打ちやプレス打ちで塑性変形させて高さを低くす
る場合に比して、押圧力は1/10以下でよい上に、加
工後のスプリングバックも少なく、従って取付座11上
面の高さ精度を前述の±2/100mm の範囲内に納めること
ができるものであり、しかも塑性変形させることで高さ
を減じているために、切削加工の場合のような切り屑が
生じることがないのはもちろん、板厚が減って剛性及び
強度が低下することがなく、加工硬化による剛性及び強
度の向上を期待することもできるものである。
At this time, in order to push down the mounting seat 11 by the punch 5 which performs the conical wobbling motion at high speed for plastic deformation, the punch 5 is pushed down as compared with the case where the height is lowered by plastic deformation by hammering or pressing. The pressure is less than 1/10, and the spring back after processing is small. Therefore, the height accuracy of the upper surface of the mounting seat 11 can be kept within the range of ± 2 / 100mm mentioned above, and plastic deformation is possible. Since the height is reduced by doing so, not only do chips not occur as in the case of cutting, but also the rigidity and strength do not decrease as the plate thickness decreases, and the rigidity and strength due to work hardening do not decrease. It can also be expected to improve strength.

【0015】ところで、このようなハイスピン塑性加工
を行う場合、押圧力が小さいとはいえ、傾斜面部10の
下面を別途部材で受けておく必要があるが、図示例のよ
うに、傾斜面部10を有しているとともに、基準面Lが
傾斜面部10の下面と一致しておらず、さらに複数の取
付座11がある場合、傾斜面部10の下面も、たとえば
±20/100mmという高さ誤差を有しているわけであるか
ら、単一の部材で全取付座11周辺の下面を受けていた
のでは、上記下面の高さばらつきで受け部材から浮いて
いるところが生じるものであり、このために、全取付座
11の上面高さを正規寸法に仕上げたとしても、加工時
にその周辺が変形してしまうとともに、スプリングバッ
クで精度を悪化させてしまうことになる。
In the case of performing such high spin plastic working, although the pressing force is small, it is necessary to separately receive the lower surface of the inclined surface portion 10 by a separate member. In addition, when the reference plane L does not coincide with the lower surface of the inclined surface portion 10 and there are a plurality of mounting seats 11, the lower surface of the inclined surface portion 10 also has a height error of, for example, ± 20/100 mm. Therefore, if the lower surface around all the mounting seats 11 is received by a single member, the height of the lower surface may cause a floating position from the receiving member. Even if the height of the upper surface of all the mounting seats 11 is finished to a regular size, the periphery of the mounting seat 11 is deformed during processing, and the accuracy is deteriorated due to springback.

【0016】これを避けるには、図3に示すように、ハ
イスピン塑性加工の際にシャシー1を受ける下型(加工
治具)3に、傾斜面部10の各取付座11周辺を夫々独
立して受ける複数の受け台30を設けるとともに、これ
ら受け台30を夫々下型3に対して上下動自在に且つ個
別のばね31によって上方に付勢されたものとしてお
く。このようにしておけば、シャシー1を下型3上にセ
ットしてクランプ33で固定した時、各取付座11の周
辺部の下面に各受け台30が確実に接触するものであ
り、この状態にある各受け台30をたとえば側方から固
定部材32によってクランプ固定することで上下動する
ことがない状態にした上で、取付座11上面にハイスピ
ン塑性加工を行って、この上面の高さを基準面から所定
の高さとなるところまで低くすれば、各取付座11の周
辺部の下面の高さのばらつきの影響を受けなくなるため
に、このばらつきに起因する各取付座11の周辺部での
スプリングバックがなくなるものであり、従って各取付
座11上面を所要の高精度で仕上げることができる。
In order to avoid this, as shown in FIG. 3, the lower die (working jig) 3 for receiving the chassis 1 at the time of high-spin plastic working is independently provided around each mounting seat 11 of the inclined surface portion 10. A plurality of receiving pedestals 30 are provided, and these receiving pedestals 30 are configured to be vertically movable with respect to the lower mold 3 and urged upward by individual springs 31. With this arrangement, when the chassis 1 is set on the lower mold 3 and fixed by the clamps 33, the receiving bases 30 are surely brought into contact with the lower surfaces of the peripheral portions of the mounting seats 11. Each pedestal 30 in FIG. 2 is clamped from the side by a fixing member 32 so as not to move up and down, and then the upper surface of the mounting seat 11 is subjected to high-spin plastic working to adjust the height of this upper surface. By lowering the height from the reference surface to a predetermined height, it is not affected by the variation in the height of the lower surface of the peripheral portion of each mounting seat 11, so that the variation in the peripheral portion of each mounting seat 11 caused by this variation is eliminated. Since the spring back is eliminated, the upper surface of each mounting seat 11 can be finished with the required high accuracy.

【0017】なお、下型3や受け台30はもちろん、固
定部材32やクランプ33も図示例のものに限るもので
はなく、自動化の点では油圧や空気圧を利用したもので
あることが好ましい。また取付座11の形状も、たとえ
ば図4に示すような形状のものであってもよく、要はハ
イスピン塑性加工で塑性変形させて高さを減じた際に、
周辺部より低くなることがない分の高さを持つ凸部とな
っておればよいものである。
Not only the lower die 3 and the pedestal 30 but also the fixing member 32 and the clamp 33 are not limited to those shown in the drawings, and hydraulic pressure or pneumatic pressure is preferably used in terms of automation. Further, the shape of the mounting seat 11 may be, for example, a shape as shown in FIG. 4, and in short, when the height is reduced by plastically deforming by high spin plastic working,
It is sufficient that the convex portion has a height that does not become lower than the peripheral portion.

【0018】[0018]

【発明の効果】以上のように本発明においては、製造コ
ストの点で有利な板金加工によって形成する際の精度不
足はハイスピン塑性加工によって補正して、求められる
精度まで高めることができるものであり、従って精度が
問題となることはなく、しかもハイスピン塑性加工では
切削や研磨加工とは異なって素材厚みを減らすことがな
いために、剛性及び強度が低下することがないものであ
り、精度や剛性及び強度を共に満足するものを容易に得
られるために、シャシーの製造コストが大幅に低下する
ものである。
As described above, in the present invention, the lack of precision in forming by sheet metal working, which is advantageous in terms of manufacturing cost, can be corrected by high spin plastic working to increase the required precision. Therefore, accuracy does not become a problem, and since high-spin plastic working does not reduce the material thickness unlike cutting and polishing, the rigidity and strength do not decrease. In addition, the manufacturing cost of the chassis can be significantly reduced because it is easy to obtain the one that satisfies both the requirements and the strength.

【図面の簡単な説明】[Brief description of drawings]

【図1】一実施例を示すもので、(a)はハイスピン塑性
加工前の状態を示す部分断面図、(b)はハイスピン塑性
加工時の部分断面図である。
1A and 1B show an embodiment, in which FIG. 1A is a partial cross-sectional view showing a state before high-spin plastic working, and FIG. 1B is a partial cross-sectional view during high-spin plastic working.

【図2】同上の全体形状を示す断面図である。FIG. 2 is a cross-sectional view showing the overall shape of the above.

【図3】同上の下型にセットした状態の断面図である。FIG. 3 is a cross-sectional view of the lower mold set in the same as above.

【図4】取付座の他例を示す部分断面図である。FIG. 4 is a partial cross-sectional view showing another example of a mounting seat.

【図5】ハイスピン塑性加工によるかしめ加工を示すも
ので、(a)(b)はともに破断正面図である。
FIG. 5 is a view showing a swaging process by high-spin plastic working, and FIGS.

【符号の説明】[Explanation of symbols]

1 シャシー 5 パンチ 11 取付座 1 chassis 5 punch 11 mounting seat

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 板金にて形成したシャシーに一面側に突
出する取付座を設け、この取付座の表面に円錐振れ運動
を行うパンチを押し付けるハイスピン塑性加工にて取付
座の表面高さを基準面からの所定高さまで減じることを
特徴とする精密機器用シャシーの製造方法。
1. A chassis formed of sheet metal is provided with a mounting seat projecting to one surface side, and the surface height of the mounting seat is set to a reference surface by high-spin plastic working in which a punch performing a conical wobbling motion is pressed against the surface of this mounting seat. A method for manufacturing a chassis for precision equipment, which comprises reducing the height to a predetermined height.
【請求項2】 ハイスピン塑性加工を行うにあたり、シ
ャシーにおける取付座付近の裏面を、シャシー全体を受
ける下型に対して上下動自在であり且つ上記裏面に接触
状態で固定される受け台で受けた状態で、取付座表面に
円錐振れ運動を行うパンチを押し付けることを特徴とす
る請求項1記載の精密機器用シャシーの製造方法。
2. When performing high-spin plastic working, the back surface of the chassis near the mounting seat is received by a pedestal that is vertically movable with respect to a lower die that receives the entire chassis and is fixed in contact with the back surface. 2. The method for manufacturing a chassis for precision equipment according to claim 1, wherein a punch performing a conical wobbling motion is pressed against the surface of the mounting seat in this state.
【請求項3】 取付座の表面高さを、板金加工で生じる
高さ誤差を見込んだ分だけ高い寸法で設計しておくこと
を特徴とする請求項1記載の精密機器用シャシーの製造
方法。
3. The method for manufacturing a chassis for precision equipment according to claim 1, wherein the surface height of the mounting seat is designed to be as high as possible in consideration of a height error caused by sheet metal working.
【請求項4】 受け台として、ばねにて上方に付勢され
ているものを用いることを特徴とする請求項2記載の精
密機器用シャシーの製造方法。
4. The method for manufacturing a chassis for precision equipment according to claim 2, wherein a pedestal urged upward by a spring is used.
JP07804193A 1993-04-05 1993-04-05 Manufacturing method of chassis for precision equipment Expired - Lifetime JP3273655B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP07804193A JP3273655B2 (en) 1993-04-05 1993-04-05 Manufacturing method of chassis for precision equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07804193A JP3273655B2 (en) 1993-04-05 1993-04-05 Manufacturing method of chassis for precision equipment

Publications (2)

Publication Number Publication Date
JPH06291475A true JPH06291475A (en) 1994-10-18
JP3273655B2 JP3273655B2 (en) 2002-04-08

Family

ID=13650755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07804193A Expired - Lifetime JP3273655B2 (en) 1993-04-05 1993-04-05 Manufacturing method of chassis for precision equipment

Country Status (1)

Country Link
JP (1) JP3273655B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9149893B2 (en) 2012-07-10 2015-10-06 Denso Corporation Deformation processing apparatus and method for correcting surface runout

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9149893B2 (en) 2012-07-10 2015-10-06 Denso Corporation Deformation processing apparatus and method for correcting surface runout

Also Published As

Publication number Publication date
JP3273655B2 (en) 2002-04-08

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