JPH06291177A - Semiconductor material container - Google Patents

Abstract

PURPOSE:To prevent contamination due to the material of a container and store semiconductor materials extremely cleanly without influencing the semiconductor materials by using the material which contains fibrous antistatic material for the container. CONSTITUTION:A clean box 10, which is semiconductor material container tool, is box-shaped as a whole and is composed of a top box 1a and a bottom box 1b. A wafer cassette is stored in the inner space for storing and carrying wafers. Material which contains fibrous antistatic material, especially carbon fibers 2 with antistatic characteristics, is used at least for the material for a part which constitutes the semiconductor material container. Polypropylene(PP) is used for base material 1. Carbon fibers 2 are mixed with the PP, which is the base material 1, so as to form molding material. Thus, not only the prevention of contamination is allowed by the charging prevention but also contamination due to the material is prevented.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor material storage tool. Semiconductor materials such as semiconductor wafers are
Alternatively, it is stored in a storage tool and transported or stored at various points after it becomes a product. For example, a substrate wafer is transferred and put in a storage tool called a box-shaped cassette box having an internal space for storing a wafer cassette containing the wafer. Such a storage tool must be used in an extremely clean state because it is strictly prohibited to give foreign substances to semiconductor materials such as wafers, and is therefore called a clean box. The present invention relates to an improvement in a semiconductor material storage tool capable of storing semiconductor materials such as semiconductor devices in an extremely clean state as described above.

[0002]

2. Description of the Related Art A semiconductor material storage tool such as a cassette box (clean box) sometimes requires semi-permanent antistatic treatment as a condition for determining its material. There is a case where it is required that the antistatic agent added to is not removed. All of these are measures to prevent contamination of products.

Conventionally, a semiconductor material storage tool such as a cassette box (clean box) is generally
PP (polypropylene) was used as the material. However, with the stricter conditions such as LSI circuit miniaturization,
There is a concern that the PP (polypropylene) material may have an electrostatic property and that foreign matter particles may adhere to the product, and as a countermeasure against this, carbon powder is added to the base material as an antistatic agent. . This method has an antistatic effect on the storage tool itself, and can prevent the attachment of dust such as general floating matters and fibers, but it has been found that carbon has a problem of falling off from the material itself.

That is, as schematically shown in FIG. 3, the carbon powder 3 kneaded in the base material 1 made of PP or the like drops off, especially on the surface, and the dropped carbon 4 is stored. There is a risk of affecting semiconductor materials such as existing wafers. The carbon powder used is a fine powder having a particle size of about several μm, but it is extremely large for a semiconductor material that has been (or should be) subjected to fine processing. This is because the fine structure has reached the order of μm. There is a great concern that the carbon 4 that has fallen off will act against the basic requirements of the semiconductor material storage tool.

[0005]

SUMMARY OF THE INVENTION It is an object of the present invention to solve the above problems and to provide a semiconductor material storage tool which can prevent the contamination from the material itself and can store the semiconductor material extremely cleanly and without adverse effect. To do.

[0006]

The invention according to claim 1 of the present application is a storage tool for storing a semiconductor material, which contains a fibrous antistatic substance as at least a material constituting the semiconductor material storage portion. A semiconductor material storage tool characterized by using the material described above, which achieves the above object.

In the present invention, the fibrous antistatic substance is contained in the constituent material in a fibrous form so that it is prevented from falling off from the base material, and it falls off like a powder to cause contamination. Say what you don't. Carbon fiber type,
Conductive whiskers can be used. The antistatic function may be used as a semiconductor material storage tool, that is, as long as it has the same contamination adhesion prevention effect as a conventional clean box. As the base material, PP, PA, ELEGAN
Etc. can be used.

The invention according to claim 2 of the present application is a storage tool for storing a semiconductor material, wherein a material containing carbon fiber is used as a material for forming at least the semiconductor material storage portion. A material storage tool for achieving the above object.

In the present invention, carbon fiber is a general term for fibrous substances of carbon or carbon-based resin.

The invention according to claim 3 of the present application is the semiconductor material storage tool according to claim 1 or 2, wherein at least a base material of a material forming the semiconductor material storage portion is a polypropylene resin. Thus, the above object is achieved.

[0011]

[Operation] According to the present invention, since a fibrous antistatic substance or a material containing carbon fiber is used as a raw material of at least a portion for accommodating a semiconductor material, contamination prevention by antistatic is not only achieved. Moreover, since it is fibrous, it is unlikely that it will fall off from the material itself, and therefore contamination from the material can also be prevented.

[0012]

Embodiments of the present invention will be described below with reference to the drawings. However, it goes without saying that the present invention is not limited to the examples.

Embodiment 1 In the present embodiment, the present invention is applied to a clean box (wafer cassette box) for accommodating semiconductor wafers.

That is, in this embodiment, the material of the cassette box (clean box) for the purpose of protecting the semiconductor wafer and the wafer cassette from the pollution source in the atmosphere is made of PP (polypropylene) to which carbon fiber is added. , Embodying the present invention. By doing so, it is possible to prevent the product from being contaminated due to the loss of carbon and to prevent the clean box itself from being charged.

A clean box 10 (wafer cassette box) which is a semiconductor material storage tool of this embodiment is shown in FIG.
As shown in FIG. 2, the upper box 1a and the lower box 1b are combined to form a box as a whole, and a wafer cassette supporting a plurality of wafers is housed in the internal space for storing and carrying. Is done.

As shown in FIG. 1, the semiconductor material storage tool (clean box 10) of this embodiment is used as a material of at least a portion constituting the semiconductor material storage portion (in this embodiment, as a molding material of the entire clean box). A material containing a fibrous antistatic substance was used.

In this embodiment, the carbon fiber 2 having antistatic performance is used.

The base material 1 was PP (polypropylene).
A molding material was obtained by kneading PP as the base material 1 with carbon fiber 2.

As conceptually shown in FIG. 1, in the raw material of this embodiment, the carbon fibers 2 contained in the base material 1 are in a fibrous form and thus are firmly contained in the base material 1. It does not fall off like the body. Therefore, contamination from the storage tool material itself is prevented.

Moreover, due to the antistatic property of the carbon fiber,
It also prevents atmospheric contamination of semiconductor materials. In this example, the charging half-life was less than 0.5 seconds. The visual evaluation of the actual stainability also gave very good results.

In the present embodiment, as described above, the use of the material to which the carbon fiber is added provides the effect of preventing the electrostatic charge and preventing the secondary contamination of the wafer product due to the adsorption of the foreign particle. In addition, unlike the case where the carbon powder is added, the carbon fiber-based material is extremely unlikely to fall off from the raw material, so that there is a remarkable effect that direct contamination of the wafer product is prevented.

Example 2 In this example, a PA resin was used as a base material, and a conductive whisker-based substance was contained in the resin.

In this example, the tensile strength and bending strength were higher than those in Example 1.

The antistatic property was the same as in Example 1.
However, the visual contamination evaluation was slightly inferior to that of Example 1.

[0025]

The semiconductor material storage tool of the present invention has the effect that the risk of contamination from the material itself is prevented, and the semiconductor material can be stored extremely cleanly and without adverse effects.

[Brief description of drawings]

FIG. 1 is a diagram showing a concept of a material of a semiconductor material storage tool according to a first embodiment.

FIG. 2 is a perspective view of a clean box (wafer cassette box) according to the first embodiment.

FIG. 3 is a diagram showing a problem of the conventional technique.

[Explanation of symbols]

 1 base material 2 carbon fiber (fibrous antistatic substance) 10 clean box (semiconductor material storage tool)

Claims (3)

[Claims] 1. A storage tool for storing a semiconductor material, wherein a material containing a fibrous antistatic substance is used as at least a material for forming the semiconductor material storage section. 2. A storage tool for storing a semiconductor material, wherein a material containing carbon fiber is used as at least a material for forming the semiconductor material storage part. 3. The semiconductor material storage tool according to claim 1, wherein at least a base material of a material forming the semiconductor material storage portion is a polypropylene resin.