JPH0628920A - Dielectric porcelain and manufacture thereof - Google Patents

Abstract

PURPOSE:To provide a dielectric porcelain of high dielectric constant, having a small temperature change of a dielectric constant, a small dielectric loss, high element strength, high withstand voltage strength, and small voltage dependency of the dielectric constant. CONSTITUTION:X molar parts in TaO5/2 conversion of tantalum pentoxide and Y molar parts in MO conversion (wherein M represents Co, Zn, Mg, Ni, or Mn) of at least one kind of oxide selected from a group consisting of cobalt oxide, zinc oxide, magnesium oxide, nickel oxide, and manganese oxide are added into 100 molar parts of tetragonal barium titanate particles having a primary average particle diameter of 0.1-0.3mum within a range of a component ratio of 2.0<X<8.8, 0.3<Y<3.6, 2Y+0.3<X, and 2.8<X+Y<11. A dielectric porcelain is manufactured, whose average grain size is 0.1-0.3mum, average grain size is 0.1-0.3mum, and whose grain distribution is included by 70% or more within a range of, the average grain size + or - the average grain size X0.5mum.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a barium titanate-based dielectric ceramic and a method for manufacturing the same.

More specifically, the present invention is a barium titanate system, in which the temperature change of the dielectric constant is small over a wide temperature range, the dielectric loss is small, the strength of the element body and the withstand voltage are large, and the voltage of the dielectric constant is large. The present invention relates to a high-dielectric-constant dielectric ceramic material having a small dependency and a method for manufacturing the same.

[0003]

2. Description of the Related Art Conventionally, as a dielectric material for a high-dielectric-constant ceramic capacitor whose dielectric constant changes little with temperature, barium titanate is used as a base material, and niobium oxide and / or tantalum oxide, yttrium oxide or Rare earth oxides, Mn, Cr, Fe, Ni, Co, Mg,
Addition of so-called barium titanate Curie point depressor agents (various barium titanate crystal grains are called cores, while these are called shell agents), which consist of various combinations with oxides such as Zn. The ones that are used are widely used.

Then, these compositions were fired and sintered to form a phase (shell phase) in which the shell agent component was diffused from the grain boundary side of the barium titanate crystal grains (core) as the base material, which were completely dissolved. By obtaining a non-sintered body, a so-called core-shell sintered body, the change in the dielectric constant with temperature is small, that is, the Y-class B characteristic of the JIS standard (the change in the dielectric constant is within the range of -25 ° C to + 85 ° C is 20 ° C as a standard). Within ± 10%)
X specified in EIAJ (Japan Electronic Machinery Manufacturers Association Agreement)
A high dielectric constant type barium titanate ceramic capacitor satisfying the 7R characteristics (dielectric constant change within ± 15% with reference to 25 ° C in the range of -55 ° C to + 125 ° C) has been proposed (JP-A-61). -99209, JP-A-61-
99210, JP-A-62-229605,
JP-A-1-315904, JP-A-3-97662
Japanese Patent Laid-Open No. 3-45557, Japanese Patent Laid-Open No. 2-11
4406 publication).

Further, in response to the recent demand for smaller size and larger capacity,
The thickness of a dielectric layer in a monolithic ceramic capacitor has been reduced, and the thickness of the dielectric layer is currently 10 μm or less.
Especially when it is thin, the film is being made thinner to 5 μm or less. As the thinning progresses in this way, the element strength and withstand voltage strength of the dielectric porcelain can be increased, and further, the characteristics with less voltage dependence of the dielectric constant and the dielectric loss can be expected, and the grain size can be reduced. In addition, a dielectric ceramic having a narrow grain distribution has been demanded.

Therefore, Japanese Patent Publication No. 3-1265 proposes a dielectric porcelain having a small grain size of 0.25 μm and is disclosed in Japanese Patent Laid-Open No. 61-9.
9209, JP-A 61-99210, and JP-A 3-97662, barium titanate having a small average particle size of 0.1 μm to 0.3 μm is used as a starting material in Examples. Is described.

[0007]

However, these dielectric materials and dielectric porcelain cannot meet the demands when more strict characteristics are required with respect to the temperature change of the dielectric constant.

That is, JIS class Y characteristics (-2
Dielectric constant change within 5 ° C + 85 ° C is within ± 5% based on 20 ° C) or Y5E, Y5 specified by EIAJ
D, Y5C, Y5B, Y5A characteristics (change in dielectric constant in the range of -30 ° C to 85 ° C is within ± 4.7%, within ± 3.3%, and within ± 2.2% with reference to 25 ° C). Within%, ±
(1.5 or less, ± 1.0% or less) is not satisfied, and of course, the more stringent EIAJ X7P, X7F, X7
E, X7D, X7C characteristics (change of dielectric constant in the range of -55 ° C to + 125 ° C is ± 1 with respect to 25 ° C, respectively)
Within 0%, within ± 7.5%, within ± 4.7%, within ± 3.3
%, Within ± 2.2%) is not satisfied.

Further, in the dielectric ceramics having a small grain size described in Japanese Patent Publication No. 3-1265, Japanese Patent Application Laid-Open No. 61-99209, Japanese Patent Application Laid-Open No. 61-99210, Japanese Patent Application Laid-Open No. 3-97662, etc. Is, the smaller the particle size of barium titanate as a starting material, the more the reaction solid solubility with the shell agent is taken into consideration, the elemental species of the shell agent and the addition amount range, the crystallinity and the particle size distribution of the barium titanate particles. It is considered difficult to obtain a uniform core-shell sintered body without strict control, but strict control is not performed in the above publication.

Therefore, those with a small grain size,
Alternatively, in an example where the grain size is considered to be small, the change in dielectric constant with temperature is large and the dielectric loss is also 1%.
There are many that exceed the above, and it is by no means satisfactory in terms of electrical characteristics.

Further, these dielectric porcelains have a large average grain size of 0.5 μm or more, and although the average grain size is small, the grain distribution is wide and the composition is non-uniform. The voltage dependence of the voltage strength and the dielectric constant is not sufficiently satisfactory. Therefore, the current situation is that the thinning of the dielectric layer cannot be sufficiently dealt with.

Therefore, according to the present invention, a dielectric ceramic having a high dielectric constant with a small change in dielectric constant over a wide temperature range, a small dielectric loss, a small grain size, and a uniform grain distribution, and a method for manufacturing the same. The purpose is to provide.

More specifically, the dielectric loss is 1% or less, the permittivity is 1600 or more, and the temperature change of the permittivity is JIS Class Y characteristics (dielectric constant in the range of -25 ° C to + 85 ° C). Change is within ± 5% based on 20 ° C), as well as E
Y5E characteristics specified by IAJ (change in dielectric constant in the range of -30 ° C to + 85 ° C is ± 4.7% based on 25 ° C)
From within) to Y5A characteristics (change in dielectric constant within -30 ° C to + 85 ° C within ± 1.0% of 25 ° C), and X7P characteristics (range from -55 ° C to + 125 ° C). Change of dielectric constant at ± 10% based on 25 ℃)
To X7C characteristics (dielectric constant change in the range of -55 ° C to + 125 ° C within ± 2.2% of 25 ° C) is a dielectric porcelain, and the strength of the element body and the withstand voltage strength are An object of the present invention is to provide a large dielectric porcelain having a small dielectric constant voltage dependency and a method for manufacturing the same.

[0014]

According to the present invention, the crystallinity and the particle size of barium titanate as a base material are specified, and the element species of the second component and the third component to be added to this barium titanate and the addition thereof are added. By specifying the amount, the average grain size is from 0.1 μm to 0.3 μm, and the grain distribution is the average grain size ± average grain size × 0.5 μm.
The inventors have found that it is possible to manufacture a dielectric ceramic containing 70% or more of the above range, and that the dielectric ceramic sufficiently satisfies the desired characteristics, and the present invention has been completed.

The means for solving the problems in the present invention will be described below.
Dielectric Porcelain Constituent Components and Their Ratios, Average Grain Size and Grain Distribution of Dielectric Porcelain, Barium Titanate Fine Powder Used for Manufacturing Dielectric Porcelain, Second
Oxides of the following components or precursors of the oxides, other,
Will be described in detail in this order.

Constituent Components Constituting the Dielectric Porcelain of the Present Invention and Their Component Ratios

The first component is barium titanate as a base material, the second component and the following components are shell agents, the second component is tantalum pentoxide, and the third component is cobalt oxide, zinc oxide, magnesium oxide, nickel oxide. And at least one oxide selected from the group consisting of manganese oxide.

In the dielectric porcelain of the present invention, to show these component ratios, the first component barium titanate is added to 1
The amount of the tantalum pentoxide as the second component is X in terms of TaO _5/2 with respect to 100 parts by mole of barium titanate.
In terms of mol parts, at least one oxide selected from the group consisting of cobalt oxide, zinc oxide, magnesium oxide, nickel oxide and manganese oxide of the third component is MO.
(M is Co, Zn, Mg, Ni or Mn) and is expressed in Y parts by mole.

The component ratio ranges of the constituents according to the present invention are as shown below. The component ratios 1) are for satisfying JIS standard Y-class A characteristics and EIAJ X7P characteristics or higher, and 2) are Y-class A characteristics and EIAJ X characteristics.
This is for satisfying the 7F characteristic or higher.

1) 2.0 <X <8.8 0.3 <Y <3.6 2Y + 0.3 <X 2.8 <X + Y <11

2) 2.5 <X <8.8 0.7 <Y <3.6 2Y + 0.3 <X 3.5 <X + Y <11

In the present invention, the reason why the component ratio of the constituent components of the dielectric ceramic is limited to the above is as follows.

First, the case of 1) will be described. X
Is 2.0 or less, even if the other component ratios are within the above range, or if a specific barium titanate is used, the sintering density, that is, the bulk density satisfies 5.6 or more. At times, the grain size of the porcelain becomes large, and either or both of the grain size and the grain distribution fall outside the scope of the present invention.

Further, in the temperature dependence of the dielectric constant of the porcelain, Ti ⁴⁺ ions and Ta ⁵⁺ ions in the base barium titanate (BaTiO ₃ ) crystal and the third component (M
O) is replaced by M ion and crystal grains are completely solid-solved [in the chemical formula, Ba (Ti ^{4 +} _1-y Ta ⁵⁺ _{2 / 3y} M ²⁺ _{1 / 3y} ) O]
₃ or Ba (Ti ^{4 +} _1-y Ta ⁵⁺ _{1 / 2y} M ³⁺ _{1 / 2y} ) O ₃ . Curie point peak of the dielectric constant estimated to be partially formed in each grain unit (depending on the valency of M ions) (the original BaTiO 3
A peak shifted to a temperature lower than the Curie point of ₃ ) appears, and the change in dielectric constant with temperature increases. Therefore, it does not have the characteristics desired in the present invention, that is, the flatness of the temperature change of the dielectric constant which is superior to the Y-class A characteristics and the X7P characteristics. Also, the dielectric loss may exceed 1%.

Further, even if X is a value exceeding 2.0,
When 2Y + 0.3 <X is not satisfied, when X + Y is 2.8 or less, and when Y is 0.3 or less, the characteristics aimed at by the present invention, that is, Y-class A characteristics and X7P characteristics or more are excellent. It does not have flatness in the change of dielectric constant with temperature.

When X is 8.8 or more, or when X + Y is 11 or more even when X is less than 8.8, the temperature characteristic of the dielectric constant intended by the present invention can be exhibited, but more than that. Even if it is contained, there is no effect of flattening the temperature characteristic of the dielectric constant, and the reduction of the dielectric constant is only wasted.

The reason why the component ratio is limited to the range indicated by 2) is to satisfy the temperature characteristic of the dielectric constant from the X7P characteristic to the more severe X7F characteristic as described above. That is, when the component ratio is out of the range of 2) above, the temperature characteristic of the dielectric constant does not satisfy the X7F characteristic for the same reason as described in 1) above.

In the present invention, the component ratio is specified with respect to 100 parts by mol of barium titanate. Strictly speaking, the Ba / Ti atomic ratio of all the compounds containing barium titanate is as described below. Since it is in the range of 0.930 to 1.100, an error occurs when the distance is more than 1.000. Therefore, 100 parts by mole of barium titanate means
It is synonymous with 100 atomic parts of all titanium elements.

Regarding the average grain size and grain distribution of the dielectric ceramics of the present invention

In the present invention, the average grain size of the dielectric ceramics is 0.1 μm to 0.3 μm, preferably 0.1.
From 1 μm to 0.2 μm, the grain distribution is 7 within the range of average grain size ± average grain size × 0.5 μm.
It is characterized by containing 0% or more.

The reason why the average grain size and grain distribution are limited as described above is as follows.

Even if the component ratio of each component is within the range of the present invention, when the average grain size is smaller than 0.1 μm or larger than 0.3 μm, the temperature change of the dielectric constant becomes large, and the Y grade B Characteristics or X7R characteristics can be satisfied,
It does not reach the temperature characteristic of the dielectric constant targeted by the present invention. Further, breakdown voltage, bending strength, voltage dependence of dielectric constant, etc. are also deteriorated. The same applies when the grain distribution is not within the range of the present invention.

In the present invention, the average grain size and grain distribution are those obtained by SEM (scanning electron microscope) observation. That is, it was obtained by drawing straight lines on the SEM photograph at regular intervals, measuring the size of the grains hitting the straight lines in units of 0.01 μm, and counting the number. However, the grain is large and 2
Those that hit more than once are counted each time. The number average is calculated by [sum of measured values of grain size] / [total number of grains]. The total number is 3000. Therefore, the grain distribution depends on the number distribution.

About Tetragonal Barium Titanate Fine Powder Used for Manufacturing the Dielectric Porcelain of the Present Invention

The tetragonal barium titanate fine powder used in the production of the dielectric porcelain of the present invention has an average primary particle diameter of 0.1 μm to 0.3 μm, preferably 0.1 μm.
m to 0.2 μm, the primary particle size distribution is 7 within the range of primary particle average particle diameter ± primary particle average particle diameter × 0.5 μm.
The content is 0% or more.

These average particle size and particle size distribution are obtained by SEM observation similarly to the above-mentioned average grain size and grain distribution, and mean number average and number distribution, respectively.

The reason why the primary particle average particle size and the primary particle size distribution of the tetragonal barium titanate fine powder used in the present invention are limited to the above range will be described below.
It is as shown below.

When tetragonal barium titanate fine powder having an average primary particle diameter of less than 0.1 μm is used, the temperature characteristic of the dielectric constant intended by the present invention cannot be obtained.

On the other hand, when tetragonal barium titanate fine powder having an average primary particle size of more than 0.3 μm is used, a porcelain having a temperature characteristic of permittivity satisfying Y-class B characteristic or X7R characteristic can be obtained, but Y Satisfies Grade A characteristics and X
A porcelain satisfying the 7P characteristic and the X7F characteristic or more cannot be obtained, and the dielectric loss often exceeds 1%.

If the particle size distribution of the primary particles is out of the above range, a porcelain satisfying the temperature characteristic of the dielectric constant, which is the object of the present invention, cannot be obtained. The reason for this is that when the particle size distribution is wide, during sintering, particles with a small particle size form grains in which the solid solution reaction with the second and third components has proceeded too much, and particles with a large particle size are mostly solid solution. It is presumed that this is because considerable heterogeneity occurs in the grain units such as the formation of grains in which the reaction has not progressed. Needless to say, when using tetragonal barium titanate whose primary particle average particle diameter and primary particle size distribution are outside the scope of the present invention, a porcelain satisfying the average grain size and grain distribution as in the present invention is obtained. I can't.

Furthermore, the more preferable range is set for the average particle size and particle size distribution of the tetragonal barium titanate fine powder used in the present invention and the average grain size and grain distribution of the dielectric ceramics of the present invention.
This is because when the same shell agent component is blended, the flatness of the temperature characteristic of the dielectric constant is further improved.

Another reason is to obtain a porcelain having a higher breakdown voltage, a higher bending strength, and a smaller voltage dependence of the dielectric constant.

Next, the crystallinity of the tetragonal barium titanate fine powder used in the present invention will be described.

The tetragonal crystal referred to here is (1
It means a peak exhibiting a completely branched peak of the (00) plane and the (001) plane, the (200) plane and the (002) plane, or the (400) plane and the (004) plane. However, (100) plane and (00
It is difficult to distinguish 1) surface because 2θ is a low angle.

Further, in terms of peak interpretation, since the diffraction peaks are broad as shown in FIGS. 2 and 6, it is interpreted as a tetragonal crystal in which the difference between the lattice constant c and the lattice constant a is reduced, or as a pseudo-cubic crystal. It is not the tetragonal crystal of the present invention that it is formed or is interpreted as a mixed crystal of cubic crystal and tetragonal crystal.

Here, to limit the tetragonal crystal in the present invention, when the lattice constant c and the lattice constant a are calculated by the X-ray diffraction measurement by the powder method, the lattice constant ratio c / a is 1.009 or more. , Preferably 1.010 or more.

Next, a method for producing the tetragonal barium titanate fine powder used in the present invention will be described.

The method for producing the tetragonal barium titanate fine powder used in the present invention is not particularly limited, but in the usual solid solution reaction method of titanium oxide and barium carbonate, the particle diameter after the reaction becomes too large. Therefore, it is impossible to mechanically grind it into an average particle size and particle size distribution suitable for use in the present invention.

Therefore, an alkoxide method using alkoxides of titanium and barium, a hydrothermal synthesis method or thermal hydrolysis method using barium hydroxide and hydrous titanium hydroxide, and strong alkaline coprecipitation hydrolysis using salts of titanium and barium. It is preferable to use barium titanate obtained by a wet method such as a decomposition method or an oxalic acid (oxalic acid) coprecipitation method. However, although barium titanate obtained by these wet methods can satisfy the average particle size and the particle size distribution, the crystal form as it is is a pseudo-cubic crystal on X-ray diffraction, and the crystallinity is not satisfactory. Therefore, in order to obtain satisfactory crystallinity, it is necessary to perform heat treatment.

For the above reasons, as an example of the method for producing the tetragonal barium titanate fine powder used in the present invention, a method of heat-treating barium titanate obtained by the wet method can be adopted. However, the particle size by the wet method,
Even if barium titanate having a controlled particle size distribution is obtained, unless the Ba / Ti atomic ratio of barium titanate and heat treatment are strictly controlled, when barium titanate having satisfactory crystallinity is obtained, Particles may grow large or sintering may become more intense.

That is, in addition to the average particle size and particle size distribution of barium titanate obtained by the wet method, the particle size, particle size distribution and crystal of barium titanate are determined by the Ba / Ti atomic ratio with a precision of three digits after the decimal point and the heat treatment temperature. Since the properties are greatly affected, tetragonal barium titanate that can be used in the present invention cannot be obtained unless those conditions are strictly controlled.

Specific preferred examples include Ba / disclosed in International Publication No. WO 91/02697.
Tetragonal barium titanate obtained under the condition that the Ti atomic ratio is in excess of Ba is suitable.

Regarding the oxide of the second component and the third component or the precursor of the oxide used in the present invention

The oxide of the second component and the oxide of the third component used in the present invention is 1 if a plurality of oxides belong to the oxide.
Not only the oxide of the seed metal element, but also a composite oxide of two or more metal elements selected from the metal elements of the oxides belonging to the component. The oxides of these components also include complex oxides with titanium and barium.

The second component used in the present invention,
The oxide precursor of the third component means, during calcination or firing,
That is, it means one that decomposes into an oxide at a temperature lower than the sintering temperature, and specifically, carbonates, acetates, oxalates,
Examples include alkoxides and hydroxides.

About others

Regarding the addition and mixing of the above-mentioned second to third components,
The method is not particularly limited as long as it is in accordance with a conventional method, but when the additive component is water-insoluble such as an oxide or a carbonate, it is preferable to pulverize it in advance and then add and mix it for the purpose of uniform mixing. Is preferred.

The Ba / Ti atomic ratio in all the formulations of the present invention depends on the addition amount of the second to third components, but is 0.9.
The range of 3 to 1.10 is preferable.

That is, if the Ba / Ti atomic ratio is smaller than 0.93, the dielectric constant is remarkably reduced and there is no other merit. Further, if the Ba / Ti atomic ratio becomes larger than 1.10, the sintering temperature becomes high.

As one of the merits of the present invention, B
It is possible to widen the Ba excess permissible range of the a / Ti atomic ratio, and as a result, lower the sintering temperature, reduce the contact failure with the electrode, and prevent the reduction of Ti during firing.

That is, when the addition amounts of the second component and the third component are within the range of the component ratio specified in the present invention and the above-mentioned specific one is used as the tetragonal barium titanate fine powder, the tetragonal titanium is Since barium acid is a fine particle and has a sharp particle size distribution, the sintering limit of the Ba / Ti atomic ratio is smaller than that in the case of using a tetragonal barium titanate powder having a large particle diameter outside the scope of the present invention. , The latter (that is, in the usual case) is 1.008, while the former (that is, in the case of the present invention), it becomes possible to sinter even with Ba excess, and the desired characteristics can be obtained. .

More specifically, when the latter has a Ba / Ti atomic ratio of 1.044 and has a bulk density of 5.1 after firing at 1400 ° C. for 2 hours, the former has a Ba / Ti density of Ba / Ti.
When the Ti atomic ratio is 1.044, the bulk density is 5.9 after firing at 1250 ° C. for 2 hours. This means not only the advantages of lowering the sintering temperature when considering the production of monolithic ceramic capacitors, that is, when considering the contact between internal electrode material types or internal electrodes and ceramics,
Since it is possible to sinter with an excess of Ba, there are advantages such as reduction of contact failure with the electrode and prevention of reduction of Ti during firing by controlling generation of a Ti-rich composition phase.

Furthermore, oxides of elements other than the above-mentioned components can be added within a range that does not impair the electrical characteristics aimed at by the present invention. That is, it is possible to add rare earths such as Fe, Cr, Cu and Y for the purpose of improving the bias characteristics and the withstand voltage characteristics. Further, oxides such as Si, Al, B, and Ge having an ionic radius relatively separated from the ionic radius of Ba or Ti can be added for the purpose of improving the sintering characteristics. In addition, Zr, Sn, C
Even in oxides of elements such as a, Pb, and Sr, which have an ionic radius relatively close to that of Ti or Ba, the amount is 10 moles per 100 mole parts of barium titanate, although it varies slightly depending on the element species. If less than
It is also possible to add. In addition, Ba in all formulations
For the purpose of adjusting the / Ti atomic ratio, it is possible to add Ba or Ti in the form of an oxide or an oxide precursor of Ba or Ti, or a complex oxide of Ba or Ti and a shell agent element species.

In producing the dielectric ceramics of the present invention, firing may be performed by a usual method. However, regarding the firing temperature, the heating rate, the particle size of barium titanate, Ba / Ti
It is appropriately adjusted by the atomic ratio, the addition amount of the shell agent component after the second component, and the like. That is, the normal heating rate (1 ° C
/ Min-20 ° C / min), the optimum firing temperature is in the range of 1200 ° C to 1300 ° C. Furthermore, the heating rate is 100
A temperature of at least 50 ° C is preferable because it enables firing at a low temperature of at least 50 ° C.

As a feature of the present invention, despite the fine particle size of barium titanate as a starting material, the crystallinity of barium titanate as a starting material is limited within the scope of the present invention, and the kind of shell agent component is used. By limiting the amount and the amount, it is possible to sinter almost no barium titanate particles without particle growth.

More specifically, as is clear from Examples 1 to 9, barium titanate has an average particle size of 0.
Despite the use of particles having a diameter of around 13 μm, they are all sintered with a grain growth grain of 1.5 times or less the grain diameter of the barium titanate.

[0067]

[Function] A pure barium titanate sintered body has a tetragonal (low temperature side) -cubic (high temperature side) crystal transition point (Curie point) at around 130 ° C, so that the dielectric constant is abnormal at around 130 ° C. Grows to. In order to control this dielectric anomaly, a barium titanate as a main raw material is mixed with a shell agent (in the present invention, a component after the second component), and the mixture is fired to form grains of barium titanate crystal grains. Attempts have been made to obtain a sintered body doped with a shell agent from the boundary side. A schematic diagram of the core-shell sintered body thus obtained is shown in FIG.

Usually, the smaller the particle size of the barium titanate powder that is the base, the larger the specific surface area and activity, and the easier it is to sinter at a relatively low temperature, but the solid solution reaction with the shell agent easily occurs. Grain growth is also likely to occur. Further, it is considered that the poorer the crystallinity of the barium titanate powder, the easier the solid solution reaction with the shell agent occurs.

Therefore, the elemental species of the shell agent and the addition amount must be specified according to the particle size of the barium titanate powder as the raw material, but the addition amount of the shell agent is within the range in which the core-shell structure is possible. Also, it is necessary to fully consider the crystallinity, particle size and particle size distribution of the barium titanate powder.

Specifically, when barium titanate powder having a good crystallinity but a wide particle size distribution is used, even if the whole porcelain is a core-shell sintered body, it is not uniform in each grain unit. As a result, the grains do not become the core shell and are completely doped into the crystal. In FIG. 1, (1) and (2) are schematic views of the core shell in that case.

(1) in FIG. 1 shows an example in which the raw material barium titanate powder having a large average particle diameter and a wide particle size distribution is used, and (2) shows the average as the raw material barium titanate powder. An example is shown in which particles having a small particle size and a wide particle size distribution are used.

In FIG. 1, the core phase is shown by hatching, and the shell phase is shown by a white background. In (1) in FIG. 1, 1 is a shell phase and 2 is a core phase. (2) ~
In (5), no reference numeral is attached, but the same as in (1). The core phase is a barium titanate crystal phase that is hardly doped with a shell agent, and the shell phase is a partial replacement of the element ions of the shell agent after the second component with Ti ⁴⁺ ions in the barium titanate crystal. I did it,
As a result, the barium titanate crystal is in a distorted phase.

In particular, as shown in (2), in the case of relatively small grains, the shell agent is doped up to the center of the grains at the temperature at which they are sintered, and in addition to that, grain growth also occurs and the grains grow. There are also larger ones.

In (5) of FIG. 1, the element species of the shell agent, the amount of addition thereof are out of the range of the present invention, or excessive baking is performed, so that solid solution reaction and particle growth occur, and most of them are core-shell baked. It is a schematic diagram of the example which did not become a union.

Next, when the raw material barium titanate powder has a small particle size and a narrow particle size distribution, but the crystallinity is poor and it is a pseudo cubic crystal, the core-shell sintered body is
The state becomes as shown by (3) in FIG. In other words, during sintering, the grains are those in which many incomplete cores were present (grains in which the shell agent was almost diffused and solid-solved). Also,
Also in this case, solid-solution reaction is likely to occur during sintering, and grains that have grown grains also exist.

(4) in FIG. 1 is a schematic diagram of the dielectric porcelain of the present invention. In the present invention, tetragonal barium titanate having a small crystal size and a narrow particle size distribution and good crystallinity is used. In addition, since the element type and the addition amount of the shell agent suitable for the barium titanate are specified, the average grain size is small from 0.1 μm to 0.3 μm, the grain distribution is narrow, and it is uniform in each grain unit. It forms a smooth core shell. Therefore, the dielectric porcelain of the present invention has excellent electric characteristics and mechanical strength that have not been obtained in the past.

The schematic diagrams (1) to (5) in FIG. 1 are sample names B2 (G) in Examples and Comparative Examples described later.
₁₃₅₀ , B3 (G) ₁₂₅₀ , A5 (G) ₁₂₅₀ , B4 (G)
₁₂₅₀ and sample number 31 respectively. The SEM photographs of the surfaces of those porcelains are shown in FIGS.
9, FIG. 18 and FIG. 20 are attached.

FIG. 16 is a SEM of the surface of the porcelain of (1) above.
In the photograph (1), since barium titanate having a large particle size and a wide particle size distribution is used as a starting material, the obtained porcelain has a large grain size and a grain distribution as shown in FIG. Is also wide.

FIG. 17 is a SEM photograph of the surface of the porcelain of (2) in FIG. 1 above. In (2), barium titanate having a relatively small particle size but a wide particle size distribution is used as a starting material. Therefore, grain growth occurs at the same time as the solid solution reaction, and the obtained porcelain has a large grain size as shown in FIG. 17, resulting in a wide grain distribution.

FIG. 18 is an SEM photograph of the surface of the porcelain shown in FIG. 1 (4), that is, the dielectric porcelain of the present invention. In this (4), tetragonal barium titanate having a small particle size and a narrow particle size distribution and good crystallinity is used as a starting material, and a shell agent suitable for the barium titanate and its addition amount are specified. Therefore, the obtained porcelain has a small grain size and a narrow grain distribution as shown in FIG.

FIG. 19 is a SEM photograph of the surface of the porcelain of (3) in FIG. 1 above. In (2), barium titanate having a small grain size and a narrow grain size distribution but poor crystallinity was used as a starting material. Therefore, the number of incomplete cores increases,
Further, since grain growth occurs simultaneously with the solid solution reaction, the obtained porcelain has a large grain size as shown in FIG. 19, and as a result, the grain distribution is wide.

FIG. 20 is a SEM photograph of the surface of the porcelain of (5) in FIG. 1 above. In this (5), barium titanate having a relatively small particle size and a narrow particle size distribution and good crystallinity is used as a starting material. Although it is used, the added amount of the shell agent was not appropriate, so that the core-shell sintered body was not obtained, and the solid solution reaction also caused particle growth. Therefore, the obtained porcelain was as shown in FIG. Some grains have a very large grain size, and of course, the grain distribution lacks uniformity.

Further, the porcelains of (1) to (5) are SEM
In addition to the grain observation by X-ray diffraction, the peaks of the (200) plane and the (002) plane or the (400) plane and the (004) plane of the porcelain surface can be discriminated to some extent by the X-ray diffraction.

That is, (1), (2), (3),
The porcelains of (4) and (5) are X-ray diffraction patterns of the (400) plane and the (004) plane, respectively, as shown in FIGS.
It has the features shown in FIGS. 10 and 15.

That is, the porcelain [porcelains of (1), (2) and (4)] which became the core-shell sintered body are as shown in FIGS.
As shown in FIG. 10 and FIG. 10, the original tetragonal peak (lattice constant ratio c / a of 1.009 to 1.010) shows a broad peak distorted in the cubic direction (direction in which c / a shrinks). .

Then, a tetragonal barium titanate powder having a large particle size was used as a raw material, that is, a core-shell sintered body having a large grain had a broad peak in which the trace of the original tetragonal crystal remained (FIG. 8). Conversely, a core-shell sintered body having a smaller grain size shows a broad peak in which c / a is contracted from the original tetragonal crystal (see FIGS. 9 and 10, particularly FIG. 10). The relationship of the X-ray diffraction diagram of the core-shell sintered body with respect to these grain sizes is specifically illustrated in Example 10 (FIG. 7 to FIG.
(See FIG. 13).

(5) in FIG. 1 shows a crystal peak [Ba (Ti ^{4 +} _{1 -y} Ta) in which the shell agent is completely dissolved.
⁵⁺ _{2 / 3y} M ²⁺ _{1 / 3y} ) O ₃ or Ba (Ti ^{4 +} _1-y Ta ⁵⁺
_{1 / 2y} M ³⁺ _{1 / 2y} ) O ₃ compound peak, which can be described as a peak maximum position slightly shifts depending on the amount of y]
And a peak of (1) or (4) corresponding to the grains remaining as the core shell. However, the more the former, the sharper the peak is reflected in the former. FIG. 15 shows the case where there are many crystal peaks in which the former shell agent is completely dissolved.

As in (5), (3) in FIG. 1 shows crystal peaks which are almost solid-solved, but since the grains are relatively small, the peak in (3) is (5) as shown in FIG. )
It is broader than the peak (see FIG. 15).

The temperature characteristics of the dielectric constant of the porcelains (1) to (5) correlate with the size of the grains, the grain distribution, and the X-ray diffraction peak, and the dielectric constants of the dielectric constants shown in FIGS. Corresponds to temperature characteristics.

21 to 25, these FIGS. 21 to 25 clarify that the dielectric material of the present invention has a smaller change in dielectric constant with temperature than other porcelains.

21 to 25, the upper diagrams show the rate of change of the dielectric constant with temperature change, and the lower diagrams show the rate of change of dielectric loss with temperature change.

21 to FIG. 25, FIG. 24 shows the case of the present invention, and FIGS. 21 to 23 and 25 show the case outside the present invention, but the upper diagram of FIG. 24 and other drawings (FIG. 21 to 23
As is clear from the comparison with the upper diagram of FIG. 25), the curve showing the dielectric constant with temperature change is flat in the case of FIG.

That is, it has been clarified that the rate of temperature change of the dielectric constant of the dielectric ceramics of the present invention is smaller than that of other ceramics.

The following is a detailed description of each of FIGS. 21 to 25.

FIG. 21 shows B described in Example 10 described later.
It is a figure which shows the temperature change rate of the dielectric constant and dielectric loss of 2 (G) ₁₃₅₀ (however, this invention is outside).

B2 (G) _{1350 in} FIG. 21 uses barium titanate having a large average particle size and a wide particle size distribution as a starting material, and corresponds to (1) and FIG. 16 in FIG.

FIG. 22 shows B described in Example 10 described later.
It is a figure which shows the temperature change rate of the dielectric constant and dielectric loss of 3 (G) ₁₂₅₀ (however, it is outside this invention). B3 (G) ₁₂₅₀ of FIG. 22 uses barium titanate having a wide particle size distribution as a starting material, although the average particle size is relatively small, and corresponds to (2) and FIG. 17 of FIG.

FIG. 23 shows A described in Example 9 described later.
5] It is a figure which shows the temperature change rate of the dielectric constant and dielectric loss of 5 ₁₂₅₀ (however, it is outside this invention). A5 of this FIG.
₁₂₅₀ uses barium titanate having a small average particle size and a narrow particle size distribution but poor crystallinity as a starting material, and corresponds to (3) and FIG. 19 in FIG.

FIG. 24 shows B4 described in Example 10 below.
(G) ₁₂₅₀ , that is, a diagram showing a temperature change rate of a dielectric constant and a dielectric loss of the dielectric ceramic of the present invention. B of this FIG.
4 (G) ₁₂₅₀ uses tetragonal barium titanate having a small average particle diameter and a narrow particle size distribution and good crystallinity as a starting material, and the element species and the addition amount of the shell agent suitable for the barium titanate. Therefore, the average grain size is small from 0.1 μm to 0.3 μm, the grain distribution is narrow, and a uniform core shell is formed in each grain unit. As shown in (4) and FIG. It corresponds.

FIG. 25 is a diagram showing the temperature change rate of the dielectric constant and the dielectric loss of the porcelain of sample No. 31 (but not of the present invention) in Example 1 described later. In the porcelain of FIG. 25, barium titanate having a relatively small average particle size and a narrow particle size distribution and good crystallinity is used as a starting material, but since the addition amount of the shell agent was not appropriate, it was considered as a core-shell sintered body. This has not occurred and corresponds to (5) and FIG. 20 in FIG.

From these FIGS. 21 to 25, it can be seen that the rate of change in dielectric loss with temperature of the dielectric ceramics of the present invention is also small.

[0102]

EXAMPLES Next, the present invention will be described in more detail with reference to examples. However, the present invention is not limited to only those examples. Prior to the examples, a production example of barium titanate fine powder used in the examples is shown as Reference Example 1. In the following,% indicating concentration is% by weight unless otherwise noted.

Reference Example 1 [Production Example of Barium Titanate Fine Powder] The purity obtained by the hydrothermal synthesis method was 99.9%, and the average particle size was 0.
08 μm, particle size distribution less than 0.05 μm 14%, 0.0
5% or more and less than 0.1 μm 64%, 0.1 μm or more 0.
21% less than 15 μm, 1% less than 0.15 μm and less than 0.20 μm, and barium titanate having a Ba / Ti atomic ratio of 1.016 was provisionally molded and calcined at 1000 ° C. for 2 hours, and then thunder struck. It was crushed with a machine.

Next, wet ball milling was performed using zirconia balls having a diameter of 5 mm. After removing the balls, the resulting slurry was kept at 60 ° C. with simple stirring if necessary, and the pH of the slurry was adjusted with a 5% acetic acid aqueous solution. After that, it is filtered and dried to obtain various B
A fine barium titanate powder having an a / Ti atomic ratio was obtained.

Ba / of the obtained barium titanate fine powder
The Ti atomic ratio was measured using a fluorescent X-ray apparatus manufactured by Philips.

The crystallinity of the barium titanate fine powder was measured by a powder method using an X-ray diffractometer manufactured by Rigaku Co., Ltd., and the lattice constant ratio c / a was 1.010, confirming that a tetragonal crystal was obtained. The X-ray diffraction patterns of the (400) plane and the (004) plane of the obtained barium titanate fine powder are as shown in FIG.

That is, as shown in FIG. 5, the obtained barium titanate fine powder has a (00
4) A clear peak on the surface and 2θ: around 101 ° (40
It has a clear peak on the (0) plane and has a lattice constant ratio c / a of 1.010, which indicates that the crystal is tetragonal.

Further, the average particle size of the primary particles obtained by counting the number of barium titanate fine particles by SEM observation was 0.13 μm.

The particle size distribution of the tetragonal barium titanate fine powder is shown below. Average particle size ± average particle size x 0.5μ
78% when the percentage of the number in the range of m is shown in%
Met.

Particle size distribution 0.05 μm or less 3% 0.05 to 0.10 μm 22% to 0.15 μm 44% to 0.20 μm 19% to 0.25 μm 9% to 0.30 μm 2% to 0.35 μm 1% 0.35 μm or more 0% Average particle size 0.13 μm

Next, Examples 1 to 7 will clarify the element species and the range of addition amount of the additive component as the shell agent.

Example 1 Production of Dielectric Porcelain A dielectric ceramic containing tetragonal barium titanate as the first component, tantalum pentoxide as the second component and cobalt oxide as the third component was produced as shown below.

That is, the tetragonal barium titanate fine powder obtained above was treated with a planetary ball mill using zirconia balls having a diameter of 5 mm for 1 hour, and tantalum pentoxide and cobalt oxide which had been finely pulverized in advance were made into titanium. To 100 mol parts of barium acid, TaO _5/2 and CoO were added so that the component ratios of the sintered bodies (however, shown in Tables 1 and 2) were obtained, and pure water was added using zirconia balls having a diameter of 5 mm. Mix ball mill 10 as solvent
After the time, 3% polyvinyl alcohol was added as a binder to the total solid content, and the mixture was granulated with a spray dryer.

The obtained granules were heated to 200 with a dry powder molding machine.
It was molded into a disk shape having a diameter of 15 mm and a thickness of 1 mm at a pressure of 0 kg / cm ² . After degreasing this molded product in an electric furnace at a temperature of 200 ° C to 600 ° C, 600 ° C to + 10 ° C /
The temperature was raised at a temperature rising rate of 1 minute, the temperature was maintained at 1225 ° C. or 1250 ° C. for 2 hours, and firing was performed to produce a dielectric ceramic.

Tables 1 and 2 show the Ba / Ti atomic ratio and the addition amounts of tantalum pentoxide and cobalt oxide in all the formulations of each sample. Further, in Tables 3 and 4, the firing temperature, the bulk density of the porcelain obtained by firing at the firing temperature, S
The average grain size and grain distribution obtained by EM observation are shown.

In Tables 1 and 2, tantalum pentoxide is represented by TaO _5/2 and cobalt oxide is represented by CoO. These are the same in the following tables.

In this example, sample numbers 1-2
0 is within the scope of the present invention, but sample numbers 21 to 3
No. 3 is out of the scope of the present invention, since the desired characteristics were not obtained, as is apparent from the results of characteristics measurement described later.

[0118]

[Table 1]

[0119]

[Table 2]

[0120]

[Table 3]

[0121]

[Table 4]

In the table, the sample number is a number given by the inventor for distinguishing each experiment, and the Ba / Ti atomic ratio in the entire formulation has various Ba / Ti atomic ratios. It is the Ba / Ti atomic ratio of the barium titanate fine powder measured using a fluorescent X-ray apparatus manufactured by Philips when the barium titanate fine powder was obtained.

The amount of the shell agent to be added means the molar part of tantalum pentoxide and cobalt oxide in terms of TaO _5/2 and CoO based on 100 mol of the barium titanate fine powder blended, more precisely, the barium titanate blended. It is the atomic component ratio of the constituent metal species of tantalum pentoxide and cobalt oxide added to 100 atomic parts of the Ti component in the fine powder.

The firing temperature is the maximum temperature of the porcelain obtained by firing the molded product in an electric furnace for 2 hours, and the bulk density is the weight of the porcelain obtained by firing measured with a micrometer. It is a specific gravity calculated by dividing by the obtained volume, the average grain size is a value obtained by the number average method from SEM observation of the porcelain obtained by firing, and the grain distribution is obtained by firing. Among 3000 pieces of porcelain obtained by measurement by SEM photograph, the value is a percentage of the number of grains having a value within the range of average grain size ± average grain size × 0.5 μm.

In Table 4, sample numbers 21 and 2
No numerical value is entered for the grain sizes 4, 26, 28 and 31 because 50% or more of the grains have a grain size of 0.3 μm or more, which is a porcelain outside the scope of the present invention.

Electrical Properties of Porcelain [0126] Silver paste was applied on both sides of the porcelain obtained as described above and baked at 750 ° C for 10 minutes to form electrodes, which were used as samples for measuring electrical properties by the methods described below. , Electrical characteristics were measured.

For each sample, at a frequency of 1 KHz and a measuring voltage of 1 vrms, a temperature range of -60 ° C to 160 ° C was measured at every 5 ° C step at every step of 5 ° C.
The capacitance C and the dielectric loss tan δ (%) were measured with a meter. Further, the dielectric constant ε at + 20 ° C was obtained from the capacitance C at + 20 ° C. The results are shown in Tables 5 to 7.

Further, +2 in the range of -25 ° C to + 85 ° C.
The maximum value and the minimum value of the temperature change rate of the dielectric constant when the dielectric constant at 0 ° C. is used as a reference, and −55 ° C. to +125
The maximum value and the minimum value of the temperature change rate of the dielectric constant when the dielectric constant at + 25 ° C in the range of ° C was used as a reference were obtained. The results are shown in Tables 5 to 7 as temperature characteristics of dielectric constant.

[0129]

[Table 5]

[0130]

[Table 6]

[0131]

[Table 7]

In Table 7, sample numbers 21 and 2
4, 26, 28, 31 are not written for −25 to + 85 ° C., because these compositions do not provide the desired properties as shown at −55 to + 125 ° C. This is because there is no meaning to display.

Further, the resistivity, breakdown voltage, bias characteristics and bending strength of each sample at 25 ° C. and 125 ° C. were measured. The results are shown in Tables 8 and 9.

The resistivity is 1 at 25 ° C. and 125 ° C.
It was obtained from a value measured by an insulation resistance meter manufactured by Yokogawa Hewlett-Packard Company after applying a voltage of kV / mm for 1 minute.

The breakdown voltage was measured by using a breakdown voltage measuring instrument manufactured by Phase Co., and each sample was boosted with a direct current voltage of 100 V / mm per second in silicon oil at 25 ° C. and a cut-off current was set to 20 mA. Measured.

The bias characteristics were such that at 25 ° C., each sample was 0.1 kV / mm in the range of 0 V / mm to 2.5 kV / mm.
The dielectric constant of each sample was measured when a DC voltage was applied for 1 minute in mm steps. Tables 8 to 9 show, as the bias characteristics, the dielectric constant ε ₀ and 2 kV / at 0 V / mm.
2k from the dielectric constant ε ₂ when applying mm
The reduction rate of the dielectric constant due to the application of V / mm was determined and displayed.

Bias characteristic (%) = [(ε ₂ −ε ₀ ) / ε ₀ ] × 100

The bending strength of each sample was determined by polishing the porcelain surface of each sintered body with abrasive grains 2000 # using a lapping machine manufactured by Hamai Sangyo Co., Ltd. to measure a length of 16.5 mm and a width (w) of 3.5 m.
m, thickness (t) after adjusting to a size of 1.5 mm, with a strength tester manufactured by Shimadzu Corporation, span (L) 13.0 mm
The maximum load P [kgf] was measured with, the bending strength was calculated by the following formula, and the average value of 20 points of the same sample was displayed.

Flexural strength (kg / cm ² ) = (3PL / 2 wt ² ) × 100

[0140]

[Table 8]

[0141]

[Table 9]

In this example, sample numbers 21 to 21
No. 33 is out of the scope of the present invention because the desired characteristics were not obtained. -50> of the bias characteristics in Table 9 is -50%
It shows that it was the following.

Example 2 A dielectric ceramic was produced in the same manner as in Example 1 except that zinc oxide was used as the third component, and its characteristics were measured. The results are shown as in Example 1. In addition, in the present Example, sample numbers 34 to 44 are within the scope of the present invention, but sample numbers 45 to 50 do not have desired characteristics,
It is outside the scope of the present invention.

[0144]

[Table 10]

[0145]

[Table 11]

[0146]

[Table 12]

[0147]

[Table 13]

Example 3 A dielectric ceramic was produced in the same manner as in Example 1 except that magnesium oxide was used as the third component, and its characteristics were measured. The results are shown as in Example 1. In this example, sample numbers 51 to 61 are within the scope of the present invention, but sample numbers 62 to 67 are outside the scope of the present invention because the desired characteristics cannot be obtained.

[0149]

[Table 14]

[0150]

[Table 15]

[0151]

[Table 16]

[0152]

[Table 17]

Example 4 Example 1 was repeated except that nickel oxide was used as the third component.
Dielectric porcelain was prepared in the same manner as above, and the characteristics were measured.
The results are shown as in Example 1. In this example, sample numbers 68 to 78 are within the range of the present invention, but sample numbers 79 to 84 are out of the range of the present invention because desired characteristics cannot be obtained.

[0154]

[Table 18]

[0155]

[Table 19]

[0156]

[Table 20]

[0157]

[Table 21]

Example 5 Example 1 was repeated except that manganese oxide was used as the third component.
Dielectric porcelain was prepared in the same manner as above, and the characteristics were measured.
The results are shown as in Example 1. In addition, in this Example, sample numbers 85 to 95 are within the scope of the present invention, but sample numbers 96 to 101 are out of the scope of the present invention because desired characteristics cannot be obtained.

[0159]

[Table 22]

[0160]

[Table 23]

[0161]

[Table 24]

[0162]

[Table 25]

Example 6 Tantalum pentoxide was added to tetragonal barium titanate fine powder, and two kinds of cobalt oxide, magnesium oxide, zinc oxide, nickel oxide and manganese oxide were selected and added as a third component. Otherwise, in the same manner as in Example 1, a dielectric ceramic was produced and its characteristics were measured. The results are shown as in Example 1.

Although all the third components are oxides, in the following table, for simplification, only the metal species are shown in parentheses. In addition, in Example 6, sample number 1
02 to 133 are within the scope of the present invention, while sample numbers 134 to 153 are outside the scope of the present invention.

[0165]

[Table 26]

[0166]

[Table 27]

[0167]

[Table 28]

[0168]

[Table 29]

[0169]

[Table 30]

[0170]

[Table 31]

[0171]

[Table 32]

[0172]

[Table 33]

[0173]

[Table 34]

[0174]

[Table 35]

[0175]

[Table 36]

[0176]

[Table 37]

Example 7 Tantalum pentoxide was added to tetragonal barium titanate fine powder, and three kinds of cobalt oxide, magnesium oxide, zinc oxide, nickel oxide and manganese oxide were selected and added as a third component. Otherwise, in the same manner as in Example 1, a dielectric ceramic was produced and its characteristics were measured. The results are shown as in Example 1.

Although all the third components are oxides, in the following table, for simplification, only the metal species are shown in parentheses. In addition, each sample number includes Ba
Since the / Ti atomic ratio is 0.990 and the addition amount of tantalum pentoxide is 3.47 mol parts in terms of TaO _5/2 , the display is omitted.

[0179]

[Table 38]

[0180]

[Table 39]

[0181]

[Table 40]

[0182]

[Table 41]

Example 8 To tetragonal barium titanate fine powder, tantalum pentoxide was added, and as the third component, four kinds were selected from cobalt oxide, magnesium oxide, zinc oxide, nickel oxide, and manganese oxide, and Otherwise, in the same manner as in Example 1, a dielectric ceramic was produced and its characteristics were measured. The results are shown as in Example 1.

Although all the third components are oxides, in the following table, for simplification, only the metal species are shown in parentheses. In addition, each sample number includes Ba
Since the / Ti atomic ratio is 0.990 and the addition amount of tantalum pentoxide is 3.47 mol parts in terms of TaO _5/2 , the display is omitted.

[0185]

[Table 42]

[0186]

[Table 43]

[0187]

[Table 44]

[0188]

[Table 45]

Example 9 In this Example 9, as a representative example of the shell agent, tantalum-
We will clarify the effect of the crystallinity of barium titanate powder on the properties of dielectric ceramics when cobalt is selected and used.

Fine barium titanate powders A1 to A5 were prepared by the following method.

A1: Purity 99.9 obtained by hydrothermal synthesis method
%, Average particle diameter 0.06 μm, particle size distribution 0.05 μ
m less than 40%, 0.05 μm or more and less than 0.10 μm 54
%, 0.10 μm or more and less than 0.15 μm 5%, 0.15
Barium titanate powder having a Ba / Ti atomic ratio of 1.016, which is 1 μm or more and less than 0.20 μm and is 1%, is calcinated for 2 hours at 850 ° C., and then crushed for 5 minutes by a crusher. Got by.

A2: Barium titanate obtained by the same hydrothermal synthesis method as A1 was preformed, calcined at 900 ° C. for 2 hours, and then crushed by a crusher.

A3: Barium titanate obtained by the same hydrothermal synthesis method as A1 was preformed, calcined at 950 ° C. for 2 hours, and then crushed by a crusher.

A4: Barium titanate obtained by the same hydrothermal synthesis method as A1 was preformed, calcined at 1000 ° C. for 2 hours, and then crushed by a crusher.

A5: Purity 99.9 obtained by hydrothermal synthesis method
%, Average particle size 0.06 μm, particle size distribution 0.05 μm
Less than 40%, 0.05 μm or more and less than 0.10 μm 54
%, 0.10 μm or more and less than 0.15 μm 5%, 0.15
A barium titanate powder having a Ba / Ti atomic ratio of 0.983, which is 1 μm or more and less than 0.20 μm and is 1%, is provisionally molded and calcined at 1100 ° C. for 2 hours to obtain the powder.

The powders A1 to A5 thus obtained were wet-milled for 15 hours using zirconia balls each having a diameter of 5 mm. After removing the balls, A5 is kept as it is, and for A1 to A4, the obtained slurry is kept at 60 ° C. during simple stirring, pH is adjusted with a 5% acetic acid aqueous solution, and then filtration and drying are performed. A fine barium titanate powder having a / Ti atomic ratio of 0.983 was obtained.

The obtained (004) planes of A1 to A5 and (4)
The X-ray diffraction patterns of the (00) plane are shown in FIGS. The lattice constant ratio c / a of A4 is 1.010, the lattice constant ratio c / a of A3 is 1.009, and the lattice constant ratio c / a of A2 is
Was 1.007, and the peaks of A1 and A5 could not be measured because the peak branching was not clear.

That is, FIG. 2 is an X-ray diffraction diagram of A1. As shown in FIG. 2, A1 has only one peak and no clear branching of the peak is observed. Further, FIG. 6 is an X-ray diffraction pattern of A5, but as shown in FIG. 6, A5 has only one peak and no clear peak branching is observed. Therefore, the lattice constant ratio c / a of these A1 and A5
Could not ask.

FIG. 3 is an X-ray diffraction pattern of A2. As shown in FIG. 3, A2 has a peak around 2θ: 99.8 °. Therefore, the lattice constant ratio c / a was determined to be c. / A
Was 1.007. But at this level, c
/ A is small, and the tetragonal crystal (that is, c / a =
1.09 or more, preferably 1.010 or more).

FIG. 4 is an X-ray diffraction diagram of A3.
In No. 3, as shown in FIG. 4, the peak near 2θ = 99.8 ° becomes slightly larger, and the branching of the peak becomes clear. Then, when the lattice constant ratio c / a of A3 was obtained, it was found that c / a = 1.09, which was just within the range of the tetragonal crystal in the present invention.

FIG. 5 is an X-ray diffraction diagram of A4.
In FIG. 5, there is a clear peak near 2θ = 99.5 °, and the branching of the peak is clear. This A4
The lattice constant ratio c / a of was calculated to be 1.01.
It is 0, which is completely within the range of the tetragonal crystal in the present invention.

Table 46 shows the average particle size and particle size distribution of the powders A1 to A5 determined by SEM observation. Table 46
Each item in the table will be described after Table 46.

In this Example 9, since various barium titanates having different crystallinities are used as described above, the samples described in this Example 9 include those outside the scope of the present invention. There is. That is, as is clear from the description of the crystallinity based on the above X-ray diffraction pattern and the characteristic data described below, A3 and A4 are within the scope of the present invention.
1, A2 and A5 are outside the scope of the present invention.

[0204]

[Table 46]

In Table 46, the mark ◯ in the upper row in the section "Crystallinity c / a" indicates that the barium titanate fine powder has sufficient crystallinity as tetragonal barium titanate used in the present invention. Indicates that the barium titanate fine powder is not sufficient as a tetragonal crystal,
It is shown that it is outside the scope of the present invention. In addition, the numerical value is not written in the lower part of the crossed mark because no clear peak was observed in the X-ray diffraction pattern, so that the lattice constant ratio c / a could not be obtained.

The numerical value in the "particle size distribution" section is
Of the particle diameters obtained from the SEM observation, the ratio of the number of particles within the range of average particle diameter ± average particle diameter × 0.5 μm is shown in%.

The detailed particle size distribution of A1 to A5 is shown in Table 47 below.
It is as follows.

[0208]

[Table 47]

The barium titanate fine powders A1 to A5 obtained as described above were treated with a planetary ball mill using zirconia balls having a diameter of 5 mm for 1 hour, and tantalum pentoxide was finely pulverized in advance. Cobalt oxide,
With respect to 100 mol parts of the barium titanate having a sintered body component ratio, 3.47 mol parts and 1.26 mol parts of TaO _5/2 and CoO, respectively, were added, and wet ball mill mixing was performed using zirconia balls having a diameter of 5 mm. I went for 5 hours.

Then, the total solid content is 3%, respectively.
Was added as a binder and granulated with a spray dryer. After that, it was made porcelain in the same manner as in Example 1, and the temperature characteristics of the bulk density, grain size, dielectric constant, dielectric loss and dielectric constant were examined. The results are shown in Table 48 and Table 49.

[0211] In the upper part of the item "Sample" in Table 48
The mark indicates that the barium titanate used in the present invention is not suitable. It can be seen that in the case of using barium titanate having poor crystallinity, the solid solution reaction occurs before reaching the sintering temperature, and the core-shell structure is not taken at the time of sintering.

Further, A3 and A4, especially A4, were sintered in a state in which barium titanate particles hardly grew even though the fine particles of raw material were used, and at the time of sintering, fine particles which were not used in the past were produced. It can be seen that it is a core-shell sintered body.

[0213]

[Table 48]

[0214]

[Table 49]

Example 10 In this Example 10, the effect of the primary particle size and particle size distribution of tetragonal barium titanate fine powder on the grain size and properties of the dielectric ceramic was measured using tantalum-cobalt. Will be clarified by taking as an example.

Fine tetragonal barium titanate fine powders B1 to B7 were produced by various methods shown below. Table 50
Shows the characteristics of each barium titanate powder.

B1; purity 99.99 obtained by hydrothermal synthesis method
%, Average particle size 0.05 μm, particle size distribution is average particle size ±
83% within the range of average particle diameter × 0.5 μm, and Ba /
It was obtained by calcining barium titanate powder having a Ti atomic ratio of 1.002 at 1050 ° C. for 2 hours.

B2: Obtained by calcining barium titanate powder obtained by the same hydrothermal synthesis method as B1 at 1150 ° C. for 2 hours.

B3: The average particle diameter of barium titanate powder obtained by calcination in B2 obtained from a specific surface area meter with a planetary ball mill using zirconia balls having a diameter of 5 mm (compared with a specific surface area meter manufactured by Shimadzu Corporation). (A value calculated by measuring the surface area and assuming that the particle shape is a sphere from the specific surface area)
Of 0.12 μm.

B4: Tetragonal barium titanate powder was obtained in the same manner as in Reference Example 1. However, if acetic acid treatment is used, Ba
The / Ti atomic ratio was adjusted to 1.002.

B5: Purity 99.99 obtained by hydrothermal synthesis method
%, Average particle size 0.13 μm, particle size distribution is average particle size ±
80% within the range of average particle diameter × 0.5 μm, and Ba /
It was obtained by calcining barium titanate powder having a Ti atomic ratio of 1.023 at 1050 ° C. for 2 hours.

B6; Ba / Ti atomic ratio obtained in B4: 1.
It was obtained by recalcining tetragonal barium titanate of 002 at 1050 ° C. for 2 hours.

B7: Purity 99.9 obtained by hydrothermal method
%, Average particle size 0.15 μm, particle size distribution is average particle size ±
80% within the range of average particle diameter × 0.5 μm, and Ba /
It was obtained by calcining barium titanate powder having a Ti atomic ratio of 1.028 at 1100 ° C. for 2 hours.

[0224]

[Table 50]

In Table 50, the upper circle in the "Crystallinity c / a" section indicates that the barium titanate powder is tetragonal, and B3 was obtained by mechanically pulverizing B2. Therefore, the X-ray diffraction peak was broadened. Therefore, c / a was not measured.

The numerical value in the "particle size distribution" section is
Of the particle diameters obtained from the SEM observation, the ratio of the number of particles within the range of average particle diameter ± average particle diameter × 0.5 μm is shown in%.

The barium titanate powders B1 to B7 obtained as described above were wet pulverized for 15 hours with a ball mill using zirconia balls having a diameter of 5 mm, and then finely pulverized beforehand to the barium titanate powder. The tantalum pentoxide and the cobalt oxide were added to TaO _5/2 and TaO _5/2 , respectively, relative to 100 parts by mole of barium titanate in the sintered body.
Add 3.47 parts by mole and 1.26 parts by mole as CoO, and for samples having a Ba / Ti atomic ratio of 1.002 or more, the Ba / Ti atomic ratio in the entire formulation should be 1.002. Titanium oxide is weighed and added to (2.1 against B5.
0 parts by mole, 2.59 parts by mole with respect to B7), and further wet-milled and mixed for 5 hours.

Then, 3% of polyvinyl alcohol was added as a binder, and then granulated with a spray dryer. Hereinafter, it was made porcelain in the same manner as in Example 1, and the characteristics of the obtained dielectric ceramic were measured in the same manner as in Example 1. The results are shown in Table 51, Table 52, Table 53, Table 54, Table 55 and Table 56.
Shown in.

The values of the average particle diameter and particle size distribution of the tetragonal barium titanate powder in Table 50 are tantalum pentoxide,
It is after pulverization for 15 hours before adding cobalt oxide. In addition, the asterisk * in the upper row in the "Sample" section of Tables 51 and 53 indicates that those barium titanates are not suitable as barium titanate used in the present invention.

[0230]

[Table 51]

[0231]

[Table 52]

[0232]

[Table 53]

[0233]

[Table 54]

[0234]

[Table 55]

[0235]

[Table 56]

Next, in order to further clarify the content of the present invention, in B1 to B7, the particle size distribution of tetragonal barium titanate fine powder before firing as a porcelain and the sintering produced using the fine powder. The body grain distribution is shown in Table 57 and Table 58 side by side.

Table 57 shows the particle size distribution of the tetragonal barium titanate fine powders B1 to B3 and the grain distribution of the sintered body produced by using the fine powders side by side. The distribution is 0.10 μm. Shown in intervals.

Table 58 shows the particle size distribution of tetragonal barium titanate fine powder of B4 to B7 and the grain distribution of the sintered body produced by using the fine powder side by side. The distribution is 0.05 μm. Shown in intervals.

The numbers in Table 57 and Table 58 show the percentage of the number within the particle diameter range with respect to the total number.
(P) in Tables 57 and 58 shows the particle size distribution of barium titanate fine powder, (G) shows the grain distribution of porcelain, and the numbers and tables shown in the subscript below (G) in Table 57. The number indicated by a subscript on the lower right side of G in 58 indicates the firing temperature during porcelainization.

[0240]

[Table 57]

[0241]

[Table 58]

Further, the X-ray diffraction diagrams of the (004) plane and the (400) plane of the surface of the porcelain manufactured in B1 to B7 are shown in FIGS.
3 shows.

That is, although FIGS. 7 to 13 show the same core-shell sintered body, the average primary particle diameter and particle size distribution of barium titanate as a starting material, the average grain size of the core-shell sintered body, and the grain distribution are different. The case shows how the X-ray diffractogram changes.

FIG. 7 is an X-ray diffraction diagram of the surface of a porcelain [B1 (G) ₁₃₀₀ ] having an average grain size of 0.51 μm and using B1 as a starting material.

FIG. 8 is an X-ray diffraction diagram of the surface of a porcelain [B2 (G) ₁₃₅₀ ] having an average grain size of 0.83 μm using B2 as a starting material, and corresponds to (1) and FIG. 16 of FIG. ing.

FIG. 9 shows a porcelain using B3 as a starting material and having a wide grain size distribution with an average grain size of 0.30 μm [B3
FIG. 2B is an X-ray diffraction diagram of the surface of (G) ₁₂₅₀ ], FIG.
17 corresponds to FIG.

FIG. 10 shows a porcelain using B4 as a starting material and having an average grain size of 0.15 μm [B4 (G) ₁₂₅₀ ].
18 is an X-ray diffraction diagram of the surface of FIG.
And is within the scope of the present invention.

FIG. 11 is an X-ray diffraction diagram of the surface of a porcelain [B5 (G) ₁₂₅₀ ] having an average grain size of 0.2 μm and using B5 as a starting material, which is within the scope of the present invention.

FIG. 12 shows a porcelain using B6 as a starting material and having an average grain size of 0.26 μm [B6 (G) ₁₃₀₀ ].
FIG. 3 is an X-ray diffraction diagram of the surface of the above, which is within the scope of the present invention.

FIG. 13 shows a porcelain using B7 as a starting material and having an average grain size of 0.30 μm [B7 (G) ₁₃₀₀ ].
FIG. 3 is an X-ray diffraction diagram of the surface of the above, which is within the scope of the present invention.

As can be seen from FIGS. 7 to 13,
The larger the grain size of the starting barium titanate and the larger the grain size of the porcelain, the stronger the traces of tetragonal crystals.

As is clear from the above characteristic values,
In this Example 10, because various barium titanates having different primary particle diameters are used, the samples described in this Example 10 include those outside the scope of the present invention. That is, although B4 to B7 relate to the present invention, B1 to B7
B3 is outside the scope of the present invention.

14 and 15 will now be described. FIG. 14 shows the surface of a porcelain manufactured using barium titanate as a starting material, which has a small particle size and a narrow particle size distribution but has poor crystallinity. It is an X-ray diffraction diagram of a (004) plane and a (400) plane, and corresponds to (3) and FIG. 19 of FIG.

The barium titanate of the porcelain shown in FIG. 14 corresponds to the sample name A5 described in Example 9 (provided that it is not included in the present invention), and the average grain size of the porcelain is 0.
Although it is 26 μm, some grains have a large grain size as shown in FIG. 19, and the grain distribution is wide, and the porcelain within the scope of the present invention shown in FIG. 12 (the average grain size of the porcelain as in the case of FIG. Is 0.26 μm), and the peak state is different.

In FIG. 15, barium titanate having a relatively small particle size and a narrow particle size distribution and good crystallinity is used as a starting material. However, since the amount of the shell agent added was not appropriate, a core-shell structure was hardly obtained. It is an X-ray diffraction diagram of the (004) plane and the (400) plane of the surface of the porcelain,
It corresponds to (5) and FIG. 20 in FIG.

The porcelain shown in FIG. 15 corresponds to the sample number 31 in Example 1 (but outside the scope of the present invention).
As shown in FIG. 0, some grains have a very large grain size and the grain distribution is wide, and their X-ray diffraction patterns are different from those of the porcelain within the scope of the present invention shown in FIGS. 9 to 13.

Further, FIGS. 16, 17, 18, 19, and 20 show B2 (G) ₁₃₅₀ and B3 (G), respectively.
21 and 2 are SEM (scanning electron microscope) photographs of the surfaces of porcelains of ₁₂₅₀ , B4 (G) ₁₂₅₀ , A4 ₁₂₅₀ and sample No. 31 in Example 1 (however, outside the scope of the present invention).
2, FIG. 23, FIG. 24, and FIG.
(G) ₁₃₅₀ , B3 (G) ₁₂₅₀ , A5 ₁₂₅₀ , B4 (G)
It is a figure which shows the temperature change rate of the permittivity and the dielectric loss of the porcelain of ₁₂₅₀ and the sample number 31 of Example 1 (however, it is outside the scope of the present invention), but these details are as already explained in the section of the action. is there.

FIG. 26 shows B1 (G) ₁₃₀₀ and B2.
It is a figure which shows the voltage dependence of the dielectric constant of the ceramics of (G) ₁₃₅₀ , B4 (G) ₁₂₅₀ , and B7 (G) ₁₃₀₀ . However, in FIG. 26, these are simplified and shown by B1, B2, B4, and B7.

As shown in FIG. 26, B4 (G) ₁₂₅₀ (indicated by B4) and B, which are dielectric ceramics of the present invention, are used.
7 (G) ₁₃₀₀ (indicated by B7) is B outside the present invention.
1 (G) ₁₃₀₀ (B1 is shown) and B2 (G) ₁₃₅₀
(However, as shown by B2), even if the voltage becomes high, the decrease in the dielectric constant is small, and the voltage dependence of the dielectric constant is small.

This is considered to be due to the grain size. That is, B1 (G) ₁₃₀₀ , B2
(G) ₁₃₅₀ , B4 (G) ₁₂₅₀ , B7 (G) ₁₃₀₀ are all core-shell sintered bodies, but B4 (G) of the present invention
₁₂₅₀ has an average grain size of 0.15 μm, B7 (G)
₁₃₀₀ has an average grain size of 0.30 μm, and B1 (G) ₁₃₀₀ outside the present invention has an average grain size of 0.51 μm.
m, B2 (G) ₁₃₅₀ has an average grain size of 0.83μ
m. The voltage dependence of the dielectric constant varies depending on the size of the grain. The smaller the grain, the smaller the voltage dependence of the dielectric constant, and the better characteristics.

Example 11 In Example 11, the effect of the Ba / Ti atomic ratio of barium titanate on the characteristics of the dielectric ceramic will be clarified.

The tetragonal barium titanate fine powder used in Example 1 has the same average particle size and particle size distribution,
Tetragonal barium titanate having various Ba / Ti atomic ratios was prepared by the same method as in Reference Example 1.

The obtained tetragonal barium titanate fine powder was finely pulverized in advance, and tantalum pentoxide, cobalt oxide, magnesium oxide, zinc oxide, nickel oxide, and oxide were mixed in the amounts shown in Table 59. Manganese, barium carbonate, and the like were added, wet ball mill mixing was performed for 10 hours using zirconia balls having a diameter of 5 mm, and thereafter, the same treatment as in Example 1 was performed to produce dielectric ceramics having various Ba / Ti atomic ratios. did.

The characteristics of the obtained dielectric ceramic were measured in the same manner as in Example 1. The results are shown in Tables 60, 61 and 62. Although all the shell agents are metal oxides, the metal species are shown in Table 59.

[0265]

[Table 59]

[0266]

[Table 60]

[0267]

[Table 61]

[0268]

[Table 62]

Comparative Example 1 In this Comparative Example 1, since it is a comparative example with Example 11,
Using the tetragonal barium titanate B1 having an average particle size of 0.41 μm and the tetragonal barium titanate B2 having an average particle size of 0.79 μm prepared in Example 10, various Ba / Ti atomic ratios were obtained in the same manner as in Example 11. A dielectric porcelain having the above was produced. The characteristics of the tetragonal barium titanate fine powder used are shown in Table 63, and the shell agent added during the preparation of the porcelain and the addition amount thereof are shown in Table 64. The characteristics of the obtained dielectric porcelain are shown in Tables 65 and 6.
6, shown in Table 67 and Table 68. The method of measuring the characteristics is the same as that of the first embodiment.

The method of displaying the shell agent and the method of displaying the added amount are the same as in Example 11. Also, firing is 1200
It was carried out at ˜1400 ° C., and the one having the maximum bulk density was adopted.

As shown in Table 63, sample numbers 189 and 19
0, 195, 199 to 202, 206 and 207 are obtained by using the barium titanate of B1 produced in Example 10, and sample numbers 191-194, 196-198 and 20.
Nos. 3 to 205 and 208 use B2 barium titanate.

In Example 11, since the tetragonal barium titanate used had a small particle size and a narrow particle size distribution, the Ba / Ti atomic ratio in the entire blend was 1.044, as a matter of course.
Even if it is 1.062, it can be sintered by firing at 1250 ° C,
It is possible to obtain a dielectric porcelain that sufficiently satisfies the electrical characteristics and bending strength aimed at by the present invention.

However, in Comparative Example 1, since the conventional tetragonal barium titanate having a large average particle size is used, it is difficult to sinter even if the Ba / Ti atomic ratio in the total composition is 1.044 or less. is there.

That is, when tetragonal barium titanate B1 having an average particle diameter of 0.41 μm was used, the Ba / Ti atomic ratio in the entire blend was 1.008, and the baking was performed at 1350 ° C.
1.033 requires calcination at 1400 ° C. Of course, the various characteristics have a large grain size and therefore do not satisfy the characteristics intended by the present invention.

Further, when tetragonal barium titanate B2 having an average particle diameter of 0.79 μm was used, the Ba
When the Ti / Ti atomic ratio is 1.044, it does not sinter even if it is fired at 1400 ° C, and when it is 1.033, it is 1400 ° C.
It can be seen that the sintering is not sufficient despite the firing at.

[0276]

[Table 63]

[0277]

[Table 64]

[0278]

[Table 65]

[0279]

[Table 66]

[0280]

[Table 67]

[0281]

[Table 68]

Example 12 In Example 12, the effects of the temperature rising rate during firing and the firing temperature on the characteristics of the dielectric ceramic will be clarified. Since various conditions are set in this Example 12, the samples of this Example 12 include those outside the scope of the present invention. That is, sample numbers 215 to 217 are outside the scope of the present invention.

The same treatment as in Example 1 was carried out, and tantalum pentoxide and cobalt oxide were added to TaO _5/2 and CoO with respect to 100 parts by mole of barium titanate as a sintered body component ratio, respectively.
The molded body prepared by adding 3.47 mol parts and 1.26 mol parts was placed on a platinum plate in an overlapping manner and placed in a platinum crucible with a lid so that the radiant heat would not directly hit the sample. After degreasing by raising the temperature to 800 ° C. at a temperature rising rate of + 1 ° C./min in an electric furnace, firing was performed at a temperature of 1000 ° C. to 1300 ° C. for 2 hours. The characteristics of the obtained porcelain are shown in Tables 69, 70 and 71. The method of measuring the characteristics is the same as that of the first embodiment.

Sample Nos. 209 to 212 and 215 and 216
Is the same molded body having a Ba / Ti atomic ratio of 0.975, and sample numbers 213, 214, and 217 are the same molded bodies having a Ba / Ti atomic ratio of 0.963. The sample numbers 209, 210, and 215 were fired under the condition that the temperature rising rate from 800 ° C. to the predetermined temperature was + 10 ° C./min, and the sample numbers 211, 212, and 216 were increased from 800 ° C. to the predetermined temperature. It was baked at a temperature rate of + 100 ° C./min. In addition, sample numbers 213, 214, and 217
Is fired under the condition of + 300 ° C./min. All the temperature lowering conditions are −5 ° C./min.

It can be seen that the optimum firing temperature is lowered by 100 to 200 ° C. by rapidly raising the temperature.

[0286]

[Table 69]

[0287]

[Table 70]

[0288]

[Table 71]

[0289]

EFFECTS OF THE INVENTION The dielectric ceramic of the present invention has a small grain size, a narrow grain distribution, and forms a core-shell sintered body that is uniform in grain units. Is small and the voltage dependence of the dielectric constant is small. Moreover, the voltage dependence of the dielectric loss is also small.

Further, the dielectric ceramics of the present invention have an insulation resistance of 10 ¹³ Ωcm or more, and even at 125 ° C., there are some that exceed 10 ¹³ Ωcm. Expressed as a CR product (product of permittivity and resistance), it is 2000 ΩF or more at room temperature, and exceeds 10,000 ΩF with good characteristics.
Even at 125 ° C, most of them exceed 1000ΩF,
Some exceed 2000 ΩF. Further, the breakdown voltage and the bending strength are large, and the withstand voltage strength and the element strength are also excellent.

Furthermore, the dielectric ceramics of the present invention have the above-mentioned excellent characteristics, have a small grain size, and have a Ba / Ti atomic ratio of Ba excess 1300. Since it can be sintered at a low temperature of ℃ or less, it can be said that it is a material suitable for producing a multilayer ceramic capacitor having a thinner film.

[Brief description of drawings]

FIG. 1 is a schematic view of various core-shell sintered bodies.

FIG. 2 is an X-ray diffraction diagram of (004) plane and (400) plane of barium titanate fine powder of sample A1 in Example 9. In addition, all the X-ray diffraction diagrams shown below are CuKα
_Two lines are cut and smoothing processing is performed.

FIG. 3 is an X-ray diffraction diagram of (004) plane and (400) plane of barium titanate fine powder of sample A2 in Example 9.

FIG. 4 is an X-ray diffraction diagram of (004) plane and (400) plane of barium titanate fine powder of sample A3 in Example 9.

5 is an X-ray diffraction diagram of (004) plane and (400) plane of barium titanate fine powder of sample A4 in Example 9. FIG.

FIG. 6 is an X-ray diffraction diagram of (004) plane and (400) plane of barium titanate fine powder of sample A5 in Example 9.

FIG. 7 shows B1 (G) ₁₃₀₀ (Sample B1) in Example 10.
(Porcelain sintered at a firing temperature of 1300 ° C.)
3 is an X-ray diffraction diagram of the (004) plane and the (400) plane of the surface of FIG.

FIG. 8 shows B2 (G) ₁₃₅₀ (Sample B2) in Example 10.
FIG. 3 is an X-ray diffraction diagram of (004) plane and (400) plane of the surface of a porcelain sintered at 1350 ° C. as a starting material.

FIG. 9 shows B3 (G) ₁₂₅₀ (Sample B3) in Example 10.
FIG. 3 is an X-ray diffraction diagram of (004) plane and (400) plane of the surface of a porcelain sintered at 1250 ° C. as a starting material.

FIG. 10: B4 (G) ₁₂₅₀ (Sample B in Example 10)
4 is an X-ray diffraction diagram of (004) plane and (400) plane of the surface of porcelain sintered at a firing temperature of 1250 ° C. using No. 4 as a starting material.

FIG. 11 B5 (G) ₁₂₅₀ (Sample B in Example 10)
5 is an X-ray diffraction diagram of the (004) plane and the (400) plane of the surface of a porcelain sintered at a firing temperature of 1250 ° C. using No. 5 as a starting material.

FIG. 12 shows B6 (G) ₁₃₀₀ (Sample B in Example 10).
6 is an X-ray diffraction diagram of (004) plane and (400) plane of the surface of a porcelain sintered at a firing temperature of 1300 ° C. using 6 as a starting material.

FIG. 13 shows B7 (G) ₁₃₀₀ (Sample B) in Example 10.
7 is an X-ray diffraction diagram of the (004) plane and the (400) plane of the surface of a porcelain sintered at a firing temperature of 1300 ° C. using 7 as a starting material.

FIG. 14 is an X-ray diffraction diagram of (004) plane and (400) plane of the porcelain surface of the porcelain sintered with the sample A5 as a starting material in Example 9 at a firing temperature of 1250 ° C.

FIG. 15 is an X-ray diffraction diagram of the (004) plane and the (400) plane of the surface of the porcelain of sample number 31 (porcelain in which the amount of the shell agent added is outside the range of the present invention) in Example 1.

16 shows B2 (G) ₁₃₅₀ (Sample B) in Example 10. FIG.
2 is a SEM (scanning electron microscope) photograph showing the particle structure of the surface of porcelain sintered at a firing temperature of 1350 ° C. using 2 as a starting material.

FIG. 17 shows B3 (G) ₁₂₅₀ (Sample B) in Example 10.
3 is a SEM photograph showing the particle structure of the surface of porcelain sintered at a firing temperature of 1250 ° C. using 3 as a starting material.

FIG. 18 shows B4 (G) ₁₂₅₀ (Sample B) in Example 10.
4 is a SEM photograph showing a particle structure of a surface of a porcelain sintered at a firing temperature of 1250 ° C. using No. 4 as a starting material.

FIG. 19 is an SEM photograph showing a particle structure on the surface of A5 ₁₂₅₀ (porcelain sintered at a firing temperature of 1250 ° C. using Sample A5 as a starting material) in Example 9.

FIG. 20 is an SEM photograph showing the particle structure of the surface of the porcelain of Sample No. 31 of Example 1 (the range of the amount of the shell agent added is outside the range of the present invention).

21 is a diagram showing the temperature change rate of the dielectric constant and dielectric loss of B2 (G) ₁₃₅₀ in Example 10. FIG.

22 is a diagram showing a temperature change rate of a dielectric constant and a dielectric loss of B3 (G) ₁₂₅₀ in Example 10. FIG.

FIG. 23 is a diagram showing a temperature change rate of dielectric constant and dielectric loss of A5 ₁₂₅₀ in Example 9.

FIG. 24 is a diagram showing a temperature change rate of a dielectric constant and a dielectric loss of B4 (G) ₁₂₅₀ in Example 10.

FIG. 25 is a diagram showing the temperature change rate of the dielectric constant and the dielectric loss of the porcelain of Sample No. 31 (the porcelain in which the addition amount range of the shell agent is outside the range of the present invention) in Example 1.

FIG. 26 shows B1 (G) ₁₃₀₀ and B2 in Example 10.
It is a figure which shows the voltage dependence of the dielectric constant of each porcelain of (G) ₁₃₅₀ , B4 (G) _1250, and B7 (G) ₁₃₀₀ .

─────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission date] January 14, 1993

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0008

[Correction method] Change

[Correction content]

That is, JIS standard Y-class A characteristics (−
The change of the dielectric constant within the range of 25 ° C to + 85 ° C is within ± 5% based on 20 ° C) or Y5E specified by EIAJ,
Y5D, Y5C, Y5B, Y5A characteristics (-30 ℃ ~ + 8
The change in dielectric constant in the range of 5 ° C is ± 4.7% or less, ± 3.3% or less, ± 2.2% or less, ± 1.5 % or less, ± 1. (0% or less) is not satisfied, and of course, the more severe EIAJ X7P, X7
F, X7E, X7D, X7C characteristics (-55 ° C to +125
Change of dielectric constant in the range of ℃ is within ± 10%, within ± 7.5%, within ± 4.7% based on 25 ℃,
Within ± 3.3%, within ± 2.2%) is not satisfied.

[Procedure Amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0026

[Correction method] Change

[Correction content]

When X is 8.8 or more, or when X + Y is 11 or more even when X is less than 8.8, the temperature characteristic of the dielectric constant targeted by the present invention can be exhibited, but more than that. Even if contained, there is no effect of flattening the temperature characteristic of the dielectric constant,
Only it is came a decrease in dielectric constant is a waste.

[Procedure 3]

[Document name to be amended] Statement

[Correction target item name] 0091

[Correction method] Change

[Correction content]

[0091] In FIGS. 21 to 25, the upper figure indicate the rate of change in dielectric constant with temperature change, the lower part of the figure shows the rate of change in dielectric loss with temperature change.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0100

[Correction method] Change

[Correction content]

[0100] Figure 25 is a diagram showing the dielectric constant and temperature coefficient of dielectric loss porcelain sample No. 31 in Example 1 described later (however, the present invention outside ones). In the porcelain of FIG. 25, barium titanate having a relatively small average particle size and a narrow particle size distribution and good crystallinity is used as a starting material, but since the addition amount of the shell agent was not appropriate, it was considered as a core-shell sintered body. This has not occurred and corresponds to (5) and FIG. 20 in FIG.

[Procedure Amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0103

[Correction method] Change

[Correction content]

Reference Example 1 [Production Example of Barium Titanate Fine Powder] The purity obtained by the hydrothermal synthesis method is 99.9%, and the average particle diameter is 0.
08 μm, particle size distribution less than 0.05 μm 14%, 0.0
5% or more and less than 0.1 μm 64%, 0.1 μm or more 0.
Barium titanate having 21% less than 15 μm, 0.15 μm or more and 0.20 μm or less and 1% and a Ba / Ti atomic ratio of 1.016 is temporarily formed, calcined at 1000 ° C. for 2 hours, and then crushed. It was crushed with a machine.

[Procedure correction 6]

[Document name to be amended] Statement

[Name of item to be corrected] 0156

[Correction method] Change

[Correction content]

[0156]

[Table 20]

[Procedure Amendment 7]

[Document name to be amended] Statement

[Name of item to be corrected] 0188

[Correction method] Change

[Correction content]

[0188]

[Table 45]

[Procedure Amendment 8]

[Document name to be amended] Statement

[Name of item to be corrected] 0213

[Correction method] Change

[Correction content]

[0213]

[Table 48]

[Procedure Amendment 9]

[Document name to be amended] Statement

[Correction target item name] 0240

[Correction method] Change

[Correction content]

[0240]

[Table 57]

[Procedure Amendment 10]

[Document name to be amended] Statement

[Correction target item name] 0257

[Correction method] Change

[Correction content]

In addition, FIGS. 16, 17, 18, and 19.
And FIG. 20 show B2 (G) ₁₃₅₀ and B3, respectively.
(G) ₁₂₅₀ , B4 (G) ₁₂₅₀ , A5 ₁₂₅₀ and SEM (scanning electron microscope) photographs of the surface of the porcelain of Sample No. 31 (but outside the scope of the present invention) in Example 1, and FIG. 22, FIG. 23, FIG. 24 and FIG.
Are B2 (G) ₁₃₅₀ and B3 (G), respectively.
₁₂₅₀ , A5 ₁₂₅₀ , B4 (G) ₁₂₅₀ and the sample No. 31 of Example 1 (however outside the scope of the present invention) showing the dielectric constant and the rate of temperature change of the dielectric loss. Is as already explained in the section of action.

[Procedure Amendment 11]

[Document name to be corrected] Drawing

[Name of item to be corrected] Fig. 21

[Correction method] Change

[Correction content]

FIG. 21

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroki Kubota 1-3-47 Funamachi, Taisho-ku, Osaka City Teika Co., Ltd.

Claims (9)

[Claims] 1. Barium titanate as a first component and a second component
A dielectric ceramic obtained by firing a mixture containing tantalum pentoxide as a component and at least one oxide selected from the group consisting of cobalt oxide, zinc oxide, magnesium oxide, nickel oxide and manganese oxide as a third component. Therefore, with respect to 100 mol parts of barium titanate, X mol parts of tantalum pentoxide in terms of TaO _5/2 , and the oxide of the third component are MO (M is Co, Zn, Mg, Ni).
Alternatively, the component ratio in terms of Mn) is Y mol parts, and the average grain size is 0.1.
A dielectric porcelain having a grain distribution of 70 μm or more in the range of average grain size ± average grain size × 0.5 μm. 2.0 <X <8.8 0.3 <Y <3.6 2Y + 0.3 <X 2.8 <X + Y <11 2. Barium titanate as the first component, second
A dielectric ceramic obtained by firing a mixture containing tantalum pentoxide as a component and at least one oxide selected from the group consisting of cobalt oxide, zinc oxide, magnesium oxide, nickel oxide and manganese oxide as a third component. Therefore, with respect to 100 mol parts of barium titanate, X mol parts of tantalum pentoxide in terms of TaO _5/2 , and the oxide of the third component are MO (M is Co, Zn, Mg, Ni).
Alternatively, the component ratio in terms of Mn) is Y mol parts, and the average grain size is 0.1.
A dielectric porcelain having a grain distribution of 70 μm or more in the range of average grain size ± average grain size × 0.5 μm. 2.5 <X <8.8 0.7 <Y <3.6 2Y + 0.3 <X 3.5 <X + Y <11 3. The average grain size is 0.1 μm to 0.2 μm, and the grain distribution is 70% or more within the range of the average grain size ± the average grain size × 0.5 μm. Item 1. A dielectric ceramic according to item 1 or 2. 4. A Ba / Ti atomic ratio of 1.000 or more.
The dielectric ceramic according to claim 3, wherein the dielectric ceramic is in a range of 100 or less. 5. The average particle size of primary particles is 0.1 μm to 0.3 μm, and the particle size distribution of primary particles is 70% or more within the range of average particle size of primary particles ± average particle size of primary particles × 0.5 μm. To 100 mol parts of tetragonal barium titanate fine powder, X mol parts of tantalum pentoxide and / or a precursor of tantalum pentoxide as TaO _5/2 as the second component and cobalt oxide, zinc oxide as the third component , At least one oxide selected from the group consisting of magnesium oxide, nickel oxide and manganese oxide and / or a precursor of the oxide of the third component is MO (M is Co,
2. The method for producing a dielectric ceramic according to claim 1, wherein the composition is added in an amount such that the component ratio in terms of Zn, Mg, Ni or Mn) becomes Y molar parts within the range shown below, and the composition is fired. . 2.0 <X <8.8 0.3 <Y <3.6 2Y + 0.3 <X 2.8 <X + Y <11 6. The average particle size of primary particles is 0.1 μm to 0.3 μm, and the particle size distribution of primary particles is 70% or more within the range of average particle size of primary particles ± average particle size of primary particles × 0.5 μm. To 100 mol parts of tetragonal barium titanate fine powder, X mol parts of tantalum pentoxide and / or a precursor of tantalum pentoxide as TaO _5/2 as the second component and cobalt oxide, zinc oxide as the third component , At least one oxide selected from the group consisting of magnesium oxide, nickel oxide and manganese oxide and / or a precursor of the oxide of the third component is MO (M is Co,
3. The method for producing a dielectric ceramic according to claim 2, wherein an amount is added so that the component ratio when converted to Zn, Mg, Ni or Mn) to be Y mole parts is within the range shown below, and the mixture is fired. . 2.5 <X <8.8 0.7 <Y <3.6 2Y + 0.3 <X 3.5 <X + Y <11 7. Tetragonal barium titanate fine powder having an average primary particle size of 0.1 μm to 0.2 μm and a primary particle size distribution of primary particle average particle size ± primary particle average particle size × 0.5 μm. 70% or more is contained in the range, The manufacturing method of the dielectric ceramics of Claim 5 or 6 characterized by the above-mentioned. 8. The method for manufacturing a dielectric ceramic according to claim 5 or 6, wherein the temperature is raised at a heating rate of 100 ° C./minute or more after degreasing during firing. 9. The method for manufacturing a dielectric ceramic according to claim 5, wherein the temperature is raised at a temperature rising rate of 300 ° C./minute or more after degreasing during firing.