JPH06285664A - Laser irradiation device - Google Patents

Abstract

PURPOSE:To provide a laser irradiation device capable of irradiation so that a quantity of energy per unit area is constant. CONSTITUTION:The laser irradiation device is constituted of a laser beam source 51 emitting a laser beam with variable intensity, a work 52, a fixing bed 53 fixing the work 52, a rack 54 fixed on the fixing bed 53, a first guide 55 installed in parallel with Y1 and Y2 directions on the fixing bed 53, a first stage 56 possible to move back and forth in Y1 and Y2 directions on the guide 55, a driving means 57 driving the first stage 56 in Y1 and Y2 directions, a second guide 58 installed in parallel with X1 and X2 directions on the first stage 56, a second stage 59 capable of moving back and forth in X1 and X2 directions on the second guide 58, a driving means 60 driving the second stage 59 in X1 and X2 directions, a first optical member 61 bending a laser beam coming from the laser beam source 51 in Z2 direction, which is on the second stage 59 and a beam forming means 63 fixed on the second stage 59.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser irradiation device used in laser processing and the like.

[0002]

2. Description of the Related Art In recent years, research and development of a multi-shot type laser irradiation apparatus for processing a work having a large area, for example, excimer laser light into a beam having a small area, and scanning the work while overlapping them, has been actively conducted. Has been done.

A conventional laser irradiation device will be described below. FIG. 9 shows the configuration of a conventional laser irradiation device. In FIG. 9, 1 is a laser light source, 2 is a work, 3
Is a fixed bed for fixing the work 2; 4 is a pedestal fixed to the fixed bed 3; 5 is a first guide installed on the pedestal 4 in parallel with the X1 and X2 directions; 6 is X1 on the guide 5; X
A first stage that can reciprocate in two directions, 7 is a drive unit that drives the first stage 6 in the X1 and X2 directions, and 8 is located on the first stage 6 and is installed parallel to the Y1 and Y2 directions. A second guide, 9 is a second stage that can reciprocate on the second guide 8 in the Y1 and Y2 directions, 10 is a driving unit that drives the second stage 9 on the Y1 and Y2 directions, and 11 is a first guide. A first optical member on the first stage 6 for bending the laser light coming from the laser light source 1 in the Y2 direction, and a second optical member 12 on the second stage 9 for bending the laser light coming from the Y2 direction in the Z2 direction. Member, 13, 14, 15, 16, 17
Is on the second stage 9, and the third, fourth, fifth, sixth, and seventh optical members respectively adjust the laser beam into a predetermined beam shape, and 18 is a diaphragm member that forms the laser beam into a predetermined beam shape. To work.

The operation of the laser irradiation apparatus configured as described above will be described below. First of all, in the multi-shot method in which a beam having a small area is superposed on a workpiece to scan, laser light (for example, an excimer laser) is continuously emitted from one laser light source at a constant frequency of several 100 Hz and at a constant speed during that period. The beams are superimposed on the work by moving the first and second stages 6 and 9 in the X and Y directions by the first and second driving units 7 and 10. The laser light emitted from the laser light source 1 is bent in the Y2 direction by the first optical member 11 on the first stage 6. During that time, the first stage 6 is moving at a constant speed for scanning. The laser light bent in the Y2 direction is bent in the X2 direction by the second optical member 12 on the second stage 9. The shape of the laser light emitted from the laser light source 1 is, for example, a shape of several cm square at the irradiation port. The third and fifth optical members 13 and 15 use, for example, a cylindrical lens to change the size of the laser beam in the vertical direction in order to set the laser beam to a shape of, for example, 1 cm in length and 1 cm in width on the work. Cylindrical lenses are also used for the fourth and sixth optical members 14 and 16 to change the lateral size of the laser light so that the laser light is close to a predetermined shape. Make it 1 cm wide and 1 cm wide. Finally, the diaphragm member 18 is used to form a predetermined shape. The workpiece 2 is continuously irradiated with a predetermined amount of energy by the laser beam having the predetermined shape to perform processing.

[0005]

However, in such a structure, since the laser light has a divergence angle from the laser light source irradiation port, for example, the first stage 6 and the second stage 9 are the extreme ends in the X1 direction and the Y1 direction. Since the laser optical path length is different between the case of being in the portion and the case of being at the extreme end in the X2 direction and the Y2 direction, the shape of the laser light passing through the first optical member 11 and the second optical member 12 is different, and as a result, Energy density depends on the work irradiation position. There is a problem that even if the diaphragm member 18 is finally formed into a predetermined shape, laser light having different energy densities is obtained depending on the irradiation position of the work, and the work cannot be irradiated with a certain amount of energy.

The present invention solves the above-mentioned conventional problems, and an object of the present invention is to provide a laser irradiation apparatus capable of performing irradiation with a constant amount of energy regardless of the positions of the first and second stages. .

[0007]

In order to achieve this object, a laser irradiation apparatus according to the first invention of the present invention irradiates a workpiece by scanning while irradiating a laser beam integrating a predetermined position with a beam of a small area. Then, in a laser irradiation device for processing a work, a laser light source that variably emits an output of the laser light in a first direction, a first stage that holds the work, and the first stage are the first A first guide capable of reciprocating in a second direction perpendicular to the first direction, first driving means for reciprocating the first stage in the second direction, and the first guide arranged to face the work. A mount, a second guide installed on the mount parallel to the first direction, a second stage capable of reciprocating on the second guide in the first direction, and the second stage Drive the stage in the first direction Two drive means, a first optical member fixed to the second stage and bending the laser light in the first direction and a third direction perpendicular to the second direction, and the second optical member. Beam forming means on the stage and arranged parallel to the third direction of the first optical member,
A first measuring means for measuring the energy density of the laser light before or after passing through the beam forming means, or a second measuring means for measuring an optical path length from the laser light source to the second optical member; Control means is provided for varying the output of the laser light source from the first measuring means or the second measuring means.

Further, in the second invention, the laser light source emits laser light at a predetermined output and frequency, and the moving speed of the first stage and the second stage can be varied by the control means. .

Further, in the third invention, the laser light source emits a laser with a predetermined output, the first stage and the second stage are moved at a predetermined speed, and the frequency of the laser light source is changed by the control means. It has a configuration that can.

In the fourth invention, the laser light source emits a laser beam with a predetermined output, and the third stage and the third stage, which are on the second stage and are arranged in parallel to the third direction, are provided. Third driving means for driving the third and fourth optical members on the stage and arranged in parallel to the third direction of the second optical member and the third stage in the third direction And the fifth, sixth, and seventh optical members that are fixed on the second stage in order to the third and fourth optical members in parallel with the third direction, and are configured by the control means. The control means can drive the third drive means.

In the fifth aspect of the invention, the laser light source emits a predetermined output, and the laser light source is provided with a transmittance variable member capable of varying the transmittance by the control means arranged on the optical path of the laser light.

Further, in the sixth invention, by simultaneously driving the first driving means and the second driving means, the laser light is moved to the fourth direction forming 45 degrees in the first and second directions. It has a configuration capable of scanning in a fifth direction perpendicular to the fourth direction.

[0013]

The function of the first invention is to measure the energy density of the laser light or predict it from the laser optical path length, and adjust the output of the laser light so that the laser light from the laser light source emits a constant energy density near the processing position. By doing so, it is possible to perform uniform irradiation with a constant amount of energy by using a laser beam having a uniform energy density.

The operation of the second invention is that the laser light from the laser light source is emitted at a constant frequency and at a constant output, and the moving speeds of the first stage and the second stage are changed to change the work depending on the position of the stage. Even if the above energy density per unit area is different, the irradiation energy amount per unit area can be made constant by superimposing the laser beams, so that uniform irradiation can be performed.

The operation of the third invention is to emit the laser light from the laser light source with a constant output, to keep the moving speed of the first stage and the second stage constant, and to change the frequency of the laser light. Thus, even if the energy density per unit area on the work differs depending on the position of the stage, the irradiation energy amount per unit area can be made constant by superimposing the laser beams, so that uniform irradiation can be performed.

The operation of the fourth invention is that the laser light is emitted from the laser light source with a constant output and the stage moves, so that the laser light of different shape passes through the second optical member. Measure the energy density or predict it from the laser optical path length and set the distance between the third and fourth optical members and the fifth and sixth optical members so that the laser light from the laser light source has a constant energy density near the processing position. It is possible to perform uniform irradiation by adjusting the shape of the laser light by adjusting and adjusting the amount of irradiation energy per unit area with the laser light having a uniform energy density.

The action of the fifth aspect of the invention is to measure the energy density of the laser beam or predict it from the laser beam path length, and to adjust the transmittance variable member so that the energy density of the irradiated laser beam becomes constant near the processing position. By adjusting the transmittance, laser light having a uniform energy density can be formed and uniform irradiation can be performed with a constant amount of energy.

The operation of the sixth aspect of the invention is such that when the laser beam is scanned in the fourth direction, the optical path length of the laser does not change, so that the shape of the laser beam is constant and the laser beam having a constant energy density can be irradiated. Since the laser light from the laser light source may be adjusted only when the laser light is scanned in the fifth direction, it is not necessary to continuously adjust the laser light, and high-speed feeding is possible and high productivity can be obtained.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A laser irradiation apparatus according to an embodiment of the first aspect of the present invention will be described below with reference to the drawings. Figure 1
FIG. 1 is a diagram showing an overall configuration of a laser irradiation device according to a first embodiment of the present invention.

In FIG. 1, reference numeral 51 is a laser light source that emits laser light of variable output at a constant frequency, 52 is a work, and 53 is a work.
Is a fixed bed for fixing the work 52, 54 is a mount fixed to the fixed bed 53, 55 is on the mount 54 Y1,
The first guide 56, which is installed parallel to the Y2 direction, is guide 5
5 is a first stage that can reciprocate in the Y1 and Y2 directions, 57 is a drive unit that drives the first stage 56 in the Y1 and Y2 directions, and 58 is on a mount 54 and is installed parallel to the X1 and X2 directions. The second guide, 59 is the second guide 58
A second stage that can move back and forth in the X1 and X2 directions,
Reference numeral 60 is a driving means for driving the second stage 59 in the X1 and X2 directions, 61 is a first optical member on the second stage 59 for bending the laser light coming from the laser light source 51 in the Z2 direction, and 63 is a second optical member. A beam forming means fixed on the stage 59 for adjusting the beam shape of the laser light, and a measuring means 64 for measuring the energy density of the laser light.

The operation of the laser irradiation apparatus constructed as above will be described below. First of all, in the multi-shot method in which a beam having a small area is superposed on a work and scanned, a laser beam (for example, an excimer laser) whose output can be variably changed is continuously emitted from a laser light source 51 at a frequency of several hundred HZ and kept constant during that period. The first and second stages 56 and 59 are moved in the Y and X directions by the first and second driving means 57 and 60 at the speed of. Laser light source 5
The laser light emitted from No. 1 is bent in the Z2 direction by the first optical member 61 on the second stage 59. Meanwhile, the first stage 56 is moving for scanning. The shape of the laser light emitted from the laser light source 51 is, for example, several cm square at the irradiation port. The laser beam is formed into a predetermined shape by using the beam forming means 63 so that the laser beam has a length of 1 cm and a width of 1 cm on the work. The energy density of the laser light is measured by the measuring means 64 installed in the vicinity of the work 52 with the laser light having the predetermined shape, the laser light is fed back to the laser light source 51 so that the laser light has a constant energy density, and the output is adjusted. Then, a laser beam having a constant energy density and a constant amount of energy is superposed and irradiated, and irradiation is performed with a constant amount of energy per unit area.

As described above, according to the present embodiment, since the laser light has a divergence angle, the laser light path length differs depending on the position of the stage, the shape of the laser light varies, and the energy density per unit area varies. The energy density of the laser light is measured by the means, and the output of the laser light is adjusted so that the laser light has a constant energy density near the processing position. It is possible to irradiate with a constant amount of energy per unit area by superimposing the laser beams having the constant energy density.

The measuring means may be just before the beam forming means, or the stage position may be measured and the optical path length of the laser beam may be converted by the position to calculate the energy density.

The laser irradiation apparatus of the first embodiment will be described below with reference to the drawings. FIG. 1 is a diagram showing the overall configuration of the laser irradiation apparatus in the embodiment.

1 is different from that of the first embodiment in that a laser light source 51 that emits a laser beam at a constant frequency and a constant output, a first stage 56 that can change the moving speed, and a second stage 56 It is stage 59 of.

The operation of the laser irradiation apparatus having the above structure will be described below. First, in the multi-shot method in which a beam having a small area is superposed on a workpiece and scanned, a laser beam (for example, an excimer laser) is continuously emitted from a laser light source 51 and a constant output is obtained by a number 1
It emits at a frequency of 00HZ, during which the first and second stages 5
The moving speed of 6, 59 is changed in the Y and X directions by the first and second driving means 57, 60. For example, the second stage 5
When the energy density per unit area of the laser beam is small depending on the position of 9, the irradiation speed of the laser beam per unit area of the workpiece increases when the stage speed is slowed and the laser beam is irradiated at a constant frequency. become. On the contrary, when the energy density per unit area of the laser light is large, slowing down the stage speed and irradiating the laser light at a constant frequency reduces the number of times the laser beam irradiates the workpiece per unit area. Become. As a result, the irradiation energies per unit area of both are equal and uniform irradiation can be performed.

As described above, according to the present embodiment, since the laser light has a divergence angle, the laser light path length differs depending on the position of the stage, and the laser light shape differs, so that the energy density per unit area on the work differs. Even if the number of laser irradiations per unit area is changed so that the amount of energy per unit area becomes constant by changing the stage speed, uniform irradiation can be performed. The measuring means may be just before the beam forming means, or the stage position may be measured and the optical path length of the laser may be converted by the position to produce the energy density.

A laser irradiation apparatus according to the third embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing the overall configuration of the laser irradiation apparatus in the embodiment.

In FIG. 1, what is different from the configuration of the first embodiment is a laser light source 51 which emits laser light at a variable frequency and a constant output.

The operation of the laser beam irradiation apparatus configured as described above will be described below. First, laser light is emitted from the laser light source 51 at a constant output, during which the first and second stages 56 and 59 are moved at constant speeds in the Y and X directions by the first and second driving means 57 and 60. For example, when the energy density per unit area of the laser light is small depending on the position of the second stage 59, the number of times the substrate is irradiated with the laser light per unit area is increased, and conversely, the unit area of the laser light is increased. When the energy density per hit is high, the irradiation energy per unit area of both is equalized by reducing the number of times of irradiation of the work per unit area with the laser light, and uniform irradiation can be performed.

As described above, according to this embodiment, since the laser light has a divergence angle, the laser light path length differs depending on the position of the stage, and the laser light shape differs, resulting in a difference in energy density per unit area on the work. Even if the number of laser irradiations per unit area is kept constant and the laser irradiation frequency from the laser light source is changed so that the amount of energy per unit area becomes constant, uniform irradiation can be performed. it can. The measuring means may be just before the beam forming means, or the energy density may be calculated by measuring the stage position and converting the optical path length of the laser light according to the position.

A laser irradiation apparatus according to the fourth embodiment of the present invention will be described below with reference to the drawings. FIG. 2 is a diagram showing the overall configuration of the laser irradiation apparatus in the same embodiment.

In FIG. 2, 102 is a work, 103 is a fixed bed for fixing the work 102, and fixed bed 103.
Fixed on the mount 105, on the mount 104 Y1,
A first guide 106 installed parallel to the Y2 direction, a first stage 106 that can reciprocate on the guide 105 in the Y1 and Y2 directions, and 107 a driving unit that drives the first stage 106 in the Y1 and Y2 directions. , 108 are on the gantry 104 and X
The second guide 109 installed parallel to the 1st and X2 directions, 109 is the second stage that can reciprocate in the X1 and X2 directions on the second guide 108, and 110 is the second stage 109.
Driving means for driving in the 1st and X2 directions, 111 is on the second stage 109, and laser light coming from the laser light source is Z2.
First optical member for bending in the direction 113, 114, 11
Reference numerals 5, 116, 117 are on the second stage 109, and the second, third, fourth, fifth, and sixth optical members respectively adjust the laser light into a predetermined beam shape, and 118 is a diaphragm member. To form a predetermined beam shape. Reference numeral 119 is a measuring means for measuring the energy density of the laser light.
The difference from the configuration of FIG. 1 is that a laser light source 101 that emits a constant output and a third guide 120 are installed in parallel to a third direction to allow the second and third optical members 113 and 114 to move in parallel. 121 is the drive means.

The operation of the laser irradiation apparatus having the above structure will be described below. Laser light source 1
Since laser light emitted continuously from 01 with a constant energy density (for example, excimer laser) has a divergence angle, the laser light path length varies depending on the position of the stage, and the shape of the laser light also varies. Although the energy density per hit is different, the second and third optical members 113, 114, and the fourth optical member 113, 114, and the fourth optical member 113, 114, and the fourth optical member 113, 114 are arranged so that the energy density of the laser light is measured by the measuring means 119 installed in the vicinity of the work 102 to obtain a constant energy density. The fifth optical member 115,
The laser light shape is adjusted by adjusting the position of the second and third optical members 113 and 114 by changing the position of the third drive means 121 with respect to the interval of the laser light of a constant density. Then, the work 102 is irradiated with laser light with a certain amount of energy.

As described above, according to this embodiment, since the laser light has a divergence angle, the laser light path length differs depending on the position of the stage, the shape of the laser light differs, and the energy density per unit area also differs. , The energy density of the laser light is measured by the measuring means installed near the work, and the laser light shape is adjusted by changing the position of the optical member so that the laser light has a constant energy density,
A laser beam having a constant energy density is formed and the work is irradiated with the laser beam with a constant amount of energy.

The measuring means may be just before the beam forming means, or the position of the stage may be measured and the optical path length of the laser beam may be converted by the position to calculate the energy density. In this embodiment, the diaphragm member is arranged only immediately before the work, but another diaphragm member is also arranged immediately before the second optical member, and the laser beam is incident on the second optical member. By adjusting the light shape, more uniform laser light can be formed.

A laser irradiation apparatus according to the fifth embodiment of the present invention will be described below with reference to the drawings. FIG. 3 is a diagram showing the overall configuration of the laser irradiation apparatus in the embodiment.

In FIG. 3, 201 is a laser light source which emits a laser beam having a constant output, 202 is a work, 203 is a fixed bed for fixing the work 202, and 204 is a fixed bed 2.
The base fixed to 03, 205 is on the base 204 Y
1, a first guide installed parallel to the Y and Y2 directions, 206 is a first stage that can reciprocate on the guide 205 in the Y1 and Y2 directions, and 207 is a first stage 206 that is Y1 and Y2.
209 is a second guide installed on the gantry 204 in parallel with the X1 and X2 directions.
Is a second stage that can reciprocate in the X1 and X2 directions on the second guide 208, and 210 is a second stage 209 that moves X.
1, driving means for driving in the X2 direction, 211 is on the second stage 209, and a first optical member for bending the laser light from the laser light source 201 in the Z2 direction, 213 is fixed on the second stage 209 and is a laser Beam forming means for adjusting the beam shape of the light, 214 is a measuring means for measuring the energy density of the laser light, 215 is changing the transmittance of the beam,
It is a transmittance variable member that adjusts the energy intensity.

The operation of the laser irradiation apparatus constructed as above will be described below. First, in the multi-shot method in which a beam having a small area is superposed on a work for scanning, a laser beam (for example, an excimer laser) having a constant output is continuously emitted from the laser light source 201 for several hundred Hz.
And the first and second stages 206 and 209 are driven at a constant speed during the first and second driving means 207 and 21.
When it is 0, it is moved in the Y and X directions. The laser light emitted from the laser light source 201 is bent in the Z2 direction by the first optical member 211 on the second stage 209. Meanwhile, the first stage 206 is moving for scanning.
This laser light is formed into a predetermined shape by using the beam forming means 213 and transmitted through the transmittance varying member 215, and the work 2
The energy density of the laser beam is measured by the measuring means 214 installed in the vicinity of 02, and is fed back to the transmittance variable member 215 to adjust the transmittance so that the laser beam has a constant energy density. Thus, it is possible to superimpose and irradiate laser light having a certain amount of energy.

As described above, according to the present embodiment, since the laser light has a divergence angle, the laser light path length differs depending on the position of the stage, the laser light shape differs, and the energy density per unit area also differs. The energy density of the laser light is measured by a measuring means installed in the vicinity, and the transmittance of the transmittance variable member is adjusted so that the laser light has a constant energy density. Irradiation can be performed with a constant amount of energy per unit area by superimposing the laser beams having the constant energy density.

The measuring means may be just before the beam forming means, or the stage position may be measured and the optical path length of the laser beam may be converted by the position to calculate the energy density.

A laser irradiation apparatus according to the sixth embodiment of the present invention will be described below with reference to the drawings. FIG. 4 is a diagram showing the overall configuration of the laser irradiation apparatus in the sixth embodiment of the present invention. FIG. 5 is a diagram showing a laser light irradiation path on a work in the same embodiment. FIG. 6 is a diagram showing the relationship between the laser irradiation position on the work and the laser optical path length in the same example. FIG. 7 is a diagram showing a laser light irradiation path on a work in the seventh embodiment of the present invention. FIG. 8 is a diagram showing the relationship between the laser irradiation position on the work and the laser optical path length in the same example.

In FIG. 4, reference numeral 151 denotes a laser light source that emits laser light having a constant output, and 152 denotes 45 in the X and Y directions.
The work 153 is placed so as to make a turn, and the work 152 is
Is fixed on the fixed bed 153, and 155 is on the fixed bed 153.
A first guide 156 installed parallel to the 1 and Y2 directions, a first stage 156 capable of reciprocating on a guide 155 in the Y1 and Y2 directions, and 157 a first stage 156 which is moved to the Y1 and Y2 directions.
The driving means 158 for driving in the direction 158 is a second guide 159 which is installed on the pedestal 154 in parallel with the X1 and X2 directions.
Is a second stage that can reciprocate on the second guide 158 in the X1 and X2 directions, and 160 is a second stage 159 that moves X.
Driving means for driving in the 1st and X2 directions, 161 is a first optical member on the second stage 156 for bending the laser light coming from the laser light source 151 in the Z2 direction, and 163 is a laser fixed on the second stage 159. A beam forming unit 164 for adjusting the beam shape of light is a measuring unit 164 for measuring the energy density of laser light.

The operation of the laser irradiation apparatus having the above structure will be described below. First, in the multi-shot method in which a beam having a small area is superposed on a work for scanning, a laser light source 151 emits a laser beam (for example, an excimer laser) whose output can be variably changed at a frequency of several hundreds of Hz and is constant during that period. The first and second stages 156 and 159 are moved in the X and Y directions by the first and second driving means 157 and 160 at the speed of. The laser light emitted from the laser light source 151 is bent in the Z2 direction by the first optical member 161 on the second stage 159. This laser light is formed into a predetermined shape by the beam forming means 163 of 163, and the energy density of the laser light is measured by the measuring means 164 installed near the work 152 to obtain the laser light having a constant energy density. By thus feeding back to the laser light source 151 and adjusting the output thereof, the work 152 is overlapped and irradiated with laser light of a certain amount of energy at a certain energy density, and is irradiated with a certain amount of energy per unit area. At this time, as shown in FIG. 5, when the laser light is scanned in the X direction, for example, from the point A to the point B, and in the Y direction, for example, from the point B to the point C, the optical path length changes due to the movement in the X direction as shown in FIG. As shown in FIG. 7, the laser light is directed in the U direction, which forms 45 degrees with the X and Y directions, for example, from point A
When scanning from the point, the V direction, for example, from point B to point C
As shown in, the optical path length is 151
Since the quick response of the output adjustment of the laser light source does not pose a problem so much, the output of the laser is small and the output of the laser can follow the high-speed scan, and a highly productive laser irradiation device can be realized. The output can be adjusted by changing the moving speed of the stage or changing the laser frequency.
Similar effects can be obtained even if the distance between the optical members of the beam forming unit is variable or the transmittance of the transmittance variable member is variable. The measuring means may be just before the beam forming means,
Alternatively, the energy density may be calculated by measuring the stage position and converting the optical path length of the laser light according to the position.

[0045]

As described above, according to the first aspect of the invention, in the laser irradiation device for processing a work by irradiating while irradiating while scanning a beam of a small area with a laser beam in which a predetermined position of the work is integrated, A laser light source that variably emits the output of the laser light in a first direction, a first stage that holds the work, and a first stage that reciprocates in a second direction that is perpendicular to the first direction. A movable first guide, a first drive means for reciprocating the first stage in the second direction, a mount installed to face the work, and the first mount on the mount. Second guide installed parallel to the direction, a second stage capable of reciprocating on the second guide in the first direction, and driving the second stage in the first direction. The second drive means and the second stage. A first optical member for bending the laser light in a third direction perpendicular to the first direction and the second direction; and the third optical member on the second stage Beam forming means arranged in parallel to the direction, and first measuring means for measuring the energy density of the laser light before or after passing through the beam forming means, or from the laser light source to the second optical member. By providing a second measuring means for measuring the optical path length up to and a control means for varying the output of the laser light source from the first measuring means or the second measuring means, the divergence angle of the laser light is increased. Since the laser beam path length varies depending on the stage position and the laser beam shape varies, the energy density per unit area varies. Energy density of laser light by measuring means for measuring the density, measuring means for measuring the optical path length from the laser light source to the second optical member, and control means for varying the output of the laser light source from these measuring means. Excellent laser irradiation by irradiating the work with a certain amount of energy by adjusting the output of the laser light source so that the laser light with a constant energy density can be measured or predicted. Can be realized.

Further, according to the second invention, the laser light source emits laser light at a predetermined output and frequency, and the moving speeds of the first stage and the second stage can be varied, so that the number of laser irradiations per unit area is increased. By changing so that the amount of energy per unit area becomes constant, uniform and excellent laser irradiation can be realized.

According to the third aspect of the invention, the laser light source emits a laser beam having a predetermined output at a variable frequency, and the first stage and the second stage are moved at a predetermined speed so that the workpiece is moved. Even if the energy density per unit area is different, the number of laser irradiations per unit area can be changed by changing the laser irradiation frequency from the laser light source to keep the amount of energy per unit area constant and excellent laser irradiation. Can be realized.

Further, according to the fourth invention, the laser light source emits a laser beam with a predetermined output, and the third stage and the third stage, which are on the second stage and are parallel to the third direction, are provided. A second and third optical member which is on a third stage and is arranged in parallel with the first optical member in the third direction, and a third stage which drives the third stage in the third direction. The driving means and a sixth optical member which is parallel to the third direction and is fixed to the fourth and fifth optical members on the second stage in order, and the laser light is adjusted to a predetermined size. By providing a diaphragm member and a laser irradiation device configured by the control means and capable of driving the third drive means by the control means, the laser light path length differs depending on the position of the stage because the laser light has a divergence angle. The shape of The different energy densities per unit area means that the first measuring means for measuring the energy density of the laser light before or after passing through the beam forming means or the optical path from the laser light source to the second optical member. A second measuring means for measuring the length and a control means for driving the third driving means from the first measuring means or the second measuring means are provided to measure or predict the energy density of the laser light. By changing the position of the optical member so that the laser light has a constant density, the laser light having a constant energy density is irradiated and the work is irradiated, so that the amount of energy per unit area becomes constant and excellent. Laser irradiation can be realized.

According to a fifth aspect of the invention, there is provided the laser irradiation apparatus according to claim 1, wherein the laser light source emits a predetermined output, and the transmittance irradiating member is arranged on the laser optical path and is capable of varying the light amount of the laser light. Since the laser beam has a divergence angle, the laser beam path length varies depending on the stage position, and the shape of the laser beam varies depending on the stage position. First measuring means for measuring the energy density of the laser light, or second measuring means for measuring the optical path length from the laser light source to the first optical member,
Measuring or predicting the energy density of the laser light by providing a control means for varying the output of the laser light source from the first measuring means or the second measuring means,
By adjusting the transmittance of the transmittance variable member so that the laser light has a constant density, irradiating the work with the laser light having a constant energy density so that the energy amount per unit area becomes constant. Therefore, uniform and excellent laser irradiation can be realized.

According to a sixth aspect of the present invention, the first drive means and the second drive means are simultaneously driven so that the laser beam forms a predetermined angle with the first in the work plane. The laser irradiation device according to claim 1, which is capable of scanning and irradiating in four directions and a fifth direction perpendicular to the fourth direction, provides a high frequency even by gently adjusting the output of the laser light source. The laser output can follow the irradiation, and a high-performance laser irradiation device can be realized.

[Brief description of drawings]

FIG. 1 is a perspective view of a laser irradiation apparatus according to first, second and third embodiments of the present invention.

FIG. 2 is a perspective view of a laser irradiation device according to a fourth embodiment of the present invention.

FIG. 3 is a perspective view of a laser irradiation device according to a fifth embodiment of the present invention.

FIG. 4 is a perspective view of a laser irradiation device according to a sixth embodiment of the present invention.

FIG. 5 is a perspective view of a laser irradiation device according to a seventh embodiment of the present invention.

FIG. 6 is a relationship diagram of a laser light irradiation path and a laser light path length in a seventh embodiment of the present invention.

FIG. 7 is an irradiation path diagram of laser light according to an eighth embodiment of the present invention.

FIG. 8 is a relationship diagram of a laser light irradiation path and a laser light path length in an eighth embodiment of the present invention.

FIG. 9 is a perspective view of a laser irradiation device in a conventional example.

[Explanation of symbols]

 51 laser light source 52 work 53 fixed bed 54 frame 55 first guide 56 first stage 57 first drive means 58 second guide 59 second stage 60 second drive means 61 first optical member 63 beam Forming means 64 Measuring means

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Takashi Inoue Takashi Inoue 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Tetsuya Kawamura, 1006 Kadoma, Kadoma City, Osaka Matsushita Electric Industrial Co., Ltd. 72) Inventor Yutaka Miyata 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.

Claims (6)

[Claims] 1. A laser irradiation device for processing a work by irradiating while scanning a beam of a small area while superimposing a beam of a small area with a laser beam integrating a predetermined position of the work to variably output the output of the laser beam. Direction of a laser light source and a first stage for holding the work, a first guide capable of reciprocating the first stage in a second direction perpendicular to the first direction, and the first stage. First drive means for reciprocating the stage in the second direction, a gantry installed facing the work, and a second guide installed on the gantry parallel to the first direction. A second stage capable of reciprocating on the second guide in the first direction, a second drive means for driving the second stage in the first direction, and the second stage The laser beam fixed to the first direction And a first optical member that bends in a third direction perpendicular to the second direction, and beam forming that is on the second stage and is arranged parallel to the third direction of the first optical member. Means and a first measuring means for measuring the energy density of the laser light before or after passing through the beam forming means, or a second measuring means for measuring the optical path length from the laser light source to the second optical member. Irradiating a predetermined position of the work with the condensed laser light, which comprises a measuring means and a control means for varying the output of the laser light source from the first measuring means or the second measuring means. Laser irradiation device characterized by. 2. The laser irradiation apparatus according to claim 1, wherein the laser light source emits laser light at a predetermined output and frequency, and the moving speed of the first stage and the second stage can be varied by the control means. . 3. The laser light source emits laser light with a predetermined output, the first stage and the second stage are moved at a predetermined speed, and the frequency of the laser light source is made variable by the control means. The laser irradiation device according to claim 1. 4. A laser beam source emits a laser beam with a predetermined output, and a second stage is provided on a third stage and a third stage which are on the second stage and are arranged parallel to the third direction. The third and fourth optical members arranged in parallel to the third direction of the member, the third driving means for driving the third stage in the third direction, and the third driving means parallel to the third direction. Third,
The fourth optical member is composed of a fifth, sixth, and seventh optical members fixed on the second stage in order, a diaphragm member for organizing the laser light into a predetermined size, and the control means. 2. The laser irradiation apparatus according to claim 1, wherein the control means can drive the third drive means. 5. A transmittance variable member which emits a laser beam of a predetermined output and is arranged on an optical path of the laser beam and whose transmittance can be varied by the control means. The laser irradiation device described. 6. A fourth direction and a fourth direction in which a laser beam is formed at a predetermined angle with respect to the first direction in a work plane by simultaneously driving the first driving means and the second driving means. 6. The laser irradiation apparatus according to claim 1, wherein the laser irradiation apparatus scans and irradiates in a fifth direction perpendicular to.