JPH06282887A - Magneto-optical recording medium and manufacture thereof - Google Patents

Magneto-optical recording medium and manufacture thereof

Info

Publication number
JPH06282887A
JPH06282887A JP9374293A JP9374293A JPH06282887A JP H06282887 A JPH06282887 A JP H06282887A JP 9374293 A JP9374293 A JP 9374293A JP 9374293 A JP9374293 A JP 9374293A JP H06282887 A JPH06282887 A JP H06282887A
Authority
JP
Japan
Prior art keywords
magneto
recording medium
optical recording
layer
transparent substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9374293A
Other languages
Japanese (ja)
Inventor
Kenichi Aihara
謙一 相原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP9374293A priority Critical patent/JPH06282887A/en
Publication of JPH06282887A publication Critical patent/JPH06282887A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide a magneto-optical recording medium and a method for manufacturing the same in which an intensity of a laser light need not be necessarily varied from an inner periphery toward an outer periphery of a disk in the case of recording. CONSTITUTION:A dielectric layer 2, a recording layer 3, a dielectric layer 4 and a reflecting layer 5 are laminated on a transparent board 1, and the layers are so formed that thicknesses are reduced in a quadratic function manner to a distance from an inner periphery. Thus, a recording sensitivity is raised from the inner periphery toward an outer periphery, and the sensitivity required at not only the inner periphery but also the outer periphery can be satisfied. Formations of such layers can be conducted by sputtering at an outer most periphery of the board with a shielding member.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、レーザ光を用いて情報
の記録、再生、消去を行なう光磁気記録媒体及びその製
造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical recording medium for recording, reproducing and erasing information by using a laser beam and a method for manufacturing the same.

【0002】[0002]

【従来の技術】光磁気記録媒体は記憶容量が大きく、記
録、再生、消去ができ、しかもアクセス速度が磁気テー
プなどよりも圧倒的に速いことから近年急速に普及して
きている。光磁気記録媒体は回転しながら記録、再生、
消去を行なうため、外周部では内周部よりも線速度が速
くなり、単位面積当たりのレーザ光の照射時間が短くな
る。そのため、記録に際して外周部では内周部より強い
レーザ光によって一定温度以上に加熱する必要がある。
しかしこの場合、記録レーザ光の強度を内周から外周に
向かって大きくしなければならないので、半導体レーザ
のパワーマージンを大きくする必要がある。さらにパワ
ー制御の回路等も複雑になるのでドライブ装置にとって
負担となっている。
2. Description of the Related Art Magneto-optical recording media have become popular rapidly in recent years because they have a large storage capacity and can record, reproduce and erase data, and their access speed is much faster than that of magnetic tapes. The magneto-optical recording medium rotates while recording, reproducing,
Since the erasing is performed, the linear velocity in the outer peripheral portion is higher than that in the inner peripheral portion, and the irradiation time of the laser beam per unit area is shortened. Therefore, at the time of recording, it is necessary to heat the outer peripheral portion to a certain temperature or higher with a laser beam stronger than the inner peripheral portion.
However, in this case, since the intensity of the recording laser light must be increased from the inner circumference toward the outer circumference, it is necessary to increase the power margin of the semiconductor laser. Further, the power control circuit and the like are complicated, which is a burden on the drive device.

【0003】また、この問題を光磁気記録媒体側で解決
しようとする場合、磁性層の組成が記録感度と特に関連
が深い要素となっているため、この磁性層の組成を内周
から外周にかけて変化させることが考えられる。しか
し、磁性層の組成を内周から外周にかけて変化させるの
は技術的に非常に困難である上、磁性層の組成は記録感
度以外の記録特性にも影響を与えることとなり、前記の
問題を磁性層の組成を変化させることで解決しようとす
る方策は適当でない。
Further, when attempting to solve this problem on the magneto-optical recording medium side, the composition of the magnetic layer is a factor closely related to the recording sensitivity. Therefore, the composition of the magnetic layer extends from the inner circumference to the outer circumference. It can be changed. However, it is technically very difficult to change the composition of the magnetic layer from the inner circumference to the outer circumference, and the composition of the magnetic layer also affects recording characteristics other than the recording sensitivity. The solution attempted by changing the composition of the layers is not suitable.

【0004】[0004]

【発明が解決しようとする課題】本発明の目的は、記録
に際してレーザ光の強度をディスクの内周から外周に向
かって変化させる必要のあまりない光磁気記録媒体及び
その製造方法を提供することである。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a magneto-optical recording medium which does not need to change the intensity of laser light from the inner circumference to the outer circumference of a disk during recording, and a method of manufacturing the same. is there.

【0005】[0005]

【課題を解決するための手段】前記目的を達成するため
に、本発明によれば、透明基板上に、少なくとも記録層
を含む複数の層を設けてなる光磁気記録媒体において、
前記複数の層は、各層の膜厚が内周からの距離に対して
2次関数的に減少するように形成されていることを特徴
とする光磁気記録媒体が提供される。また、本発明によ
れば、上記光磁気記録媒体を製造する方法であって、透
明基板の最外周部に遮蔽部材を置き、各層をスパタリン
グ法で成膜することを特徴とする光磁気記録媒体の製造
方法が提供される。
In order to achieve the above-mentioned object, according to the present invention, a magneto-optical recording medium comprising a transparent substrate and a plurality of layers including at least recording layers,
A magneto-optical recording medium is provided, wherein the plurality of layers are formed so that the film thickness of each layer decreases quadratically with respect to the distance from the inner circumference. Further, according to the present invention, there is provided a method for manufacturing the above-mentioned magneto-optical recording medium, characterized in that a shielding member is placed on the outermost peripheral portion of the transparent substrate and each layer is formed by a sputtering method. A method of manufacturing the same is provided.

【0006】[0006]

【作用】請求項1の発明では、各層の膜厚が内周から外
周にかけて内周からの距離に対して2次関数的に減少し
ているため、記録感度が内周から外周にかけて高くな
り、内周部のみならず外周部においても要求される記録
感度を満足させることが可能となる。請求項2の発明で
は、各層をスパタリングで成膜するに当たり、透明基板
の最外周部に遮蔽部材を置いて成膜するため、各層は、
それらの膜厚が内周から外周にかけて内周からの距離に
対して2次関数的に減少するように成膜される。
According to the invention of claim 1, since the film thickness of each layer decreases from the inner circumference to the outer circumference in a quadratic function with respect to the distance from the inner circumference, the recording sensitivity increases from the inner circumference to the outer circumference. It is possible to satisfy the required recording sensitivity not only in the inner peripheral portion but also in the outer peripheral portion. In the invention of claim 2, in forming each layer by the sputtering, the shielding member is placed on the outermost peripheral portion of the transparent substrate to form the film.
The film is formed so that the film thickness decreases quadratically from the inner circumference to the outer circumference with respect to the distance from the inner circumference.

【0007】[0007]

【実施例】以下、本発明を実施例に基づき詳述する。図
1は本発明による一構成例の光磁気記録媒体の概略断面
図で、図2は従来の光磁気記録媒体の概略断面図であ
る。両図において、1は透明基板、2及び4は誘電体
層、3は記録層、5は反射層である。図2の従来の光磁
気記録媒体の場合、各層の膜厚が透明基板1上で均一と
なっているが、図1の本発明による光磁気記録媒体は、
各層の膜厚が内周からの距離に対して2次関数的に減少
している。
EXAMPLES The present invention will be described in detail below based on examples. FIG. 1 is a schematic cross-sectional view of a magneto-optical recording medium of one configuration example according to the present invention, and FIG. 2 is a schematic cross-sectional view of a conventional magneto-optical recording medium. In both figures, 1 is a transparent substrate, 2 and 4 are dielectric layers, 3 is a recording layer, and 5 is a reflective layer. In the case of the conventional magneto-optical recording medium of FIG. 2, the film thickness of each layer is uniform on the transparent substrate 1, but the magneto-optical recording medium of the present invention of FIG.
The film thickness of each layer decreases as a quadratic function with respect to the distance from the inner circumference.

【0008】図1の構成の光磁気記録媒体は、各層の膜
厚が内周からの距離に対して2次関数的に減少している
ため、記録感度が内周から外周にかけて高くなり、内周
部のみならず外周部においても要求される記録感度を満
足させることが可能となる。また、記録層3を構成する
磁性層の組成は全面にわたって同一組成であるので、他
の記録特性に影響が及ぶことはない。なお、図1の層構
成は単に例示したものであって、これに限定されるもの
ではなく適宜の層構成を採用できる他、基板の両側に記
録層等を設けた構造、或いは記録層等を設けた一対の基
板を貼り合わせた構造等にすることもできる。
In the magneto-optical recording medium having the structure shown in FIG. 1, since the film thickness of each layer decreases as a quadratic function with respect to the distance from the inner circumference, the recording sensitivity increases from the inner circumference to the outer circumference. It is possible to satisfy the required recording sensitivity not only in the peripheral portion but also in the outer peripheral portion. Further, since the composition of the magnetic layer forming the recording layer 3 is the same over the entire surface, it does not affect other recording characteristics. The layer structure in FIG. 1 is merely an example, and the layer structure is not limited to this, and an appropriate layer structure can be adopted. In addition, a structure in which recording layers and the like are provided on both sides of the substrate, or It is also possible to adopt a structure in which a pair of provided substrates are bonded together.

【0009】次に、上記構成の光磁気記録媒体の製造方
法について説明する。図3(a)は、本発明の方法によ
りスパタリングで各膜を成膜する際に、透明基板の最外
周部に置かれる遮蔽部材を示す図、図3(b)はその断
面図である。図中、11は透明基板であり、その材料と
してはガラス、或いはポリカーボネートなどプラスチッ
ク等が用いられる。12は基板固定治具、13は遮蔽部
材、14はディスクキャリヤである。基板固定治具1
2、遮蔽部材物13は成膜時にディスクキャリヤ14に
固定できるようになっている。遮蔽部材13は透明基板
11の最外周部から1mmの位置まで覆うリング状のも
のでセットしたときの高さは基板面から2mm以上が好
ましく、材料は金属が好ましい。
Next, a method of manufacturing the magneto-optical recording medium having the above structure will be described. FIG. 3A is a diagram showing a shielding member placed on the outermost peripheral portion of the transparent substrate when depositing each film by the method of the present invention, and FIG. 3B is a sectional view thereof. In the figure, reference numeral 11 is a transparent substrate, and its material is glass or plastic such as polycarbonate. Reference numeral 12 is a substrate fixing jig, 13 is a shielding member, and 14 is a disk carrier. Substrate fixing jig 1
2. The shielding member 13 can be fixed to the disk carrier 14 during film formation. The shield member 13 is preferably a ring-shaped member that covers the transparent substrate 11 from the outermost peripheral portion to a position 1 mm away, and the height of the shield member 13 is preferably 2 mm or more from the substrate surface, and the material is preferably metal.

【0010】本発明では、透明基板11上に、各層を成
膜するに当たり、透明基板11をディスクキャリア14
上にセットし、基板固定治具12で透明基板11を固定
するとともに、透明基板11の最外周部に遮蔽部材13
を固定配置する。この状態でスパタリングを行なうこと
により、透明基板11上に成膜される各膜は膜厚が内周
からの距離に対して2次関数的に減少したものとなる。
In the present invention, when forming each layer on the transparent substrate 11, the transparent substrate 11 is attached to the disk carrier 14.
The transparent substrate 11 is fixed on the outermost peripheral portion of the transparent substrate 11 while being set on the transparent substrate 11 by the substrate fixing jig 12.
Fixedly arranged. By performing the sputtering in this state, each film formed on the transparent substrate 11 has a film thickness that decreases quadratically with respect to the distance from the inner circumference.

【0011】次に、実際の作製例を述べる。まず、図1
のようにセットされた状態で、透明基板(直径90m
m)の上に、スパタリング法で誘電体層(SiN、厚さ
100nm)を形成し、この誘電体層の上に希土類−遷
移金属合金からなる記録層(TbDyFeCo、厚さ6
30nm)をスパタリング形成し、その上に誘電体層
(SiN、厚さ40nm)をスパタリング形成し、さら
にその上に反射層(AlTi、厚さ50nm)をスパタ
リング形成し、本発明による光磁気記録媒体を得た。
Next, an actual manufacturing example will be described. First, Fig. 1
The transparent substrate (diameter 90m
m), a dielectric layer (SiN, thickness 100 nm) is formed on the dielectric layer by a sputtering method, and a recording layer (TbDyFeCo, thickness 6 made of a rare earth-transition metal alloy is formed on the dielectric layer.
30 nm) is sputtered, a dielectric layer (SiN, thickness 40 nm) is sputtered thereon, and a reflection layer (AlTi, thickness 50 nm) is sputtered thereon, and the magneto-optical recording medium according to the present invention is formed. Got

【0012】このようにして作製した光磁気記録媒体の
各層の内周部の膜厚を100としたときの各層の膜厚の
半径方向の変化を図4に示す。この図から明らかなよう
に、各層とも、内周からの距離に対して2次関数的に減
少している。また、この光磁気記録媒体の記録しきい値
パワーの半径方向の変化を図3に示す。この図から明ら
かなように、記録しきい値パワーは内周から外周にかけ
て小さくなっている(記録感度は内周から外周にかけて
高くなっている)。
FIG. 4 shows changes in the film thickness of each layer in the radial direction when the film thickness of the inner peripheral portion of each layer of the magneto-optical recording medium thus manufactured is 100. As is clear from this figure, each layer decreases quadratically with the distance from the inner circumference. FIG. 3 shows the change in the recording threshold power of this magneto-optical recording medium in the radial direction. As is clear from this figure, the recording threshold power decreases from the inner circumference to the outer circumference (the recording sensitivity increases from the inner circumference to the outer circumference).

【0013】これらのことから、基板最外周部に遮蔽部
材を置いて、スパタリング法により成膜すると、従来で
は得られなかった各層の膜厚が内周からの距離に対して
2次関数的に減少している光磁気記録媒体が得られ、外
周部に向かって膜厚が薄くなるため記録感度が内周から
外周にかけて高くなることがわかる。
From these facts, when the shielding member is placed on the outermost peripheral portion of the substrate and the film is formed by the sputtering method, the film thickness of each layer, which has not been obtained conventionally, becomes a quadratic function with respect to the distance from the inner circumference. It can be seen that a decreasing magneto-optical recording medium is obtained, and the recording sensitivity increases from the inner circumference to the outer circumference because the film thickness decreases toward the outer circumference.

【0014】[0014]

【発明の効果】本発明によれば、記録に際しレーザ光の
強度をディスクの内周から外周に向かって変化させる必
要のあまりない光磁気記録媒体の提供が可能となる。ま
た、本発明によれば、前記の特徴をもつ光磁気記録媒体
をスパタリング時にディスク最外周部に遮蔽部材を置く
ことにより容易に作製することができる。
According to the present invention, it is possible to provide a magneto-optical recording medium in which it is not necessary to change the intensity of laser light from the inner circumference to the outer circumference of a disk during recording. Further, according to the present invention, the magneto-optical recording medium having the above characteristics can be easily manufactured by placing the shielding member on the outermost peripheral portion of the disk at the time of sputtering.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による一構成例の光磁気記録媒体の概略
断面図である。
FIG. 1 is a schematic cross-sectional view of a magneto-optical recording medium of one configuration example according to the present invention.

【図2】従来の光磁気記録媒体の概略断面図である。FIG. 2 is a schematic sectional view of a conventional magneto-optical recording medium.

【図3】(a)は本発明の方法で使用する遮蔽部材を示
す斜視図、(b)はその断面図である。
3A is a perspective view showing a shielding member used in the method of the present invention, and FIG. 3B is a sectional view thereof.

【図4】本発明による作製例における各層の膜厚の平均
の半径方向の変化を示す図である。
FIG. 4 is a diagram showing an average radial change in film thickness of each layer in a manufacturing example according to the present invention.

【図5】本発明による作製例における記録しきい値パワ
ーの半径方向の変化を示す図である。
FIG. 5 is a diagram showing a change in recording threshold power in a radial direction in a manufacturing example according to the present invention.

【符号の説明】[Explanation of symbols]

1 透明基板 2、4 誘電体層 3 記録層 5 反射層 11 透明基板 12 基板固定治具 13 遮蔽部材 14 ディスクキャリア 1 Transparent Substrate 2, 4 Dielectric Layer 3 Recording Layer 5 Reflective Layer 11 Transparent Substrate 12 Substrate Fixing Jig 13 Shielding Member 14 Disk Carrier

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 透明基板上に、少なくとも記録層を含む
複数の層を設けてなる光磁気記録媒体において、前記複
数の層は、各層の膜厚が内周からの距離に対して2次関
数的に減少するように形成されていることを特徴とする
光磁気記録媒体。
1. A magneto-optical recording medium comprising a transparent substrate and a plurality of layers including at least a recording layer, wherein each of the plurality of layers has a quadratic function with respect to the distance from the inner circumference. A magneto-optical recording medium characterized in that the magneto-optical recording medium is formed so as to be gradually reduced.
【請求項2】 請求項1に記載の光磁気記録媒体を製造
する方法であって、透明基板の最外周部に遮蔽部材を置
き、各層をスパタリング法で成膜することを特徴とする
光磁気記録媒体の製造方法。
2. The method for manufacturing the magneto-optical recording medium according to claim 1, wherein a shielding member is placed on the outermost peripheral portion of the transparent substrate, and each layer is formed by a sputtering method. Recording medium manufacturing method.
JP9374293A 1993-03-29 1993-03-29 Magneto-optical recording medium and manufacture thereof Pending JPH06282887A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9374293A JPH06282887A (en) 1993-03-29 1993-03-29 Magneto-optical recording medium and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9374293A JPH06282887A (en) 1993-03-29 1993-03-29 Magneto-optical recording medium and manufacture thereof

Publications (1)

Publication Number Publication Date
JPH06282887A true JPH06282887A (en) 1994-10-07

Family

ID=14090876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9374293A Pending JPH06282887A (en) 1993-03-29 1993-03-29 Magneto-optical recording medium and manufacture thereof

Country Status (1)

Country Link
JP (1) JPH06282887A (en)

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