JPH06281567A - Double refraction measuring apparatus - Google Patents

Double refraction measuring apparatus

Info

Publication number
JPH06281567A
JPH06281567A JP7906792A JP7906792A JPH06281567A JP H06281567 A JPH06281567 A JP H06281567A JP 7906792 A JP7906792 A JP 7906792A JP 7906792 A JP7906792 A JP 7906792A JP H06281567 A JPH06281567 A JP H06281567A
Authority
JP
Japan
Prior art keywords
sample
motor
measurement
holding
polarizer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7906792A
Other languages
Japanese (ja)
Inventor
Kiyokazu Sakai
清和 酒井
Shinichi Nagata
紳一 永田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New Oji Paper Co Ltd
Original Assignee
New Oji Paper Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by New Oji Paper Co Ltd filed Critical New Oji Paper Co Ltd
Priority to JP7906792A priority Critical patent/JPH06281567A/en
Priority to US08/023,384 priority patent/US5504581A/en
Priority to DE4306050A priority patent/DE4306050A1/en
Publication of JPH06281567A publication Critical patent/JPH06281567A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To simplify the measurement by making a sample holding stage on a holding board rotatable by a motor or the like, and making the holding board inclinable by a motor or the like about a line along the surface of a holding plate as a central shaft, thereby performing measurements while the rotating angle and the inclining angle of a sample are changed. CONSTITUTION:A sample S is set on a sample holding stage, and a motor 5 is started to turn a polarizer 1 and an analyzer 2. A data processing device 11 starts to take in the outputs of an optical sensor 10 when a photoelectric detector 6 detects a reflecting body at a side face of a holding disk of the polarizer 1, with rotating the polarizer 1 and analyzer 2 once. The retardation of the sample S is calculated and stored from the maximal and minimal values of the outputs during this time. After finishing the measurement, the motor is driven to rotate the holding stage, e.g. by 10 deg.. The same measurement is repeatedly carried out. Moreover, the holding stage is inclined, for example, by 5 deg. by a motor 29, and the same measurement is repeated. When the difference between the maximal and minimal values is small, a 1/4 wave plate 15 is inserted into an optical path and the measurement is conducted again. Accordingly, the retardation is obtained from these measurements and the measurement is automated.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、光学的異方性を呈する
材料の3軸方向屈折率を測定するための複屈折計に関す
る。
FIELD OF THE INVENTION The present invention relates to a birefringence meter for measuring the triaxial refractive index of a material exhibiting optical anisotropy.

【0002】[0002]

【従来の技術】延伸したプラスチックシートは一般に複
屈折性を示し、材質が同じであるとき厚さ一定のシート
であれば複屈折の程度によって延伸度合いを判定でき、
延伸度合いが一定の場合厚さの判定ができる。また、材
料の3軸方向の屈折率を測定する必要がある場合もあ
る。この他にもシート状材料の複屈折は色々な目的で測
定されるが、平行配置した偏光子と検光子に対し、試料
を相対的に回転させて透過光強度の変化を検出して、試
料の透過する2つの直線偏光の位相差を求める場合、位
相差がπ近辺になるときは、測定値の精度が低くなると
云う欠点があった。
2. Description of the Related Art Stretched plastic sheets generally show birefringence, and if the sheets are made of the same material and have a constant thickness, the degree of stretching can be determined by the degree of birefringence.
When the degree of stretching is constant, the thickness can be determined. It may also be necessary to measure the triaxial index of refraction of the material. In addition to this, the birefringence of the sheet-shaped material is measured for various purposes, but the sample is rotated relative to the polarizer and the analyzer arranged in parallel to detect the change in transmitted light intensity, In the case of obtaining the phase difference between the two linearly polarized lights that are transmitted, there is a drawback that the accuracy of the measured value becomes low when the phase difference is in the vicinity of π.

【0003】[0003]

【発明が解決しようとする課題】本発明は、試料の3軸
方向の屈折率測定とか、位相差がπ近辺になる場合のレ
ターデーションの測定が簡単にできる複屈折計を提供す
ることを目的とする。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a birefringence meter capable of easily measuring the refractive index of a sample in the three-axis directions and the retardation when the phase difference is in the vicinity of π. And

【0004】[0004]

【課題を解決するための手段】複屈折計において、試料
を保持する台を試料保持基板に回転可能に設置し、同試
料保持台をモータ等で回転駆動させる手段を試料保持基
板上に設け、試料保持基板を試料保持台の表面に沿う一
直線を中心軸にして傾動可能に屈折計本体に保持し,上
記試料保持台をモータ等で傾動駆動させる手段を設け、
上記回転駆動手段及び傾動駆動手段を一定角度づつ回転
させながら測定動作を行う制御手段を設け且つ上記試料
保持台の上方に1/4波長板を屈折計の光軸上に出入で
きるように設けた。
In a birefringence meter, a table holding a sample is rotatably installed on a sample holding substrate, and a means for rotating the sample holding table by a motor or the like is provided on the sample holding substrate. A means for holding the sample holding substrate in the refractometer main body so as to be tiltable about a straight line along the surface of the sample holding base as a central axis and for tilting and driving the sample holding base by a motor or the like is provided.
A control means is provided for performing a measurement operation while rotating the rotation drive means and the tilt drive means by a fixed angle, and a quarter wave plate is provided above the sample holder so that it can be moved in and out on the optical axis of the refractometer. .

【0005】[0005]

【作用】試料の回転及び傾動が自動的に可能であるた
め、試料の傾きを変えながら、色々な傾きで試料を回転
させ、その時の透過光を測定することで、試料を色々な
角度で透過する光の複屈折を測定することができ、ま
た、必要に応じて1/4波長板を試料に重ねた測定がで
きるから、位相差がπ付近になる場合にも、正確なレタ
ーデーションの測定が可能となる。
[Function] Since the sample can be rotated and tilted automatically, the sample is rotated at various tilts while changing the tilt of the sample, and the transmitted light at that time is measured to transmit the sample at various angles. The birefringence of the light can be measured, and the 1/4 wavelength plate can be overlaid on the sample if necessary, so that the accurate retardation can be measured even when the phase difference is near π. Is possible.

【0006】[0006]

【実施例】図1に本発明の1実施例を示す。図で1,2
は偏光子と検光子であり、夫々円板に装着され、各円板
はベルト3,3およびプーリ4,4を介してパルスモー
タ5によって一体的に回転されるようになっており、偏
光子1と検光子2は平行ニコルの状態にしてある。偏光
子1を装着した円板の側面の一個所に反射体の印が付し
てあり、光電的検出器によりこの反射体を検出すること
により、偏光子,検光子の回転の初期位置を検出する。
6は光源で、その出射光はレンズ7で平行光束となり、
偏光子1,検光子2を透過した後、受光素子8上で検出
される。この光検出出力は増幅回路9で増幅され、A/
D変換器10でA/D変換された後、データ処理装置1
1に入力される。データ処理装置11は、測定データを
処理すると共に、各モータにパルスを送り、これの回転
を制御している。12は測定結果を表示するCRTであ
る。13は波長フィルタで、モータ14の回転によって
各種の波長フィルタ13を交換する。15は1/4波長
板で、ガイド16に沿って測定光軸に出入自在に保持さ
れている。Sは試料保持装置Aに保持された試料であ
る。
FIG. 1 shows an embodiment of the present invention. 1, 2 in the figure
Is a polarizer and an analyzer, each of which is mounted on a disc, and each disc is integrally rotated by a pulse motor 5 via belts 3, 3 and pulleys 4, 4. 1 and the analyzer 2 are in a parallel Nicol state. A mark of a reflector is attached to one side surface of the disc on which the polarizer 1 is mounted, and the initial position of rotation of the polarizer and the analyzer is detected by detecting this reflector with a photoelectric detector. To do.
6 is a light source, and the emitted light is a parallel light flux by the lens 7,
After passing through the polarizer 1 and the analyzer 2, it is detected on the light receiving element 8. This photodetection output is amplified by the amplifier circuit 9, and A /
After A / D conversion by the D converter 10, the data processing device 1
Input to 1. The data processing device 11 processes the measurement data, sends a pulse to each motor, and controls the rotation thereof. Reference numeral 12 is a CRT that displays the measurement result. Reference numeral 13 is a wavelength filter, and various wavelength filters 13 are replaced by rotation of the motor 14. Reference numeral 15 is a quarter-wave plate, which is held along the guide 16 so as to be able to move in and out of the measurement optical axis. S is a sample held by the sample holding device A.

【0007】試料保持装置Aの詳細を図2に示す。図2
において、21は試料保持台で、中央に透孔21Aを設
け、裏面を円形にくりぬき、上面に押え板21Bを2箇
所設けている。22は回転台で、試料保持台21の裏面
凹部を円形突部22Aと嵌合させ、試料保持台21を試
料面の垂直軸で回転可能に保持している。23はベルト
で試料保持台21の側面とプーリ24に装着され、モー
タ25によって試料保持台21を回転駆動する。30は
上記モータ25及び回転台22を取付けている基板で、
プーリ24と試料保持台21が1平面上に配置されるよ
うに、モータ25と回転台22の取付面を構成してお
り、両側面に軸31を試料保持台21の表面が中心軸と
なるように取付け、この軸を複屈折計本体に支承させ、
同軸31にプーリ26を取付け、ベルト27及び複屈折
計本体側のモータ29によりプーリ28を介して回動駆
動される。
The details of the sample holder A are shown in FIG. Figure 2
In the above, reference numeral 21 denotes a sample holder, which has a through hole 21A in the center thereof, a back surface which is hollowed out in a circular shape, and two holding plates 21B provided on the upper surface. Reference numeral 22 denotes a rotary table which fits the concave portion of the back surface of the sample holder 21 with the circular protrusion 22A to rotatably hold the sample holder 21 on a vertical axis of the sample surface. A belt 23 is attached to the side surface of the sample holder 21 and the pulley 24, and the motor 25 rotationally drives the sample holder 21. Reference numeral 30 is a substrate on which the motor 25 and the turntable 22 are mounted.
The mounting surfaces of the motor 25 and the rotary table 22 are configured so that the pulley 24 and the sample holder 21 are arranged on one plane, and the shafts 31 are provided on both side surfaces and the surface of the sample holder 21 serves as the central axis. And support this shaft in the main body of the birefringence meter,
A pulley 26 is attached to the coaxial shaft 31, and is driven to rotate by a belt 27 and a motor 29 on the main body of the birefringence meter via a pulley 28.

【0008】上述した装置で試料の複屈折率の測定は次
のようにして行われる。試料を試料保持台21に取り付
け、モータ5を始動させ、偏光子1,検光子2を回転さ
せる。データ処理装置11は偏光子1の保持円板の側面
の反射体が、光電検出器6で検出された時点から光セン
サ10の出力を取込み偏光子,検光子1,2を一回転さ
せる。この結果は極座標表示で示すと、図3のようにな
り、この図における極大値Imax と極小値Imin から試
料のレターデーションδが次式によって求めることがで
きる。 cosδ=2Imin /Imax −1 このようにしてデータ処理装置11はレターデーション
を算出して記憶する。一回の測定が終わると、モータ2
5を駆動させ、試料保持台21を一定角例えば10°回
わして、装置に再び上と同じ動作を行わせる。このよう
にして、試料の向きを変えながらレターデーションを求
め、更に以上の測定動作をモータ29を駆動させて一定
角例えば5°ずつ試料保持台21を傾けることで、試料
の傾斜角度を変えながらレターデーションを求める。以
上の測定動作において、光センサー出力の極大極小の差
が小さく、レターデーションが精密に求め難いと判断さ
れた時は、1/4波長板15を光軸上に進出させて同じ
測定を再度行う。試料保持台21の回転角度をモータ2
5の駆動パルスによって読取り、試料保持台21の傾斜
角度はモータ29の駆動パルスによって読取る。
The birefringence of the sample is measured by the above-mentioned apparatus as follows. The sample is attached to the sample holder 21, the motor 5 is started, and the polarizer 1 and the analyzer 2 are rotated. The data processing device 11 takes in the output of the optical sensor 10 from the time when the reflector on the side surface of the holding disk of the polarizer 1 is detected by the photoelectric detector 6 and rotates the polarizer, analyzers 1 and 2 once. This result is shown in polar coordinates as shown in FIG. 3, and the retardation δ of the sample can be obtained from the maximum value I max and the minimum value I min in this figure by the following equation. cos δ = 2I min / I max −1 In this way, the data processing device 11 calculates and stores the retardation. After one measurement, the motor 2
5 is driven, the sample holder 21 is rotated by a fixed angle, for example, 10 °, and the apparatus is made to perform the same operation as above again. In this way, the retardation is obtained while changing the orientation of the sample, and the motor 29 is driven to further perform the above measurement operation to incline the sample holder 21 by a constant angle, for example, 5 °, thereby changing the inclination angle of the sample. Ask for retardation. In the above measurement operation, when the difference between the maximum and minimum of the optical sensor output is small and it is determined that the retardation cannot be accurately obtained, the ¼ wavelength plate 15 is advanced to the optical axis and the same measurement is performed again. . The rotation angle of the sample holder 21 is set to the motor 2
5 is read by the drive pulse, and the inclination angle of the sample holder 21 is read by the drive pulse of the motor 29.

【0009】[0009]

【発明の効果】本発明によれば、シート状試料の複屈折
率の測定が、試料の傾斜角度及び回転角度を自動的に調
整しながら且つ1/4波長板を自動的に出入させながら
行うことができるようになり、自動測定が可能となっ
た。
According to the present invention, the birefringence of a sheet-shaped sample is measured while automatically adjusting the tilt angle and rotation angle of the sample and automatically moving the quarter-wave plate in and out. It has become possible to perform automatic measurement.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の1実施例の全体構成図FIG. 1 is an overall configuration diagram of an embodiment of the present invention.

【図2】 上記実施例における試料保持台の詳細斜視図 A 試料保持装置 S 試料 1 偏光子 2 検光子 3 ベルト 4 プーリ 5 パルスモータ 6 光源 7 レンズ 8 受光素子 9 増幅回路 10 A/D変換器 11 データ処理装置 12 CRT 13 波長フィルタ 14 モータ 15 1/4波長板 16 ガイド 26 プーリ 27 ベルト 28 プーリ 29 モータFIG. 2 is a detailed perspective view of a sample holder in the above embodiment A sample holder S sample 1 polarizer 2 analyzer 3 belt 4 pulley 5 pulse motor 6 light source 7 lens 8 light receiving element 9 amplification circuit 10 A / D converter 11 Data Processing Device 12 CRT 13 Wavelength Filter 14 Motor 15 Quarter Wave Plate 16 Guide 26 Pulley 27 Belt 28 Pulley 29 Motor

─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成6年3月5日[Submission date] March 5, 1994

【手続補正1】[Procedure Amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】図面の簡単な説明[Name of item to be corrected] Brief description of the drawing

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の1実施例の全体構成図FIG. 1 is an overall configuration diagram of an embodiment of the present invention.

【図2】 上記実施例における試料保持台の詳細斜視図FIG. 2 is a detailed perspective view of a sample holder in the above embodiment.

【図3】 上記実施例における測定結果の極座標表示図FIG. 3 is a polar coordinate display diagram of measurement results in the above-mentioned embodiment.

【符号の説明】 A 試料保持装置 S 試料 1 偏光子 2 検光子 3 ベルト 4 プーリ 5 パルスモータ 6 光源 7 レンズ 8 受光素子 9 増幅回路 10 A/D変換器 11 データ処理装置 12 CRT 13 波長フィルタ 14 モータ 15 1/4波長板 16 ガイド 26 プーリ 27 ベルト 28 プーリ 29 モータ[Explanation of Codes] A sample holding device S sample 1 polarizer 2 analyzer 3 belt 4 pulley 5 pulse motor 6 light source 7 lens 8 light receiving element 9 amplification circuit 10 A / D converter 11 data processing device 12 CRT 13 wavelength filter 14 Motor 15 Quarter wave plate 16 Guide 26 Pulley 27 Belt 28 Pulley 29 Motor

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】試料を保持する台を試料保持基板に回転可
能に設置し、同試料保持台をモータ等で回転駆動させる
手段を試料保持基板上に設け、試料保持基板を試料保持
台の表面に沿う一直線を中心軸にして傾動可能に屈折計
本体に保持し,上記試料保持台をモータ等で傾動駆動さ
せる手段を設け、上記回転駆動手段及び傾動駆動手段を
一定角度づつ回転させながら測定動作を行う制御手段を
設けたことを特徴とする複屈折測定装置。
1. A sample holding substrate is rotatably installed on a sample holding substrate, and means for rotating the sample holding table by a motor or the like is provided on the sample holding substrate. The sample holding substrate is the surface of the sample holding table. A means for tiltably holding the refractometer main body around a straight line along the axis as a central axis and for tilting and driving the sample holder by a motor or the like is provided, and measuring operation is performed while rotating the rotation driving means and the tilting driving means at fixed angles. A birefringence measuring apparatus comprising a control means for performing
【請求項2】上記試料保持台の上方に1/4波長板を屈
折計の光軸上に出入できるように設けたことを特徴とす
る請求項1記載の複屈折測定装置。
2. The birefringence measuring apparatus according to claim 1, wherein a quarter wave plate is provided above the sample holder so as to be able to move in and out on the optical axis of the refractometer.
JP7906792A 1992-02-29 1992-02-29 Double refraction measuring apparatus Pending JPH06281567A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP7906792A JPH06281567A (en) 1992-02-29 1992-02-29 Double refraction measuring apparatus
US08/023,384 US5504581A (en) 1992-02-29 1993-02-26 Method and apparatus for measuring birefringence
DE4306050A DE4306050A1 (en) 1992-02-29 1993-02-26 Measuring double refraction to measure foil thickness - by applying phase plate to sample, measuring intensity of light momentarily passing through, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7906792A JPH06281567A (en) 1992-02-29 1992-02-29 Double refraction measuring apparatus

Publications (1)

Publication Number Publication Date
JPH06281567A true JPH06281567A (en) 1994-10-07

Family

ID=13679545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7906792A Pending JPH06281567A (en) 1992-02-29 1992-02-29 Double refraction measuring apparatus

Country Status (1)

Country Link
JP (1) JPH06281567A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6382345A (en) * 1986-09-26 1988-04-13 Orc Mfg Co Ltd Double refraction measurement and display
JPS63108236A (en) * 1986-10-10 1988-05-13 エヌ・ベー・フィリップス・フルーイランペンファブリケン Spectral ellipsometer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6382345A (en) * 1986-09-26 1988-04-13 Orc Mfg Co Ltd Double refraction measurement and display
JPS63108236A (en) * 1986-10-10 1988-05-13 エヌ・ベー・フィリップス・フルーイランペンファブリケン Spectral ellipsometer

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