JPH06272921A - Clean booth unit and clean room with the same - Google Patents

Abstract

PURPOSE:To enable the obtaining of higher cleanness maintaining the noise at a low level without imposing so much burden on equipment at a low cost by arranging a fan in a duct and lining a delivery chamber with a sound adsorbing member to suppress the noise of air to be sent out. CONSTITUTION:A fan 17 is arranged upper inside a duct 15 and air is introduced through a prefilter 87 at a suction port 16 with the driving of the fan 17. A delivery chamber 22 is made up of a top wall 28. a side wall 29 and a discharge wall 30 to deliver the air. A HEPA filter 18 is arranged on the side of the discharge wall 30 and an adsorption member 19 is packed at an upper part thereof. The delivery chamber 22 is positioned at an upper part of a clean booth unit 2 and clean air is supplied right below an assembly line or a working platform 11.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean booth unit installed corresponding to an assembly line in a clean room used for assembling precision parts and equipment.

[0002]

2. Description of the Related Art In a spindle motor used in, for example, a magnetic disk drive, a magnetic disk to be mounted is arranged to face a head with a small gap, so that high assembly accuracy is required and dust is generated. Strict quality that must not be met is required. For this reason, precision products such as spindle motors must be processed in a dust-free environment from assembly to inspection, and the work room must be clean and the work desks used for the work must also be clean. Such an environment is realized in a clean room, and a clean booth (or clean bench), which is individually partitioned according to the assembly line, is installed and used.

Incidentally, as such precision products are required to have high precision, the cleanliness in the clean room is required to have a higher clean level (for example, class 100). In order to obtain such a high clean environment, the air sent into the clean room is removed by a high-definition (eg ULPA) filter and
It is necessary to use the floor in the clean room as a grating and to perform the entire room in a down-flow system. Alternatively, in order to increase the cleanliness of the air sent from each clean booth, it is necessary to increase the air volume / air velocity per unit area within the limited range.

[0004]

However, in a clean room having the above-mentioned structure, while high cleanliness can be secured, the cost of providing a high-definition filter and the cost thereof is high, and the entire room is large-scaled. However, there is a drawback that it requires a lot of work and the burden associated with this is heavy. Also, in a clean booth, etc., while improving the cleanliness and capacity, the fan built into the clean booth
The noise of the supplied clean air was large, and as a result, the working environment was significantly deteriorated, which was one of the causes of lowering production efficiency.

The present invention has been made in view of the above problems existing in the prior art. The problem is that the cost is low, the burden of equipment is not so great, and noise is generated. While maintaining at a low level, it had high cleanliness,
It is to provide a clean booth unit and a clean room equipped with it.

[0006]

In order to achieve the above object, the clean booth unit of the present invention uses a fan disposed inside to take in air and clean the air through a filter that removes the air. A clean booth unit for supplying various kinds of air; a duct that defines an intake port for taking in air and an air flow path, and a clean booth connected to the duct and provided with the filter. A delivery chamber, the fan is disposed in the duct, and the delivery chamber is equipped with a sound absorbing member for suppressing noise of the delivered air.

Further, in the clean room of the present invention, the clean booth units are arranged at a predetermined interval along the assembly line, and the clean booth units supply the air sent from each clean booth unit, Correspondingly arranged so that the air is sucked from the suction port of the next adjacent clean booth unit.

[0008]

According to the clean booth unit according to the present invention, the air sucked from the suction port is sent to the sending chamber through the duct by the fan provided in the duct. This air contains a noise component due to the fan. The noise level of the air containing the noise component is reduced by the sound absorbing member provided in the delivery chamber. Then, clean air that has passed through the filter is delivered from the delivery chamber.

Further, in the clean room of the present invention, the above clean booth unit is arranged along the assembly line. In the clean booth unit, the air sent from the clean booth unit is arranged at a predetermined interval corresponding to the intake port of the next clean booth unit. Inhaled at the inlet of the unit. Therefore, the air sent from the clean booth unit is prevented from settling in the clean room, so that the clean room is always kept clean. That is, it is possible to obtain a clean room that realizes high cleanliness without using a high-definition filter or installing large-scale equipment.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of a clean room according to the present invention and a clean booth unit installed therein will be described below with reference to the drawings. FIG. 1 is a configuration diagram showing the entire clean room, and FIG. 5 is a configuration diagram showing an air flow path in the clean room of FIG.
In these drawings, clean booth units 2 and 3 are installed on a floor 13 inside a clean room 1. The outside of the clean room 1, that is, the ceiling wall 12
A circulation duct 6 is provided in the upper part of the figure. The circulation duct 6 is connected to a passage connecting a return duct 10 formed by a partition wall 14 provided in the clean room 1 and a HEPA filter 8 arranged on a part of the ceiling wall 12. That is, the circulation duct 6 is the clean room 1
The air in the inside of the clean room 1 is sucked from the air conditioning return 9, and after performing a predetermined cleaning by the filter described below, the clean air is circulated from the ceiling wall 12 into the clean room 1 to circulate the air in the clean room 1. Is.

The member 4 provided in the middle of the circulation duct 6 is a heat exchanger. On the suction side of the heat exchanger 4,
The circulation duct 6 connected from the return duct 10 is connected to the outside air 5 introduced from the outside of the clean room 1 through the pre-filter 49. On the delivery side of the heat exchanger 4, a medium performance filter 7 is arranged near the ceiling wall 12 of the circulation duct 6. Ceiling wall 1
2, a HEPA filter 8 is arranged. As a result, the air returned from the air conditioning return 9 and the outside air 5 are
The temperature is adjusted by the heat exchanger 4, dust is removed by the filters 7 and 8, and the dust is fed from the ceiling wall 12 into the clean room 1.

On the other hand, the return duct 10 is formed by the side wall 99 inside the clean room 1 and the partition wall 14 provided so as to face the side wall 99. The lower end 98 of the partition wall 14 extends close to the floor 13 of the clean room 1, and the space defined by the lower end 98 and the floor 13 is
The suction port 26 of the return duct 10 is formed. Therefore, the air conditioning return 9 collects air from the floor 13 below the clean room 1. And inside the clean room 1, the ceiling wall 1
Since the clean air sent from 2 passes through the clean room 1 and is collected from the vicinity of the floor 13, it does not settle in the clean room 1 and a clean working environment can be maintained.

Reference numerals 2 and 3 in FIG. 1 are clean booth units corresponding to an assembly line or a workbench 11 provided in the clean room 1. The clean booth units 2 and 3 are installed on the floor 13. 2 is shown in FIG.
It is the block diagram which expanded and showed the clean booth unit 2 in. In these drawings, the clean booth unit 2 corresponds to an assembly line or a workbench 11 and has partition walls 21 and 20 for defining a clean air supply area.
Consists of. A partition inner wall 27 is provided inside the partition wall 21, and the duct 15 is configured from the partition wall 21 and the partition inner wall 27. The duct 15 defines an air flow path communicating in the vertical direction as shown in the figure. Further, the lower end portion 95 of the partition wall 21 extends close to the floor portion 13, and the lower end portion 9 extends.
The space defined by 5 and the floor 13 forms the suction port 16 of the duct 15. A pre-filter 87 is attached to the suction port 16.
Is installed.

A fan 17 is provided above the inside of the duct 15.
Is provided, and air is introduced from the suction port 16 through the pre-filter 87 by driving the fan. The introduced air is sent to the delivery chamber 22 that is connected to the duct 15. The delivery chamber 22 is located above the clean booth unit 2 and is provided so as to deliver clean air directly below the assembly line or the workbench 11. The delivery chamber 22 includes a ceiling wall 28,
It is a closed space composed of a side wall 29 and a discharge wall 30 for sending out air. In the internal space of the delivery chamber 22,
The HEPA filter 18 is disposed on the side of the discharge wall 30, and the sound absorbing member 19 is filled in the upper portion of the HEPA filter 18 and is internally provided. Discharge wall 3
For 0, a blow punching plate having a predetermined hole is used.

The air sent from the fan 17 is sent into the sending chamber 22, and the noise component is absorbed by the sound absorbing member 19 inside to reduce the noise.
Clean air is delivered through the PA filter 18.
Therefore, in order to improve the cleanliness of the air, the noise level can be kept low even if the air volume per unit area or the air velocity is increased, that is, even if a fan having a large capacity (in other words, a relatively large noise) is used. . Further, if the filter 18 is formed integrally with the fan, no means for reducing noise could be obtained, but this configuration can effectively reduce noise. Further, since it is not necessary to take soundproofing measures on the fan itself, which is a noise generation source, general-purpose products such as sirocco fan and turbo fan that are commonly used can be used.

In the clean booth unit 2 of the present invention,
The fan 1 is installed in the duct 15 connected to the delivery chamber 22.
Since 7 is provided, the air sent from the fan 17 is once stored in the sending chamber 22. Then, the sound absorbing member 19 in the delivery chamber 22 delivers the clean air through the HEPA filter 18 while keeping the air volume and the air velocity of the delivered air intact, that is, in the state where only the noise component is reduced. As the sound absorbing member 19, it is desirable to use glass fibers such as glass wool covered with a dust-free garment, and other fiber materials having extremely little dust emission may be used. In the clean booth unit of this configuration, 1 below the center of the discharge surface of the discharge wall 30
The noise level measured at m is 56 dB (A)
(However, the background noise value was 42 dB (A)). In the clean booth unit in which the filter and the fan are integrally formed, when the fan and the device having the same characteristics are used, the result is 72 dB (A). By the way,
When the noise level is 65 dB (A) or more, it may be a considerable obstacle in conducting normal conversation. Also in the working environment, a noise value of 65 dB (A) or less is required.

Further, in the clean booth unit 2, the suction port 16 for introducing air is the clean booth unit 2
Since the air is sent to the clean room 1, the air sent into the clean room 1 is introduced into the clean booth unit 2 without settling. Also, the provision of the pre-filter 87 improves the cleanliness of the air.

Next, in the clean booth unit 2,
The discharged clean air is discharged to the outside of the clean booth unit 2 by the discharge portion 23 defined between the partition wall 20 on the working side and the floor portion 13. Corresponding to the discharge portion 23, at a predetermined interval, in this embodiment, about 1.2 m
The next clean booth unit 3 is installed at intervals. The clean booth unit 3 also has the same configuration as the clean booth unit 2. And
The suction port 24 of the clean booth unit 3 is arranged to face the discharge booth 23 of the clean booth unit 2. Therefore, the air discharged from the clean booth unit 2 does not settle on the way, is dedusted by the prefilter 88, and is sucked into the clean booth unit 3. Then, the air discharged from the discharge part 25 of the clean booth unit 3 is sucked by the return duct 10 provided on the side wall and collected in the air conditioning return 9. Since the air thus discharged is collected near the floor portion 13 in the clean room 1, the air in the clean room 1 does not settle.

Therefore, the HEPA filter is sufficient as the filter 8 for feeding the entire inside of the clean 1 without using a high-definition and expensive filter such as ULPA, and it is provided in each clean booth unit 2, 3. Filter 18
The HEPA filter can secure a working environment with sufficient air cleanliness and can suppress noise generated from each clean booth unit to a sufficiently low level. In addition, the suction port 1 of each clean booth unit 2 and 3
Since the pre-filters 87 and 88 are respectively provided in 6 and 24, the cleanliness of air is further enhanced. The external dimensions of the clean booth units 2 and 3 of the present invention are such that the height from the floor portion 13 to the ceiling wall 28 is about 2.5 m,
The width from the partition wall 20 to the partition wall 21 is about 1.8 m. The opening size of the suction ports 16 and 24 is
It opens from the floor 13 to a height of about 0.6 m. The optimum opening size may be selected according to the aspect of the clean room 1 and the flow rate and speed of the air discharged from the clean booth units 2 and 3.

FIG. 3 is a block diagram showing an example of the interior of the sound absorbing member 19 in the clean booth units 2 and 3 shown in FIGS. 1 and 2. In the above, in the delivery chamber 22,
Although the example in which the sound absorbing member 19 is filled has been described, the inside of the delivery chamber 22 may be provided in a wavy shape as shown in FIG.
Regarding the method of installing the sound absorbing member 19, various layouts can be implemented at any time depending on the internal form of the delivery chamber 22.

FIG. 4 is a block diagram showing another embodiment of the clean booth unit. The clean booth unit 50 of FIG. 4 is a so-called clean bench type. Also in this embodiment, the sound absorbing member 6 is provided in the delivery chamber 43.
It is filled with 6 and decorated. A suction port 47 for sucking air is provided in the lower portion of the work table 46, and the suction port 47
A filter 42 is provided in the. Also duct 45
A fan is arranged in the lower part of the. Therefore, the fan 41
A relatively long distance can be provided from the exhaust chamber 48 to the delivery chamber 43 through the duct 45, and the clean air delivered from the discharge wall 48 can further reduce noise. Further, as in the previous embodiment, since the filters are doubly arranged, the cleanliness can be further improved. In addition, the suction port 47 as in the above-described embodiment.
However, since it is positioned in the lower part, it can be installed in the clean room 1 shown in FIG. 1 to realize a clean room that maintains high cleanliness. In addition, it can be realized at low cost without using a high-definition ULPA filter or the like.

Although the clean booth unit and the clean room according to the present invention have been described above in detail, the present invention is not limited to these and can be freely modified within the scope of the gist of the present invention. For example, it is possible to freely design and select the number of clean booth units installed, their shapes, the type of fans, and the number of fans used. The layout of the sound absorbing member to be installed in the delivery chambers 22 and 43 and the material used can be freely selected. Further, in the duct 15 of the clean booth unit 2 shown in FIG. 1 and FIG.
Although 8 and 42 are provided, this may be omitted depending on the cleanliness. Needless to say, the mounting positions of the fans 17 and 41 arranged in the ducts 15 and 45 can be freely determined in the ducts.

[0023]

Since the clean room and the clean booth unit of the present invention have the above-mentioned structure, they have the following effects. That is, it is possible to obtain a clean booth unit and a clean room equipped with the clean booth unit, which has a low cost, does not require much burden on the equipment, and has a high level of noise while maintaining a low level of noise. Even when an environment with a cleanliness such as class 100 is obtained, a normal HEPA filter can be adequately used, and the noise can be suppressed without increasing the equipment cost, thus improving the working environment. Can be planned.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an entire clean room in which a clean booth unit of the present invention is installed.

FIG. 2 is a configuration diagram of the clean booth unit shown in FIG.

FIG. 3 is a configuration diagram showing a part of FIG. 2 in an enlarged manner.

FIG. 4 is a configuration diagram showing another embodiment of the clean booth unit of the present invention.

5 is a flow diagram showing an air flow path in the clean room of the present invention shown in FIG.

[Explanation of symbols]

 1 Clean room 2,3 Clean booth unit 4 Heat exchanger 7 Medium performance filter 8,18 HEPA filter 15 Duct 16,24 Suction port 17,41 Fan 49,87,88 Pre-filter

Claims (2)

[Claims] 1. A clean booth unit in which air is taken in by a fan disposed inside, and clean air is sent through a filter for removing the dust, and a suction port and air for taking in air. A duct that defines a flow path, and that is connected to the duct and is provided with the filter,
A delivery chamber for delivering clean air, wherein the fan is disposed in the duct, and the delivery chamber is provided with a sound absorbing member for suppressing noise of the delivered air. A characteristic clean booth unit. 2. A clean room in which the clean booth unit according to claim 1 is arranged, wherein the clean booth units are arranged at a predetermined interval along an assembly line, and the clean booth units are: A clean room characterized in that it is arranged so that the air sent from each clean booth unit is sucked in through the suction port of the next adjacent clean booth unit.