JPH0340334Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a filter unit used in clean rooms such as semiconductor manufacturing factories and hospitals.

[Conventional technology]

Generally, a filter unit is installed on the ceiling of a building or above various equipment such as a clean bench, and is used to blow clean air into a room or a container to maintain the cleanliness inside the room or the above-mentioned equipment.

A conventional filter unit consists of a filter for removing dust, a fan for blowing air through the filter, and a casing box that houses these.The dust should be removed from the suction port formed in the casing box. It takes in air, passes through a filter, and blows out clean air from the outlet into the clean room.

However, since this filter unit is installed on the ceiling or above various equipment such as a clean bench, there is a demand for a filter unit with a small height. This is because if the height of the filter unit is small, the height of the ceiling space can be lowered when installed on the ceiling, reducing building construction costs. When installing, if the height of the filter unit is small, the overall height of the clean bench can be reduced, and if the height from the floor to the ceiling is restricted by the overall height of the clean bench. This is because the height of the building can be lowered by the amount that the overall height of the clean bench is lowered, so the construction cost of the building can be significantly reduced.

[The problem that the idea aims to solve]

However, when a multi-blade blower is used as the blower, the outer dimensions of the multi-blade blower's casing are larger than the outer diameter of its impeller, so in order to accommodate the multi-blade blower in the filter unit, the filter
The height of the unit must be increased, which increases the height of the building, which is not only uneconomical in terms of equipment, but also requires a large-capacity air blower to maintain cleanliness in a wide range of rooms. There were still problems, such as the need to use additional equipment and the need for increasingly large-scale equipment.

The present invention eliminates these conventional drawbacks and is an economical device that uses a compact filter unit with a low height to more effectively use the pressure boost of the blower and significantly reduces pressure loss, resulting in extremely efficient operation. The purpose is to provide

[Means to solve the problem]

In the present invention, a plurality of suction ports 19 and a plurality of blow-off ports 20 are formed in the casing box 4, and a plurality of blow-off ports 20 are respectively communicated with the suction ports 19, and a filter 10 is provided corresponding to each blow-off port 20. 10 and the centrifugal blower 11 communicating with the suction port 19, the inside of the casing box 4 is divided into a suction side and a discharge side by an inner plate 21, and the centrifugal blower 1
1 is fixed to an inner plate 21, a connecting plate 23 is interposed between the inner plate 21 and the outer plate of the casing box, and the outer plate of the casing box, the inner plate 21, and the connecting plate 23 are interposed between the inner plate 21 and the outer plate of the casing box. As a result, a duct portion 22 is formed to guide the air sucked in from each suction port 19 to the suction port 14 of each centrifugal blower 11, and
Furthermore, the filter unit is characterized in that a partition member 17 is fixedly provided to the inner plate 21 for dividing the air blowing area between each centrifugal blower 11.

〔Example〕

In FIG. 1, a casing box 4 in which a filter 10 is located has a discharge port and a suction port opened in a clean room 1 surrounded by a floor surface 2 and a ceiling surface 3, and is attached to a building etc. using a hanging bracket 7 on a ceiling frame 8. It is the same as the conventional example in that it is installed or installed as an air conditioner 5 outside the side of the building, but as shown in FIGS. A plurality of filters are arranged in parallel or in series on the same plane, or a combination of both is used, and a filter 1 is placed at the bottom of the casing box 4.
0 corresponding to the discharge port of each centrifugal blower 11,
Air to be removed from dust can be pumped through the filter 10.

The centrifugal blower 11 has a fan casing 12, and a driving electric motor 13 is installed at the fan suction port 14, that is, the electric motor 13 is installed on the blower suction side,
The impeller 15 as the fan is connected to the motor rotation shaft 1.
The motor rotating shaft 16 of the centrifugal blower 11 is installed in the height direction of the filter 10 and is housed in the casing box 4, and each A partition member, such as a partition plate 17, which divides the air blowing areas between the centrifugal blowers 11, is arranged to connect the opening edges of the discharge ports 18 of the centrifugal blowers 11. The partition plate 17 may be a flat plate, but a corrugated plate or a curved plate capable of guiding the flow may be selected depending on the arrangement of the centrifugal blower, and is provided to partition the inside of the casing box 4.
A sound insulating plate, filter, punched metal, or the like may be used if necessary.

In these cases, when multiple centrifugal blowers 11 are arranged in parallel in a filter unit, care must be taken to prevent the airflows discharged from each blower from colliding with each other or interfering with each other, resulting in loss of pressure energy of the airflows. To prevent pressure loss, connect one blower outlet and the other outlet with a partition plate 17 (a partition plate with a height equal to or greater than the width of the blower outlet width B ₁ ″). It is considered that the increased pressure can be used more effectively and the air volume of the filter unit can be increased.

The partition plate 17 may be linear, but if it is a corrugated plate, for example, an S-shaped curved plate, the expansion angle will be small in the area where the flow velocity is high near the blower outlet, so there will be an advantage that the loss pressure due to expansion will be reduced. be.

The casing box 4 is formed into a box shape with an outer plate and a side plate each having a plurality of suction ports 19 for taking in air to be removed and a plurality of blow-off ports 20 for blowing out clean air that has passed through the filter 10.
1, and is equipped with a duct part 22 that guides the air sucked in from the suction port 19 to the suction port 14 of the centrifugal blower 11.If necessary, the fan casing 12 may be used together with the inner plate, and the inner plate A reinforcing connecting plate 23 is interposed between the casing box 21 and the outer panel of the casing box 4. The centrifugal blower 11 is bolted to a blower mounting seat 24, and it is convenient that the mounting seat 24 is fixed to the inner plate 21 and fixedly housed within the casing box 4, and furthermore, the above-mentioned communication As shown in FIG. 4, the plate 23 may be used as a partition wall to form a duct for air guidance, or may be configured as a guide vane or movable vane (not shown) for guidance. It is an effect.

Note that this communication plate 23 connects the outer plate and the inner plate 21, and is enclosed in a closed state around the blower suction port 14, and is connected to the suction port 1 of the casing box 4.
The method is to suck all the air sucked in from 9 into the blower 11 and prevent it from flowing into another blower.
Although it is preferable that there is no interference at the blower suction port and the airflow sucked in is not disturbed and the performance of the blower is not deteriorated, it is also possible to guide only on both sides. The structure has increased rigidity and can sufficiently support the blower even if the plate thickness is thin, making it possible to provide a structure that prevents vibrations caused by blower operation.

In the specific example shown in FIG. 5, three of the blowers 11 are arranged in parallel in the casing box 4, each having an inlet 19 and an outlet 20, and the centrifugal blowers are separated by partition plates 17, 17. It is attached.

Note that a sound deadening material (not shown) may be installed inside the casing box 4, and the number of air outlets 20, filters 10, suction ports 19, etc. may be appropriately selected to partition the interior. That is taken into consideration.

In the figure, 25 is a motor mounting leg.

In order to improve the cleanliness of the entire clean room, multiple filter units are usually installed to uniformly supply clean air throughout the clean room. For example, in a clean room used in a hospital operating room, a high level of cleanliness is required during surgery, but the cleanliness inside the operating room does not need to be at a high level during periods when surgery is not performed. In this way, when the cleanliness required in a clean room changes, the amount of clean air blown into the clean room (the number of ventilations) can be changed as necessary to save energy. Since multiple centrifugal blowers are installed in the unit in parallel, by controlling the number of blowers in the filter unit, the amount of clean air blown can be adjusted as necessary, and the distribution of the flow of clean air can be uneven. It is possible to adjust the amount of air flow while keeping it uniform.

[Effect of idea]

In the present invention, the inside of the casing box is divided into a suction side and a discharge side by an inner plate, and the centrifugal blower is fixed to the inner plate, and there is a space between the inner plate and the outer plate of the casing box. Intervening communication boards,
The outer plate of the casing box, the inner plate, and the connecting plate form a duct portion that guides the air sucked in from each suction port to the suction port of each centrifugal blower, and also partitions that divide the air blowing area between each centrifugal blower. By fixing the member to the inner plate,
The centrifugal blower can be fixedly stored in the casing box, making assembly easy, and there is no airflow turbulence near the blower suction port, and there is no mutual interference between the airflows discharged from each blower, which significantly improves the performance of the blower. In addition, inside the casing box, the inner plate and connecting plate form a honeycomb structure, increasing rigidity.Furthermore, even if the plate thickness is thin, it can sufficiently support multiple blowers, creating a vibration-preventing structure. It is possible to provide a filter unit that is significantly more compact and smaller in height compared to conventional filter units, which reduces installation space, downsizes buildings, and reduces construction costs. The number of units can be controlled easily, clean air can be supplied to the clean room in an energy-saving manner, and the flow of clean air can be distributed and used efficiently while maintaining a uniform distribution, which has extremely great practical effects.

[Brief explanation of the drawing]

Fig. 1 is a layout diagram of a conventional filter unit in use, Fig. 2 is a plan view showing an embodiment of the present invention, Fig. 3 is an enlarged vertical sectional view taken along the line shown in Fig. 2, and Fig. 4 is Figure 3 - cross-sectional view along the line,
FIG. 5 is a plan view of another embodiment. 4... Casing box, 10... Filter, 11... Centrifugal blower, 12... Fan casing, 13... Electric motor, 14... Fan suction port,
15... Impeller, 16... Rotating shaft, 17... Partition plate, 18... Discharge port, 19... Suction port, 20...
Air outlet, 21...Inner plate, 22...Duct part, 23
...Communication board.

Claims (1)

[Scope of utility model registration request] A plurality of suction ports 19 in the casing box 4,
A plurality of air outlets 2 each communicating with the suction port 19
0, a filter 10 is provided corresponding to each outlet 20, and a centrifugal blower 11 is provided which communicates with the filter 10 and the suction port 19. The centrifugal blower 11 is divided into a suction side and a discharge side by an inner plate 21.
A connecting plate 23 is interposed between the inner plate 21 and the outer plate of the casing box, and the outer plate of the casing box, the inner plate 21, and the connecting plate 23 are used to A partition member 1 that forms a duct portion 22 that guides air sucked in from the port 19 to the suction port 14 of each centrifugal blower 11, and further divides the air blowing area between each centrifugal blower 11.
7 is fixedly arranged on the inner plate 21.