JPH06271354A - Intergranular insulation type semiconductor porcelain composition - Google Patents

Intergranular insulation type semiconductor porcelain composition

Info

Publication number
JPH06271354A
JPH06271354A JP5059248A JP5924893A JPH06271354A JP H06271354 A JPH06271354 A JP H06271354A JP 5059248 A JP5059248 A JP 5059248A JP 5924893 A JP5924893 A JP 5924893A JP H06271354 A JPH06271354 A JP H06271354A
Authority
JP
Japan
Prior art keywords
composition
grain size
crystal particles
particles
type semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5059248A
Other languages
Japanese (ja)
Inventor
Hirohisa Yamada
裕久 山田
Shigeru Sugie
茂 杉江
Norio Kawada
宣男 川田
Shigenori Nishiyama
茂紀 西山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP5059248A priority Critical patent/JPH06271354A/en
Publication of JPH06271354A publication Critical patent/JPH06271354A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain the subject composition which prevents the abnormal growth of particles at the time of firing and maintains a prescribed breakdown voltage and apparent dielectric constant by incorporating a specific amount of the glass component having average grain size of crystal particles and max. grain size less than respective values and having the crystal particles of specified composition. CONSTITUTION:In the SrTiO3 series intergranular insulation type semiconductor porcelain composition having <=10mum average grain size of crystal particles and <=20mum max. grain size, the composition is incorporated with the crystal particles consisting of (Sr1-x-y-zCaxMgyMz)Ti2O3, wherein the non-stoichiometrical values of x, y, z and alphais x<=0.50, y<=0.20, 0.002<=z<=0.02, and 0.990<=alpha<=1.02, M is the additive being converted into semiconductor by the valency controlling of Y, La, Ce, Cd, Dy, Ho, Er, etc., and incorporated with <=1000ppm glass component in wt. ratio based on the starting material of the crystal particles. The intergranular insulation type semiconductor porcelain composition which prevents the abnormal growth of particles generating at the time of firing and maintains a prescribed breakdown voltage and apparent dielectric constant is provided.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、コンデンサとして使用
されるSrTiO3系粒界絶縁型半導体磁器組成物に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a SrTiO 3 type grain boundary insulating semiconductor ceramic composition used as a capacitor.

【0002】[0002]

【従来の技術】従来、SrTiO3系粒界絶縁型半導体
磁器コンデンサは、BaTiO3磁器コンデンサと比較
して、高い見掛け誘電率を有し、温度特性に優れ、誘電
体損失が小さい特性を有するものとして知られている。
本願出願人は、この種のSrTiO3系粒界絶縁型半導
体磁器コンデンサの改良として、結晶粒子を平均粒径が
10μm以下で最大粒径が20μm以下の組成物を提案
した(特開昭64−63204号公報参照)。この種の
組成物は、焼結助剤(鉱化剤)として、また原料を作製
する際の混合・粉砕工程で使用する粉砕玉石からのコン
タミネーションとして、SiO2等のガラス成分を数1
000ppm程度含有する。しかし、ガラス成分は原料
の混合・粉砕後の乾燥工程で主原料と分離しやすく、微
量のガラス成分を原料中に均一に分散することは難し
く、凝集体として不均一に存在することとなる。
2. Description of the Related Art Conventionally, SrTiO 3 based grain boundary insulation type semiconductor ceramic capacitors have characteristics of having a higher apparent dielectric constant, excellent temperature characteristics, and smaller dielectric loss than BaTiO 3 ceramic capacitors. Known as.
The applicant of the present application has proposed, as an improvement of this type of SrTiO 3 -based grain boundary insulating type semiconductor ceramic capacitor, a composition in which crystal grains have an average grain size of 10 μm or less and a maximum grain size of 20 μm or less (JP-A-64- 63204 publication). This type of composition contains a glass component such as SiO 2 in a number of 1 as a sintering aid (mineralizing agent) and as a contamination from crushed cobblestones used in the mixing and crushing process when preparing raw materials.
Contains about 000 ppm. However, the glass component is easily separated from the main raw material in the drying step after mixing and pulverizing the raw materials, it is difficult to uniformly disperse a minute amount of the glass component in the raw material, and the glass components are nonuniformly present.

【0003】このように不均一に存在するガラス成分
は、焼成の際に局所的に液相を形成し、焼成の駆動力が
不均衡となるため、20μm以上の結晶粒子(異常粒
子)が生じやすくなる。また、ガラス成分の大きな偏折
は白点を中心としてその周囲に異常粒子の成長を伴う外
観不良として観察される。このような異常粒子の成長が
発生すると、その部分の電界方向の結晶粒界数が減少
し、トータルの絶縁体層の厚みが薄くなるため、破壊電
圧が低下する。特に、前記白点はその周囲に異常粒子と
して成長した領域がリング状に存在するため、破壊電圧
が1/3ないし1/10に低下する。
The glass component which exists non-uniformly in this way locally forms a liquid phase during firing, and the driving force for firing becomes imbalanced, so that crystal grains (abnormal particles) of 20 μm or more occur. It will be easier. Further, a large deviation of the glass component is observed as a poor appearance with growth of abnormal particles around the white spot. When such abnormal grain growth occurs, the number of crystal grain boundaries in the electric field direction at that portion decreases, and the total thickness of the insulating layer becomes thin, so that the breakdown voltage decreases. In particular, since the white spots have a ring-shaped region around them that has grown as abnormal particles, the breakdown voltage is reduced to 1/3 to 1/10.

【0004】異常粒子の成長は、焼成温度を最適焼成温
度から約20〜30℃低くすることにより、その発生を
抑えることができる。しかし、焼成温度を下げると、見
掛け誘電率εが低下してしまう。例えば、焼成温度を2
0℃低下させると、見掛け誘電率εが約15%低下する
ことが確認されている。
The growth of abnormal particles can be suppressed by lowering the firing temperature from the optimum firing temperature by about 20 to 30 ° C. However, when the firing temperature is lowered, the apparent dielectric constant ε is lowered. For example, the firing temperature is 2
It has been confirmed that when the temperature is lowered by 0 ° C., the apparent dielectric constant ε is reduced by about 15%.

【0005】[0005]

【発明の目的、構成、作用、効果】そこで、本発明の目
的は、焼成時に生じる異常粒子の成長を防ぎ、破壊電圧
や見掛け誘電率が所定の値を維持できる粒界絶縁型半導
体磁器組成物を提供することにある。以上の目的を達成
するため、本発明に係る粒界絶縁型半導体磁器組成物
は、結晶粒子の平均粒径が10μm以下で最大粒径が2
0μm以下であるSrTiO3系の結晶粒子からなり、
結晶粒子原料との重量比で約1000ppm以下のガラ
ス成分を含有する。結晶粒子は、(Sr1-X-Y-ZCaX
YZ)TiαO3の組成からなり、X,Y,Z,αの
非化学量論的数値が、X≦0.50、Y≦0.20、
0.002≦Z≦0.02、0.990≦α≦1.02
であり、MはY,La,Ce,Gd,Dy,Ho,Er
等の原子価制御で半導体化させる添加物である。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a grain boundary insulating semiconductor ceramic composition capable of preventing the growth of abnormal particles generated during firing and maintaining a predetermined breakdown voltage and apparent dielectric constant. To provide. In order to achieve the above object, the grain boundary insulating semiconductor ceramic composition according to the present invention has an average grain size of 10 μm or less and a maximum grain size of 2 or less.
Consisting of SrTiO 3 -based crystal particles having a size of 0 μm or less,
It contains a glass component in an amount of about 1000 ppm or less in weight ratio with the crystal grain raw material. The crystal particles are (Sr 1-XYZ Ca X M
g Y M Z ) TiαO 3 and the nonstoichiometric values of X, Y, Z and α are X ≦ 0.50, Y ≦ 0.20,
0.002 ≦ Z ≦ 0.02, 0.990 ≦ α ≦ 1.02
And M is Y, La, Ce, Gd, Dy, Ho, Er
It is an additive that is converted into a semiconductor by controlling the valence of the above.

【0006】結晶粒子の平均粒系が10μm以下で最大
粒径が20μm以下のSrTiO3系磁器組成物は、結
晶粒子の内部まで酸化することがなく、良好な特性の破
壊電圧、誘電率を示す。しかも、ガラス成分の含有量が
重量比で約1000ppm以下であることにより、十分
な高温で焼成しても異常粒子の成長が生じない。本発明
者らの実験によれば、焼成温度の上昇によって見掛け誘
電率εが約1.4倍向上し、破壊電圧も最小値で1.3
倍に向上した。これらの大幅な特性の向上は、結晶粒子
の粒径が均一で、異常粒子の成長がなく、絶縁層の厚み
のばらつきが少ないことに起因する。
The SrTiO 3 based porcelain composition having an average grain size of crystal grains of 10 μm or less and a maximum grain size of 20 μm or less does not oxidize to the inside of the crystal grains, and exhibits good breakdown voltage and dielectric constant. . Moreover, since the content of the glass component is about 1000 ppm or less by weight, abnormal particles do not grow even if fired at a sufficiently high temperature. According to the experiments conducted by the present inventors, the apparent dielectric constant ε was improved by about 1.4 times by the increase of the firing temperature, and the breakdown voltage was 1.3 at the minimum value.
Doubled. These significant improvements in characteristics are due to the fact that the crystal grains have a uniform grain size, no abnormal grain growth occurs, and the variation in the thickness of the insulating layer is small.

【0007】[0007]

【実施例】以下、本発明の実施例につき説明する。ま
ず、原料としてSrCO3,CaCO3,MgCO3,T
iO2,希土類をそれぞれ用意し、下記第1表及び第2
表のNo.1〜27に示す組成比の磁器が得られるよう
に、各粉末を秤量し、ボールミルで約8時間湿式混合を
行った。ボールミルの玉石には部分安定化ジルコニアの
ボールを用い、原料にガラス成分が混入しないようにし
た。
EXAMPLES Examples of the present invention will be described below. First, as raw materials, SrCO 3 , CaCO 3 , MgCO 3 , T
io 2 and rare earth are prepared respectively and are shown in Tables 1 and 2 below.
No. in the table Each powder was weighed and wet-mixed in a ball mill for about 8 hours so that a porcelain having a composition ratio shown in 1-27 was obtained. A ball of partially stabilized zirconia was used for the boulder of the ball mill to prevent the glass component from being mixed into the raw material.

【0008】得られたスラリを乾燥・造粒し、1150
℃で2時間仮焼を行った。この仮焼原料にガラス成分と
してSiO2粉末を第1表及び第2表に示す所定量(重
量比)を添加し、さらにバインダとして酢酸ビニル樹脂
6重量%と水を加えて湿式で混合粉砕を行った。脱水し
た後、50メッシュのサラン篩で整粒し、これを200
0kg/cm2の圧力で、直径10mm,厚さ0.35
mmの円板状に成形した。その後、これらの円板状成形
素体を1150℃で2時間脱脂処理を行い、引き続いて
窒素97%,水素3%の還元雰囲気下で1370〜14
00℃で5時間以上の焼成を行った。
The obtained slurry was dried and granulated, and 1150
It was calcined at ℃ for 2 hours. To this calcined raw material, SiO 2 powder as a glass component was added in a predetermined amount (weight ratio) shown in Tables 1 and 2, and 6% by weight of vinyl acetate resin as a binder and water were further added and wet-mixed and ground. went. After dehydration, the particles were sized with a 50 mesh Saran sieve and
At a pressure of 0 kg / cm 2 , the diameter is 10 mm and the thickness is 0.35.
It was formed into a disk shape of mm. Then, these disc-shaped molded bodies were subjected to a degreasing treatment at 1150 ° C. for 2 hours, and subsequently, at 1370 to 14 in a reducing atmosphere of 97% nitrogen and 3% hydrogen.
Baking was performed at 00 ° C. for 5 hours or more.

【0009】ついで、得られた磁器素体の表面に、 (A)Bi23:48重量%、CuO:2重量%、ワニ
ス:50重量% (B)Pb34:45重量%、MnO2:5重量%、樹
脂ワニス:50重量% (C)Bi23:48重量%、MnO2:2重量%、樹
脂ワニス:50重量% の3種の酸化物混合樹脂液を塗布し、大気中にて112
0℃で2時間焼成し、結晶粒界の絶縁体化を行った。
Then, on the surface of the obtained porcelain body, (A) Bi 2 O 3 : 48% by weight, CuO: 2% by weight, varnish: 50% by weight (B) Pb 3 O 4 : 45% by weight, MnO 2 : 5% by weight, resin varnish: 50% by weight (C) Bi 2 O 3 : 48% by weight, MnO 2 : 2% by weight, resin varnish: 50% by weight , In the air 112
It was fired at 0 ° C. for 2 hours to make the crystal grain boundaries an insulator.

【0010】このようにして得られた磁器素体の両面に
銀ペーストを塗布し、800℃で30分間の焼付けを行
って電極を形成し、評価用サンプルとしてのコンデンサ
とした。得られたコンデンサの見掛け誘電率ε、誘電損
失DF、破壊電圧(kV/mm)の平均、最小について
測定した結果を、第1表、第2表に示す。なお、試料番
号中*印を付したものは、本発明の範囲外のものであ
る。また、試料番号12は破壊電圧が低く、バリスタと
しての特性を示した。
Silver paste was applied to both surfaces of the thus obtained porcelain body and baked at 800 ° C. for 30 minutes to form electrodes, which were used as capacitors for evaluation. Tables 1 and 2 show the results of measuring the apparent permittivity ε, the dielectric loss DF, the average of breakdown voltage (kV / mm) and the minimum of the obtained capacitors. The samples marked with * in the sample numbers are outside the scope of the present invention. Further, Sample No. 12 had a low breakdown voltage and exhibited characteristics as a varistor.

【0011】各磁器素体表面を顕微鏡写真にとったとこ
ろ、ガラス成分が1000ppm以下である試料番号1
〜4、8〜11、13、16〜21のものにあっては、
小さな結晶粒子がほぼ均質に成長していることが観察さ
れた。
A micrograph of the surface of each porcelain body showed that the glass component was 1000 ppm or less. Sample No. 1
~ 4, 8-11, 13, 16-21,
It was observed that the small crystal grains grew almost uniformly.

【0012】[0012]

【表1】 [Table 1]

【0013】[0013]

【表2】 [Table 2]

───────────────────────────────────────────────────── フロントページの続き (72)発明者 西山 茂紀 京都府長岡京市天神二丁目26番10号 株式 会社村田製作所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shigeki Nishiyama 2 26-10 Tenjin Tenjin, Nagaokakyo, Kyoto Prefecture Murata Manufacturing Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 結晶粒子の平均粒径が10μm以下で最
大粒径が20μm以下であるSrTiO3系の粒界絶縁
型半導体磁器組成物において、 (Sr1-X-Y-ZCaXMgYZ)TiαO3の組成からな
る結晶粒子を含み、但し、X,Y,Z,αの非化学量論
的数値が、X≦0.50、Y≦0.20、0.002≦
Z≦0.02、0.990≦α≦1.02であり、Mは
Y,La,Ce,Gd,Dy,Ho,Er等の原子価制
御で半導体化させる添加物である、 前記結晶粒子原料との重量比で約1000ppm以下の
ガラス成分を含む、 ことを特徴とする粒界絶縁型半導体磁器組成物。
1. A (Sr 1 -XYZ Ca X Mg Y M Z ) TiαO in a SrTiO 3 -based grain boundary insulating semiconductor ceramic composition in which the average grain size of the crystal grains is 10 μm or less and the maximum grain size is 20 μm or less. 3 includes crystal grains having a composition of 3 , provided that the non-stoichiometric values of X, Y, Z and α are X ≦ 0.50, Y ≦ 0.20, 0.002 ≦
Z ≦ 0.02, 0.990 ≦ α ≦ 1.02, and M is an additive such as Y, La, Ce, Gd, Dy, Ho, Er which is converted into a semiconductor by controlling the valence. A grain boundary insulating semiconductor porcelain composition comprising a glass component in an amount of about 1000 ppm or less in weight ratio to a raw material.
JP5059248A 1993-03-19 1993-03-19 Intergranular insulation type semiconductor porcelain composition Pending JPH06271354A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5059248A JPH06271354A (en) 1993-03-19 1993-03-19 Intergranular insulation type semiconductor porcelain composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5059248A JPH06271354A (en) 1993-03-19 1993-03-19 Intergranular insulation type semiconductor porcelain composition

Publications (1)

Publication Number Publication Date
JPH06271354A true JPH06271354A (en) 1994-09-27

Family

ID=13107901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5059248A Pending JPH06271354A (en) 1993-03-19 1993-03-19 Intergranular insulation type semiconductor porcelain composition

Country Status (1)

Country Link
JP (1) JPH06271354A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012171852A (en) * 2011-02-24 2012-09-10 Murata Mfg Co Ltd Grain boundary-insulated semiconductor ceramic, semiconductor ceramic capacitor, and method for producing the semiconductor ceramic capacitor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012171852A (en) * 2011-02-24 2012-09-10 Murata Mfg Co Ltd Grain boundary-insulated semiconductor ceramic, semiconductor ceramic capacitor, and method for producing the semiconductor ceramic capacitor

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