JPH06255710A - Storage equipment with cleaning device - Google Patents

Abstract

PURPOSE:To provide necessary blow-off speed over the whole vertical range by mounting a side surface chamber where fan filter units are installed on the rear surface side of a storage part, and forming an upper surface chamber where fan filter units which generate relatively high pressure air, communicating with the side surface chamber. CONSTITUTION:This cleaning device, which is suited to the storage of products such as semiconductors, is provided with a storage part 3 where a front surface 3a and a rear surface 3b are open, and on the rear surface 3b side, side surface chambers 6 where plural fan filter units 5 are installed over the whole range are disposed. Above the respective side surface chambers 6, an upper chamber 7 which communicates with the side surface chamber is mounted at a roof. At the upper chamber 7, there is formed a fan filter unit 8 which is adjusted so as to generate larger air pressure than the fan filter unit 5. Partition chambers 9 are formed, communicating with the lower ends of the respective side surface chambers 6, and a suction port 10 and a pre-filter 11 are mounted on the working area 4 side of the partition chambers 9 and a clean room 20 side.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a storage facility equipped with a clean device which is used for storing products such as semiconductors that are extremely disliked by dust.

[0002]

2. Description of the Related Art Conventionally, as a storage device with a cleaning device of this type, for example, a side chamber is arranged on the rear surface side of a storage portion whose front and rear surfaces are open, and a fan filter including a filter and a plurality of fans is provided in the side chamber. There is known a storage facility with a clean device in which a unit is arranged. And, in such a storage device with a clean device, the air inlet is normally communicated with the lower part of the side chamber,
From there, air is introduced into the side chamber.

[0003]

In the conventional storage equipment with a cleaning device, as described above, the air sucked into the side chamber from the air suction port communicating with the lower portion of the side chamber is passed through the fan filter unit. However, since the fans of the fan filter unit are close to each other, they interfere with each other, and as a result, the resistance due to the number of fans increases toward the upper stage. At the same time, there is an inconvenience that the resistance due to the distance of the side chamber increases and the required blowing speed cannot be obtained. Therefore, it is an object of the present invention to provide a storage device with a clean device in which the required blowing speed can be obtained over the entire top and bottom of the storage device.

[0004]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention arranges a side chamber on the rear surface side of a storage part having an open front surface and a rear surface, and a fan including a filter and a plurality of fans in the side chamber. In a storage device with a cleaning device provided with a filter unit, an upper surface chamber communicating with the side surface chamber is provided on the ceiling side,
A fan filter unit including a fan capable of forming a higher air pressure than the fan is disposed in the upper chamber. Further, it is preferable that each fan of the side chamber is provided with an air volume adjusting means, and as the air volume adjusting means, an inverter type control device or a resistance plate provided on a suction port side of the fan is preferable. Furthermore, it is preferable that each of the fans is an axial fan.

[0005]

Since the upper chamber communicating with the side chamber is provided on the ceiling side and the fan filter unit having the fan capable of forming a higher air pressure than the fan of the side chamber is disposed in the upper chamber, the side chamber is provided. The buffer between the fans is suppressed, and the competition between the upper fan and the lower fan is reduced.As a result, the fan resistance does not significantly increase toward the upper stage and the blowing speed slows down unlike the conventional case. . Further, it is expected that the fan provided in the upper chamber will consume the air volume of the fan on the upper side of the side chamber to slightly slow down the air velocity. However, by providing each fan of the side chamber with the air volume adjusting means. By controlling the air volume of each fan, the required wind speed can be obtained more reliably.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the storage equipment with a cleaning device of the present invention will be described below with reference to the drawings. The illustrated storage device with a clean device is configured as a closed type load storage device used in a clean room, and has a box-shaped main body 1
Inside, a plurality of storage spaces 2 are formed so as to define a plurality of storage spaces 2 in the vertical direction, and a storage space 3 is provided so as to be opposed to each other via a work space 4 on the front side. A front surface 3a and a rear surface 3b of the housing portion 3 are opened, a plurality of fan filter units 5 are arranged over the entire rear surface 3b side, and a side surface chamber 6 is formed behind these fan filter units 5, Above the side chamber 6, the upper chamber 7
Are in communication.

Each fan filter unit 5 of the side chamber 6 is composed of four axial fans 5a and one filter 5b, and the filter 5b is 610 mm × 6.
The size is 10mm × 65mm, and this is φ172m
m, a width of 150 mm, and a thickness of 51 mm were attached to four axial fans. In the illustrated example, the fan filter units 5 are arranged in four layers in each side chamber 6.

Each side chamber 6 has a length of 690 m.
m, width 112 mm, length 2950 mm, both side surface chambers 6, 6 communicate with the upper surface chamber 7 provided on the ceiling at the upper end, and the upper surface chamber 7 is provided with the side surface chambers 6, 6. The fan filter unit 5 has the same structure as that of the fan filter unit 5 except that one fan filter unit 8 adjusted so that an air pressure larger than that of the fan filter unit 5 can be formed is disposed in the central portion.

A partition chamber 9 is communicated with the lower end of each side chamber 6, a suction port 10 is provided on the working space 4 side and the clean room 20 side of the partition chamber 9, and a pre-filter is provided on each suction port 10. 11 is provided. This compartment 9 is suitable for providing a working height in the working space 4 and for forming a laminar flow in the side chamber 6.
It is not always an indispensable configuration for the storage equipment with the clean device of the present invention. In the above embodiment, the fan filter unit composed of the axial fan has been described.
The fan filter unit in the present invention is not limited to the axial fan, but may be a fan filter unit composed of a mixed flow fan or a sirocco fan. Further, the fan filter unit according to the present invention may have a fan built in the casing or may have the fan attached outside the casing.

Next, the operation of the storage equipment with the cleaning device will be described. Suction port 1 from clean room 20
The air sucked through 0 and the air sucked from the work space 4 through the suction port 10 are
Large dust is removed by 11, and each compartment 9
It is buffered inside, is supplied to each side chamber 6, and is blown out to the work space 4 side via each fan filter unit 5. Further, the air sucked into the upper surface chamber 7 through the side surface chamber 6 is blown out from the fan filter unit 5 of the upper surface chamber 7 toward the working space 4 side. At this time, since the fan filter unit 8 of the upper side chamber 7 is configured to generate a larger air pressure than the fan filter unit 5 of the side chamber 6, the fan filter unit 5 of each side chamber 6 can be formed.
The fans 5a of No. 3 do not buffer each other, and as a result, a uniform air flow distribution can be formed in the storage section 3 and the work space 4.

Incidentally, in the conventional storage equipment with a clean device which does not have a fan filter unit configured to generate a larger air pressure in the upper chamber than the fan filter unit in the side chamber, the wind speed of the filter above the side chamber and The wind speed of the lower filter is 1.
Although a variation of 5 times or more was observed, in the case of the above embodiment, when the fan was driven so that the average wind speed was 0.3 to 0.4 m / s, the wind speed of the upper filter and that of the lower filter were The variation in wind speed was 1.2 times or less. Further, in the above-described embodiment, each fan of the side chamber is not provided with the air volume adjusting means, but it goes without saying that if the air volume adjusting means is provided with each fan, the variation in the wind speed is further reduced.

[0012]

As described above, according to the storage equipment with the cleaning device of the present invention, it is possible to prevent the fans of the side chambers from being buffered with each other, and as a result, the required wind speed can be obtained over the entire upper and lower sides of the storage equipment. it can.

[Brief description of drawings]

FIG. 1 is a vertical and vertical cross-sectional view of an embodiment of storage equipment with a clean device according to the present invention.

[Explanation of symbols]

 1 Main body 3 Storage part 3a Front face 3b Rear face 4 Work space 5 Fan filter unit 5a Fan 5b Filter 6 Side chamber 7 Top chamber 8 Fan filter unit 20 Clean room

Claims (5)

[Claims] 1. A storage device with a clean device, wherein a side chamber is disposed on the rear side of a storage portion having front and rear surfaces opened, and a fan filter unit including a filter and a plurality of fans is disposed in the side chamber. A cleaning device characterized in that a ceiling chamber is provided with an upper chamber communicating with the side chamber, and a fan filter unit having a fan capable of forming a higher air pressure than the fan is disposed in the upper chamber. Storage equipment. 2. The storage equipment with a clean device according to claim 1, wherein each fan of the side chamber is provided with an air volume adjusting means. 3. The storage equipment with a clean device according to claim 2, wherein the air flow rate adjusting means is an inverter type control device. 4. The storage equipment with a clean device according to claim 2, wherein the air flow rate adjusting means is a resistance plate provided on a suction port side of the fan. 5. The storage equipment with a clean device according to claim 1, wherein each fan is an axial fan.