JPH09108517A - Fan filter unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the depth dimension of a fan filter unit to reduce the wt. thereof. SOLUTION: An once-through blower 4 is used as a fan introducing compressed air into a casing and arranged on the side of the side surface plate 22 of the top plate 21 of the casing and the blowoff port 45 thereof is turned toward the side surface plate 23 opposed to the side surface plate 22. A deflection plate 52 is provided in the vicinity of the blowoff part 45 and a deflection plate 51 is provided to the corner part formed by the top plate 21 and the side surface plate 23 to equally introduce compressed air to the entire surface of an air filter 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fan filter unit used in air conditioning equipment in a clean room such as a semiconductor manufacturing factory.

[0002]

2. Description of the Related Art A large number of fan filter unit methods have been adopted as a method of introducing air into a clean room such as a semiconductor manufacturing factory. In this method, a fan filter unit in which a high performance air filter and a fan are integrated is used as a ceiling. Many are installed. As a conventional fan filter unit, as shown in FIG. 4, an air filter 3 in which a filter medium is contained in a frame is attached to an opening side of a casing 20a, and a sirocco fan 40a is attached to a top plate of the casing 20a. Alternatively, as shown in FIG. 5, there is one in which a propeller fan 40b is attached to the upper part inside a casing 20b. In the case where the propeller fan 40b is attached, for example, rectifying plates 61 and 62 are provided on the upper portion of the air filter 3 and the side surface of the casing 20b so that the air is evenly fed to the suction surface of the air filter 3. There is.

[0003]

However, in these conventional fan filter units, as described above, it is necessary to provide the fan on the top plate of the casing and to secure the rectifying portion in the casing. Or, since the depth dimension (H ₁ , H ₂ ) as a whole becomes large, it is necessary to make the space in the ceiling large (the size in the height direction is large), and it is necessary to perform fan maintenance and the like in the ceiling. It was Further, since the weight of the fan filter unit is heavy, it is necessary to strengthen the ceiling member so as to withstand this.

An object of the present invention is to solve the above-mentioned problems of the prior art, and an object thereof is to provide a fan filter unit having a small depth dimension and a light weight.

[0005]

In order to solve the above-mentioned problems, a fan filter unit according to the present invention has a casing in which an air filter is arranged in an opening on the front side, and a suction surface side of the air filter in the casing. In a fan filter unit configured by a fan for introducing pressurized air, the fan is a cross flow fan, and the blow air flow is directed from the one side surface of the casing to the other side surface facing the cross flow fan. It is characterized by being arranged as follows.

It is preferable to provide a deflection plate at a predetermined position in the casing for directing the air flow introduced from the fan to the suction surface of the air filter. The cross-flow blower is a centrifugal blower having an impeller in which the width of the blade is larger than the diameter, and sucks the airflow from a direction perpendicular to the axis, and in a different direction perpendicular to the axis, for example, from an elongated blowout port. It blows out a wide curtain-like air flow and is lighter in weight than sirocco fans and propeller fans.
Further, since the diameter of the impeller is small, the depth dimension of the casing can be made smaller than that of the conventional one even if a gap is provided between the impeller and the air filter.

Further, the arrangement of the cross-flow blower is such that, when the casing is a rectangular parallelepiped, for example, the rotation axis direction of the cross-flow blower is aligned with the longitudinal direction of one side surface of the casing and the blowout port is directed to the other side surface side. Then, it is achieved by arranging the cross flow fan on the one side surface side. With such an arrangement of the cross-flow blower, the direction of the blowout airflow is substantially parallel to the suction surface of the air filter. In particular, the blowout airflow is directed by the deflecting plate to the suction surface of the air filter. Can be directed evenly to. As a result, clean air can be uniformly blown out from the entire blowing surface of the air filter.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. 1 and 2 are views showing a fan filter unit of this embodiment, FIG. 1 is a perspective view mainly showing an arrangement of fans in a casing, and FIG. 2 is a cross section taken along a predetermined plane perpendicular to a rotation axis of the fan. Corresponds to the figure.

The casing 2 of the fan filter unit 1 is made of a rectangular parallelepiped box whose front surface is open. An air filter 3 having a filter medium 32 housed in a frame 31 is provided at the front opening of the casing 2. The blowing surface is fixed so as to match the opening surface of the casing 2. Also,
An elongated once-through blower 4 as shown in FIG. 3 is installed in the casing 2 as a fan for introducing pressurized air to the suction surface side of the air filter 3. This once-through blower 4
Is a centrifugal blower having an impeller 41 whose blade width is larger than its diameter. Here, two impellers 41 are arranged in series with a motor 43 interposed in an elongated rectangular parallelepiped housing 42. Are using.

The suction port 44 is formed at a position on the outer side of each impeller 41 on one side plate 42a of the four elongated side plates of the housing 42. The one side plate 42b, which is orthogonal to the side plate 42a, has a blowout port 45 extending linearly in the longitudinal direction. The cross-flow fan 4 has a structure in which a corner formed by a top plate (a back plate parallel to the opening surface) 21 and one side plate 22 disposed orthogonal to the top plate 21 inside the casing 2 and a longitudinal direction of the side plate 22 and a cross flow. The blower 4 is arranged so that the axial directions thereof are aligned with each other and a predetermined gap is provided between the blower 4 and the air filter 3.

That is, an opening 21a is formed at the end of the top plate 21 on the side of the side plate 22 at a position communicating with the suction port 44 of the cross-flow fan 4, and the suction port 44 is aligned with this opening 21a. The cross-flow blower 4 is attached to the corner with the outlet 45 facing the side plate 23 facing the side plate 22. As a result, the air introduced from the top plate 21 side of the casing 2 becomes a wide curtain-shaped air flow from the side surface plate 22 to the side surface plate 23 by the cross flow fan 4. Therefore, the side surface plate 22 of the casing 2 in this embodiment corresponds to one side surface of the casing of the present invention, and the side surface plate 23 of the casing 2 corresponds to the other side surface.

Further, a deflecting plate 51, which is formed in a slender shape with a substantially arcuate cross section at a corner formed by the top plate 21 and the side plate 23 in the casing 2, has an inner side at the center of the arc (air filter 3 Side) is installed toward. Further, in the vicinity of the blow-out port 45 of the cross-flow fan 4, a deflecting plate 52 having a substantially arcuate cross section and elongated is provided at the side plate 2 at the center of the arc.
It is installed toward the 2 side.

The deflecting plate 52 is for making a part of the air immediately after being blown out from the once-through blower 4 wrap around the gap between the once-through blower 4 and the air filter 3, and as shown in FIG. Air filter 3 near the bottom of the mouth 45
Is arranged at a position lower than that of the deflecting plate 51. The deflector plate 51 is for distributing the air blown out from the cross flow fan 4 and not affected by the deflector plate 52 between the deflector plate 52 and the side plate 23. Due to the action of these deflecting plates 51 and 52, the airflow blown out from the once-through blower 4 is evenly directed to the suction surface of the air filter 3, so that clean air is uniformly blown out from the entire blowing surface of the air filter 3. ing.

As described above, this fan filter unit
The fan 1 is a fan for introducing pressurized air into the casing 2.
Of weight compared to sirocco fans and propeller fans
Uses a light once-through blower 4, reducing the overall weight
Can be done. Further, the once-through blower 4 has an impeller 41.
Since the diameter of the
Even if they are arranged with a gap, the depth dimension H of the casing 2
Conventional (H in Fig. 4 ₁, H in FIG._Two) Smaller
be able to.

Therefore, when the fan filter unit 1 is installed on the ceiling of a clean room, since the depth dimension is small, it is not necessary to make the space in the ceiling wide (the dimension in the height direction is large) as in the conventional case. For,
The floor height can be lowered, and maintenance of the fan can be performed from inside the clean room (with the air filter 3 removed) instead of inside the ceiling. Furthermore, since the weight is light, the ceiling member can be made a cheaper member than the conventional one, so that the construction cost of the clean room is reduced and the workability such as installation work is improved. In addition, noise is reduced by the reduced weight.

The once-through blower 4 has an output sufficient to sufficiently exert the dust removal performance of the air filter 3 used (for example, the wind speed from the blowing surface of the air filter 3 is 0.30 to 0.30). It should be 0.35 m / s). In addition, as a constituent material of the cross-flow fan 4 and the casing 2, it is preferable to use a material that does not generate volatile organic substances in the clean room. Further, as the motor 43 of the cross-flow blower 4, it is preferable to use a lower noise type motor.

In the above embodiment, the two deflector plates 5 are used.
Although 1, 52 are used, if the number of deflecting plates is three or more, the blowing airflow can be more uniformly directed to the entire suction surface of the air filter 3. In that case, it is preferable to increase the arrangement height of each deflection plate in the order from the blow-out port 45 side of the once-through blower 4 toward the side face plate 23 side.

In the above embodiment, the cross flow fan 4 is arranged inside the casing 2. However, the cross flow fan 4 may be arranged outside the casing 2 as long as it is on one side of the casing 2. That is, for example, the cross flow fan 4 is attached to the side plate 22.
The side plate 22 may be provided with an opening so as to communicate with the blow-out port 45, and even in this case, the depth dimension H of the fan filter unit 1 can be reduced.

The deflecting plates 51 and 52 do not necessarily have to be installed in the casing 2. For example, the corners of the casing 2 may be formed in an arc shape like the deflecting plate 52 instead. It is also possible to make the blowout airflow evenly toward the suction surface of the air filter 3 by devising the blowout port of the once-through blower 4.

[0020]

As described above, according to the fan filter unit of the present invention, since the depth dimension can be reduced and the weight can be reduced, the floor height of the clean room can be reduced, and the noise can be reduced. The effect that maintenance is easy can be obtained. Particularly, according to the fan filter unit of the second aspect, it is possible to easily ensure the uniformity of the blown clean air.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a fan filter unit according to an embodiment of the present invention.

FIG. 2 is a diagram showing a fan filter unit according to an embodiment of the present invention, and corresponds to a cross-sectional view taken along a plane perpendicular to the rotation axis of the fan.

FIG. 3 is a schematic view showing a once-through fan used in an embodiment of the present invention.

FIG. 4 is a vertical cross-sectional view showing a conventional example of a fan filter unit.

FIG. 5 is a vertical sectional view showing a conventional example of a fan filter unit.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Fan filter unit 2 Casing 3 Air filter 4 Cross-flow blower 22 Side plate (one side) 23 Side plate (other side) 45 Blowout port 51 Deflection plate 52 Deflection plate

Front page continuation (72) Inventor Yutaka Kishino 1-25-1 Nishishinjuku, Shinjuku-ku, Tokyo Taisei Corporation

Claims (2)

[Claims] 1. A fan filter unit comprising a casing in which an air filter is arranged in an opening on the front side, and a fan for introducing pressurized air to the suction surface side of the air filter in the casing, wherein the fan Is a cross-flow blower, and the cross-flow blower is arranged so that the blowout airflow is directed from one side surface side of the casing to the other side surface side opposite thereto. 2. The fan filter unit according to claim 1, wherein a deflection plate for evenly feeding air to the suction surface of the air filter is provided at a predetermined position in the casing.