JPH06252534A - Printed wiring board with sealing and its manufacture - Google Patents

Printed wiring board with sealing and its manufacture

Info

Publication number
JPH06252534A
JPH06252534A JP3359793A JP3359793A JPH06252534A JP H06252534 A JPH06252534 A JP H06252534A JP 3359793 A JP3359793 A JP 3359793A JP 3359793 A JP3359793 A JP 3359793A JP H06252534 A JPH06252534 A JP H06252534A
Authority
JP
Japan
Prior art keywords
circuit
copper foil
header
resin
base circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3359793A
Other languages
Japanese (ja)
Inventor
Hideo Nakanishi
秀雄 中西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP3359793A priority Critical patent/JPH06252534A/en
Publication of JPH06252534A publication Critical patent/JPH06252534A/en
Pending legal-status Critical Current

Links

Landscapes

  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PURPOSE:To provide a printed wiring board with improved adhesion property of a resin-sealing layer even if it is preserved under high-temperature and high- humidity environment and its manufacturing method. CONSTITUTION:The title printed wiring board is provided with a base circuit 1 consisting of copper formed on the surface of an insulation substrate 5, a header circuit 2 which is wider than the base circuit on the top surface of the base circuit 1, and a resin-sealing layer 4 for surrounding the base circuit 1 and the header circuit 2. After the header circuit 2 is formed on the copper foil surface where the insulation substrate 5 in that copper foil is provided on the surface is exposed, etching is performed on the copper foil surface where covered resist layer is eliminated, thus forming the base circuit 1 whose circuit width is narrower than that of the header circuit 2 and further the resin-sealing layer 4.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は電子機器、電気機器に利
用される封止付プリント配線板、及びその製造方法に関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sealed printed wiring board used for electronic equipment and electric equipment, and a method for manufacturing the same.

【0002】[0002]

【従来の技術】封止付プリント配線板の従来の製造方法
を、図3に示した従来の封止付プリント配線板を参照し
て説明すると、絶縁基板(5)の表面に銅から成るベー
ス回路(1)を形成後、このベース回路(1)の露出面
に下地メッキとしてニッケル(12)を施し、さらにニ
ッケル(12)の表面に金メッキ(13)を施して、上
記ベース回路(1)を包囲した後、その金メッキ(1
3)の周囲を耐湿性を高めるためにエポキシ樹脂等の樹
脂封止層(4)で封止するものであった。しかし、従来
の封止付プリント配線板では高温高湿で保存すると、上
記樹脂封止層(4)の密着が弱く、樹脂封止層(4)が
剥離し易い欠点がある。
2. Description of the Related Art A conventional method for manufacturing a printed wiring board with a seal will be described with reference to the conventional printed wiring board with a seal shown in FIG. 3, and a base made of copper on the surface of an insulating substrate (5). After forming the circuit (1), the exposed surface of the base circuit (1) is plated with nickel (12) as a base plating, and further, the surface of the nickel (12) is plated with gold (13) to form the base circuit (1). After surrounding the
The periphery of 3) was sealed with a resin sealing layer (4) such as an epoxy resin in order to enhance the moisture resistance. However, in the conventional printed wiring board with encapsulation, when stored at high temperature and high humidity, the resin encapsulating layer (4) is weakly adhered and the resin encapsulating layer (4) is easily peeled off.

【0003】[0003]

【発明が解決しようとする課題】本発明は上述の事実を
鑑みてなされたもので、その目的とするところは、高温
高湿で保存しても樹脂封止層の密着性が高い封止付プリ
ント配線板、及びその製造方法を提供することにある。
SUMMARY OF THE INVENTION The present invention has been made in view of the above facts, and an object of the present invention is to provide a resin-encapsulating layer having high adhesion even when stored at high temperature and high humidity. A printed wiring board and a method for manufacturing the same are provided.

【0004】[0004]

【課題を解決するための手段】本発明に係る封止付プリ
ント配線板は、絶縁基板(5)の表面に形成された銅か
ら成るベース回路(1)と、このベース回路(1)の頂
面にベース回路(1)の回路巾よりも巾広のニッケル
(2a)、又は/及び金(2b)から成るヘッダー回路
(2)とから成る導電路(3)、及びこの導電路(3)
を包囲する樹脂封止層(4)とを備えることを特徴とす
る。
A printed wiring board with encapsulation according to the present invention comprises a base circuit (1) made of copper formed on the surface of an insulating substrate (5) and a top of the base circuit (1). A conductive path (3) consisting of a header circuit (2) made of nickel (2a) and / or gold (2b) wider than the circuit width of the base circuit (1) on the surface, and this conductive path (3)
And a resin sealing layer (4) surrounding the.

【0005】本発明に係る封止付プリント配線板の製造
方法は、表面に銅箔(11)が配設された絶縁基板
(5)の絶縁路に位置する銅箔面(16)がレジスト層
(17)で被覆され、導電路に位置する銅箔面(18)
が露出したレジスト付基板の導電路用の銅箔面(18)
にニッケル(2a)、又は/及び金(2b)のメッキを
施してヘッダー回路(2)とした後に、上記レジスト層
(17)を除去して銅箔面(16)を露出させ、次いで
この銅箔面(16)にエッチングを施して、ヘッダー回
路(2)より回路巾の狭いベース回路(1)を形成して
プリント回路板とし、さらにこのプリント回路板に樹脂
封止層(4)を形成することを特徴とする。
In the method for manufacturing a printed wiring board with a seal according to the present invention, the copper foil surface (16) located in the insulating path of the insulating substrate (5) having the copper foil (11) on the surface is the resist layer. Copper foil surface (18) covered with (17) and located in the conductive path
Copper foil surface (18) for conductive paths of resist-coated substrate
Is plated with nickel (2a) and / or gold (2b) to form the header circuit (2), the resist layer (17) is removed to expose the copper foil surface (16), and then the copper The foil surface (16) is etched to form a base circuit (1) having a narrower circuit width than the header circuit (2) to form a printed circuit board, and a resin sealing layer (4) is formed on the printed circuit board. It is characterized by doing.

【0006】[0006]

【作用】本発明による封止付プリント配線板とその製造
方法によると、ヘッダー回路(2)で導電路に位置する
銅箔面(18)を被覆し、さらに、エッチングにより銅
のベース回路(1)を形成する。この場合、エッチング
されるベース回路(1)の側面は溶出される結果、ヘッ
ダー回路(2)より回路巾の狭いベース回路(1)は、
ヘッダー回路(2)を基準にしてくびれ(10)が形成
される。本発明の封止付プリント配線板は、樹脂封止層
(4)がベース回路(1)のくびれ(10)にくい込む
ので密着力が増加する。
According to the encapsulation printed wiring board and the method for manufacturing the same according to the present invention, the header circuit (2) covers the copper foil surface (18) located in the conductive path, and the copper base circuit (1) is further etched by etching. ) Is formed. In this case, the side surface of the etched base circuit (1) is eluted, so that the base circuit (1) having a narrower circuit width than the header circuit (2) is
A constriction (10) is formed with reference to the header circuit (2). In the sealed printed wiring board of the present invention, since the resin sealing layer (4) is less likely to be constricted (10) in the base circuit (1), the adhesion is increased.

【0007】以下、本発明を詳細に説明する。図1は、
本発明の実施例に係るプリント配線板の要部を拡大した
断面図である。
The present invention will be described in detail below. Figure 1
It is sectional drawing which expanded the principal part of the printed wiring board which concerns on the Example of this invention.

【0008】本発明の封止付プリント配線板は、絶縁基
板(5)の表面に形成された銅から成るベース回路
(1)と、このベース回路(1)の頂面にベース回路
(1)の回路巾よりも巾広のニッケル(2a)、又は/
及び金(2b)から成るヘッダー回路(2)とから成る
導電路(3)、及びこの導電路(3)を包囲する樹脂封
止層(4)から構成されている。
The printed wiring board with sealing of the present invention comprises a base circuit (1) made of copper formed on the surface of an insulating substrate (5), and a base circuit (1) on the top surface of the base circuit (1). Wider than the circuit width of nickel (2a), or /
And a header circuit (2) made of gold (2b) and a conductive path (3), and a resin sealing layer (4) surrounding the conductive path (3).

【0009】上記絶縁基板(5)としては、基材に樹脂
を含浸乾燥して得られるプリプレグの樹脂を硬化させた
有機系の絶縁板、又はアルミナ等のセラミック系の絶縁
板が用いられる。この有機系の絶縁板の樹脂としてはエ
ポキシ樹脂、ポリイミド樹脂、フッ素樹脂、フェノール
樹脂、不飽和ポリエステル樹脂、PPO樹脂等の単独、
変成物、混合物等が用いられる。有機系の絶縁板の基材
としては、特に限定するものではないが、ガラス繊維な
どの無機材料の方が耐熱性、耐湿性などに優れて好まし
い。また、耐熱性に優れる有機繊維布基材及びこれらの
混合物を用いることもできる。
As the insulating substrate (5), an organic insulating plate obtained by curing a resin of a prepreg obtained by impregnating and drying a base material with a resin, or a ceramic insulating plate such as alumina is used. As the resin for the organic insulating plate, epoxy resin, polyimide resin, fluororesin, phenol resin, unsaturated polyester resin, PPO resin, etc. may be used alone.
Modified products, mixtures and the like are used. The base material of the organic insulating plate is not particularly limited, but an inorganic material such as glass fiber is preferable because it is excellent in heat resistance and moisture resistance. Further, an organic fiber cloth base material having excellent heat resistance and a mixture thereof can also be used.

【0010】上記導電路(3)はベース回路(1)とヘ
ッダー回路(2)から構成され、上記ベース回路(1)
は銅から成り、上記ヘッダー回路(2)はニッケル(2
a)、又は/及び金(2b)から成っている。ヘッダー
回路(2)に金(2b)を用いる場合は、ニッケル
(2)を下地のメッキ層として、ニッケル(2)の表面
に形成される。上記樹脂封止層(4)を形成する樹脂と
しては、エポキシ樹脂等の公知の各種封止材が用いら
れ、特に限定されない。
The conductive path (3) is composed of a base circuit (1) and a header circuit (2), and the base circuit (1).
Is made of copper, and the header circuit (2) is nickel (2
a) or / and of gold (2b). When gold (2b) is used for the header circuit (2), it is formed on the surface of nickel (2) using nickel (2) as an underlying plating layer. As the resin forming the resin sealing layer (4), various known sealing materials such as epoxy resin are used and are not particularly limited.

【0011】次に、本発明の製造方法について、ヘッダ
ー回路(2)に金(2b)を用いた場合で説明する。図
2(a)乃至(d)は加工工程を示す要部拡大断面図で
ある。
Next, the manufacturing method of the present invention will be described in the case where gold (2b) is used for the header circuit (2). 2A to 2D are enlarged cross-sectional views of a main part showing a processing step.

【0012】図2(a)に示す如く、例えば、銅箔(1
1)が配設された絶縁基板(5)をドライフィルムフォ
トレジスト、液状フォトレジスト等のレジスト層(1
7)で被覆する。この被覆したレジスト層(17)の表
面にマスクを重ねて露光処理し、絶縁路となる部分を光
硬化させる。次いで未硬化の上記レジスト層(17)を
現像液で溶解除去することによって、絶縁基板(5)の
絶縁路に位置する銅箔面(16)がレジスト層(17)
で被覆され、導電路(3)に位置する銅箔面(18)が
露出したレジスト付基板が作製される。
As shown in FIG. 2A, for example, a copper foil (1
The insulating substrate (5) on which (1) is disposed is provided with a resist layer (1) such as a dry film photoresist or a liquid photoresist.
Cover with 7). A mask is overlaid on the surface of the coated resist layer (17) and exposed to light, and the portion to be an insulating path is photo-cured. Then, the uncured resist layer (17) is dissolved and removed by a developing solution, so that the copper foil surface (16) located in the insulating path of the insulating substrate (5) is changed to the resist layer (17).
Then, a resist-coated substrate is produced which is covered with and the copper foil surface (18) located in the conductive path (3) is exposed.

【0013】図2(b)に示す如く、上記レジスト付基
板の露出した導電路用の銅箔面(18)に下地メッキと
してニッケル(2a)を形成し、このニッケル(2a)
の表面に金(2b)のメッキを施す。このニッケル(2
a)及び金(2b)のメッキは公知のメッキ方法で行え
ばよい。次に、図2(c)に示す如く、例えばレジスト
層(17)が溶解する剥離液に浸漬して、上記レジスト
層(17)を除去し、絶縁路に位置する銅箔面(16)
を露出させる。
As shown in FIG. 2B, nickel (2a) is formed as an undercoat on the exposed copper foil surface (18) for a conductive path of the resist-coated substrate, and the nickel (2a) is formed.
Is plated with gold (2b). This nickel (2
The plating of a) and gold (2b) may be performed by a known plating method. Next, as shown in FIG. 2C, the resist layer (17) is removed by, for example, immersing it in a stripping solution in which the resist layer (17) is dissolved, and the copper foil surface (16) located in the insulating path.
Expose.

【0014】図3(d)に示す如く、上記絶縁路に位置
する銅箔面(16)をエッチングにより除去すると、金
(2b)で被覆さた銅から成るベース回路(1)が形成
されると共に、このエッチングの際、ベース回路(1)
にヘッダー回路(2)に対して弓形のくびれ(10)が
形成され、ヘッダー回路(2)の回路巾よりも狭いベー
ス回路(1)を有するプリント回路板が形成される。そ
の後、このプリント回路板のベース回路(1)とヘッダ
ー回路(2)から成る導電路(3)を包囲して樹脂封止
層(4)を形成し、封止付プリント配線板が作製され
る。この樹脂封止層(4)は公知の封止方法を用いれば
よく、限定はされない。
As shown in FIG. 3 (d), when the copper foil surface (16) located in the insulating path is removed by etching, a base circuit (1) made of copper covered with gold (2b) is formed. Together with this etching, the base circuit (1)
An arcuate constriction (10) is formed in the header circuit (2), and a printed circuit board having a base circuit (1) narrower than the circuit width of the header circuit (2) is formed. Thereafter, a resin sealing layer (4) is formed so as to surround a conductive path (3) composed of a base circuit (1) and a header circuit (2) of this printed circuit board, and a printed wiring board with a seal is manufactured. . The resin sealing layer (4) may be formed by a known sealing method and is not limited.

【0015】上述の如く、ベース回路(1)の頂面にベ
ース回路(1)の回路巾よりも巾広のヘッダー回路
(2)が形成され、ヘッダー回路(2)に対してくびれ
たベース回路(1)を樹脂封止層(4)で包囲している
ので、ヘッダー回路(2)の樹脂封止層(4)がベース
回路(1)のくびれ(10)にくい込むので密着力が増
加する。
As described above, the header circuit (2) wider than the circuit width of the base circuit (1) is formed on the top surface of the base circuit (1), and the base circuit constricted with respect to the header circuit (2). Since (1) is surrounded by the resin encapsulating layer (4), the resin encapsulating layer (4) of the header circuit (2) is hard to fit into the constriction (10) of the base circuit (1), so that the adhesion is increased. .

【0016】[0016]

【実施例】実施例1 絶縁基板(5)として、厚さ0.6mmの銅張りガラス
基材エポキシ樹脂積層板を用いた。この積層板の表面に
ドライフィルムフォトレジストを被覆し、マスクを重ね
て露光処理し、絶縁路となるドライフィルムフォトレジ
ストの部分を光硬化させた。未硬化のドライフィルムフ
ォトレジストを現像液で溶解し、導電路用の銅箔面(1
8)を露出させ、この露出した銅箔面(18)にニッケ
ル(2a)で下地メッキし、次いで金(3b)のメッキ
を施し、ヘッダー回路(2)を形成した。その後、上記
レジスト層(17)を剥離液に浸漬し除去し、絶縁路に
位置する銅箔面(16)を露出させた。この露出した銅
箔面(16)をエッチングすることにより、ヘッダー回
路(2)に対してベース回路(1)に弓形のくびれ(1
0)を形成し、ヘッダー回路(2)の回路巾よりも狭い
ベース回路(1)を形成した。次に上記ベース回路
(1)とヘッダー回路(2)から成る導電路(3)をエ
ポキシ樹脂で封止して、封止付プリント配線板を得た。
Example 1 A copper-clad glass-based epoxy resin laminate having a thickness of 0.6 mm was used as an insulating substrate (5). The surface of this laminated plate was covered with a dry film photoresist, a mask was overlaid and exposed to light, and the portion of the dry film photoresist to be an insulating path was photo-cured. The uncured dry film photoresist is dissolved in a developing solution and the copper foil surface (1
8) was exposed, and the exposed copper foil surface (18) was underplated with nickel (2a), and then gold (3b) was plated to form a header circuit (2). Then, the resist layer (17) was immersed in a stripping solution and removed to expose the copper foil surface (16) located in the insulating path. By etching the exposed copper foil surface (16), an arcuate constriction (1) is formed on the base circuit (1) with respect to the header circuit (2).
0) was formed, and the base circuit (1) narrower than the circuit width of the header circuit (2) was formed. Next, the conductive path (3) consisting of the base circuit (1) and the header circuit (2) was sealed with an epoxy resin to obtain a printed wiring board with a seal.

【0017】この封止付プリント配線板の樹脂封止層
(4)の密着性を試験した。密着性の試験は、温度12
0℃、圧力2kg/cm2 で100時間の条件のPCT
試験機で吸湿させた後、ベース回路(1)を拡大鏡で観
察したが、樹脂封止層(4)の剥がれはなかった。又、
50個の試料で絶縁性試験をした結果、導通不良はなか
った。
The adhesion of the resin sealing layer (4) of this printed wiring board with sealing was tested. The adhesion test is performed at a temperature of 12
PCT under conditions of 0 ° C and pressure of 2 kg / cm 2 for 100 hours
After absorbing moisture with a tester, the base circuit (1) was observed with a magnifying glass, but the resin sealing layer (4) was not peeled off. or,
As a result of conducting an insulation test on 50 samples, there was no conduction failure.

【0018】比較例1 実施例1と同一の絶縁基板を用い、表面にエッチングに
より銅のベース回路を形成した。このベース回路にニッ
ケル、次いで金メッキを施しヘッダー回路を形成した。
このベース回路とヘッダー回路を実施例1と同様にエポ
キシ樹脂で封止した後、実施例と同様の条件で樹脂封止
層の密着を試験した。ベース回路を観察したところ、樹
脂封止層に剥がれがみられた。又、50個の試料で絶縁
性試験をした結果、10個の導通不良が発生していた。
Comparative Example 1 Using the same insulating substrate as in Example 1, a copper base circuit was formed on the surface by etching. This base circuit was plated with nickel and then with gold to form a header circuit.
After the base circuit and the header circuit were sealed with an epoxy resin as in Example 1, the adhesion of the resin sealing layer was tested under the same conditions as in Example. When the base circuit was observed, the resin sealing layer was peeled off. Further, as a result of the insulation test on 50 samples, 10 conduction defects were found.

【0019】[0019]

【表1】 [Table 1]

【0020】[0020]

【発明の効果】本発明の製造方法によって、ベース回路
(1)の頂面にベース回路(1)の回路巾よりも巾広の
ヘッダー回路(2)を形成することができる。
According to the manufacturing method of the present invention, the header circuit (2) wider than the circuit width of the base circuit (1) can be formed on the top surface of the base circuit (1).

【0021】本発明の封止付プリント配線板は、高温高
湿で保存しても樹脂封止層(4)の密着性がよい。
The encapsulating printed wiring board of the present invention has good adhesiveness to the resin encapsulating layer (4) even when stored at high temperature and high humidity.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例に係る封止付プリント配線板の
要部拡大断面図である。
FIG. 1 is an enlarged sectional view of an essential part of a printed wiring board with sealing according to an embodiment of the present invention.

【図2】(a)乃至(d)は本発明の製造方法に係る加
工工程を示した要部拡大断面図である。
2A to 2D are enlarged cross-sectional views of a main part showing a processing step according to the manufacturing method of the present invention.

【図3】従来例に係る封止付プリント配線板の要部拡大
断面図である。
FIG. 3 is an enlarged cross-sectional view of a main part of a sealed printed wiring board according to a conventional example.

【符号の説明】[Explanation of symbols]

1 ベース回路 2 ヘッダー回路 2a ニッケル 2b 金 3 導電路 4 樹脂封止層 5 絶縁基板 10 くびれ 11 銅箔 16 銅箔面 17 レジスト層 18 銅箔面 1 Base Circuit 2 Header Circuit 2a Nickel 2b Gold 3 Conductive Path 4 Resin Sealing Layer 5 Insulating Substrate 10 Constriction 11 Copper Foil 16 Copper Foil Surface 17 Resist Layer 18 Copper Foil Surface

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 絶縁基板(5)の表面に形成された銅か
ら成るベース回路(1)と、このベース回路(1)の頂
面にベース回路(1)の回路巾よりも巾広のニッケル
(2a)、又は/及び金(2b)から成るヘッダー回路
(2)とから成る導電路(3)、及びこの導電路(3)
を包囲する樹脂封止層(4)とを備えることを特徴とす
る封止付プリント配線板。
1. A base circuit (1) made of copper formed on the surface of an insulating substrate (5), and a nickel wider than the circuit width of the base circuit (1) on the top surface of the base circuit (1). (2a) or / and a conductor circuit (3) consisting of a header circuit (2) consisting of gold (2b), and this conductor path (3)
And a resin encapsulating layer (4) surrounding the resin.
【請求項2】 表面に銅箔(11)が配設された絶縁基
板(5)の絶縁路に位置する銅箔面(16)がレジスト
層(17)で被覆され、導電路(3)に位置する銅箔面
(18)が露出したレジスト付基板の導電路用の銅箔面
(18)にニッケル(2a)、又は/及び金(2b)の
メッキを施してヘッダー回路(2)とした後に、上記レ
ジスト層(17)を除去して銅箔面(16)を露出さ
せ、次いでこの銅箔面(16)にエッチングを施して、
ヘッダー回路(2)より回路巾の狭いベース回路(1)
を形成してプリント回路板とし、さらにこのプリント回
路板に樹脂封止層(4)を形成することを特徴とする封
止付プリント配線板の製造方法。
2. A copper foil surface (16) located in an insulating path of an insulating substrate (5) on the surface of which a copper foil (11) is arranged is covered with a resist layer (17) to form a conductive path (3). Nickel (2a) and / or gold (2b) was plated on the copper foil surface (18) for the conductive path of the resist-coated substrate where the positioned copper foil surface (18) was exposed to form a header circuit (2). After that, the resist layer (17) is removed to expose the copper foil surface (16), and then the copper foil surface (16) is etched,
Base circuit (1) with a narrower circuit width than the header circuit (2)
Is formed into a printed circuit board, and a resin sealing layer (4) is further formed on the printed circuit board.
JP3359793A 1993-02-23 1993-02-23 Printed wiring board with sealing and its manufacture Pending JPH06252534A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3359793A JPH06252534A (en) 1993-02-23 1993-02-23 Printed wiring board with sealing and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3359793A JPH06252534A (en) 1993-02-23 1993-02-23 Printed wiring board with sealing and its manufacture

Publications (1)

Publication Number Publication Date
JPH06252534A true JPH06252534A (en) 1994-09-09

Family

ID=12390902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3359793A Pending JPH06252534A (en) 1993-02-23 1993-02-23 Printed wiring board with sealing and its manufacture

Country Status (1)

Country Link
JP (1) JPH06252534A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08264581A (en) * 1995-03-28 1996-10-11 Ibiden Co Ltd Package and its manufacture
JP2001284749A (en) * 2000-03-29 2001-10-12 Matsushita Electric Ind Co Ltd Printed wiring board
JP2007189177A (en) * 2006-01-16 2007-07-26 Sumitomo Metal Mining Co Ltd Flexible wiring board and its manufacturing method
JP2014027151A (en) * 2012-07-27 2014-02-06 Kyocera Corp Wiring board and electronic apparatus
JP2016141210A (en) * 2015-01-30 2016-08-08 大日本印刷株式会社 Heating plate, conductive pattern sheet, and vehicle equipped with the heating plate
JP2017201726A (en) * 2017-08-16 2017-11-09 三菱電機株式会社 Semiconductor device and manufacturing method of the same
US10104775B2 (en) 2013-09-30 2018-10-16 Mitsubishi Electric Corporation Semiconductor device and method for manufacturing the same
JP2019125587A (en) * 2019-04-22 2019-07-25 大日本印刷株式会社 Heating plate, conductive pattern sheet, and vehicle having the heating plate
TWI744498B (en) * 2018-03-05 2021-11-01 矽品精密工業股份有限公司 Substrate structure and method for fabricating the same

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08264581A (en) * 1995-03-28 1996-10-11 Ibiden Co Ltd Package and its manufacture
JP2001284749A (en) * 2000-03-29 2001-10-12 Matsushita Electric Ind Co Ltd Printed wiring board
JP2007189177A (en) * 2006-01-16 2007-07-26 Sumitomo Metal Mining Co Ltd Flexible wiring board and its manufacturing method
JP4735274B2 (en) * 2006-01-16 2011-07-27 住友金属鉱山株式会社 Flexible wiring board and manufacturing method thereof.
JP2014027151A (en) * 2012-07-27 2014-02-06 Kyocera Corp Wiring board and electronic apparatus
US10104775B2 (en) 2013-09-30 2018-10-16 Mitsubishi Electric Corporation Semiconductor device and method for manufacturing the same
JP2016141210A (en) * 2015-01-30 2016-08-08 大日本印刷株式会社 Heating plate, conductive pattern sheet, and vehicle equipped with the heating plate
JP2017201726A (en) * 2017-08-16 2017-11-09 三菱電機株式会社 Semiconductor device and manufacturing method of the same
TWI744498B (en) * 2018-03-05 2021-11-01 矽品精密工業股份有限公司 Substrate structure and method for fabricating the same
JP2019125587A (en) * 2019-04-22 2019-07-25 大日本印刷株式会社 Heating plate, conductive pattern sheet, and vehicle having the heating plate

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