JPH06249710A - Infrared detector - Google Patents

Infrared detector

Info

Publication number
JPH06249710A
JPH06249710A JP3497193A JP3497193A JPH06249710A JP H06249710 A JPH06249710 A JP H06249710A JP 3497193 A JP3497193 A JP 3497193A JP 3497193 A JP3497193 A JP 3497193A JP H06249710 A JPH06249710 A JP H06249710A
Authority
JP
Japan
Prior art keywords
pyroelectric element
substrate
infrared detector
conductive pattern
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP3497193A
Other languages
Japanese (ja)
Inventor
Shinji Yoshiyuki
伸治 吉行
Takashi Yamamoto
隆 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP3497193A priority Critical patent/JPH06249710A/en
Publication of JPH06249710A publication Critical patent/JPH06249710A/en
Withdrawn legal-status Critical Current

Links

Abstract

PURPOSE:To provide an infrared detector suitable for mass production in which manufacturing cost is reduced while enhancing assembling performance. CONSTITUTION:The infrared detector 1 comprises a substrate 2 having a surface formed with a conductive pattern 3, a pyroelectric element 5 provided with a surface electrode 5a and a rear surface electrode, and at least two chip capacitors 6 provided with terminal electrodes 6a, 6b connected with the conductive pattern 3 on the substrate 2 and the rear surface electrode of the pyroelectric element 5 and supporting the pyroelectric element 5 while floating above the substrate 2. This structure facilitates connection between the pyroelectric element 5 and the conductive pattern 3 on the substrate 2, reduces manufacturing cost and the number of manufacturing steps, and enhances mass productivity.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、人体検知センサや高度
情報処理用の多素子センサとして好適な赤外線検出器に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an infrared detector suitable as a human body detection sensor or a multi-element sensor for advanced information processing.

【0002】[0002]

【従来の技術】焦電素子は、セラミックス等からなる焦
電素体の表面に赤外線を吸収するための表面電極を形成
し、焦電素体の裏面に検出信号を取出すための裏面電極
を形成してなるものである。人体等から放射された赤外
線が焦電素子に吸収されると、焦電効果により焦電素体
が温度上昇して内部の自発分極が変化し、表面に電荷が
誘起される。そして、このような焦電効果により入射赤
外線の変化量に応じた電圧,電流が得られる。
2. Description of the Related Art In a pyroelectric element, a surface electrode for absorbing infrared rays is formed on the surface of a pyroelectric element made of ceramics or the like, and a back electrode for extracting a detection signal is formed on the back surface of the pyroelectric element. It will be done. When infrared rays radiated from the human body or the like are absorbed by the pyroelectric element, the pyroelectric effect raises the temperature of the pyroelectric element, changes the spontaneous polarization inside, and induces charges on the surface. Then, due to such a pyroelectric effect, a voltage and a current according to the amount of change of the incident infrared ray can be obtained.

【0003】従来の赤外線検出器として、半円筒状で絶
縁体製の支持部材により焦電素子を基板から浮かした状
態で支持し、焦電素子と基板との空間に焦電素子の検出
信号を処理する回路素子を配置して、実装密度を向上さ
せたものが知られている(実開昭57-201938 号公報)。
また、導電性の支持部材により焦電素子を基板から浮か
した状態で支持し、焦電素子の出力信号を前記導電性の
支持部材を介して基板に設けた導電パーターンに導くよ
うにしたもの赤外線検出器も知られている(実開平2-14
0427号公報)。
As a conventional infrared detector, a semi-cylindrical support member made of an insulating material supports a pyroelectric element in a floating state from a substrate, and a detection signal of the pyroelectric element is provided in a space between the pyroelectric element and the substrate. It is known that circuit elements to be processed are arranged to improve the packaging density (Japanese Utility Model Publication No. 57-201938).
In addition, the pyroelectric element is supported by the conductive supporting member in a state of being floated from the substrate, and the output signal of the pyroelectric element is guided to the conductive pattern provided on the substrate through the conductive supporting member. A detector is also known (Actual Kaihei 2-14
No. 0427).

【0004】[0004]

【発明が解決しようとする課題】しかしながら、実開昭
57-201938 号公報に開示された赤外線検出器は、支持部
材を用いて焦電素子を基板から浮かした状態で支持する
ものであるため、焦電素子と基板との空間に回路素子が
存在するものの、支持部材はあくまで支持部材としてし
か機能せず、回路部品の実装密度の点で不十分であると
いう問題があった。
[Problems to be Solved by the Invention]
Since the infrared detector disclosed in Japanese Patent Publication No. 57-201938 supports the pyroelectric element in a state of being floated from the substrate by using the supporting member, the circuit element exists in the space between the pyroelectric element and the substrate. However, the supporting member functions only as a supporting member, and there is a problem that the mounting density of circuit components is insufficient.

【0005】また、支持部材が半円筒状であるため、自
動搭載が困難で組み立て性に欠けるという問題があっ
た。さらに、支持部材が絶縁体製のため、焦電素子の電
極から基板の導電パターンへの導電路の確保のためにこ
の支持部材に対して導電パターンを塗布又は焼き付けな
ければならず、焦電素子の電極と基板の導電パターンと
を効率よく接続することが困難であるという問題もあっ
た。
Further, since the supporting member has a semi-cylindrical shape, there is a problem that automatic mounting is difficult and assembly is poor. Furthermore, since the supporting member is made of an insulator, a conductive pattern must be applied or baked on the supporting member in order to secure a conductive path from the electrode of the pyroelectric element to the conductive pattern of the substrate. There is also a problem that it is difficult to efficiently connect the electrode of 1) and the conductive pattern of the substrate.

【0006】一方、実開平2-140427号公報に開示された
赤外線検出器は、導電性の支持部材により焦電素子を基
板から浮かした状態で支持したものであるため、他の回
路部品は基板の別の位置に配置しなければならず、やは
り実装密度の点で不十分であるという問題があった。さ
らに、導電性の支持部材として金属製のものを用いる場
合、前記焦電素子の出力端子数に相当する数の支持部材
が必要となり、支持部材の数が増加して製造コスト増加
や、工程数の増加を招くという問題もあった。
On the other hand, in the infrared detector disclosed in Japanese Utility Model Laid-Open No. 2-140427, since the pyroelectric element is supported by the conductive supporting member in a state of being floated from the board, other circuit parts are mounted on the board. However, there is a problem that the mounting density is insufficient. Furthermore, when a metal support member is used as the conductive support member, a number of support members corresponding to the number of output terminals of the pyroelectric element are required, which increases the number of support members and increases the manufacturing cost and the number of steps. There was also the problem of causing an increase in

【0007】そこで、本発明は、焦電素子と基板の導電
パターンとの接続が容易で、工程数が少なくてすみ組み
立て性が良好で量産に適し、回路部品の実装密度の向上
をも図ることができる赤外線検出器を提供することを目
的とする。
Therefore, according to the present invention, the connection between the pyroelectric element and the conductive pattern of the substrate is easy, the number of steps is small, the assembly is easy, the mass production is good, and the packaging density of circuit parts is improved. It is an object of the present invention to provide an infrared detector capable of

【0008】[0008]

【課題を解決するための手段】請求項1記載の赤外線検
出器は、表面に導電パターンが形成された基板と、焦電
素体の表裏両面にそれぞれ表面電極、裏面電極が形成さ
れた焦電素子と、前記焦電素子を基板上に浮上状態に支
持するとともに前記基板の導電パターン及び焦電素子の
裏面電極に接続した端部電極を備えた少なくとも2個の
チップコンデンサとを有するものである。
An infrared detector according to claim 1 is a pyroelectric device comprising a substrate having a conductive pattern formed on the surface thereof, and a front electrode and a back electrode formed on the front and back surfaces of the pyroelectric element, respectively. An element and at least two chip capacitors each of which supports the pyroelectric element in a floating state on a substrate and which has an end electrode connected to a conductive pattern of the substrate and a back electrode of the pyroelectric element. .

【0009】請求項2記載の赤外線検出器は、前記焦電
素子が、少なくとも2組の逆直列接続された電極対を備
え、この焦電素子の裏面電極と基板の導電パターンとが
前記チップコンデンサの端部電極各々により接続したも
のである。
According to another aspect of the infrared detector of the present invention, the pyroelectric element includes at least two pairs of electrodes connected in anti-series, and the back electrode of the pyroelectric element and the conductive pattern of the substrate are the chip capacitors. The end electrodes are connected to each other.

【0010】請求項3記載の赤外線検出器は、前記焦電
素子を基板上に浮上状態に支持する各チップコンデンサ
の間に他の回路部品を実装したものである。
In the infrared detector of the third aspect, other circuit parts are mounted between the chip capacitors for supporting the pyroelectric element in a floating state on the substrate.

【0011】[0011]

【作用】請求項1記載の赤外線検出器によれば、上述し
た構成としたので、基板と、焦電素子との間に介在させ
た少なくとも2個のチップコンデンサの端部電極を利用
して前記基板の導電パターンと基板上方の焦電素子の裏
面電極とを接続でき、これにより、焦電素子と基板の導
電パターンとの接続を極めて容易に行うことができ組み
立て性が良好となる。
According to the infrared detector of the first aspect, since the infrared detector has the above-mentioned structure, the end electrodes of at least two chip capacitors interposed between the substrate and the pyroelectric element are used. The conductive pattern of the substrate and the back electrode of the pyroelectric element above the substrate can be connected, which allows the pyroelectric element and the conductive pattern of the substrate to be connected very easily, and the assemblability is improved.

【0012】また、規格が統一されたチップコンデンサ
を利用することにより、製造コストの低減が図れるとと
もに、従来例に比べ工程数が削減でき、量産に好適とな
る。
Further, by using a chip capacitor having a unified standard, the manufacturing cost can be reduced and the number of steps can be reduced as compared with the conventional example, which is suitable for mass production.

【0013】請求項2記載の赤外線検出器によれば、前
記焦電素子が、少なくとも2組の逆直列接続された電極
対を備え、この焦電素子の裏面電極と基板の導電パター
ンとが前記チップコンデンサの端部電極各々により接続
されるものであるから、焦電素子からの出力信号の取り
出しが容易となる。
According to another aspect of the infrared detector, the pyroelectric element includes at least two pairs of electrodes connected in anti-series, and the back electrode of the pyroelectric element and the conductive pattern of the substrate are the above-mentioned. Since they are connected by the respective end electrodes of the chip capacitor, it becomes easy to take out the output signal from the pyroelectric element.

【0014】請求項3記載の赤外線検出器によれば、前
記焦電素子を基板上に浮上状態に支持する各チップコン
デンサの間に他の回路部品を実装したものであるから、
この赤外線検出器の実装密度の向上を図れ、さらには、
全体構成の小型化が可能となる。
According to the infrared detector of the third aspect, since other circuit parts are mounted between the chip capacitors for supporting the pyroelectric element on the substrate in a floating state,
The mounting density of this infrared detector can be improved, and further,
The overall configuration can be downsized.

【0015】[0015]

【実施例】以下に本発明の実施例を詳細に説明する。EXAMPLES Examples of the present invention will be described in detail below.

【0016】図1に示す本実施例の赤外線検出器1は、
表面に所定の形状の導電パターン3が形成された絶縁体
製で板状の基板2と、板状の焦電素体4の表裏両面にそ
れぞれ表面電極(受光電極)5a、裏面電極が形成され
た焦電素子5と、基板2上の導電パターン3の上に所定
の間隔で配置され、焦電素子5を基板2上に浮上状態に
支持するとともに、前記基板2の導電パターン3及び焦
電素子5の裏面電極に各々接続した端部電極6a,6b
を備えた2個のチップコンデンサ6と、前記2個のチッ
プコンデンサ6の間の空間に配置され、リード端子8に
より前記導電パターン3に接続された回路部品(例え
ば、FET,トランジスタ,オペアンプ,抵抗,コンデ
ンサ等)11と、前記焦電素子5に対応する位置に所定
の光透過率を有するフィルタ9を頂部に備え、このフィ
ルタ9が焦電素子5の真上になる状態で前記2個のチッ
プコンデンサ6及び焦電素子5を外部から密封する蓋体
10とを具備している。
The infrared detector 1 of this embodiment shown in FIG.
A plate-shaped substrate 2 made of an insulating material having a conductive pattern 3 of a predetermined shape formed on the surface, and a front surface electrode (light receiving electrode) 5a and a back surface electrode are formed on both front and back surfaces of the plate-shaped pyroelectric element 4, respectively. The pyroelectric element 5 and the conductive pattern 3 on the substrate 2 are arranged at a predetermined interval to support the pyroelectric element 5 above the substrate 2 in a floating state, and the conductive pattern 3 on the substrate 2 and the pyroelectric element 3 are supported. End electrodes 6a and 6b respectively connected to the back surface electrodes of the element 5
And two chip capacitors 6 provided with a circuit component (for example, an FET, a transistor, an operational amplifier, a resistor) arranged in a space between the two chip capacitors 6 and connected to the conductive pattern 3 by a lead terminal 8. , A condenser, etc.) 11 and a filter 9 having a predetermined light transmittance at a position corresponding to the pyroelectric element 5, and the two filters are placed directly above the pyroelectric element 5. A chip body 6 for sealing the chip capacitor 6 and the pyroelectric element 5 from the outside is provided.

【0017】図2に、前記蓋体10により施蓋した状態
の赤外線検出器1を示す。
FIG. 2 shows the infrared detector 1 in the state of being covered with the cover 10.

【0018】前記焦電素子5は、例えばTGS(硫酸ト
リグリシン)等の有機系の結晶,LiTaO3 (タンタ
ル酸リチウム)等の無機系の結晶又はPbTiO3 (チ
タン酸鉛)等のセラミックスからなる焦電素体4の表面
に複数の表面電極5aを形成し、図3に等価的に示すよ
うに受光エレメントC1 ,C2 を逆直列の状態に接続す
るとともに、電界効果トランジスタFETを介して出力
信号を取り出すようになっている。さらに、焦電素体4
の裏面に各表面電極5aに対向するように複数の裏面電
極(図示省略)を形成して、多チャンネル化したもので
ある。
The pyroelectric element 5 is made of, for example, an organic crystal such as TGS (triglycine sulfate), an inorganic crystal such as LiTaO 3 (lithium tantalate), or a ceramic such as PbTiO 3 (lead titanate). A plurality of surface electrodes 5a are formed on the surface of the pyroelectric element 4, the light receiving elements C1 and C2 are connected in an anti-series state as shown equivalently in FIG. 3, and an output signal is output via the field effect transistor FET. To take out. Furthermore, the pyroelectric body 4
A plurality of back surface electrodes (not shown) are formed on the back surface of the so as to face the respective front surface electrodes 5a to form a multi-channel structure.

【0019】前記焦電素子5の裏面電極とチップコンデ
ンサ6の端部電極6a,6bとは、導電性接着剤等によ
り電気的に接続している。また、前記基板2の導電パタ
ーン3と、チップコンデンサ6の端部電極6a,6bと
は、半田付け,導電性接着剤等により電気的に接続して
いる。
The back electrode of the pyroelectric element 5 and the end electrodes 6a and 6b of the chip capacitor 6 are electrically connected by a conductive adhesive or the like. The conductive pattern 3 on the substrate 2 and the end electrodes 6a and 6b of the chip capacitor 6 are electrically connected by soldering, a conductive adhesive or the like.

【0020】尚、図4は前記受光エレメントC1 ,C2
、電界効果トランジスタFETを2組備えた場合の等
価回路を示すものである。
FIG. 4 shows the light receiving elements C1 and C2.
2 shows an equivalent circuit when two sets of field effect transistor FETs are provided.

【0021】上述した構成の赤外線検出器1によれば、
基板2と、焦電素子5との間に介在させた少なくとも2
個のチップコンデンサ6の各端部電極6a,6bを利用
して前記基板2の導電パターン3と基板2の上方の焦電
素子5の裏面電極とを導電性接着剤等により電気的に簡
単に接続でき、これにより、赤外線検出器1の組み立て
性が良好となる。
According to the infrared detector 1 having the above structure,
At least 2 interposed between the substrate 2 and the pyroelectric element 5.
Using the respective end electrodes 6a, 6b of the individual chip capacitors 6, the conductive pattern 3 of the substrate 2 and the back surface electrode of the pyroelectric element 5 above the substrate 2 can be electrically simply made by a conductive adhesive or the like. The infrared detector 1 can be connected, and the assemblability of the infrared detector 1 is improved.

【0022】また、規格が統一されたチップコンデンサ
6を利用することにより、製造コストの低減が図れると
ともに、従来例に比べ工程数が削減でき、量産性の向上
を図れる。
Further, by using the chip capacitor 6 having the unified standard, the manufacturing cost can be reduced, the number of steps can be reduced as compared with the conventional example, and the mass productivity can be improved.

【0023】また、前記焦電素子5を基板2上に浮上状
態に支持する各チップコンデンサ6の間に、他の回路部
品11を実装できるので、基板2上に2個のチップコン
デンサ6と他の回路部品11とを高密度に搭載でき、こ
の赤外線検出器1の実装密度の向上を図れ、さらには、
全体構成の小型化が可能となる。
Further, since another circuit component 11 can be mounted between the chip capacitors 6 for supporting the pyroelectric element 5 on the substrate 2 in a floating state, the two chip capacitors 6 and The circuit components 11 and can be mounted at a high density, and the mounting density of the infrared detector 1 can be improved.
The overall configuration can be downsized.

【0024】さらに、前記焦電素子5が、少なくとも2
組の逆直列接続された表面電極5aを備え、この焦電素
子5の裏面電極と基板2の導電パターン3とが前記チッ
プコンデンサ6の各端部電極6a,6b各々により接続
されるものであるから、焦電素子5からの出力信号の取
り出しが容易となる。
Furthermore, the pyroelectric element 5 has at least 2
A pair of anti-series connected front electrodes 5a are provided, and the back electrode of the pyroelectric element 5 and the conductive pattern 3 of the substrate 2 are connected by the respective end electrodes 6a and 6b of the chip capacitor 6. Therefore, it becomes easy to take out the output signal from the pyroelectric element 5.

【0025】次に、図5を参照して本発明の第2の実施
例を説明する。
Next, a second embodiment of the present invention will be described with reference to FIG.

【0026】同図に示す赤外線検出器1Aは、前記赤外
線検出器1と略同様な構成であるが、焦電素子15が、
その表面に少なくとも2組の逆直列接続された電極対1
5a,15bを備え、この焦電素子15の電極対15
a,15bに対応する裏面電極と基板2の導電パターン
3とを、前記各チップコンデンサ6の各端部電極6a,
6b各々により電気的に接続したこと、各チップコンデ
ンサ6の間の空間に2個の回路部品20a,20bを搭
載し、リード端子21a,21bを用いて導電パターン
3に接続したことが特徴である。
The infrared detector 1A shown in the figure has a structure similar to that of the infrared detector 1, except that the pyroelectric element 15 is
At least two electrode pairs 1 connected in anti-series on the surface
5a and 15b, and the electrode pair 15 of this pyroelectric element 15
a and 15b, the back surface electrodes and the conductive pattern 3 of the substrate 2 are connected to the end electrodes 6a of the chip capacitors 6,
6b are electrically connected to each other, two circuit components 20a and 20b are mounted in the spaces between the chip capacitors 6, and the lead terminals 21a and 21b are used to connect to the conductive pattern 3. .

【0027】このような構成の赤外線検出器1Aによっ
ても、前記赤外線検出器1の場合と同様な作用効果を発
揮させることができる。
With the infrared detector 1A having such a structure, it is possible to exhibit the same operational effect as that of the infrared detector 1.

【0028】本発明は、上記実施例に限定されず、種々
に変形実施できる。
The present invention is not limited to the above embodiment, but can be modified in various ways.

【0029】例えば、上述した実施例では、基板上に2
個のチップコンデンサを間隔をもって搭載する場合につ
いて説明したが、チップコンデンサの搭載個数は3個,
4個等任意数として実施可能である。
For example, in the above-mentioned embodiment, 2 on the substrate.
I explained the case of mounting the chip capacitors at intervals, but the number of chip capacitors mounted is 3,
It can be implemented as an arbitrary number such as four.

【0030】[0030]

【発明の効果】以上詳述した本発明によれば、以下の効
果を奏する。
According to the present invention described in detail above, the following effects can be obtained.

【0031】請求項1記載の発明によれば、上述した構
成としたので、焦電素子と基板の導電パターンとの接続
が容易となり、製造コストの低減が図れる、さらに、従
来例に比べ工程数が削減でき、量産性に優れた赤外線検
出器を提供することができる。
According to the first aspect of the present invention, since the above-mentioned structure is adopted, the connection between the pyroelectric element and the conductive pattern of the substrate can be facilitated, and the manufacturing cost can be reduced. It is possible to provide an infrared detector that can be reduced in mass production and is excellent in mass productivity.

【0032】請求項2記載の発明によれば、焦電素子か
らの出力信号の取り出しが容易な赤外線検出器を提供す
ることができる。
According to the second aspect of the invention, it is possible to provide an infrared detector in which the output signal from the pyroelectric element can be easily taken out.

【0033】請求項3記載の発明によれば、回路部品の
実装密度の向上を図れ、さらには、全体構成の小型化が
可能な赤外線検出器を提供することができる。
According to the third aspect of the present invention, it is possible to provide an infrared detector capable of improving the packaging density of circuit components and further downsizing the entire structure.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の赤外線検出器の一実施例を一部を切欠
して示す斜視図
FIG. 1 is a perspective view showing an embodiment of an infrared detector of the present invention with a part cut away.

【図2】本実施例の赤外線検出器の外観を示す斜視図FIG. 2 is a perspective view showing the appearance of the infrared detector of this embodiment.

【図3】本実施例の赤外線検出器の等価回路図FIG. 3 is an equivalent circuit diagram of the infrared detector of this embodiment.

【図4】本実施例の赤外線検出器の他例の等価回路図FIG. 4 is an equivalent circuit diagram of another example of the infrared detector of this embodiment.

【図5】本発明の赤外線検出器の他の実施例を一部を切
欠して示す斜視図
FIG. 5 is a perspective view showing another embodiment of the infrared detector of the present invention with a part cut away.

【符号の説明】[Explanation of symbols]

1 赤外線検出器 2 基板 3 導電パターン 4 焦電素体 5 焦電素子 5a 表面電極 6 チップコンデンサ 6a,6b 端部電極 11 回路部品 1 Infrared Detector 2 Substrate 3 Conductive Pattern 4 Pyroelectric Element 5 Pyroelectric Element 5a Surface Electrode 6 Chip Capacitor 6a, 6b End Electrode 11 Circuit Parts

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 表面に導電パターンが形成された基板
と、焦電素体の表裏両面にそれぞれ表面電極、裏面電極
が形成された焦電素子と、前記焦電素子を基板上に浮上
状態に支持するとともに前記基板の導電パターン及び焦
電素子の裏面電極に接続した端部電極を備えた少なくと
も2個のチップコンデンサとを有することを特徴とする
赤外線検出器。
1. A substrate having a conductive pattern formed on its surface, a pyroelectric element having a front electrode and a back electrode formed on both front and back surfaces of a pyroelectric element, and the pyroelectric element suspended above the substrate. An infrared detector comprising: at least two chip capacitors that support and are provided with a conductive pattern of the substrate and an end electrode connected to a back electrode of a pyroelectric element.
【請求項2】 前記焦電素子は、少なくとも2組の逆直
列接続された電極対を備え、この焦電素子の裏面電極と
基板の導電パターンとが前記チップコンデンサの端部電
極各々により接続されたものである請求項1記載の赤外
線検出器。
2. The pyroelectric element includes at least two pairs of electrodes connected in anti-series, and a back electrode of the pyroelectric element and a conductive pattern of a substrate are connected by each end electrode of the chip capacitor. The infrared detector according to claim 1, which is a
【請求項3】 前記焦電素子を基板上に浮上状態に支持
する各チップコンデンサの間に他の回路部品を実装した
請求項1又は2記載の赤外線検出器。
3. The infrared detector according to claim 1, wherein another circuit component is mounted between the chip capacitors that support the pyroelectric element in a floating state on the substrate.
JP3497193A 1993-02-24 1993-02-24 Infrared detector Withdrawn JPH06249710A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3497193A JPH06249710A (en) 1993-02-24 1993-02-24 Infrared detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3497193A JPH06249710A (en) 1993-02-24 1993-02-24 Infrared detector

Publications (1)

Publication Number Publication Date
JPH06249710A true JPH06249710A (en) 1994-09-09

Family

ID=12429031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3497193A Withdrawn JPH06249710A (en) 1993-02-24 1993-02-24 Infrared detector

Country Status (1)

Country Link
JP (1) JPH06249710A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100805756B1 (en) * 2006-08-21 2008-02-21 한국과학기술원 Transducer and various applicable device using thereof and method of manufacturing thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100805756B1 (en) * 2006-08-21 2008-02-21 한국과학기술원 Transducer and various applicable device using thereof and method of manufacturing thereof

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