JPH06244487A - Device for coordinating laser beam time of laser device - Google Patents

Device for coordinating laser beam time of laser device

Info

Publication number
JPH06244487A
JPH06244487A JP3024993A JP3024993A JPH06244487A JP H06244487 A JPH06244487 A JP H06244487A JP 3024993 A JP3024993 A JP 3024993A JP 3024993 A JP3024993 A JP 3024993A JP H06244487 A JPH06244487 A JP H06244487A
Authority
JP
Japan
Prior art keywords
laser
light
branched
wavelength
beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP3024993A
Other languages
Japanese (ja)
Inventor
Nariyuki Tomonaga
成之 朝長
Jun Izumi
順 泉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP3024993A priority Critical patent/JPH06244487A/en
Publication of JPH06244487A publication Critical patent/JPH06244487A/en
Withdrawn legal-status Critical Current

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  • Lasers (AREA)

Abstract

PURPOSE:To control the delay circuit of a light at the same time with the sweeping of the wavelength of a Ti sapphire laser so as to enable the mixing of light in each wavelength by branching a laser beam, and delaying it with an optical fiber and a prism so as to adjust a light path, and detecting the time difference, and feeding it back. CONSTITUTION:The beam of an exciting laser 1 is branched with a beam splitter 2, and a wavelength variable laser 3 is excited with one hand of the branched beams, and the beam of the wavelength variable laser 3 is incident on an optical 11. Furthermore, the other branched beam is incident on the optical mixer 11 through an optical fiber 4, a prism 5 on an X stage 7, and a prism 6. One part of the two beams which have entered the light mixer 11 is guided to a PIN photodiode 9 by a partial reflecting mirror 10, and the incidence timing of two beams is detected. An X stage controller 8 operates the stage 7 and adjusts the length of the light path of the other beam so that the incidence timings may accord with each other.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はレーザ装置のレーザ光時
間整合装置に関するものであり、光混合法によりレーザ
の発振波長範囲を広げたレーザ装置に適用するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser light time matching device for a laser device, and is applied to a laser device in which the oscillation wavelength range of the laser is widened by a light mixing method.

【0002】[0002]

【従来の技術】レーザ元素分析用の光源としてレーザ装
置を用いる。このレーザ装置では、レーザビームの発振
波長範囲を広げる手法として光混合法が用いられる。
2. Description of the Related Art A laser device is used as a light source for laser elemental analysis. In this laser device, the light mixing method is used as a method for expanding the oscillation wavelength range of the laser beam.

【0003】ここで光混合法を用いた従来のレーザ装置
を図3,図4を基に説明する。図3に示す従来装置で
は、2台の励起レーザ01a,01bを有し、励起レー
ザ01aにより波長可変レーザ02を励起して得たパル
ス状のビームと、励起レーザ01bのパルス状のビーム
を、ミラーM1,M2により光混合器3に入射する。こ
の場合、光混合器03に2つのビームを同時に入射する
ため、励起レーザ01a,01bを同期させていた。
A conventional laser device using the light mixing method will be described with reference to FIGS. 3 and 4. The conventional apparatus shown in FIG. 3 has two pump lasers 01a and 01b, and a pulsed beam obtained by pumping the wavelength tunable laser 02 by the pump laser 01a and a pulsed beam of the pump laser 01b are The light is incident on the light mixer 3 by the mirrors M1 and M2. In this case, since the two beams are simultaneously incident on the light mixer 03, the pump lasers 01a and 01b are synchronized.

【0004】図4に示す従来装置では、励起レーザ01
cのパルス状のビームをビームスプリッタ04により分
岐する。そして分岐した一方のビームで波長可変レーザ
05を励起し、ミラーM3,M4,M5により、分岐し
た他方のビームと波長可変レーザ05のビームを光混合
器03に導く。この場合、光混合器03に2つのビーム
を同時に入射するため、波長可変レーザ05として時間
遅れのないものを用いる。
In the conventional device shown in FIG. 4, the pump laser 01
The pulsed beam of c is split by the beam splitter 04. Then, the tunable laser 05 is excited by one of the branched beams, and the other branched beam and the beam of the tunable laser 05 are guided to the optical mixer 03 by the mirrors M3, M4, and M5. In this case, since the two beams are simultaneously incident on the light mixer 03, the wavelength tunable laser 05 that does not have a time delay is used.

【0005】[0005]

【発明が解決しようとする課題】結局従来では、時間遅
れのある波長可変レーザを用いようとすると、2台の励
起レーザが必要となりコスト高となってしまう。
After all, in the past, if a wavelength tunable laser with a time delay was used, two pump lasers would be required, which would increase the cost.

【0006】波長可変レーザの例としてTi サファイア
レーザを挙げる。Ti サファイアレーザは約700〜9
00nmの波長範囲を発振でき、このレーザに光混合法等
の非線形効果を用いることで、紫外から近赤外の波長範
囲を発振させることが可能となる。光混合には励起レー
ザとして用いているYAGレーザ光を使用するが、T i
サファイアレーザは、YAGレーザで励起後、遅れて発
振する為、ここに時間差が生じ、混合できない。またT
i サファイアレーザは、図2に示すように、発振する波
長により遅れ時間が異なる為、単なる光の遅延回路では
波長掃引できない。
An example of a tunable laser is Tisapphire
I will give you a laser. TiSapphire laser is about 700-9
Can oscillate in the wavelength range of 00 nm
By using the nonlinear effect of, the wavelength range from ultraviolet to near infrared is
It becomes possible to oscillate the enclosure. Excitation laser for light mixing
The YAG laser light used as the i
The sapphire laser is emitted with a delay after being excited by the YAG laser.
Since it is shaken, there is a time difference here and mixing is not possible. See also T
iThe sapphire laser, as shown in FIG.
Since the delay time differs depending on the length, in a simple optical delay circuit
Wavelength cannot be swept.

【0007】本装置はこれを解決し、Ti サファイアレ
ーザの波長掃引と同時に光の遅延回路を制御し、各波長
での光混合を可能にするものである。
The present device solves this problem and controls the optical delay circuit at the same time as the wavelength sweeping of the T i sapphire laser, thereby enabling light mixing at each wavelength.

【0008】[0008]

【課題を解決するための手段】励起レーザより分岐した
レーザ光を光ファイバとプリズムで遅延する。光ファイ
バは時間固定、プリズムはXステージでスライドさせら
れ光路長を調整し波長による時間差を補正する。光路上
でビームを一致させた場所にPINフォトダイオードを
置き、これで時間差を検出しXステージにフィードバッ
クさせ時間の整合をとる。なおPINフォトダイオード
は光を検出する素子であり、Xステージは横あるいは縦
にスライドするステージである。
A laser beam branched from an excitation laser is delayed by an optical fiber and a prism. The optical fiber is fixed at time, and the prism is slid on the X stage to adjust the optical path length and correct the time difference due to the wavelength. A PIN photodiode is placed at a position where the beams coincide with each other on the optical path. With this, a time difference is detected and is fed back to the X stage for time matching. The PIN photodiode is an element that detects light, and the X stage is a stage that slides horizontally or vertically.

【0009】[0009]

【作用】光混合とは、二つの異なる周波数の光を物質中
で混ぜ合わせることであり、和周波ω1 +ω2 と差周波
|ω1 −ω2 |の光を発生させる方法である。混ぜる物
質には非線形結晶が使用され、この結晶は反転対称性を
持たない必要がある。入射する波長の片方が波長可変の
場合には発生する光も波長可変となり、これによってレ
ーザの発振波長が拡大される。しかし入射する2つのレ
ーザ光は同時に結晶中を通過する必要があり、この時間
調整に本装置は使用される。
The light mixing is to mix lights having two different frequencies in a substance, and is a method for generating lights having a sum frequency ω 1 + ω 2 and a difference frequency │ω 12 │. A non-linear crystal is used as the substance to be mixed, and this crystal needs to have no inversion symmetry. When one of the incident wavelengths is wavelength tunable, the generated light is also wavelength tunable, which expands the oscillation wavelength of the laser. However, the two incident laser beams must pass through the crystal at the same time, and this device is used for this time adjustment.

【0010】波長可変レーザとしてTi サファイアレー
ザを用いその基本波(700〜900nm)とYAGレー
ザの基本波,2倍波との光混合で発生する波長及び、T
i サファイアレーザの2倍波を用いた場合での光混合で
発生する波長を表1に示す。
Using a T i sapphire laser as a wavelength tunable laser, the wavelength generated by the optical mixing of the fundamental wave (700 to 900 nm) of the T i sapphire laser with the fundamental wave of the YAG laser and the second harmonic wave, and T
Table 1 shows the wavelengths generated by light mixing when the second harmonic of the i- sapphire laser is used.

【0011】[0011]

【表1】 [Table 1]

【0012】[0012]

【実施例】以下本発明について、図1を参照して説明す
る。同図に示すように、励起レーザ1(YAGレーザ)
からのビームは、ビームスプリッタ2により分岐され、
一方はミラーm1を介して波長可変レーザ(Ti サファ
イアレーザ)3に、他方は光混合用として光ファイバ4
へ進む。波長可変レーザ3からは数十から数百ナノ秒遅
れてビームが出射し、ミラーm2,m3及び部分反射ミ
ラー10により、一部をPINフォトダイオード9へ、
大部分を光混合器11へ入射する。一方、光ファイバ4
を通過したビームは、横あるいは縦にスライドするXス
テージ7上の光路長可変なプリズム5,6を通過した
後、ミラーm4,m5及び部分反射ミラー10で、一部
をPINフォトダイオード9へ、大部分を光混合器11
へ入射する。PINフォトダイオード9では、2つのビ
ームを検知し、Xステージコントローラー8によって、
Xステージ7を操作し2つのビームをPINフォトダイ
オード9の位置で同時刻に入射するよう時間を整合す
る。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to FIG. As shown in the figure, pump laser 1 (YAG laser)
Beam from is split by the beam splitter 2,
One is a wavelength tunable laser ( Ti sapphire laser) 3 via a mirror m1, and the other is an optical fiber 4 for light mixing.
Go to. A beam is emitted from the wavelength tunable laser 3 with a delay of several tens to several hundreds of nanoseconds, and a part thereof is directed to the PIN photodiode 9 by the mirrors m2, m3 and the partial reflection mirror 10.
Most of the light is incident on the light mixer 11. On the other hand, the optical fiber 4
After passing through the prisms 5 and 6 whose optical path length is variable on the X stage 7 which horizontally or vertically slides, a part of the beam is passed to the PIN photodiode 9 by the mirrors m4 and m5 and the partial reflection mirror 10. Mostly the light mixer 11
Incident on. The PIN photodiode 9 detects two beams, and the X stage controller 8
The X stage 7 is operated so that the two beams are incident at the same time at the position of the PIN photodiode 9.

【0013】[0013]

【発明の効果】本発明により、今まで波長範囲が限定さ
れていたレーザ装置が、より広い領域の発振が可能とな
り、1台のレーザ装置で紫外から近赤外まで発振できる
レーザが出現する。
According to the present invention, a laser device whose wavelength range has been limited so far can oscillate in a wider region, and a laser capable of oscillating from ultraviolet to near infrared appears with one laser device.

【0014】図2にTi サファイアレーザの波長に対す
る遅延時間依存性を示す。これは解析データではあるが
数十から百数十ナノ秒の補正をすればよい。
FIG. 2 shows the delay time dependence of the wavelength of the T i sapphire laser. Although this is analysis data, it may be corrected for several tens to several hundreds of nanoseconds.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例を示すブロック図。FIG. 1 is a block diagram showing an embodiment of the present invention.

【図2】Ti サファイアレーザの波長に対する遅延時間
の関係を示す特性図。
FIG. 2 is a characteristic diagram showing a relationship between delay time and wavelength of a T i sapphire laser.

【図3】従来技術を示すブロック図。FIG. 3 is a block diagram showing a conventional technique.

【図4】従来技術を示すブロック図。FIG. 4 is a block diagram showing a conventional technique.

【符号の説明】[Explanation of symbols]

1 励起レーザ 2 ビームスプリッタ 3 波長可変レーザ 4 光ファイバ 5,6 プリズム 7 Xステージ 8 Xステージコントローラー 9 PINフォトダイオード 10 部分反射ミラー 11 光混合器 1 Excitation Laser 2 Beam Splitter 3 Wavelength Tunable Laser 4 Optical Fiber 5, 6 Prism 7 X Stage 8 X Stage Controller 9 PIN Photodiode 10 Partial Reflection Mirror 11 Optical Mixer

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 励起レーザのビームを分岐し、分岐した
一方のビームで波長可変レーザを励起し、波長可変レー
ザのビームと分岐した他方のビームを、光混合器に入射
し混合して出力するレーザ装置において、 分岐した他方のビームを導くと共に光路長が可変となっ
ているビームガイド手段と、 前記光混合器に入射する2つのビームの入射タイミング
を検出する検出手段と、 前記検出手段で検出した入射タイミングが一致するよう
に、前記ビームガイド手段の光路長をコントロールする
コントローラーと、を備えたことを特徴とするレーザ装
置のレーザ光時間整合装置。
1. A beam of an excitation laser is branched, a wavelength tunable laser is excited by one of the branched beams, and the other beam branched from the beam of the wavelength tunable laser is incident on an optical mixer and mixed and output. In the laser device, a beam guide unit that guides the other branched beam and has a variable optical path length, a detection unit that detects the incident timing of the two beams that enter the optical mixer, and a detection unit that detects the beam And a controller for controlling the optical path length of the beam guide means so that the incident timings coincide with each other.
JP3024993A 1993-02-19 1993-02-19 Device for coordinating laser beam time of laser device Withdrawn JPH06244487A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3024993A JPH06244487A (en) 1993-02-19 1993-02-19 Device for coordinating laser beam time of laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3024993A JPH06244487A (en) 1993-02-19 1993-02-19 Device for coordinating laser beam time of laser device

Publications (1)

Publication Number Publication Date
JPH06244487A true JPH06244487A (en) 1994-09-02

Family

ID=12298441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3024993A Withdrawn JPH06244487A (en) 1993-02-19 1993-02-19 Device for coordinating laser beam time of laser device

Country Status (1)

Country Link
JP (1) JPH06244487A (en)

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A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20000509