JPH06242268A - Device and method for supporting infrared detector - Google Patents

Abstract

PURPOSE:To finely align the position of an infrared detector with an optical system in an infrared detector supporting device. CONSTITUTION:An infrared detector support device is equipped with spring means 123, 127, 133 allowing spring compression forces to act on movable members 73, 79, 87, 90 mutually equipped with guide means 74, 76, 78, 81, 84, 88, 89, 93 and independently movable and adjustable in three-axis directions, a fine adjustment means capable of finely adjusting the respective movable members against the compression forces of the spring means on the basis of the pitch difference of the screw parts of screws 122, 126, 132 by the screws 122, 126, 132 having screw parts different in pitch in the same direction and fixing means 102, 108, 109, 113 capable of independently and mutually connecting and fixing the movable members in such a state that the positions of the movable members are set to predetermined positions by the fine adjustment means.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an infrared detector supporting device and an infrared detector supporting method applied to an infrared detecting portion of an infrared detecting device.

[0002] Various technological research and analysis researches are carried out by detecting and processing the temperature distribution in observation devices of natural phenomena and living things, industrial production fields, medical fields, various academic researches, and the like. . It has also been realized that such a temperature distribution is visualized so that it can be visually captured, and that it is colored according to the temperature.

An outline of the configuration of the infrared image device as shown in FIG. 4 will be described below.
The infrared ray of the object 1 is received and condensed by the optical lens 2 for infrared rays, and the condensed luminous flux is repeatedly scanned by the horizontal plane scanning mirror 3 in the horizontal direction of the arrow A in a vibration state in the horizontal plane as shown by the arrow B. To do.

Then, the vertical plane scanning mirror 4 repeatedly scans the light beam from the target 1 in the vertical direction in the vertical plane as indicated by the arrow C in a vibrating state. As a result, the object 1 is sequentially subjected to two-dimensional surface scanning, so that the object 1 is focused by the infrared condenser lens 5 and is made incident on the infrared detecting element portion in the infrared detector 6.

The electric signal converted from the optical / electrical signal from the infrared detector 6 is processed by the signal processing unit 7, and the image display unit 8 sequentially scans the surface in the two-dimensional direction to change the light or shade depending on the temperature. A color-coded heat distribution image is displayed.

Such an infrared detector 6 is used as its infrared detecting element, for example, Hg-Cd made of a ternary alloy.
A cooled type such as Te is used. Such a cooling type infrared detecting element is used, for example, in a state of being cooled to the temperature of liquid nitrogen or being cooled to the temperature of liquid helium.

For this purpose, liquefied nitrogen is supplied to the infrared detecting element to cool it, or a circulating type cooling device capable of circulating a refrigerant to cool it by the Joule-Thomson effect is used. The former requires the supply of the refrigerant according to the evaporation of the refrigerant, and the latter is suitable for continuous use.

The appearance of the infrared detector is shown in FIG. 5A is a plan view, FIG. 5B is a side view, and FIG. 5C is a bottom view. An infrared detecting element 13 is arranged inside the main body 11 through an infrared transmitting window 12 at the inner end of the vacuum chamber. Further, it has a mounting flange 14 at the other end. Mounting holes 15 are formed in notches at the four corners of the flange 14.

The infrared detecting element 13 has a large number of elements formed in an array in a line. Reference numeral 16 is a screw hole for mounting the cooling device. It is necessary that the element part of the infrared detector be accurately aligned with the focal position of the condenser lens 5, and also be aligned with the center of the scanning range for scanning the object.

FIG. 6A is a front view of the infrared detecting element 13 having an array structure. The infrared detection element 13 has a size of, for example, about 50 μm square.
There are 0 elements, 120 elements, 240 elements or more elements, and an appropriate element is adopted according to a request.

It is indispensable that the array row is fixed in a correct position with respect to the optical system, and in the design, it is specified that each constituent member is precisely processed to obtain a predetermined positional relationship. However, a slight positional deviation occurs due to accumulation of machining tolerances and errors during assembly. The mechanical system error can be approached to an accurate position while being measured by various means during assembly, but the optical and electrical position of the infrared detection element 13 cannot be measured by mechanical measurement. .

Therefore, the position of the supporting device supporting the infrared detector in the finally assembled state is made adjustable, and the position of the infrared detector is adjusted and aligned by using the infrared light source for measurement as a reference. To be done. As an electrically operated state, for example, the element 13c (FIG. 6A in FIG. 6) at the center of the infrared detection element 13 on a line is moved in the XY direction parallel to the paper surface so as to coincide with the optical axis of the optical system. It is slightly moved and aligned so that the waveform of the output voltage detected as shown in FIG. 6B shows the maximum value E.

Next, the element 1 at the central portion in the direction along the paper surface
Other infrared detecting element 13 which is slightly rotated about 3c
The output voltage waveforms of are all aligned so as to obtain the maximum value, and the state is fixed.

Further, the element position of the infrared detector may be fixed by adjusting the mounting position of the infrared detector due to the fact that the element position is slightly different due to replacement of the infrared detector and the convenience of the optical system. preferable. For this purpose, a position-adjustable infrared detector support device is used.

The applicant of the present application has already applied for such an infrared detector supporting device in Japanese Patent Application No. 4-209346.
This principle configuration will be described with reference to the perspective view in the separated state of FIG. 7. In the figure, an infrared detector supporting device 40 includes an L-shaped fixing member 41 and a vertical sliding surface 42 of the fixing member 41.
The first movable member 43 is in contact with. A vertical guide groove 44 is formed on the sliding surface 42, and two guide protrusions 46 that fit in the guide groove are vertically embedded in the sliding surface 45 of the first movable member 43. Has been.

On the second sliding surface 47 on the front side of the first movable member 43, there is formed a horizontal guide groove 48 in a direction orthogonal to the guide direction on the rear side. On the sliding surface 50 of the second movable member 49 which is slidable in contact with the second sliding surface 47 of the first movable member 43, two guide protrusions 51 that fit in the guide grooves 48 are provided on the left and right. Embedded in the direction.

A second sliding surface 52, which is orthogonal to the vertical sliding surface 50, is provided in the second movable member 49 in the horizontal direction, and the hole 53 and the hole 53 are offset in the center thereof. Guide grooves 54, 54 to be seen through are formed on a straight line directed toward the fixing member 41.

The third movable member 57 having the sliding surfaces 55 and 56 on both sides has the lower sliding surface 55 on the second movable member 4.
9 is in contact with the second sliding surface 52, and the sliding surface 55 has guide projections 58 fitted in the guide grooves 54, 54 embedded at two positions in the front-rear direction. Further, a fitting hole 59 is opened in the central portion.

The sliding surface 56 on the upper surface of the third movable member 57 is in contact with the sliding surface 61 on the lower surface of the fourth movable member 60. An insertion hole 62 for the infrared detector is provided at the center of the movable member so that the infrared detector can be inserted and the flange can be screwed and fixed. On the lower surface, a rotatable cylindrical portion 63 that fits into the fitting hole 59 of the third movable member 57 is formed.

With the above structure, the fixing member 41 is attached and fixed to the case 64 of the infrared detecting section having an optical system. The movable direction of the first movable member 43 is restricted to only one axial direction by the projection 46 of the first movable member 43 fitted in the guide groove 44 of the fixed member 41. That is, it is the vertical Z-axis direction indicated by the orthogonal arrows.

Due to the projection 51 of the second movable member 49 fitted in the guide groove 48 of the first movable member 43, the movable direction of the second movable member 49 is only the horizontal X-axis direction indicated by the orthogonal arrow. Regulated by.

The protrusion 58 of the third movable member 57 fitted in the guide grooves 54, 54 of the second movable member 49 causes the third movable member 57 to move in the horizontal Y-axis indicated by the orthogonal arrow. It is restricted only to the direction.

The fourth movable member 60 in which the cylindrical portion 63 is fitted in the fitting hole 59 of the third movable member 57 is the third movable member 57.
The sliding surface 56 on the upper surface and the sliding surface 61 on the lower surface are in contact with each other and slide, but can rotate about the center line S with respect to the fitting hole 59 only in the arrow W direction.

As described above, the movable direction of the first movable member 43 is parallel to the direction of the central axis S to which the infrared detector is attached. Although not shown, the first movable member 43 is provided with means for fixing to the fixed member 41, and the second movable member 49 is provided with means for fixing to the first movable member 43. is there. Means for fixing the third movable member 57 to the second movable member 49 is also provided, and means for fixing the fourth movable member 60 to the third movable member 57 is also provided. In this way, each movable member has a fixing means capable of individually coupling and fixing the movable members. Furthermore, a fine movement means can be provided.

In this way, it is possible to finely adjust the X-, Y-, Z-perpendicular three-axis directions and the infrared detector about the central axis thereof and fix them at arbitrary set positions. In the above embodiment, the relationship between the guide groove and the protrusion may be reversed, and other guide means such as a key and a key groove can be applied.

[0026]

2. Description of the Related Art A concrete embodiment disclosed in Japanese Patent Application No. 4-209346 based on the principle block diagram of FIG. 7 is shown in FIGS. 8A is a plan view, FIG. 8B is a side view, and FIG. 9 is a front view. Figure 8 (b)
Is a cross-sectional view taken along the line D-D in FIG. 7A, with the front rib removed.

The principal part of this embodiment of the infrared detector supporting device 70 has basically the same structure as the principle diagram of FIG.
That is, the first movable member 73 contacts the vertical sliding surface 72 on the front side of the L-shaped fixed member 71. A vertical guide groove 74 is formed on the sliding surface 72 of the fixed member 71, and the sliding surface 7 on the rear surface side of the first movable member 73 is formed in the guide groove 74.
Two upper and lower protrusions 76 embedded in 5 are fitted and movable in the vertical Z-axis direction.

A horizontal guide groove 78 is formed in the second sliding surface 77 on the front side of the first movable member 73, and the second sliding surface 77 has an L-shaped second groove. Movable member 79
When the sliding surface 80 is in contact with the sliding surface 80, the two projections 81 on the left and right sides embedded in the sliding surface 80 are fitted into the guide grooves 78 and are movable in the left-right direction and the X-axis direction.

At the center of the horizontal second sliding surface 82 of the second movable member 79, there are two holes 83 into which the main body 11 of the infrared detector 10 is fitted and two deviation positions which are seen through the hole 83. The guide grooves 84, 84 are formed on a straight line toward the fixing member 71.

On the second sliding surface 82 of the second movable member 79, the sliding surface 85 of the lower surface of the third movable member 87 having sliding surfaces 85 and 86 on both sides is in contact. Protrusions 88, 88 that fit into the guide grooves 84, 84 of the second movable member 79 are embedded in the sliding surface 85, and are movable in the front-rear direction Y-axis direction in the fitted state. A fitting hole 89 is formed in the central portion of the third movable member 87.

The lower sliding surface 91 of the fourth movable member 90 is in contact with the upper sliding surface 86 of the third movable member 87. A hole 92 into which the infrared detector 10 is fitted is opened in the central portion,
A cylindrical portion 93 that fits into the fitting hole 89 of the third movable member 87 is provided on the lower surface.

The above-mentioned structure is the same as that of FIG. 7, but this embodiment has mutual connecting and fixing means and fine adjusting means having the following structures. The fixing member 71 is attached and fixed to the housing portion (not shown) of the infrared detecting unit whose lower surface 100 has an optical system by a mounting hole 101 with a screw. First
The movable member 73 is fixed by four fixing screws 102, but is joined by two screws 104 and 105 of the support plate 103 attached to the upper end of the fixing member 71 so that fine adjustment in the vertical direction is possible. Has been done.

Support plates 106 at both ends of the first movable member 73.
The second movable member 79 is coupled to the second movable member 79 in a horizontally finely adjustable manner by a screw 107 screwed into the first movable member 73 and the second movable member 79 by four fixing screws 108. Fixed.

Second movable member 79 and third movable member 87
Are fixed by four fixing screws 109, but the support plate 11 attached to the front end of the second movable member 79.
It is connected by two screws 111 and 112 of 0 so as to be capable of fine adjustment movement in a horizontal direction with respect to the fixing member 71.

The fourth movable member 90 is the third movable member 87.
The infrared detector 10 is attached with four screws 114, and the infrared detector 10 is slid around the axis of the infrared detector 10. Can move.

A cooling unit 26 of a circulation type cooling device (refrigerant circulation device is not shown) inserted into the infrared detector 10 from above is attached by four screws 27. Fine adjustment for fine movement in the X, Y, and Z directions with the above configuration will be described. A point light source (black body furnace) is placed in the center of the field of view of the target 1 (FIG. 4), and the center of the optical scanning range is based on this point, and the center of the infrared detector array is located at this center and Adjust the position so that it becomes the position.

Fixing screws 102, 108, 109, 11
No. 3 is not completely tightened and fixed, but half-tightened so that it can slide and move. Fine adjustment of the fixed member 71 and the first movable member 73, and the second movable member 79 and the third movable member 87 will be described with reference to FIG.
The fixed member 71 and the first movable member 73 will be representatively described, but it should be understood that the same applies to the second movable member 79 and the third movable member 87.

As shown in the sectional view of FIG. 10A, the support plate 103 attached to the fixing member 71 has a screw hole 115 for the two screws 104 and 105 and a through hole 1.
16 are formed, and a screw hole 117 corresponding to the through hole 116 is formed on the end surface of the first movable member 73, but a portion corresponding to the screw hole 115 is a flat surface.

As shown in FIG. (B), two screws 1
One of the parts 04 and 105 is screwed into the screw hole 115 of the support plate 103, and the tip end is brought close to the flat surface of the first movable member 73. The other one 105 is screwed into the screw hole 117 of the first movable member 73 through the through hole 116 of the support plate 103.

Here, when the screw 104 is separated from the end surface of the first movable member 73 as shown in FIG. 7B and the other screw 105 is screwed in this state, the head of the screw 105 is moved to the supporting plate 10.
Since the first movable member 73 is in contact with the third movable member 73, the first movable member 73 is pulled toward the support plate 103 side. That is, the first movable member 73 is raised in the Z direction (FIG. 7).

When the head of the screw 105 is separated from the support plate 103 and the screw 104 is screwed in as shown in FIG. 7C, the first movable member 73 is pushed away from the support plate 103. That is, the first movable member 73 is lowered in the Z direction (FIG. 7).

When the above operation is repeated and the desired position is set, the fixing screw is tightened to fix the both. As described above, due to the relationship between the second movable member 79 and the third movable member 87, they can be moved closer to the fixed member 71 in the Y direction (FIG. 7).

Support plates 106 at both ends of the first movable member 73.
When one of the screws 107 screwed in is loosened and the other is screwed in, the second movable member 79 is finely moved in either the left or right direction. If it is reversed, it will be slightly moved in the opposite direction. Since the second movable member 79 is moved in the X direction (FIG. 7) in this manner, when it is set at an arbitrary predetermined position, the fixing screw is tightened to fix the both members.

No means for fine movement is provided for the fourth movable member 90, but it is sufficiently possible to apply the same means as the fine movement means in the X, Y, and Z directions.

The first movable member 73 with respect to the fixed member 71.
Is in the Z direction and the second movable member 79 is in the X direction with respect to the first movable member 73, but such a relationship can be sufficiently reversed. The positional relationship between the guide groove and the guide member fitted into this groove may be reversed, and there is no problem and it is arbitrary.

The above embodiments are described as up / down, left / right, vertical, and horizontal, but this is because they are described with reference to the drawings, and the present invention is not limited to such a state, and an infrared detector is used. The axis line can be set not only in the vertical state but also in the opposite posture or in the horizontal direction, or in any other direction, and can be applied while changing the direction.

According to the infrared detector supporting device described above, it is possible to rotate the infrared detector around its axes in three directions of X, Y, and Z to perform fine position adjustment independently. You can do it and fix each other.

[0048]

According to the above infrared detector support device, the fine adjustment screws have their own screw pitches, and the standard coarse screw has a diameter of 3 mm.
A mm screw has a pitch of 0.5 mm, and a screw having a diameter of 4 mm has a pitch of 0.7 mm. Therefore, when the screw is rotated once, the screw moves by this pitch.

Since a final amount of about several μm is required for the position adjustment which requires a minute movement, it is extremely difficult to set the screw at a minute rotation angle with the above pitch, which requires skill. In other words, the adjustment must be repeated and it takes a long time.

The combination of two screws requires one screw to be loosened and the other screw to be tightened, and will not move if the procedure is incorrect. Such an operation is troublesome, and it is extremely troublesome to repeat the moving operation minutely.

The present invention solves the problems of the invention of the above-mentioned application, and provides an infrared detector supporting device and an infrared detector supporting method which are easy to operate and capable of smooth and fine movement adjustment. This is an issue.

[0052]

Means for Solving the Problems The object of the present invention for solving the above-mentioned problems is to include a fixing member having a sliding surface and fixed to an infrared detecting section.
A first movable member that is slidable on the sliding surface of the fixed member via a guide in only one axial direction, and has both surfaces as sliding surfaces, and a second sliding member of the first movable member. A second sliding surface which has a sliding surface in contact with the moving surface and is slidable via a guide only in a direction orthogonal to the moving direction of the first movable member, and which is orthogonal to the sliding surface. The second movable member having the second movable member is in contact with the second sliding surface of the second movable member, and is slidably movable through the guide only in the direction approaching and away from the direction of the fixed member, and is fitted in the central portion. A fourth movable member having a fitting hole, and a fourth movable member fitted in the fitting hole of the third movable member, slidable only in the rotation direction, and having a support portion for mounting an infrared detector in the center thereof. Movable member, and at least the first, second, and third
Means for applying a spring compression force to each movable member and a screw having screw portions of different pitches in the same direction against the compressive force of the spring means to finely move each movable member by the pitch difference of the screw portions. The infrared detector support device is provided with an adjustable fine movement means and a fixing means capable of individually coupling and fixing each of the movable members in a state where the position of each movable member is set to a predetermined position by the fine movement means.

Further, a fixing member having a sliding surface and fixed to the infrared detecting portion is slidably movable on the sliding surface of the fixing member via a guide in only one axis direction. It has a first movable member having both surfaces as sliding surfaces and a sliding surface in contact with the second sliding surface of the first movable member, and is only in a direction orthogonal to the moving direction of the first movable member. A second movable member having a second sliding surface that is slidably movable via a guide and is orthogonal to the sliding surface, and is in contact with the second sliding surface of the second movable member. A third movable member that is slidably movable through a guide only in a direction approaching and away from the direction of the fixed member and has a fitting hole in the center, and is fitted in the fitting hole of the third movable member. A fourth movable member which is slidable only in the rotation direction and has a support portion for mounting an infrared detector in the center thereof;
The screw is formed by spring means for applying a spring compression force to each of the at least first, second, and third movable members, and a screw having screw portions having different pitches in the same direction against the compression force of the spring means. Each of them is provided with a fine movement means capable of finely adjusting each movable member by a pitch difference between portions, and a fixing means capable of individually coupling and fixing each movable member with the position of each movable member set to a predetermined position by the fine movement means. A method of supporting an infrared detector of an infrared detector supporting device, comprising: a step of setting and positioning the first, second, and third movable members at predetermined positions by the fine movement means, and fixing means between them. And a method of supporting an infrared detector, the method comprising:

[0054]

According to the above-mentioned gist of the configuration of the device of the present invention, the first movable member that slides on the fixed member is movable only in one axial direction, and on the second sliding surface of the first movable member. The second movable member that slides in is movable only in the direction orthogonal to the first movable direction.

The second movable member has a second sliding surface which is orthogonal to the sliding surface, and the second sliding surface can be moved toward and away only in the direction of the fixed member. The third movable member is slidably movable, the fourth movable member is fitted to the third movable member only in the rotation direction, and the infrared detector is attached to the fourth movable member.

As described above, since the movement adjustment is such that the X, Y, Z and rotation directions can be adjusted independently of each other, there is no change in movement in the other directions.
Since all of the sliding surfaces are in contact with each other, stable fixing can be performed without variation in tightening and fixing with screws.

The fine movement means finely adjusts each movable member by a spring means which applies a spring compression force to each movable member, and a pitch difference due to a screw having a different pitch in the same direction against the compression force of this spring means. Depending on the combination with what is obtained, extremely smooth and fine movement can be performed.

According to the gist of the constitution of the method of the present invention, in the above constitution of the device, the first, second and third movable members are respectively positioned at predetermined positions by the respective fine movement means, and the respective movable members are individually separated from each other. The position can be fixed by connecting and fixing.

[0059]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The infrared detector supporting structure and supporting method according to the present invention will be described in detail below with reference to the drawings based on specific embodiments, based on the above-mentioned concept. It should be noted that the same parts as the conventional ones are designated by the same reference numerals.

FIG. 1 shows an infrared detector supporting device 12 of the present invention.
1 is a plan view, FIG. 1B is a side view, and FIG. 2 is a front view. FIG. 1B is a cross-sectional view taken along the line D-D in FIG. 1A and shows a state in which the front rib is removed.

The main part of the present invention has basically the same configuration as the principle diagram of FIG. That is, the first movable member 73 contacts the vertical sliding surface 72 on the front side of the L-shaped fixed member 71. A vertical guide groove 74 is formed on the sliding surface 72 of the fixed member 71, and the guide groove 74 has a first guide member 74.
The protrusions 76 at the upper and lower positions embedded in the sliding surface 75 on the rear surface side of 3 are fitted and can move in the vertical Z-axis direction.

A horizontal guide groove 78 is formed on the second sliding surface 77 on the front side of the first movable member 73, and the second sliding surface 77 has an L-shaped second groove. Movable member 79
When the sliding surface 80 is in contact with the sliding surface 80, the two projections 81 on the left and right sides embedded in the sliding surface 80 are fitted into the guide grooves 78 and are movable in the left-right direction and the X-axis direction.

At the central portion of the horizontal second sliding surface 82 of the second movable member 79, there are two holes 83 into which the main body 11 of the infrared detector 10 is fitted and two deviation positions which are seen through the holes 83. The guide grooves 84, 84 are formed on a straight line toward the fixing member 71.

On the second sliding surface 82 of the second movable member 79, the lower sliding surface 85 of the third movable member 87 having sliding surfaces 85 and 86 on both sides is in contact. Protrusions 88, 88 that fit into the guide grooves 84, 84 of the second movable member 79 are embedded in the sliding surface 85, and are movable in the front-rear direction in the fitted state. The fitting hole 8 is provided in the central portion of the third movable member 87.
9 is open.

The lower sliding surface 91 of the fourth movable member 90 contacts the upper sliding surface 86 of the third movable member 87. A hole 92 into which the infrared detector 10 is fitted is opened in the central portion,
A cylindrical portion 93 that fits into the fitting hole 89 of the third movable member 87 is provided on the lower surface. The above-mentioned structure is the same as that shown in FIGS. 7 and 8 and 9, but this embodiment has a mutual fixing means and a fine adjusting means for the following structures.

The fixing member 71 is attached to a housing (not shown) of an infrared detecting section whose lower surface 100 has an optical system.
It is attached and fixed with a screw by 1. The first movable member 73 is coupled and fixed to the first movable member 73 by four fixing screws 102, but the support plate 121 attached to the upper end of the fixed member 71.
Is connected by a screw 122 and a spring plunger 123 so as to be capable of fine adjustment movement in the vertical Z-axis direction.

Support plates 12 on both ends of the first movable member 73.
The second movable member 79 is movably coupled to the first movable member 73 and the second movable member 79 by the screw 126 screwed into the screws 4, 125 and the spring plunger 127 so that the second movable member 79 can be finely adjusted and moved in the horizontal X direction. Are coupled and fixed by four fixing screws 108.

Second movable member 79 and third movable member 87
And 4 are coupled and fixed by four fixing screws 109, but are fixed to the fixing member 71 in the horizontal Y direction by the screw 132 of the support plate 131 attached to the front end portion of the second movable member 79 and the ridge plunger 133. It is coupled so that it can be moved in a fine adjustment manner to the perspective.

The fourth movable member 90 is the third movable member 87.
The infrared detector 10 is attached with four screws 114, and the infrared detector 10 is slid around the axis of the infrared detector 10. It can rotate.

A cooling unit 26 of a circulation type cooling device (refrigerant circulation device is not shown) inserted into the infrared detector 10 from above is attached by four screws 27. Fine adjustment for fine movement in the X, Y, and Z directions with the above configuration will be described. A point light source (blackbody furnace) is arranged in the center of the field of view of the target 1 (FIG. 4), and the center of the optical scanning range is based on this point, and the center of the infrared detection element is located at this center position, and the focus position Adjust the position so that

Fixing screws 102, 108, 109, 11
No. 3 is not completely tightened and fixed, but is loosely half-tightened to allow sliding movement. Fixing member 71 and first
The fine adjustment of the movable member 73, and the second movable member 79 and the third movable member 87 will be described with reference to FIG. Typically, the fixed member 71 and the first movable member 7
3 will be described, but it should be understood that the same applies to the second movable member 79 and the third movable member 87.

As shown in the sectional view of FIG. 3A, the screw 12 is attached to the support plate 121 attached to the fixing member 71.
2 and screw holes 135 and 13 for the spring plunger 123
6 is formed, and a screw hole 137 into which the tip of the screw 122 is screwed is provided in the end surface of the first movable member 73.

The threaded portion 138 on the base side of the screw 122 is φ
4mm, pitch 0.7mm, screw part 139 on the tip side
Is, for example, φ3 mm and the pitch is set to 0.5 mm. Therefore, the screw hole 135 of the support plate 121 corresponds to the screw portion 138 on the root side, and the screw hole 137 provided on the first movable member 73 corresponds to the screw portion 139 on the tip side. .

Although the threaded portions 138 and 139 are in the same direction as the right-hand thread, they may be in the same direction as the left-hand thread. In the case of a right-handed screw, the screw 122 moves forward with respect to the support plate 121 in the leftward direction in the figure by rotating the screw to the right,
The movable member 73 of the first movable member 7 is pushed in the same direction, but the rotation of the screw 122 is performed by the screw portion 139 on the tip side.
Pull 3 to the right.

As a result, one rotation of the screw 122 is pushed 0.7 mm by the threaded portion 138 on the base side and pulled 0.5 mm by the threaded portion 139 on the tip side. That is, the difference is pushed to the left by 0.2 mm. In this way, it is possible to perform fine movement by the pitch difference between the screw portions 138 and 139.

Such an adjusting operation is performed by the first movable member 73.
It is necessary to make the first movable member 73 slidable in the vertical Z-axis direction without securely tightening the screw 102 to which is attached. This is the second
The same applies to the position of the third movable member 87 with respect to the movable member 79.

The spring plunger 123 has a screw 142 around the body 141 and a driver groove 143 at the end, and a compression spring 145 and a steel ball 14 in an internal space 144.
6 and 6 are accommodated. The steel ball 146 is biased by the spring 145 and given a pressure to project from the end of the main body 141, but is regulated so as not to escape by caulking the opening.

The tip of the steel ball 146 can be pushed in from the protruding position, but the amount (stroke) is the amount indicated by the symbol S, and although it varies depending on the size, it is, for example, about 0.3 mm, and the pushing force is Is about 1 to several Kg. Therefore, the reaction force and stroke of the biasing pressure from the pushed state to the protruding position can be obtained. The spring plunger 123 is configured as described above.

This spring plunger 123 is a support plate 121.
The steel ball 146 at the tip screwed into the first movable member 73
It is in contact with a hard support piece 147 embedded in the end face of the and is set so as to be pressed against the position of about 1/2 of the stroke (the figure is shown in a protruding state without being pressed).
To do. The restoring force is the first movable member 73 and the support plate 121.
Since it acts to push apart the space between
The backlash that exists between the screw hole 2 and the screw hole is eliminated, and the fine adjustment of forward and backward movement by the screw 122 is made smooth.

The screw 126 and the spring plunger 127, which are arranged opposite to each other at the left and right ends of the second movable member 79, will be described with reference to the sectional view of FIG. 3B. Screw 126
Has the same structure as the screw 122, and the spring plunger 12
7 has the same structure as the spring plunger 123, and is therefore designated by the same reference numeral.

That is, the screw 126 is the first movable member 7
The screw part 138 on the base side is screwed into the screw hole 135 of the support plate 124 attached to
39 is screwed into the screw hole 137 on the side surface of the second movable member 79.

Screw 14 of opposing spring plunger 127
2 is a support plate 1 attached to the first movable member 73
The steel ball 146 at the tip is screwed into 25 and abuts on the hard support piece 147 embedded in the second movable member 79, and is set to be pressed to a position of about ½ of the stroke. The same is true.

Therefore, the restoring force presses the second movable member 79 toward the support plate 124 on the side of the screw 126, and the screw 126 is pressed against one side surface of the screw thread of the screw holes 135 and 137. The backlash is eliminated, and the fine adjustment of forward and backward movement by the screw 126 is facilitated.

By the fine movement adjusting means as described above, X,
It is possible to move independently in the three directions of Y and Z, and it is possible to independently combine and fix them by respective fixing means, so that the position of the infrared detection element 13 can be accurately matched with the focal position of the optical system. it can.

By rotating and adjusting the infrared detector 10 by a similar fine movement adjusting means (not shown), the array direction of the infrared detecting elements 13 can be accurately set to the state orthogonal to the optical axis of the optical system.

According to the present invention, since the position of the infrared detecting element 13 can be finely moved in any direction, accurate position setting can be performed for the optical system. Since each adjusting means is configured so as to be slidably movable with respect to the mating surface instead of being in a fixed state, the adjusting operation can be performed without overload. Since the position of the spring plunger can be set at any position within the range of the screw on the outer circumference of the spring plunger, the adjustment range can be selected in a very wide range.

Reliable positioning and fixing can be individually performed by each fixing screw. If such a reliable fixing can be performed, it is possible to remove and remove all the adjusting means after positioning. This is preferable because it is possible to reduce the weight in addition to eliminating the occurrence of obstacles such as dropping due to loosening of the adjusting means during operation. Of course, the removal is not performed when there is no such need. In the removed state as described above, the device does not include the constituent element as the adjusting means, so that the method of the present invention is applied.

The steel ball at the tip of the spring plunger is not limited to a rotating body such as a spherical body, but may be a half body of a spherical body or a trapezoidal shape, in short, the spring biasing force effectively acts. Anything you can get is good.

The diameter of the screw and the pitch of the screw for finely adjusting the position of the infrared detector by the screw having different pitches of the present invention can be selected and applied to any desired one, such as fine pitch. The method invention also includes removing and removing the adjusting means required for the adjustment.

The fine movement means in the X, Y and Z directions are not limited to the embodiment but can be combined by any surface within a conceivable range, and the guide means is not limited to the embodiment and a known guide means can be used. It is applicable.

[0091]

As described above in detail, according to the infrared detector supporting device and the infrared detector supporting method of the present invention, it is possible to smoothly perform a much finer movement than in the conventional case, and the infrared detector The position can be finely adjusted, and the effect of reducing the time required for the adjustment is extremely remarkable.

[Brief description of drawings]

FIG. 1 is a specific example of the present invention.

FIG. 2 is a front view of an embodiment of the present invention.

FIG. 3 is a sectional view of a fine movement adjusting means.

[Fig. 4] Principle configuration diagram of an infrared imaging device

[Figure 5] External view of infrared detector

FIG. 6 is an explanatory diagram of an infrared detection element having an array configuration.

FIG. 7 is a principle configuration diagram of an infrared detector supporting device.

FIG. 8: Assembly diagram of infrared detector support device

FIG. 9: Front view of assembly of infrared detector support device

FIG. 10 is an explanatory diagram of fine adjustment for fine movement.

[Explanation of symbols]

 1 Target 2 Lens 3 Horizontal Scanning Mirror 4 Vertical Scanning Mirror 5 Condensing Lens 6 Infrared Detector 7 Signal Processor 8 Image Display 10 Infrared Detector 11 Main Body 12 Window 13 Infrared Detector 14 Flange 40 Infrared Detector Supporting Device 41 Fixed member 42, 45, 50, 55, 56, 61 Sliding surface 47, 52 Second sliding surface 43 First movable member 49 Second movable member 57 Third movable member 59 Fitting hole 60th 4 movable member 62 insertion hole 63 cylindrical portion 70 infrared detector supporting device 71 fixed member 73 first movable member 72, 75, 80, 85, 86, 91 sliding surface 77, 82 second sliding surface 79 Second movable member 87 Third movable member 89 Fitting hole 90 Fourth movable member 93 Cylindrical portion 120 Infrared detector support device 121, 124, 125, 131 Support plate 122, 1 6,132 screws 123,127,133 spring plungers 138, 139 threaded portion

Claims (2)

[Claims] 1. A fixing member (71) which has a sliding surface (72) and is fixed by being attached to an infrared detecting section, and guides on the sliding surface (72) of the fixing member in only one axis direction. A first movable member (7) which is slidable via (74) and (76) and whose both surfaces are sliding surfaces (75) and (77).
3) and a sliding surface (80) in contact with the second sliding surface (77) of the first movable member, which guides only in a direction orthogonal to the moving direction of the first movable member (73). (78) A second movable member (79) slidably movable via (81) and having a second sliding surface (82) orthogonal to the sliding surface (80); Contacting with the second sliding surface (82) of the movable member of the above, it is slidable and movable to the central portion through the guides (84) (88) only in the direction approaching and approaching the direction of the fixed member (71). A third movable member (87) having a fitting hole (89) is fitted (93) into the fitting hole (89) of the third movable member and is slidable only in the rotational direction, and its central portion. A fourth movable member (90) having a support portion for mounting an infrared detector, and at least the first, second and third movable members (73)
Spring means (123) (127) (133) for exerting a spring compression force on (79) (87) and screw portions (1) having different pitches in the same direction against the compression force of the spring means.
38) (139) with screws (122) (126)
By (132), fine movement means capable of finely adjusting each movable member by the pitch difference of the threaded portion, and the fine movement means can individually couple and fix each movable member in a state where the position of each movable member is set to a predetermined position. An infrared detector support device comprising fixing means (102) (108) (109) (113), respectively. 2. A fixing member (71) having a sliding surface (72) which is attached and fixed to an infrared detecting section, and a guide on the sliding surface (72) of the fixing member in only one axis direction. (7
4) A first movable member (73) that is slidably movable via (76) and has both surfaces as sliding surfaces (75) (77).
And a sliding surface (80) in contact with the second sliding surface (77) of the first movable member, and a guide (78) only in a direction orthogonal to the moving direction of the first movable member (73). (2) A second movable member (79) slidably movable via (81) and having a second sliding surface (82) orthogonal to the sliding surface (80).
And a sliding movement through guides (84) (88) only in a direction in contact with the second sliding surface (82) of the second movable member and moving toward and away from the direction of the fixed member (71). Third movable member (87) which is possible and has a fitting hole (89) in the center
And the fitting hole (89) of the third movable member (9).
3) A fourth movable member (9) which is slidable only in the turning direction and has a support portion for mounting an infrared detector in the center thereof.
0), spring means (123) (127) (133) for applying a spring compression force to the at least first, second and third movable members (73) (79) (87) and the spring. A screw (122) (1) having threaded portions (138) (139) of different pitches in the same direction against the compressive force of the means.
26) By (132), finely moving means capable of finely adjusting the movable members by the pitch difference of the threaded portion, and the respective finely moving means are individually coupled and fixed to each other with the positions of the movable members being set to predetermined positions. Fixing means (102)
An infrared detector supporting method for an infrared detector supporting device, comprising: (108), (109), and (113), wherein the first, second, and third movable members are each provided with a predetermined amount by the fine movement means. A method for supporting an infrared detector, comprising: a step of setting and positioning at a position; and a step of coupling and fixing each other by a fixing means.