JPS58161843A - Apparatus for measuring lens performance - Google Patents

Abstract

PURPOSE:To measure the performance of a lens easily and reliably, by forming a magnified image through a detachable transparent member, a magnification objective lens and the like by regulating the optical axis of the lens to be measured by means of a position regulator and an angle regulator, and observing as well as picking up the magnified image. CONSTITUTION:The optical axis of a lens 10 is regulated and the lens 10 is focused by a linear regulator 2 which moves orthogonal triaxial moving tables 21, 23, 25 by means of micrometers 22, 24, 26, respectively. The direction of the optical axis of the lens 10 is regulated by an angle regulator 3. In such an arrangement that a transparent plate is interposed between the lens 10 and its focal point, a magnified focal image corresponding to the lens performance is formed through a detachable transparent plate 32 having a predetermined thickness by the use of either of magnification objective lenses 30 and 31 which are different in magnification from each other. The magnified image is divided into two by a prism device 6, and one of the divided image parts is observed through a visual inspection device 8, while the other is picked up by a TV camera. By this arrangement, the lens can be easily and reliably regulated to its focal position for measuring the performance thereof.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a lens inspection device, and more particularly to a device for measuring the performance of a single lens or a lens system, such as the imaging state, or its focal size, shape, Ktli focal length, and other performance. .

The diameter of the focal point of the lens is approximately 2 microns at the minimum, and it is extremely important to accurately measure and record this size and shape when determining the matrix for production lenses. However, in order to use this, it is necessary to magnify the focused image with a high-magnification transscope, but it is extremely difficult to search for the focal position with the combination of various instruments currently in use, making it difficult to perform practical inspection. No lens-based footing device has been developed that can be used as a device.

An object of the present invention is to provide a lens barrel measuring device that can meet the above-mentioned requirements.

According to an embodiment of the invention, the infrared rays supplied from the Radhe oscillator are supplied to the optical axis of the measuring device, and the lens holding device for supporting the lens to be measured is arranged at x and y.

The lens is moved in two directions by a micrometer adjusting device to align the center of the lens with a desired point on the optical axis of the device, and the lens is rotated in an angular direction to align the direction of the lens optical axis with the optical axis of the device. - The viewing mirror device has a wide field of view low magnification objective lens for use on the 114IIR floor and a high magnification objective lens for use in the foot measurement stage to magnify the focal image.

The enlarged specific heat point image is applied to a fluorescent plate, which converts the infrared rays into visible light, which is used as a visible monitoring device for monitoring during the adjustment stage, and is semi-transparent! A part of it is reflected by the rhythm and transmitted to the television camera, and the dimensions and shape of the focal point are displayed on the television camera and digitized for storage, calculation, and embedding. #
When the lens to be added is configured to pass through a transparent plate and focus after the distance, a transparent member made of the same material as the transparent plate is inserted between the lens to be added and the objective lens.

As described above, the #IJ foot device is superior to the highly practical lens 4 due to the combination of relatively simple devices, and the foot measuring process is easily performed.

The present invention will be described with reference to nine illustrative examples and drawings.

FIG. 1 shows a lens focus 1141j foot device according to the present invention, which includes a radar device 11, a linear adjustment device 2, and an angle adjustment device 1.
13, lens support device 4, optical device 5,! Rhythm device 6
, the nine infrared rays emitted by the radar using all or part of the television camera device 7 and the viewing device 8.
The focal point formed by lens 1e1o is magnified and measured and recorded using a television camera or the like.

The optical axis of the measuring device is placed on 7 beams 11 equipped with a vibration isolator.
Measurement is performed by blocking external vibrations. All of the above-mentioned equipment is mounted on the 7 frame 11 except for the control, arithmetic, amplification, etc. circuit devices (not shown) and the # device at #1.

The laser device 1 includes a Rade oscillator 12, an optical system 13, ! The rhythm device [consists of 114 and the optical axis 15
supply to.

The straight 111III4 straightening device 2 has a zWJIIb stand 21 movable in the left and right direction in the figure on a stand 20 fixed on the frame 11.
Support zv@sei! Focus position #J4 of lens lO by the ichromator 22! Do IM. 2 movable stand 21
The X movable table 23 is supported so as to be movable in the direction perpendicular to the figure.
Adjust! Adjustments in the direction perpendicular to the figure are made using the micrometer 24. The Y movable base 2S is supported on the X movable base 23 so as to be movable in the vertical direction in the figure, and Y11il! The vertical adjustment is performed using the 11-v ichromator 26. xy movable base 23
．． By moving 25, the optical axis of the lens lO is made to coincide with the optical axis 15.

The angle adjusting device 3 and the lens mounting device 4 are devices that align the direction of the optical axis of the lens 100 with the optical axis 15 of the device.
, 3, the angle adjustment device 3 only adjusts the elevation angle. The direction of the optical axis O is corrected by making the lens mounting device 4 rotatably adjustable so that the maximum deviation of the optical axis coincides with its own plane, and adjusting the elevation angle using the angle adjusting device 3.

The optical device S is a device for enlarging the focal point of the lens 10, and at least two are used as objective lenses.
It has a low magnification objective lens je30 and a high magnification objective lens 31. The low magnification lens Jl" 3G uses a linear adjustment device 2 and an angle adjustment device sO adjustment button for monitoring. This lens, e30, is rounded and covers a relatively wide range, and it is easy to recognize the focal point. It is suitable for use as a monitor.

Thereafter, the lens is switched to the high magnification lens 31 and necessary measurements are performed. It is also possible to use a rounded intermediate magnification objective lens used in the stage of fine adjustment of focus and angle.

! In the illustrated example, the rhythm device 6 is a semi-transparent device inserted in the middle of the optical system from the objective lens to the television camera! The transmitted infrared rays are projected onto a fluorescent plate (not shown) to generate fluorescent light, which can be visually observed by the viewing device 8. The reflected infrared rays are further magnified and supplied to a television camera 7 to supply data to a television camera (not shown) and/or an arithmetic processing unit for measurement, recording, and display.

According to the present invention, when the focal point of the lens 10 is connected by passing through a required synthetic resin plate, glass plate, etc., for example, a transparent acrylic plate, a transparent member 32 having the same optical characteristics is attached and detached in front of the objective lens 310 of the optical device 50. Can be attached freely.

For example, the transparent member 32 is removably screwed onto the objective lens 31, so that a lens barrel (not shown) K is attached to the objective lens 31.
It is constructed by attaching this lens barrel body to the objective lens 31 by screwing it. However, it is a must! It is possible to prepare a transparent member 32 with nine characteristics in advance according to the performance of the lens 10, and to replace it with a transparent member 32 corresponding to the performance measurement of the lens 10.

Infrared television camera equipment itself is known and has a measurable sensitivity to infrared radiation at a wavelength of 2 μmV through the use of an infrared camera and can be combined with a mirror television equipment to provide a telephonic display and to centrally process the signal. The data is supplied to a processing device and a storage device and processed as required data. It uses a rounding circuit with an infrared ray heating effect and a protection circuit with an automatic sensitivity control circuit to prevent burn-in of the camera tube.

FIG. 2.3 shows details of the angle adjustment device 3 and lens holding device 4 shown in FIG. The board 41 of this device 4 is attached to the movable base 2 by the attached locking ^ of the above-mentioned Yill adjustment movable base 2B.
The axis @42 is mounted on the end face of the optical axis 5 so that it almost coincides with the optical axis 15.

Precision bearings 4 are mounted on journals 43 and 44 formed on the substrate 41.
5.46, the shaft 4) is rotatably supported, the shaft 47 is integrally attached to the fixed arm 48, and the mounting screw 50 is attached to the nine tilting plate 49.
t-provide. The protrusion 5 is located on the opposite side of the tilting plate 49 from the arm 48.
Set 1! Screw in the ichromometer 52. The end 53 of the micrometer 52 projects through the hole 54 in the plate 49;
The I-rule 56 in the recess 55 of the substrate 41 is contacted. At the zero position of the micrometer 52, the substrate 41 and the tilting plate 49 are spaced apart from each other as shown in the figure, making it possible to adjust the angle of elevation as required.

Lens holding device 4t - Screw into hole 50 of tilting plate 49.

The mounting portion 62 of the support member 61 of the lens holding device 4 has an external thread, which engages with the internal thread of the hole 50 .

The opening 63 of the support member 61 and the shaft 65 of the rotating member 64 are supported by a precision bearing device 66 so as to be relatively rotatable with almost no play. The lens holding member 68 is removably attached to the support portion 67 of the rotating member 64 with a set screw 69 or the like. The lens holding member 68 has lenses and fY mounts corresponding to various types, and a single lens holder or an external thread of a lens system is attached to the internal thread 70.

In use, the relative angle between the substrate 41 and the tilting plate 49 is set to zero using the micrometer 52, and a lens or lens system (not shown) is attached to the internal thread 70 of the lens holding member 68. The board 41 is attached to the front surface of the Y14 adjustment movable table 25 shown in FIG. X, Y.

After performing the second adjustment, the supporting member 61 and the tilting member 64 are rotated relative to each other to align the direction of the maximum angular deviation with the outer plane including the optical axis. At ζζ, the angle of elevation is adjusted using the micrometer 62 to align the lens optical axis with the measurement optical axis 15. With this method, it is possible to correct the optical axis angle fwA difference of the measurement self-range system using only the angle ji11m in one direction. Incidentally, the relative movement between the support member 61 and the rotating member 64 can also be controlled mechanically or by a step motor or the like.The operation will be explained below.

Centering and adjusting each device without installing the first K lens-elO, the infrared rays from the Rade oscillator 12 are transmitted to the lens system 13, ! It is made to proceed accurately along the optical axis 15 through the rhythm 14. This is confirmed, for example, on a fluorescent plate of the viewing device 8.

Next, the lens mounting device 4 is attached to the mount (K) of the angle adjusting device 3, and the lens 10 is supported by the lens mounting device 4. The tightening force for the mount (mount) K is set to a predetermined tightening force using a torque wrench to prevent errors due to loosening or distortion.

Next, the objective lens of the optical device 5 is a low magnification lens 30, for example, 5 times, and the XYz adjustment micrometer 2 is adjusted using the radar device 12 or an optical device (not shown).
426.22 is made, and then the elevation angle adjustment of the angle adjustment device 3 is made coarse adjustment.

Next, use the Rade device l to adjust the linear adjustment device XYz! i
The optical axis of the lens 100 to be measured is aligned with the optical axis 15 of the apparatus by finely adjusting the 11-inch micrometer and the angle adjustment device. This time it's a place! ! Depending on the situation, use the low magnification objective lens 30 or the intermediate magnification objective lens, and finally confirm using the high magnification objective lens.

At this point, the adjustment is completed, and the television camera 7 is operated to perform measurement. The infrared rays from the Rade oscillator 12 are transmitted to the lens system 13.
Reflected by the t-through reflector or norism 14 and the optical axis 15
proceed along. The infrared rays pass through the lens 10tP and form a focal point having a round shape and diameter depending on the deviation based on the surface finish of the lens to be measured. Len, the optical axis of f10 is finely adjusted by the micrometers of linear adjustment device 2 and angle adjustment device 3, making 2 adjustments! Since the focal point position is adjusted by the ichromator 22, the size and shape of the focal point are determined purely based on the inherent deviation of the lens itself. The minimum focal diagonal is about 1 micron. Note that the minimum adjustment dimension by the X, YIII adjustment micrometer 24.26 can be approximately 0.05t/p/.

The light is focused by the lens lO and the specific heat point is expanded through the optical device 5, making it semi-transparent! It is reflected by the rhythm 6, further magnified by an optical device, and photographed by a television camera device 7.

Lens IOC>If the structure is such that the focal point is connected via a required synthetic resin plate, such as an acrylic plate, the transparent member 32 is attached at the above-mentioned fine adjustment stage to confirm the focus. The material and thickness of the transparent member 32 are the same as those of an acrylic plate or the like that is actually used. This provides a practical image.

The light beam supplied to the optical axis of the measuring device is not limited to laser beams, but it can also be carried out using visible light or other light beams, such as selecting a light beam from a traveling light source depending on the purpose of the measurement in terms of the lens performance to be measured. can do.

FIG. 4 shows a performance measuring device according to another embodiment, in which similar parts or portions are designated by the same reference numerals as in FIG.

The device shown in FIG. 1 is a focus measuring device for the lens system 10 of the lens device 70 incorporating the line light source device, and the Rade device 1 shown in FIG. 1 is not used.

In the case of FIG. 4, the angle adjustment device 71 shown in FIG. 5.6 is used to adjust the elevation angle and left/right declination angle, and the lens device 70 is attached to the mounting device 11i72 shown in FIG. 7.

The angle adjusting device 71 itself shown in FIGS. 5 and 6 has a known structure), and has a mounting surface 73 for the movable base 25, an irises member 75 with a cylindrical surface 74 formed on the upper surface, and a cylindrical surface on the lower surface. 7
6 and a second member 78 having a mounting surface 77 on the upper surface, two sets of the second member 78 are attached at right angles to each other to form a tenth rotating device 7.
9 and a third rotation device 80, g*knob 81.82
Adjust and fix the required angular position. This allows the uppermost mounting surface 83 to be oriented in any direction.

FIG. 7 shows a lens device 7 with a light source attached to the mounting device 72 in FIG. 4.
Shows the state where 0 is installed.

The board 85 of the mounting device 72 is connected to the angle adjustment device 7 in Fig. 5.6.
It can be mounted on the mounting surface 83 of No. 1. 2mO on the substrate 85
The support member 86 is attached, and the thrust support is brought into contact with the corner of the lens device 70 through the loop 87t to support the lens device 70. Centering wheels 89 add center position of housing 88, and plates 90,91 add lateral positions. Accordingly, the lens device 70 is attached to the surface of the substrate 8S of the attaching device 72. A terminal 92 is shown for supplying electricity to the light source.

The operation of the embodiment shown in FIGS. 4 to 7 will be explained.

The mounting surface 73 of the angle adjustment device 71 is attached to the movable base 25 of the Yllll adjustment device, and the mounting surface 83 is attached to the board 8 of the mounting device 72.
Install 5. Mounting device 7 for lens device 70 with built-in light source
2 thrust knoll 87, centering I-ru 89, backing plate 91.
Installed by 92.

Next, electricity is supplied to the light source from the terminal 92, and the radar light from the light source is focused by the lens IO.

First, the focal position is guided to the viewing device 8 by the low magnification objective lens 30. The XYII adjustment is performed by moving the movable bases 23 and 25, and the position of the focal point in the direction of the optical axis 15 is adjusted by moving the 2-adjustment movable base 21. Next, the angle adjustment device set 79,80 is adjusted to align the direction of the optical axis of the lens device 70 with the direction of the device optical axis 15. If you make an in-house adjustment using a commercially available angle adjustment device, the direction of the optical axis of the lens lO will change and at the same time the center position of the lens will also move, so you can make XY adjustments for fine adjustment! Requires adjustment with micrometers 24,26.

The illustrated lens device 70 is a rounded transparent member 3 made of a homogeneous material, which is configured to transmit through an acrylic plate and focus.
2 is placed over the front surface of the high magnification objective lens Ie31 at a required distance, and the focus position is tagged by the Z[111 ichromator 22 as required.

The subsequent focus measurement, recording, and display are the same as those described for the iris 1 diagram.

The device according to the invention can be used as a stand-alone imaging performance measurement device for optical, optical or lens systems, and can also be used as a performance measurement device for optical systems integrated in light source devices. can. Furthermore, when the lens system or lens device is used for focusing by passing through a transparent plate, a transparent member made of the same material can be placed to inspect the practical focal size. Furthermore, it can also be used as a jiF scissors on the practical focal length side of a lens system.

Therefore, the device according to the invention can be used in a wide range of applications υ,
Extremely accurate measurements can be made with a relatively simple structure.

[Brief explanation of the drawing]

FIG. 1 is a side view of a first embodiment of a lens focus measuring device according to the present invention, FIG. 2 is a partial cross-sectional view of the angle adjustment device and lens holding device of the device in FIG.
Fig. 3 is an end view of Fig. 2, Fig. 4 is a side view of the second embodiment of the lens measuring device, and Fig. 5 is an angle w4 of the device of Fig. 4.
! 1 is an enlarged side view of the device, Fig. 6 is a plan view of Fig. 5, and Fig. 7 is an enlarged side view of the device.
The figure is an enlarged plan view of the mounting device and lens device of the device of FIG. 4. l... Rade device, 2... Linear adjustment device, 3.71
... Angle adjustment device, 4... Lens support device, 5...
・Optical device, 6...! Rhythm device, 7... Television camera device, 8... Visual viewing device, lO... Lens to be measured, 11... Frame, 12... Rade oscillator,
15... Optical axis, 20... Frame, 21, 23.25.
・・Movable table, 22゜24.26.52...j11*Micromake, 30゜31...Objective lens, 32...
・Transparent member, 41.88...Substrate, 45.46.66
...Bearing, 49...Tilt plate, 70...Lens device, 72...Mounting device, 73.88...Mounting surface, 79
, 80... Rotating device, 86... Supporting member, 87...
- One support, 88...housing. Figure 6 Figure 86858887117 Procedural amendment (voluntary) September 7, 1980 Kazu Wakasugi, Commissioner of the Patent Office Failure 1 Indication of the incident 1988 % Intoxication 1 No. 4511 Title of the invention 2 Lens performance measuring device 3 Correction (Relationship with the patent applicant case 4, agent moat 6, number of inventions increased by amendment 7, subject of amendment) (1) Specification 4! The statement ``The diameter of the joint is about 2 microns'' in the 7th line of the 4th shell has been corrected to ``the diameter of the ith is about 2 microns.''

Claims (7)

[Claims] (1) A device for measuring the performance of a lens, which includes a lens position adjustment device to align the center of the lens to be measured with a predetermined position on the optical axis of the device, and a device to adjust the direction of the optical axis of the lens to be measured. an angle adjusting device for aligning with the optical axis of the device; a transparent member having a required material and thickness that transmits through the lens to be measured and is removably inserted into the beam path; and a transparent member for detecting the performance of the lens. 1. A lens performance constant device comprising: an optical device having a magnification objective lens; and a display mount that displays an image magnified by the optical device. (2) A device for measuring the performance of a lens, which includes a round lens position adjustment device that aligns the center of the lens to be measured with a predetermined position on the optical axis, and a device that adjusts the direction of the optical axis of the lens to be measured. , an angle adjusting device for adjusting the optical axis by 1k1; a transparent member having a required material and thickness and detachably interposed in the path of the light beam passing through the lens to be measured; and detecting the performance of the lens. A lens performance measuring device comprising: an optical device having a round magnification objective lens; and a photographing device for photographing the image of the lens obtained through the optical device. (3) A device for measuring the performance of a lens, which includes a lens position adjustment device for aligning the center of the lens to be measured with a predetermined position on the optical axis, and a device for adjusting the direction of the optical axis of the lens to be measured. , an angle adjustment device that aligns the optical axis with the optical axis;
an optical device having a transparent member having a desired material and abrasiveness that is removably interposed in the path of the light beam transmitted through the lens to be measured; and a round magnification objective lens for detecting the performance of the lens; A spectroscopic device that spectrally spectra the image of the lens obtained through the device using a semi-transparent prism, a visible monitoring device that converts the spectroscopic image into a *t' visible image of Kazuyoshi and displays it, and the other. A lens performance measuring device comprising: a photographing device for photographing an image. (4) The above lens position adjustment device includes an X@-adjustment device for moving the lens in the X-axis direction, a rounded Y-axis 1IIll adjustment device for moving the lens in the t-Y axis direction, and a rounded Y-axis adjustment device for moving the lens in the optical axis direction. 3. A lens performance measuring device according to claim 1, 2, or 3, characterized in that the device comprises a two-axis adjustment device. (5) The above-mentioned angle adjustment device is composed of a tilting plate that supports the substrate so that its angle can be adjusted, and a lens support member that rotatably supports the lens to be measured on the tilting plate. A lens performance measuring device according to claim 1, 2, or 3. (6) The above-mentioned optical device is composed of a low-magnification objective lens for detecting the image of the lens, a high-magnification objective lens for enlarging the image of the lens, and/or a switching device for both lenses. The lens performance measuring device according to the first and second ranges and the wire connection 3g4. (7) The above-mentioned imaging device is constructed as an infrared 1Ia imaging device.