JPH0623977Y2 - Probe card - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a probe card, and more particularly to a probe card in which a plurality of stylus are attached to a removable card substrate and the stylus is used to electrically measure a semiconductor product.

[Prior Art] The electrical characteristics such as the conduction state are measured at the time of manufacturing a semiconductor product. For example, the wafer state of the semiconductor product is checked, or a resistor array, a diode array, a liquid crystal display panel, etc. Electrical checks and the like are performed in various ICs.

As such a measuring instrument, a card-shaped probe card which is used by exchanging each semiconductor product is well known. For example, as shown in FIG. 5, a card substrate 10 is connected to a tester 12 by a connector 10a thereof. It is connected to the.

A plurality of stylus 14 are provided in the central portion of the card substrate 10, and the tip of the stylus 14 has a structure protruding downward.

On the other hand, the semiconductor wafer 16 is placed at a predetermined position of the movable table 18, and the movable table 18 is moved to sequentially set the wafer 16 to the lower position of the stylus 14. Then, the stylus 14 electrically measures the wafer 16.

[Problems to be Solved by the Invention] Conventional Problems By the way, the conventional stylus 14 described above is used in the card substrate 10.
However, there is a problem in that it is not possible to deal with various objects to be measured and fine adjustment at the time of measurement.

That is, the stylus position of the card substrate 10 is created according to the object to be measured, and if the object to be measured changes, the card substrate 10 also changes. Therefore, conventionally, the card substrate 10 had to be newly prepared even if there were some differences in the positions of the measurement terminals.

Further, in actual measurement, the position of the stylus may need to be slightly changed, and even in such a case, there is an inconvenience that the conventional device cannot finely adjust the position.

The purpose of the present invention is to solve the above problems, and an object thereof is to provide a probe card that can deal with various objects to be measured by finely adjusting the position of the stylus. .

[Means for Solving the Problems] In order to achieve the above object, the present invention provides a card board having a connector attachable / detachable to a tester, and a stylus held at the tip of the card board to be measured. A probe card including at least one probe protruding from a card substrate so as to be able to contact the measurement terminal and electrically connected to a connector of the card substrate, wherein the probe has a U-shaped cross section including an upper arm and a lower arm. -Shaped fixed base, a movable plate that is interposed between the upper and lower arms and has a stylus attached to one end, and is elastically urged to one side in the longitudinal direction of the arm, and a tapered portion is provided at the tip. An adjusting screw attached to the upper arm so that the edge of the movable plate can be pressed in a plane parallel to the substrate, and the movable plate is finely moved in a plane parallel to the substrate by rotating the adjusting screw. Adjustable And it features.

[Operation] With the above configuration, the fixed base is first fixed and held on the card substrate, and the movable plate slidably arranged on the fixed base is rotated by the adjusting screw attached to the fixed base side. It can move in a plane parallel to the substrate.
Along with the movement of the movable plate, the stylus attached to one end of the movable plate is moved to an arbitrary position, and at this time, the movable plate is moved by being pressed by the taper portion of the adjusting screw. By controlling the rotation angle of the adjusting screw, an extremely small amount of adjustment is possible.

That is, according to the present invention, since the fine adjustment of the stylus is possible, a highly practical measuring instrument can be obtained.

[Embodiment] A preferred embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 shows a probe applied to the present invention.
The figure shows an example of a card substrate to which this probe is attached.

2, the probes 20, 20, ... Are attached to the card substrate 10, and these probes 20 are provided at predetermined positions on the outer periphery of the central hole 10b provided at the central position of the card substrate 10 made of epoxy resin or the like. It is located in. The stylus 22 at the tip is projected from the card substrate 10 so that it can come into contact with the measurement terminal of the object to be measured.

The card board 10 is provided with a plurality of mounting screw insertion holes 10c around the center hole 10b for mounting the probe 20 at a predetermined angle, and the position of the probe 20 can be arbitrarily set according to the semiconductor product to be measured. You can choose.

Further, the card board 12 is provided with a plug-in type connection terminal 38 which is easily removable so as to electrically connect the stylus 22 and the connector 10 a of the card board 10. One is connected to the connector 10 a, and the other is connected to the lead wire 40 drawn out from the stylus 22. Thereby, the arrangement position of the probe 20 can be easily changed.

Although the case where the probe 20 is arranged at the outer peripheral position of the central hole 10b has been described above, these probes 20 may be arranged on a straight line.

Here, the present invention is characterized in that the probe 20 includes a fixed base having a U-shaped cross section including an upper arm and a lower arm, and a probe 22 that is interposed between the upper and lower arms and has a stylus 22 attached to one end thereof. Adjustable movable plate that is elastically urged to one side in the longitudinal direction, and a taper portion at the tip that is attached to the upper and lower arms such that the tapered portion can press the edge of the movable plate in a plane parallel to the substrate. It is to include a screw.

That is, in this embodiment, as shown in FIGS. 1A and 1B, the probe 20 is fixedly mounted on the card substrate 10, and the probe 20 is slidably arranged on the fixed base 26. The movable plate 24 having the stylus 22 attached to the distal end and the adjusting screws 36-1 and 36-attached to the fixed base 26 side.
Includes 2. The fixing table 26 has a U-shaped cross section in which an upper arm 32 and a lower arm 34 are joined by a vertical piece 42 at one side end in the longitudinal direction.
The movable plate 24 is interposed in a gap portion 44 formed between 34.

The upper and lower arms 3 are provided between the movable plate 24 and the vertical piece 42.
Springs (tensiles) are attached along the longitudinal direction of the blades 2, 34, and the movable plate 24 is urged by the springs 46 in its extension direction. A leaf spring 48 is attached between the movable plate 24 and the upper arm 32, and the leaf spring 48 biases the movable plate 24 toward the lower arm 34.

The movable plate 24, as shown in FIG.
A V-shaped cutout groove 52 is provided, the other end is tapered, and an oval hole 52 is bored in the middle portion. The edge portions of the notch groove 52 and the oval hole 56 are chamfered at approximately 60 °, and the adjustment screws 36-1 and 36 are attached to the chamfered portion.
The -2 taper portions 36a are in contact with each other.

That is, the adjusting screw 36, as shown in FIG.
The taper portion 36a is formed so as to be inclined by about 60 ° with respect to the horizontal plane. Therefore, the movable plate 24 is pressed by the taper portion 36a by the turning operation of the adjusting screw 36 and moved in a plane parallel to the card substrate 10. It Here, the oval hole 56
Is formed sufficiently larger than the diameter of the taper portion 36a of the adjusting screw 36-2. This is because when the movable plate 24 is pulled by the spring 46, a moment of a couple is generated in the direction A (clockwise direction) of FIG. Screw 3
This is because the taper portion 36a of 6-2 is brought into contact with the one side edge of the oval hole 56.

A probe head 50 including the stylus 22 is attached to the tip of the movable plate 24. One end of the probe head 50 is fixed to the movable plate 24 by a mounting screw 30, and the other end is cantilevered. Support arm 54 extended to
And a mounting plate 28 made of an insulating material fixedly held by the pointing arm 54 and a stylus 22 protruding from the mounting plate 28. The attachment plate 28 electrically insulates the stylus 22 from the movable plate 24, and the stylus 22 is positioned in the height direction by a height adjusting screw 58 attached to the movable plate 24. Be seen. Further, a wiring pattern is laid on the side of the attachment plate 28 where the stylus 22 is attached, and the lead wire 4 is provided from this wiring pattern.
0 is soldered and pulled out, and the other end is connected to the card substrate 10 side.

The present invention is constructed as described above, and its operation will be described below.

First, the probe 20 is attached to the attachment position of the card substrate 10 determined according to the measurement terminal of the object to be measured, and the lead wire 40 from the stylus 22 is connected to the connector 10 a by the connection terminal 38. As a result, the stylus 22 and the tester 12 are electrically connected.

Then, the stylus 22 is aligned with the measuring terminal of the object to be measured, and when the height needs to be adjusted, the height adjusting screw 58 is used, or when the stylus 22 is adjusted in a plane parallel to the substrate. Adjustment is performed by rotating the adjusting screws 36-1 and 36-2.

That is, when the screw pitch of the adjusting screw 36 is p, the taper portion 36a moves downward by one pitch by one rotation of the screw, but the taper portion 36a is approximately 60 ° with respect to the horizontal plane.
Therefore, the edge of the movable plate 24, which is in contact with the tapered portion 36a, is 1 / √3 in a plane parallel to the substrate.
It will be displaced by the pitch.

Therefore, if this screw pitch P is, for example, 250 μm,
About one rotation of the adjusting screw 36 causes a displacement of 150 μm, and by finely controlling the rotation angle, fine adjustment in units of 10 μm is possible.

In the present embodiment, the case where the probe 20 is directly fixed and held on the card substrate 10 has been described, but the present invention is not limited to this, and for example, a movable holding for rough positioning between the probe 20 and the card substrate 10. It is also possible to dispose the tool and perform the rough positioning by the movable holder and then perform the fine positioning by the probe 20.

According to the present embodiment, the stylus 22 can be positioned by adjusting the movable plate 24 without changing the mounting position of the probe 20 even for the object to be measured whose measuring terminal position is slightly different.

[Advantages of the Invention] As described above, the present invention enables the movable plate to be finely adjusted in the plane parallel to the substrate by the turning operation of the adjusting screw, so that the measurement object can be adjusted without changing the mounting position of the probe. It is possible to completely maintain the electrical connection with the stylus.

[Brief description of drawings]

FIG. 1 is a view showing an embodiment of a probe applied to the present invention, in which FIG. 1 (a) is a front view, FIG. 1 (b) is a plan view, and FIG. 2 is the probe of FIG. FIG. 3 is a perspective view showing the state of the movable plate, FIG. 3 is a view showing the shape of the movable plate, FIG. 4 is an external view of the adjusting screw, and FIG. 5 is a perspective view showing the use state of the probe card. 10 ... Card substrate 20 ... Probe 22 ... Stylus 24 ... Movable plate 26 ... Fixed base 32 ... Upper arm 34 ... Lower arm 36 ... Adjustment screw 46 ... Spring 52 ... Notch groove 56 ...... Oval hole

Claims (1)

[Scope of utility model registration request] 1. A card substrate having a connector attachable to and detachable from a tester, and a stylus held at the card substrate and protruding from the card substrate so as to come into contact with a measurement terminal of a device under test. A probe card including at least one probe electrically connected, wherein the probe includes a fixed base having a U-shaped cross section including an upper arm and a lower arm, and is interposed between the upper and lower arms and touches one end. A movable plate to which a needle is attached and which is elastically urged to one side in the longitudinal direction of the arm, and a taper portion having a taper portion at the tip, which can press the edge of the movable plate in a plane parallel to the substrate. A probe card, comprising: an adjusting screw attached to the upper arm, wherein the movable plate can be finely adjusted in a plane parallel to the substrate by rotating the adjusting screw.