JPH0623955Y2 - Sample holding device for integrating sphere measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a sample holding device for measuring the reflectance or transmittance of a sample using an integrating sphere in a spectrophotometer or the like.

(Prior Art) FIG. 5 shows a sample holder in a conventional integrating sphere measuring apparatus. I is an integrating sphere, S is a sample, P is a sample retainer, and A is an arm holding the sample retainer, which can be rotated about the point O as shown by an arrow in the figure. It is pressed against the sample window Ws. FIG. 5A shows a case of measuring the reflectance of an opaque sample. A standard white plate Sr of the control sample is attached to the reference sample window Wr of the integrating sphere, and the reference light flux enters from the reference light window Wir toward the standard white plate Sr. The sample light beam is directed from the sample light window Wis toward the sample S, and the light emitted from the photometric window Wm toward the side in the drawing in the direction perpendicular to the drawing sheet is received by a photodetector (not shown). The reference light beam and the sample light beam are alternately switched. FIG. 5B shows a case where the surface reflectance of the transparent or anti-transparent sample S is measured. Also in this case, the measuring method itself is the same as in the case of FIG. 5A. In this case, since the sample is translucent, if the light that passes through the sample is reflected by the surface of the sample retainer P and enters the integrating sphere again, it causes an error in the measurement of the surface reflectance. A through hole H, which is slightly larger than the sample window Ws of the integrating sphere, is formed in the column so that the sample transmitted light does not return to the integrating sphere. In the transmittance measurement, since it is necessary to let light enter the integrating sphere from the rear of the sample holder through the sample, the hole H is necessary for the sample holder.
In any of the above cases, the surface material of the sample retainer is usually fluororesin so that the sample is not damaged by the sample retainer P and there is no adhesiveness with the sample. In the case of a sample made of a hard material such as glass, the surface material of the presser is damaged. Therefore, in such a case, a sample presser whose surface is hard and smooth is used.

(Problems to be Solved by the Invention) The conventional sample holder in the above-described integrating sphere measuring device has the following two problems. The first problem is that the sample holder uses a fluororesin as the surface material when the sample is relatively fragile and easily scratched, or in the case of a sample such as a silicon wafer that should never be scratched. Although it is necessary to use a metal surface material for a sample that is more damaged, the sample holder P has a fixed surface material, so when a sample holder with a different surface material is required, The sample presser must be detached from the arm A and replaced with another sample presser, and it is troublesome to switch the surface material of the sample presser. The second problem concerns the case of transparent or translucent sample measurements. As described with reference to FIG. 5B, in this case, the sample holder needs to be provided with a through hole H somewhat larger than the sample window Ws of the integrating sphere. Generally, in the measurement using an integrating sphere, the sample is often handled as one component or product as it is, rather than being cut into a certain shape, and the size of the sample is not constant, Some samples have a large thickness. When pressing such a sample against the sample window of the integrating sphere, the arm A must be retracted at a large angle as shown by the chain line in FIG. 5B. For this reason, the sample retainer draws an arc and retreats, and the center of the through hole H provided in the sample retainer deviates from the center of the sample light beam.
When the through hole H is only slightly larger than the sample window of the integrating sphere, this deviation causes the edge of the through hole H to enter into the sample light beam that has passed through the sample, and in the case of the reflectance measurement. An error occurs due to the reflection of the sample light at the edge of the through hole H, and an error occurs due to the sample incident light flux being reduced by the edge of the hole H when measuring the transmittance. The above-mentioned deviation can be reduced by placing the rotation center of the arm A at O'retracted from the tangential direction in the sample window of the integrating sphere, but the space in which the integrating sphere is installed is a small space like a spectrophotometric sample chamber. ,
Normally, the center of rotation of the arm A cannot be selected at a position where the deviation is minimized. Therefore, it is necessary to make the through hole H provided in the sample retainer considerably larger than the sample window of the integrating sphere. Therefore, when the through hole H is approximately the same size as the sample window of the integrating sphere of the sample, It cannot be pressed against the integrating sphere because it has fallen out, and therefore measurement is not possible.

The present invention is intended to solve the above two problems.

(Means for Solving the Problem) The sample retainer is composed of a base member and a sample retainer member, and the sample retainer member is detachably attached to the base member by a detachable locking mechanism. Also, with regard to the size of the through holes, a plurality of types were prepared so that they could be exchanged.

(Operation) According to the configuration described above, it suffices to select an appropriate sample pressing member and attach it to the base member depending on the size and property of the sample, and it is easier to replace than to attach / detach the entire sample pressing to / from the arm A. Is.

(Embodiment) FIG. 1 shows an embodiment of the present invention. I is an integrating sphere, S is a sample, 1 is a base member for holding the sample, and a through hole Hb that is sufficiently larger than the sample window Ws of the integrating sphere is formed in the center of the arm A that rotates around the point O. Held, arm A is spring E
Is urged in the direction indicated by the arrow. Base member 1
A dovetail groove 2 is provided on the front surface of the. Reference numeral 3 is a sample pressing member, both edges of which are adapted to the dovetail groove 2, and the surface of the sample pressing member 2 projects somewhat from the surface of the base member 1. Press toward the window Ws.

As the sample pressing member 3, as shown in FIG. 2, a transparent resin or a semitransparent sample having a large through hole H, a small hole, or an opaque sample having no through hole H, each made of a fluororesin material, Metallic items are available. FIG. 3 shows the sample pressing member 3 when measuring a sample smaller than the sample window Ws of the integrating sphere, and the front surface of the integrating sphere has a white coating of the same quality as the inner surface of the integrating sphere, for example, a coating 31 of sulphium sulphate.
A hole h smaller than the sample is formed in the center. On the back side of this hole, a recess 32 is formed in such a size that the sample S can be loosely fitted therein. The sample S is fitted into this concave step, and a C-shaped ring 33 having a free diameter slightly larger than the inner diameter of the concave step is formed. The sample S is fitted in a concave step after the sample S so that the sample S is pressed into the through hole h from the rear side. The sample S is attached to the base member 1 and the front surface is directly pressed against the sample window of the integrating sphere. is there.

Although the mechanism for locking the sample pressing member 3 to the base member 1 is of the form of dovetail and dovetail groove in the above-mentioned embodiment, the locking mechanism itself is free, and the lower edge of the sample pressing member 3 is shown in FIG. A protrusion 34 is provided on the base member 1, and a receiving groove 11 into which the protrusion is inserted is provided at the lower edge of the base member 1. The upper side step portion 35 of the sample pressing member 3 is attached to the base by a pressing claw 12. A mechanism for pressing and locking may be used.

(Effect of the Invention) According to the present invention, since the sample holder is composed of the base member that is always held by the arm and the sample holder member that can be attached to and detached from the base member, the sample holder member can be easily replaced according to the sample. Also, since it is only necessary to prepare various kinds of sample pressing members instead of the entire sample pressing member, the cost is reduced as a whole.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a plan view of an embodiment of the present invention, FIG. 2 is a perspective view of a sample holding member in the same embodiment, and FIG. 3 is a part of an example of another sample holding member. FIG. 5 is a cutaway perspective view, FIG. 4 is a perspective view of another embodiment of the engagement mechanism between the base member and the sample pressing member, and FIG.
The figure is a plan view of a conventional example. I ... Integrating sphere, S ... Sample, Ws ... Sample window, A ...
Arm, 1 ... Base member for holding sample, 2 ... Dovetail groove, 3 ...
Sample holding member, H ... Through hole.

Claims (1)

[Scope of utility model registration request] 1. A base member which is always held by a holding member, and a sample holding member which is detachably attached to the base member by an engagement / disengagement locking mechanism. And a sample pressing device for an integrating sphere measuring device, which comprises the above-mentioned various kinds of sample pressing members.